Binary channels zoom-type interference system
Technical field
The utility model relates to a kind of interference system for laser plasma optical diagnostics, especially a kind of binary channels
Zoom-type interference system.
Background technique
The function of traditional plasma optics diagnostic device is more single, not high enough to the information utilization of probe light.Especially
, when studying light laser plasmoid, obtaining plasma information by binary channels zoom-type interferometer seems especially heavy for it
It wants.
For laser plasma measuring technique, the method generallyd use is by probe laser and to generate plasmon
Time synchronization, it is then special come the dynamic evolution of Study of Laser plasma by adjusting the time difference of probe light and main laser
Sign.Here plasma, that is, determinand that Laser Driven generates, it is generated by main laser and matter interaction.To same
It, often can be with accurate judgement plasmoid if a plasma can obtain different physical quantities information simultaneously.It is active
Adjustable technology can carry out the amplification of a variety of multiples to same plasma to be measured, obtain determinand under different amplification
Comparing result between physical quantity information of the same race.If not using binary channels zoom-type technology, and plasma to be measured is in probe
Light cannot be guaranteed that identity will result in single channel measurement error by front and back.Thus it is guaranteed that measured physical quantity has together
Shi Xing, and the acquisition information as much as possible from the probe light at a certain moment, are just particularly important.Become here with binary channels
Technology and Normaski principle of interference is adjusted in burnt formula can obtain the shape and electron density letter of plasma to be measured respectively
Breath.
Laser plasma optical diagnostics instrument is the modular diagnostic system of a binary channels zoom.It can be from a branch of probe
Shadow image, the magnetic field of plasma and the information of plasma electron density that plasma is obtained in light, not only mention in this way
The high utilization rate of probe optical information, and its simultaneity is maintained again.
Therefore it when studying plasmoid, needs to carry out position to laser to fix, to limit determinand
Type.Traditional plasma optics diagnostic device is faced with the limitation of space length, inflexible to the measurement of determinand.
Summary of the invention
The technical issues of in order to overcome traditional interference system to be faced with space length limitation, the utility model provides one kind
Binary channels zoom-type interference system.
A kind of binary channels zoom-type interference system, comprising:
Laser;
First polarizing film;The beam of laser that the laser issues is incident on first polarizing film, passes through the first polarization
Piece becomes polarised light;
Determinand;
Variable focal length optical system, position and size of the polarization laser through the adjustable picture of variable focal length optical system;
First beam splitter, the polarization laser are incident on first beam splitter, are divided into first by the first beam splitter
Laser signal and second laser signal;
4th imaging len, for first laser image formation in the first ccd image sensor, can be obtained to be measured
The shape information of object;
First ccd image sensor, for collecting the first laser signal;
First reflecting mirror;
Nomaski interference device can obtain to be measured by second laser image formation on the second ccd image sensor
The electron density information of object;
Second ccd image sensor, for collecting the second laser signal;
Laser generating unit includes: laser and the first polarizing film, first polarizing film in one of the embodiments,
It is arranged on the laser emitting direction of the laser.
The variable focal length optical system includes: in one of the embodiments,
One first imaging len (convex lens), one second imaging len (concavees lens) and a third imaging len (convex lens
Mirror), a precision cam and an adjusting knob.First imaging len, the second imaging len and third imaging len are successively set on
On cage, adjusting knob connects the second imaging len, and precision cam connects the second imaging len and third imaging len.
The adjusting knob is mechanical adjustment button or electrical adjustment button in one of the embodiments,.
The Nomarski interference device includes: in one of the embodiments,
One the 5th imaging len, a wollaston prism and one second polarizing film.5th imaging len, wollaston prism
It is successively set on cage with the second polarizing film.
The binary channels zoom-type interference system further includes pedestal in one of the embodiments, the shape measure list
The first and described electron density measurement cell distribution setting is on the base.
The binary channels zoom-type interference system further includes that frame described in frame is arranged in institute in one of the embodiments,
It states on pedestal, the shape measuring unit and the electron density measurement unit are arranged in the frame.
Further comprise in one of the embodiments:
First beam splitter: it is arranged between the variable focal length optical system and the Nomarski interferometer system, is used for
It is divided into two bundles the variable focal length optical system output light, it is made to be transferred to different Electro-Optical Sensor Sets.
First reflecting mirror: it is arranged between the variable focal length optical system and the Nomarski interferometer system, is used for
The wherein light beam for exporting the first beam splitter changes direction and is input to the Nomarski interferometer system.
The utility model has the beneficial effects that a variety of measuring systems are integrated on an optical platform by the interferometer, lead to
Cross variable focal length optical system, when use, mobile adjusting knob controlled the movement of the second imaging len, increased or reduced zoom system with this
System magnifying power.While the movement of the second imaging len, precision cam will drive third imaging len and make corresponding movement to mend
Image speckles are repaid, stablize image planes position, therefore adjust the placement position of laser and determinand with can be convenient.Laser is put
It sets on displacement rotating console, arranges in pairs or groups and use with interferometer cabinet, both ensure that measured physical quantity had simultaneity,
It ensure that the alignment between probe light and other all optical devices, it is a series of cumbersome to avoid traditional adjusting position etc.
Operation, so that the interferometric operation is simple, easy to use and flexible, the information obtained with the interferometer is also more accurate.
Detailed description of the invention
Fig. 1 is the structural block diagram of the binary channels zoom-type interference system of one embodiment of the invention;
Fig. 2 is the structural block diagram of the binary channels zoom-type interference system of another embodiment of the present invention.
Main element symbol description
Laser generating unit 100
Laser 110
First polarizing film 120
Zoom unit 200
First imaging len 210
Second imaging len 220
Third imaging len 230
Adjusting knob 240
Precision cam 250
Beam splitting unit 300
First beam splitter 310
Shape measuring unit 400
4th imaging len 410
First receiving device 420
Electron density measurement unit 500
First reflecting mirror 510
Nomaski interference device 520
5th imaging len 521
Wollaston prism 522
Second polarizing film 523
Second reception device 530
Pedestal 600
Frame 700
Specific embodiment
In order to be apparent to the technical means, creative features, achievable purpose and effectiveness of this optical diagnostics instrument, below with reference to
It is specifically illustrating, this optical diagnostics instrument is further described.
As shown in Figure 1, the present embodiment provides a kind of binary channels zoom-type interference systems, comprising: laser generating unit 100,
Zoom unit 200, beam splitting unit 300, shape measuring unit 400 and electron density measurement unit 500.The laser generating unit
100, for generating the probe light of polarization, the probe light is transmitted through forming information light after determinand.The probe light of the polarization
It can be circular polarization or the probe light of linear polarization.The zoom unit 200 and the beam splitting unit 300, along the biography of the information light
Defeated direction is set gradually.The zoom unit 200 amplifies information light by zoom.The beam splitting unit 300 will pass through
The amplified information light of zoom unit is split as shape measure light and density measure light.The beam splitting unit 300 wraps
Include beam splitter 310.The launch party of the shape measure light from the beam splitting unit 300 is arranged in the shape measuring unit 400
Upwards, pass through the shape of the shape measure light measurement determinand.The electron density measurement unit 500, setting are coming from institute
It states in the direction of the launch of density measure light of beam splitting unit 300, passes through the electronics of determinand described in the density measure light measurement
Density.
Binary channels coke variant interference system 10 provided in this embodiment passes through the setting of zoom unit 200, so that described double
Between channel coke variant interference system can be adjusted between the determinand and zoom unit 200 according to the position of the detection object
Away to obtain the more accurate measurement result of clearer image.
As described in Figure 2, in one embodiment, the laser generating unit 100 includes: laser 110 and the first polarization
Piece 120, first polarizing film 120 are arranged on the laser emitting direction of the laser 110.The laser 110 can be
Semiconductor laser, carbon dioxide laser etc..The laser beam that first polarizing film 120 launches the laser 110
It is converted into polarised light.
In one embodiment, the zoom unit 200 includes: the first imaging len 210, the second imaging len 220,
Three imaging lens 230, adjusting knob 240 and precision cam 250.First imaging len 210, the second imaging len 220 and third at
As lens 230 are successively along the information optical transmission direction installation settings.Adjusting knob 240 is connect with second imaging len 220
Setting, the mobile adjusting knob are horizontally away from second imaging len 220 or close to 210 directions of the first imaging len
It is mobile.Precision cam 250 connects second imaging len 220 and the third imaging len 230, the precision cam simultaneously
250 second imaging lens made third imaging len synchronizing moving when moving.The adjusting knob 240 can be adjusted to be mechanical
Button is saved, can also be electrical adjustment button.The moving range that the adjusting knob controls second imaging len is apart from described first
Imaging len 15cm-220cm.
In one embodiment, the shape measuring unit 400 includes: successively to set along the shape measure optical transmission direction
Set the 4th imaging len 410 and first receiving device 420.Laser signal is imaged on described by the 4th imaging len 410
In one reception device 420, the shape information of determinand can be obtained.The first receiving device 420 can sense for ccd image
Device.The ccd image sensor can be the andor CCD or inclined CCD of line.
In one embodiment, the electron density measurement unit 500 include: along the density measure optical transmission direction according to
The first total reflection mirror 510, Normaski interferometer 520 and the second reception device 530 of secondary setting.First total reflection mirror
510 for changing density measure light transmission direction to Normaski interferometer 520, may make the binary channels zoom-type to interfere
System is integrally more compact.The Normaski interferometer 520 includes set gradually along the density measure optical transmission direction
Five imaging lens 521, wollaston prism 522 and the second polarizing film 523.
In one embodiment, the binary channels zoom-type interference system further includes pedestal 600, the shape measuring unit
400 and the electron density measurement unit 500 be separately positioned on the pedestal 600.In one embodiment, the zoom list
Member and beam splitting unit may also be arranged on the pedestal 600.The presence of pedestal 600 facilitates overall movement.
The binary channels zoom-type interference system further includes that frame described in frame 700 is arranged on the pedestal 600, described
Zoom unit 200, the beam splitting unit 300, the shape measuring unit 400 and the electron density measurement unit 500 setting
In the frame.The frame ensure that the alignment between each element, facilitates and adjusts its position.
Below by taking Fig. 2 as an example, illustrate the course of work of the binary channels coke variant interference system 10.
Laser 110 launches laser beam and is incident on the probe light for forming polarization after the first polarizing film 120.Probe light passes through
Determinand is incident on zoom unit 200 after forming information light.The adjusting knob 240 for adjusting zoom unit 200 changes the first imaging thoroughly
The synchronous position for changing third imaging len 230 by precision cam 250 in the position of mirror 220, to achieve the purpose that zoom.
Being incident on 310 beam splitting of the first beam splitter by the amplified information light of zoom unit 200 is shape measure light and density measure light.
Shape measure light is incident on after the 4th imaging len 410 and receives shape signal by first receiving device 420.Density measure light warp
It is incident on after Normaski interference device 520 after crossing the first reflecting mirror 510 by the second reception device 530 reception density signal.In
When carrying out plasma diagnostics, mobile adjusting knob 240 increases or reduces zoom system, pancreatic system magnifying power, makes determinand in a certain range
It can obtain clearly as flexibly, conveniently, so that interferometric operation is more integrated.