CN209640573U - The accurate integrated package of optical component surface shape and its support and auxiliary locator - Google Patents
The accurate integrated package of optical component surface shape and its support and auxiliary locator Download PDFInfo
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- CN209640573U CN209640573U CN201920500080.5U CN201920500080U CN209640573U CN 209640573 U CN209640573 U CN 209640573U CN 201920500080 U CN201920500080 U CN 201920500080U CN 209640573 U CN209640573 U CN 209640573U
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Abstract
The utility model discloses a kind of support of the accurate integrated package of optical component surface shape and the accurate integrated packages of auxiliary locator, optical component surface shape.The support of the accurate integrated package of optical component surface shape and auxiliary locator include support device and auxiliary locator, the support device is for being sheathed on optical element described in optical element peripheral support, and the auxiliary locator is for being set on the support device and the optical element to position the optical element.The accurate integrated package of the optical component surface shape of the utility model guarantees the precision and uniformity of different distributions position bondline thickness by the cooperation of auxiliary locator and support device, it ensure that the precision after optical element is integrated, guarantee precision by Precision Machining, machine component is few, core key machined surface and size are few, advantageously ensure that precision, and operability is high, it realizes that the integrated rear precision zero of high-precision optical element is lost, provides strong support for the mass production of advanced optical system.
Description
Technical field
The utility model relates to optical element positioning adjustment fields more particularly to a kind of optical component surface shape precisely to collect in groups
The support of part and the accurate integrated package of auxiliary locator, optical component surface shape.
Background technique
Application in the fields such as the first entering light system integration of the accurate integrated package of optical component surface shape is more extensive.With
The mankind explore field and constantly advance to more microcosmic field, propose higher and higher demand to advanced optical system, and one
Aspect: it is high to optical element required precision, such as apply gene sequencer, litho machine, wafer defects detection field it is advanced
Optical system proposes 1/100~1/500 wavelength (conventional system optical element single side face shape to optical element single side face shape
1/5~1/20 wavelength), at least 20 times of the relatively conventional system improving of precision, element integrates bring loss of significance in conventional system
In can not consider, but advanced optical system micro- for above-mentioned high-precision, missing is destructive.On the other hand: In
Guarantee it is high-precision simultaneously, also to have both high performance-price ratio and be suitable for mass production.
In the accurate integrated package of traditional optical component surface shape, flexible connection generallys use the flexible machines such as elastic slice narrow slit
Structure or the combination of a variety of flexible apparatus are constituted, and device is complicated, at high cost, it is difficult to be applied in mass production manufacture.Therefore,
Need the flexible linking device of design innovation type, at the same to efficient, high performance-price ratio, have and can operate and the optical element of implementation
Shape accurate integrated package in face proposes urgent need.
The existing accurate integrated package of face shape generally comprises two parts, frame and flexible connection, flexible connection
It generallys use, the compliant mechanisms such as elastic slice narrow slit or the combination of a variety of flexible apparatus are constituted, and device is complicated, in order to realize that face shape is kept
Function integrates link in machining and adjustment and pays a high price, and at high cost, time-consuming, it is difficult to apply in mass production
In manufacture.
Utility model content
The utility model is intended to overcome the flexible joint in existing high-precision optical component between optical element and frame
The device divided is complicated, at high cost, it is difficult to the technical issues of being applied to mass production manufacture.
To achieve the above object, the utility model uses following technical scheme:
The support of the accurate integrated package of optical component surface shape and auxiliary locator, including support device and auxiliary positioning dress
It sets, the support device is for being sheathed on optical element described in optical element peripheral support, and the auxiliary locator is for covering
It is located to position the optical element on the support device and the optical element, the support device includes element support
With the interconnecting piece in the connection element support, the element support is used to support, places the optical element, the company
Socket part is used to be sheathed on optical element periphery and the first medial surface including the neighbouring optical element and connection described the
The hole for injecting glue of one medial surface, the hole for injecting glue make shape between first medial surface and the optical element for injecting colloid
At the glued articulamentum being flexibly connected with the optical element；The auxiliary locator includes positioning region and the first extension,
The positioning region is used to be set on the interconnecting piece and be arranged and abut the lateral surface of the optical element, and described first extends
Portion connects the one end of the positioning region far from the optical element and is arranged and abuts the first lateral surface of the interconnecting piece.
According to the preferred embodiment in the utility model, the interconnecting piece further includes the first lateral surface, and the first of the interconnecting piece
First medial surface of lateral surface and the interconnecting piece is disposed opposite to each other, the hole for injecting glue through the interconnecting piece the first medial surface with
First lateral surface；The quantity of the hole for injecting glue is at least two, and at least two hole for injecting glue is evenly distributed in described first
On side.
According to the preferred embodiment in the utility model, the positioning region includes positioning region medial surface, connects in the positioning region
The positioning region top surface and positioning region bottom surface of side and the positioning region lateral surface for setting of supporting or opposing with the positioning region medial surface, it is described
First extension connects the edge of the positioning region bottom surface, and the first extension inner surface of first extension is for abutting institute
The first lateral surface of interconnecting piece is stated, the first extension outer surface and the positioning region lateral surface of first extension are connected to
One；The auxiliary locator further includes the second extension, and second extension connects the positioning region far from described the
One end of one extension.
According to the preferred embodiment in the utility model, second extension includes the second extension medial surface, the second extension
Portion upper surface and the second extension inclined connecting surface, the second extension medial surface connect the positioning region top surface, and described the
Two extension upper surfaces connect the second extension medial surface, and the second extension inclined connecting surface is connected to described second
Extension upper surface is between the positioning region lateral surface, in the second extension inclined connecting surface and second extension
Surface and the positioning region lateral surface are respectively formed obtuse angle.
According to the preferred embodiment in the utility model, the support portion is also used for being sheathed on the optical element periphery, described
Support portion includes support portion upper surface, supports lower surface, is connected to the support portion upper surface and the support lower surface
Between opposite the second lateral surface of the second medial surface and second medial surface, the support portion upper surface is connected to described
First medial surface is used to support the optical element, second lateral surface and described first between second medial surface
Lateral surface is connected in one to form the lateral surface of the support device.
According to the preferred embodiment in the utility model, the positioning region medial surface be used for the optical element coaxial arrangement and
Identical as the optical element internal diameter, gap is better than 0.005mm, cylinder between the positioning region medial surface and the optical element
Degree is better than 0.005mm, and concentricity is better than 0.005mm, and the first extension inner surface is used for described the with the interconnecting piece
The coaxial arrangement of one lateral surface and, the first extension inner surface and first outside identical as the first lateral surface internal diameter
Gap is better than 0.005mm between face, and cylindricity is better than 0.005mm, and concentricity is better than 0.005mm.
According to the preferred embodiment in the utility model, the internal diameter of first medial surface of the interconnecting piece optics member
The big preset width of the internal diameter of part, the range of the preset width are 0.13 ± 0.005mm, first medial surface and the optics
Element is coaxial, and cylindricity is better than 0.005mm, and concentricity is better than 0.005mm, first medial surface and the support portion upper surface
Verticality is better than 0.008mm, and the verticality of second medial surface and the support lower surface is better than 0.008mm, and described the
One lateral surface and the first medial surface cylindricity are better than 0.005mm, and concentricity is better than 0.005mm, second medial surface with
The second lateral surface cylindricity is better than 0.005mm, and concentricity is better than 0.005mm.
A kind of accurate integrated package of optical component surface shape positions the optics member for being sheathed on optical element peripheral support
Part is simultaneously flexibly connected with the optical element, and according to the preferred embodiment in the utility model, the optical component surface shape is precisely integrated
Component includes support device and auxiliary locator, and the support device and the auxiliary locator use any one of the above
The support device and auxiliary locator of the accurate integrated package of optical component surface shape described in embodiment, the optical component surface shape
Accurate integrated package further includes to be formed between first medial surface and the optical element for injecting the hole for injecting glue
With the colloid of the glued articulamentum of optical element flexible connection or by injected in the hole for injecting glue colloid make it is described
The glued articulamentum with optical element flexible connection formed between first medial surface and the optical element.
In a kind of change embodiment of above preferred embodiment, the hole for injecting glue be can be omitted, and directly inject colloid
Connect the glued articulamentum of the optical element between the optical element and first medial surface to be formed, i.e. one kind
The accurate integrated package of optical component surface shape comprising support device and auxiliary locator, the support device is for being sheathed on
Optical element described in optical element peripheral support, the auxiliary locator is for being set in the support device and the optics
To position the optical element on element, according to the preferred embodiment in the utility model, the support device includes element support
With the interconnecting piece in the connection element support, the element support is used to support, places the optical element, the company
Socket part is used to be sheathed on the optical element periphery and including the first medial surface adjacent to the optical element and for injecting
The first medial surface is stated to form the colloid for the glued articulamentum being flexibly connected with the optical element or be formed in described first
Side and the glued articulamentum for being used to be flexibly connected with the optical element；The auxiliary locator includes positioning region and first
Extension, the positioning region is used to be set on the interconnecting piece and be arranged and abut the lateral surface of the optical element, described
First extension connects the one end of the positioning region far from the optical element and is arranged and abuts outside the first of the interconnecting piece
Side.
According to the preferred embodiment in the utility model, the interconnecting piece further includes the first lateral surface, and the first of the interconnecting piece
First medial surface of lateral surface and the interconnecting piece is disposed opposite to each other, the hole for injecting glue through the interconnecting piece the first medial surface with
First lateral surface；The quantity of the hole for injecting glue is at least two, and at least two hole for injecting glue is evenly distributed in described first
On side.
According to the preferred embodiment in the utility model, the positioning region includes positioning region medial surface, connects in the positioning region
The positioning region top surface and positioning region bottom surface of side and the positioning region lateral surface for setting of supporting or opposing with the positioning region medial surface, it is described
First extension connects the edge of the positioning region bottom surface, and the first extension inner surface of first extension is for abutting institute
The first lateral surface of interconnecting piece is stated, the first extension outer surface and the positioning region lateral surface of first extension are connected to
One；The auxiliary locator further includes the second extension, and second extension connects the positioning region far from described the
One end of one extension.
According to the preferred embodiment in the utility model, second extension includes the second extension medial surface, the second extension
Portion upper surface and the second extension inclined connecting surface, the second extension medial surface connect the positioning region top surface, and described the
Two extension upper surfaces connect the second extension medial surface, and the second extension inclined connecting surface is connected to described second
Extension upper surface is between the positioning region lateral surface, in the second extension inclined connecting surface and second extension
Surface and the positioning region lateral surface are respectively formed obtuse angle.
According to the preferred embodiment in the utility model, the support portion is also used for being sheathed on the optical element periphery, described
Support portion includes support portion upper surface, supports lower surface, is connected to the support portion upper surface and the support lower surface
Between opposite the second lateral surface of the second medial surface and second medial surface, the support portion upper surface is connected to described
First medial surface is used to support the optical element, second lateral surface and described first between second medial surface
Lateral surface is connected in one to form the lateral surface of the support device.
According to the preferred embodiment in the utility model, the positioning region medial surface be used for the optical element coaxial arrangement and
Identical as the optical element internal diameter, gap is better than 0.005mm, cylinder between the positioning region medial surface and the optical element
Degree is better than 0.005mm, and concentricity is better than 0.005mm, and the first extension inner surface is used for described the with the interconnecting piece
The coaxial arrangement of one lateral surface and, the first extension inner surface and first outside identical as the first lateral surface internal diameter
Gap is better than 0.005mm between face, and cylindricity is better than 0.005mm, and concentricity is better than 0.005mm.
According to the preferred embodiment in the utility model, the internal diameter of first medial surface of the interconnecting piece optics member
The big preset width of the internal diameter of part, the range of the preset width are 0.13 ± 0.005mm, first medial surface and the optics
Element is coaxial, and cylindricity is better than 0.005mm, and concentricity is better than 0.005mm, first medial surface and the support portion upper surface
Verticality is better than 0.008mm, and the verticality of second medial surface and the support lower surface is better than 0.008mm, and described the
One lateral surface and the first medial surface cylindricity are better than 0.005mm, and concentricity is better than 0.005mm, second medial surface with
The second lateral surface cylindricity is better than 0.005mm, and concentricity is better than 0.005mm.
The accurate integrated package of the optical component surface shape of the utility model is connected using after colloid solidification as gluing flexible
Layer, due to having good flexibility relative to optical element and mechanical structured member after colloid solidification, and by being filled with auxiliary positioning
Set and support device cooperation guarantee different distributions position bondline thickness precision and uniformity, integrate after, optical element stress
Balance, ensure that the precision of optical element.And by Precision Machining guarantee precision, machine component is few, core key machined surface and
Size is few, advantageously ensures that precision, and operability is high, realizes that the integrated rear precision zero of high-precision optical element is lost, simultaneously
Mass production for advanced optical system provides strong support.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is the embodiments of the present invention, for those of ordinary skill in the art, without creative efforts, also
Other attached drawings can be obtained according to the attached drawing of offer.
Fig. 1 is a kind of stereochemical structure signal of the accurate integrated package of optical component surface shape provided by the embodiment of the utility model
Figure.
Fig. 2 is the cross-sectional view of the accurate integrated package of optical component surface shape shown in Fig. 1.
Fig. 3 is the flexible connection enlarged diagram of Fig. 2.
Fig. 4 is support and the auxiliary locator enlarged diagram of Fig. 2.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and specifically
Embodiment, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only to solve
The utility model is released, without constituting limitations of the present invention.Based on the embodiments of the present invention, the common skill in this field
Art personnel all other embodiment obtained without making creative work belongs to the utility model protection
Range.
As shown in Figure 1, Fig. 1 is a kind of the vertical of the accurate integrated package 100 of optical component surface shape provided in an embodiment of the present invention
Body structural schematic diagram, the accurate integrated package 100 of optical component surface shape are cyclic structure and are used to be sheathed on optical element 200
Peripheral support positions the optical element 200 comprising including support device 120 and auxiliary locator 110, wherein the branch
For being sheathed on optical element 200 described in 200 peripheral support of optical element, the auxiliary locator 110 is used for support arrangement 120
It is set on the support device 120 and the optical element 200 to position the optical element 200, the support device 120
Including element support 121 and the interconnecting piece 122 in the element support 121 is connected, the element support 121 is for branch
It supports, place the optical element 200, the interconnecting piece 122 is for being sheathed on 200 periphery of optical element.In the present embodiment,
The optical element 200 is optical mirror slip, such as circular optical mirror slip, and material can be glass or resin, and screenshot is light transmission
Material.The accurate integrated package 100 of optical component surface shape can be circular annular form structure.
Referring to Figure 2 together, Fig. 3 and Fig. 4, Fig. 2 are the section views of the accurate integrated package 100 of optical component surface shape shown in Fig. 1
Figure, Fig. 3 is the flexible connection enlarged diagram of Fig. 2, and Fig. 4 is support and the auxiliary locator enlarged diagram of Fig. 2.Institute
Stating support device 120 is circular ring structure, including element support 121 and interconnecting piece 122, the interconnecting piece 122 it include neighbouring
The hole for injecting glue 122c of the first medial surface 122a and connection the first medial surface 122a of the optical element 200, the injecting glue
Hole 122c to be formed between the first medial surface 122a and the optical element 200 and the optics member for injecting colloid
The glued articulamentum 130 of part flexible connection, the interconnecting piece 122 further includes the first lateral surface 122b, and the of the interconnecting piece 122
The first medial surface 122a of one lateral surface 122b and the interconnecting piece 122 are disposed opposite to each other, and the hole for injecting glue 122c runs through the company
The the first medial surface 122a and the first lateral surface 122b of socket part 122.
The support portion 121 is also used for being sheathed on 200 periphery of optical element, and the support portion 121 includes support portion
Upper surface 121c, support lower surface 121d, the support portion upper surface 121c and the support lower surface 121d are connected to
Between opposite the second lateral surface 121b of the second medial surface 121a and the second medial surface 121a, table on the support portion
Face 121c is connected to the first medial surface 122a between the second medial surface 121a, is used to support the optical element
200, the second lateral surface 121b and the first lateral surface 122b are connected in one to form the outside of the support device 120
Face.
The auxiliary locator 110 can also be circular ring structure, including positioning region 111 and the first extension 112 are described fixed
Position portion 111 is used to be set on the interconnecting piece 122 and be arranged and abut the lateral surface of the optical element 200, and described first
Extension 112 connects the one end of the positioning region far from the optical element 200 and is arranged and abuts the of the interconnecting piece 122
One lateral surface 122b.The positioning region 111 includes the positioning of positioning region medial surface 111a, the connection positioning region medial surface 111a
Portion top surface 111b and positioning region bottom surface 111c and the positioning region lateral surface for setting of supporting or opposing with the positioning region medial surface 111a
111d, first extension 112 connect the edge of the positioning region bottom surface 111c, and the first extension inner surface 112a is used
In abutting the first lateral surface of interconnecting piece 121b, first extension outer surface 112b and the positioning region lateral surface 111d
It is connected in one.
The auxiliary locator 110 further includes the second extension 113, and second extension 113 connects the positioning
The one end of portion 111 far from first extension 112.Second extension 113 includes the second extension medial surface 113a, the
Two extension upper surface 113b and the second extension inclined connecting surface 113c, described in the second extension medial surface 113a connection
Positioning region top surface 111b, second extension upper surface 113b connection the second extension medial surface 113a, described second
Extension inclined connecting surface 113c is connected to second extension upper surface 113b between the positioning region lateral surface 111d,
The second extension inclined connecting surface 113c and second extension upper surface 113b and positioning region lateral surface 111d
It is respectively formed obtuse angle.
It is appreciated that the support portion 120 is integrally connected with the auxiliary locator 110 for as the optics member
The support of the accurate integrated package 100 of 200 face shape of part and auxiliary locator, play a supporting role, by the support device
The hole for injecting glue 122c injection colloid of 120 interconnecting piece 122 is to form the glued articulamentum in the first medial surface 122a
After 130, the optics for positioning the optical element 200 is collectively formed with the glued articulamentum 130 in the support device 120
The accurate integrated package 100 of 200 face shape of element.
The quantity of the hole for injecting glue 122c is at least two, and at least two hole for injecting glue 122c is evenly distributed on described the
On one medial surface 122a, in the present embodiment, the quantity of the hole for injecting glue 122c is four, is evenly distributed on first inside
90 ° on the 122a of face divide equally position, and the material of the colloid or the glued articulamentum includes RTV single-component silicon rubber.
The positioning region medial surface 111a be used for the optical element 200 be coaxially disposed and with the optical element 200
Internal diameter is identical, and gap is better than 0.005mm between the positioning region medial surface 111a and the optical element 200, and cylindricity is better than
0.005mm, concentricity are better than 0.005mm, and the first extension inner surface 112a is used for same with the first lateral surface 122a
Axis setting and, the first extension inner surface 112a and first lateral surface identical as the first lateral surface 122a internal diameter
Gap is better than 0.005mm between 122b, and cylindricity is better than 0.005mm, and concentricity is better than 0.005mm.
The internal diameter of the internal diameter optical element 200 of the first medial surface 122a of the interconnecting piece 122 is predetermined greatly
Width, the range of the preset width are 0.13 ± 0.005mm, and the first medial surface 122a and the optical element 200 are same
Axis, cylindricity are better than 0.005mm, and concentricity is better than 0.005mm, the first medial surface 122a and the support portion upper surface
121c verticality is better than 0.008mm, and the verticality of the second medial surface 121a and the support lower surface 121d are better than
0.008mm, the first lateral surface 122b and the first medial surface 122a cylindricity are better than 0.005mm, and concentricity is better than
0.005mm, the second medial surface 121a and the second lateral surface 121b cylindricity are better than 0.005mm, and concentricity is better than
0.005mm。
Compared to the prior art, the accurate integrated package 100 of the utility model optical component surface shape is made after being solidified using colloid
For glued articulamentum 130 flexible, have good flexibility relative to optical element and mechanical structured member after solidifying due to colloid, and
By the precision with auxiliary locator 110 and the cooperation guarantee different distributions position bondline thickness of support device 120 and uniformly
Property, after integrating, 200 stress balance of optical element ensure that the precision of optical element 200.And precision is guaranteed by Precision Machining,
Machine component is few, and core key machined surface and size are few, advantageously ensures that precision, and operability is high, realizes high-precision light
It learns the integrated rear precision zero of element to lose, while providing strong support for the mass production of advanced optical system.
It is appreciated that the 122c can be omitted in a kind of change embodiment of the various embodiments described above, such as directly by glue
Body is injected between the optical element 200 and the first medial surface 122a to form the gluing for connecting the optical element
Articulamentum 130.
Described specific embodiment of the present utility model does not constitute the restriction to scope of protection of the utility model.It is any
Any other various changes and modifications made by technical concept according to the present utility model, should be included in the utility model
In scope of protection of the claims.
Claims (9)
1. support and the auxiliary locator of a kind of accurate integrated package of optical component surface shape, it is characterised in that: the optics member
The support of the accurate integrated package of part face shape and auxiliary locator include support device and auxiliary locator, the support device
For being sheathed on optical element described in optical element peripheral support, the auxiliary locator is for being set in the support device
And to position the optical element on the optical element, the support device includes element support and the connection element branch
Interconnecting piece on support part, the element support are used to support, place the optical element, and the interconnecting piece is for being sheathed on institute
The hole for injecting glue of optical element periphery and the first medial surface and connection first medial surface including the neighbouring optical element is stated,
The hole for injecting glue to be formed and the optical element between first medial surface and the optical element for injecting colloid
The glued articulamentum of flexible connection；
The auxiliary locator includes positioning region and the first extension, the positioning region for being set on the interconnecting piece and
It is arranged and abuts the lateral surface of the optical element, first extension connects the positioning region far from the optical element
One end and the first lateral surface for being arranged and abutting the interconnecting piece.
2. support and the auxiliary locator of the accurate integrated package of optical component surface shape according to claim 1, feature
Be: the interconnecting piece further includes the first lateral surface, the first lateral surface of the interconnecting piece and the first inside of the interconnecting piece
Face is disposed opposite to each other, first medial surface and first lateral surface of the hole for injecting glue through the interconnecting piece；The injecting glue
The quantity in hole is at least two, and at least two hole for injecting glue is evenly distributed on first medial surface.
3. support and the auxiliary locator of the accurate integrated package of optical component surface shape according to claim 1, feature
Be: the positioning region include positioning region medial surface, the positioning region top surface of the connection positioning region medial surface and positioning region bottom surface,
And the positioning region lateral surface for setting of supporting or opposing with the positioning region medial surface, first extension connect the positioning region bottom surface
Edge, the first extension inner surface of first extension are used to abut the first lateral surface of the interconnecting piece, and described first
First outer surface of extension is connected in one with the positioning region lateral surface of the positioning region；The auxiliary locator further includes
Second extension, second extension connect the one end of the positioning region far from first extension.
4. support and the auxiliary locator of the accurate integrated package of optical component surface shape according to claim 3, feature
Be: second extension includes the second extension medial surface, the second extension upper surface and the inclination connection of the second extension
Face, the second extension medial surface connect the positioning region top surface, and second extension upper surface connection described second is prolonged
Extending portion medial surface, the second extension inclined connecting surface are connected to second extension upper surface on the outside of the positioning region
Between face, the second extension inclined connecting surface is respectively formed with second extension upper surface and the positioning region lateral surface
Obtuse angle.
5. support and the auxiliary locator of the accurate integrated package of optical component surface shape according to claim 1, feature
Be: the support portion is also used for being sheathed on the optical element periphery, and the support portion includes support portion upper surface, support portion
In lower surface, the second medial surface and described second being connected between the support portion upper surface and the support lower surface
The second opposite lateral surface of side, the support portion upper surface be connected to first medial surface in second medial surface it
Between, it is used to support the optical element, second lateral surface and first lateral surface are connected in one to form the support
The lateral surface of device.
6. support and the auxiliary locator of the accurate integrated package of optical component surface shape according to claim 1, characteristic
Be: the positioning region medial surface is used for and the optical element is coaxially disposed and identical as the optical element internal diameter, described
Gap is less than 0.005mm between positioning region medial surface and the optical element, and cylindricity error is less than 0.005mm, and concentricity is missed
Difference is less than 0.005mm, the first extension inner surface be used for the coaxial arrangement of first lateral surface of the interconnecting piece and
Identical as the first lateral surface internal diameter, gap is less than between the first extension inner surface and first lateral surface
0.005mm, cylindricity error are less than 0.005mm, and coaxiality error is less than 0.005mm.
7. support and the auxiliary locator of the accurate integrated package of optical component surface shape according to claim 5, characteristic
It is: the big preset width of internal diameter of the internal diameter optical element of first medial surface of the interconnecting piece, it is described predetermined
The range of width is 0.13 ± 0.005mm, and first medial surface and the optical element are coaxial, and cylindricity error is less than
0.005mm, coaxiality error are less than 0.005mm, and first medial surface is less than with the support portion upper surface error of perpendicularity
The error of perpendicularity of 0.008mm, second medial surface and the support lower surface is less than 0.008mm, first outside
Face and the first medial surface cylindricity error are less than 0.005mm, and coaxiality error is less than 0.005mm, second medial surface
It is less than 0.005mm with the second lateral surface cylindricity error, coaxiality error is less than 0.005mm.
8. a kind of accurate integrated package of optical component surface shape positions the optical element for being sheathed on optical element peripheral support
And it is flexibly connected with the optical element, it is characterised in that: the accurate integrated package of optical component surface shape includes support device
And auxiliary locator, the support device and the auxiliary locator are used as described in claim 1-7 any one
The support of the accurate integrated package of optical component surface shape and auxiliary locator, the accurate integrated package of optical component surface shape also wrap
It includes and makes formation between first medial surface and the optical element soft with the optical element for injecting the hole for injecting glue
Property connection glued articulamentum colloid or by the hole for injecting glue inject colloid make first medial surface with it is described
The glued articulamentum with optical element flexible connection formed between optical element.
9. a kind of accurate integrated package of optical component surface shape comprising support device and auxiliary locator, the support device
For being sheathed on optical element described in optical element peripheral support, the auxiliary locator is for being set in the support device
And to position the optical element on the optical element, it is characterised in that: the support device includes element support and company
The interconnecting piece in the element support is connect, the element support is used to support, places the optical element, the interconnecting piece
For being sheathed on optical element periphery and the first medial surface including the neighbouring optical element and for injecting described the
One medial surface is to form the colloid for the glued articulamentum being flexibly connected with the optical element or be formed in first medial surface
And the glued articulamentum for being flexibly connected with the optical element.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920500080.5U CN209640573U (en) | 2019-04-12 | 2019-04-12 | The accurate integrated package of optical component surface shape and its support and auxiliary locator |
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| CN201920500080.5U CN209640573U (en) | 2019-04-12 | 2019-04-12 | The accurate integrated package of optical component surface shape and its support and auxiliary locator |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109946807A (en) * | 2019-04-12 | 2019-06-28 | 中国科学院长春光学精密机械与物理研究所 | The support of the accurate integrated package of optical component surface shape and auxiliary locator, the accurate integrated package of face shape and its manufacturing method |
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2019
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109946807A (en) * | 2019-04-12 | 2019-06-28 | 中国科学院长春光学精密机械与物理研究所 | The support of the accurate integrated package of optical component surface shape and auxiliary locator, the accurate integrated package of face shape and its manufacturing method |
| CN109946807B (en) * | 2019-04-12 | 2024-05-24 | 中国科学院长春光学精密机械与物理研究所 | Supporting and auxiliary positioning device of optical element surface-shaped precise integrated component, surface-shaped precise integrated component and manufacturing method thereof |
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