CN209606773U - Lithographic equipment for electronic component processing - Google Patents

Lithographic equipment for electronic component processing Download PDF

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Publication number
CN209606773U
CN209606773U CN201920488424.5U CN201920488424U CN209606773U CN 209606773 U CN209606773 U CN 209606773U CN 201920488424 U CN201920488424 U CN 201920488424U CN 209606773 U CN209606773 U CN 209606773U
Authority
CN
China
Prior art keywords
dust
cabinet
electronic component
head
column
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201920488424.5U
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Chinese (zh)
Inventor
温景文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Chifa Electronic Technology Co Ltd
Original Assignee
Shanghai Chifa Electronic Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Chifa Electronic Technology Co Ltd filed Critical Shanghai Chifa Electronic Technology Co Ltd
Priority to CN201920488424.5U priority Critical patent/CN209606773U/en
Application granted granted Critical
Publication of CN209606773U publication Critical patent/CN209606773U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses the lithographic equipments processed for electronic component, including cabinet, head, dust-collecting box, column is provided with behind the cabinet, the head is installed at the top of the column, the head is mounted below laser head, fixture is provided in front of the column, the fixture is connected with the box body bolt, the fixture side is provided with dust cover, the dust-proof hood shape is arc-shaped, the dust cover and the cabinet are riveted together, and are provided with dust-exhausting port below the dust cover, are equipped with supporting network above the dust-exhausting port.Lithographic equipment described in the utility model for electronic component processing, utilize air flow blowing, first electronical elements surface dust can be cleared up before marking, avoid dust to laser can with influence, by the universal cartilage that can arbitrarily bend, facilitate position and the airflow direction of adjustment nozzle, convenient for operation, airflow circulating is flowed using dust-collecting box and filter screen, reduces the range of dust diffusion.

Description

Lithographic equipment for electronic component processing
Technical field
The utility model belongs to electronic component manufacture field, more particularly to the lithographic equipment processed for electronic component.
Background technique
Electronic component is the basic element in electronic circuit, usually individual encapsulation, and has two or more leads Or metallic contact.Electronic component must be connected with each other to constitute the electronic circuit with specific function, such as: amplifier, nothing Line electricity receiver, oscillator etc., common one of the mode of connecting electronic component are welded on printed circuit board.Electronic component Permitted to be the individual group for encapsulating (resistor, capacitor, inductor, transistor, diode etc.) or various different complexities Group, such as: integrated circuit (operational amplifier, exclusion, logic gate etc.).But no matter how to encapsulate, will utilize and swash on its surface Photoetching stamps mark, facilitates and carries out resolution use.But in the art, electronic component is directly generally fixed on lithographic equipment now On marked, be easy to make dust to block influence marking effect, at the same the dust that can be also need special dust collection equipment into Row is collected, inconvenient to use.
Utility model content
The purpose of this utility model is to provide the lithographic equipments processed for electronic component, to solve above-mentioned background technique The problem of middle proposition.
To achieve the above object, the utility model provides the following technical solutions:
For the lithographic equipment of electronic component processing, including cabinet, head, dust-collecting box, it is provided with behind the cabinet vertical Column, the column top are equipped with the head, and the head is mounted below laser head, is provided with folder in front of the column Tool, the fixture are connected with the box body bolt, and the fixture side is provided with dust cover, and the dust-proof hood shape is circular arc Shape, the dust cover and the cabinet are riveted together, and are provided with dust-exhausting port below the dust cover, pacify above the dust-exhausting port Equipped with supporting network, the supporting network and the cabinet are snapped connection, and the fixture is provided with support far from the dust cover side It manages, direction flexible, the direction flexible and support tube plug connection, the direction flexible is installed above the support tube One end is equipped with nozzle, and the nozzle form is platypelloid type, and the nozzle and direction flexible sealing are threadedly coupled, the branch Appendix is installed below stay tube, air pump is installed below the appendix, the air pump is connected with the box body bolt, described The dust-collecting box, the dust-collecting box and cabinet plug connection are installed, the dust-collecting box includes bottom plate, the bottom in cabinet It is provided with foreboard before plate, is provided with hand groove before the foreboard, the bottom plate side is provided with the first side plate, and described first Side plate side is provided with the second side plate, and the height of second side plate is less than the height of first side plate, the dust-collecting box one Side is provided with filter screen, the filter screen and cabinet plug connection, is equipped with handle before the filter screen.
Further: together with the welding box body, the head connects the column with the upstanding studs.
Welding keeps the column solid and reliable, is bolted the maintenance head easy to disassemble.
Further: the dust-exhausting port passes through the cabinet, and the support tube passes through the cabinet.
Guarantee that dust enters the cabinet by the dust-exhausting port, while ensure that air-flow passes through institute by the support tube State cabinet.
Further: the bottom plate, the foreboard, first side plate and second side plate weld together.
Welding ensure that the dust-collecting box is durable.
Further: the appendix respectively with the support tube and the air pump clamp connection.
The clamp connection replacement appendix easy to disassemble.
Further: the support tube, the direction flexible and the nozzle are respectively arranged with 2.
It ensure that from both direction and blow out air-flow.
Further: the handle welds together with the filter screen.
Welding keeps the handle solid and reliable.
Compared with prior art, the utility model has the beneficial effects that
1, using air flow blowing, first electronical elements surface dust can be cleared up before marking, avoids dust to sharp Light can with influence;
2, direction flexible is bent, nozzle is made to be directed at electronic component inscribed surface, air pump will be in dust-collecting box by filter screen Air sucking, and air-flow is conveyed to by support tube and direction flexible by appendix, air-flow is blown by nozzle in electronic component Surface facilitates position and the airflow direction of adjustment nozzle, by the universal cartilage that can arbitrarily bend convenient for operation;
3, dust is blown into dust cover, and is entered in dust-collecting box under the guidance of dust cover by dust-exhausting port, utilize dust Box and filter screen flow airflow circulating, reduce the range of dust diffusion.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the lithographic equipment described in the utility model for electronic component processing;
Fig. 2 is the front view of the lithographic equipment described in the utility model for electronic component processing;
Fig. 3 is the dust-collecting box schematic diagram of the lithographic equipment described in the utility model for electronic component processing;
Fig. 4 is the filter screen schematic diagram of the lithographic equipment described in the utility model for electronic component processing;
Fig. 5 is the dust-exhausting port schematic diagram of the lithographic equipment described in the utility model for electronic component processing.
In appended drawing reference: 1, cabinet;2, support tube;3, direction flexible;4, nozzle;5, column;6, head;7, fixture;8, Dust cover;9, dust-collecting box;10, filter screen;11, air pump;12, appendix;13, laser head;14, the first side plate;15, second side Plate;16, foreboard;17, bottom plate;18, hand groove;19, handle;20, dust-exhausting port;21, supporting network.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work Every other embodiment obtained, fall within the protection scope of the utility model.
Embodiment 1
Fig. 1-Fig. 5 is please referred to, for the lithographic equipment of electronic component processing, including cabinet 1, head 6, dust-collecting box 9, cabinet It is provided with column 5 behind 1, supports head 6, head 6 is installed at the top of column 5, laser head 13 is driven to move, head 6 is pacified below Equipped with laser head 13, photoetching is carried out, fixture 7, fixed electronic component are provided in front of column 5, fixture 7 and cabinet 1 are bolted, Replacement fixture 7 easy to disassemble, 7 side of fixture are provided with dust cover 8, prevent dust from arbitrarily flying upward, and 8 shape of dust cover is circular arc Shape, smooth guidance dust, dust cover 8 and cabinet 1 are riveted together, and guarantee that dust cover 8 is solid and reliable, are arranged below dust cover 8 There is dust-exhausting port 20, dust enters the channel of cabinet 1, and dust-exhausting port 20 is equipped with supporting network 21 above, prevents electronic component from entering case Body 1, supporting network 21 and cabinet 1 snap connection, and replacement supporting network 21 easy to disassemble, fixture 7 is provided with branch far from 8 side of dust cover Stay tube 2 supports direction flexible 3, and support tube 2 is equipped with direction flexible 3 above, facilitates the direction for changing nozzle 4, direction flexible 3 It plugs and connects with support tube 2, replacement easy to disassemble, 3 one end of direction flexible is equipped with nozzle 4, the opening that air-flow sprays, nozzle 4 Shape is platypelloid type, guarantees air-flow width, and nozzle 4 and the sealing of direction flexible 3 are threadedly coupled, increase sealing, pacify below support tube 2 Equipped with appendix 12, the pipeline of delivery air is equipped with air pump 11 below appendix 12, air is pushed to form air-flow, air pump 11 It is bolted with cabinet 1, maintenance air pump 11 easy to disassemble, dust-collecting box 9 is installed in cabinet 1, collect dust, dust-collecting box 9 and case The plug connection of body 1, the dust that cleaning easy to disassemble is collected, dust-collecting box 9 include bottom plate 17, are provided with foreboard 16 before bottom plate 17, It is provided with hand groove 18 before foreboard 16, is convenient for pull dust-collecting box 9,17 side of bottom plate is provided with the first side plate 14, the first side plate 14 sides are provided with the second side plate 15, and the height of the second side plate 15 enters dust less than the height of the first side plate 14 convenient for dust Box 9,9 side of dust-collecting box are provided with filter screen 10, prevent dust from entering air pump 11, filter screen 10 and the plug connection of cabinet 1, are convenient for Dismounting filter screen 10 is cleared up, and handle 19 is equipped with before filter screen 10, is convenient for pull filter screen 10.
Working principle: electronic component is fixed on fixture 7, bends direction flexible 3, so that nozzle 4 is directed at electronic component and is carved Surface is printed, head 6 drives laser head 13 to be marked on electronic component, and air pump 11 will be in dust-collecting box 9 by filter screen 10 Air sucking, and air-flow is conveyed to by support tube 2 and direction flexible 3 by appendix 12, air-flow is blown by nozzle 4 in electronics Dust is blown into dust cover 8 by element surface, and is entered in dust-collecting box 9 under the guidance of dust cover 8 by dust-exhausting port 20.
Embodiment 2
On the basis of the above embodiments:
Column 5 welds together with cabinet 1, keeps column 5 solid and reliable, and head 6 and column 5 are bolted, easy to disassemble Repair head 6.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art, It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.

Claims (7)

1. for the lithographic equipment of electronic component processing, including cabinet (1), head (6), dust-collecting box (9), it is characterised in that: institute It states cabinet (1) to be provided with column (5) below, be equipped with the head (6) at the top of the column (5), the head (6) is pacified below Equipped with laser head (13), it is provided with fixture (7) in front of the column (5), the fixture (7) and the cabinet (1) are bolted, Fixture (7) side is provided with dust cover (8), and dust cover (8) shape is arc-shaped, the dust cover (8) and described Cabinet (1) is riveted together, and is provided with dust-exhausting port (20) below the dust cover (8), and the dust-exhausting port (20) is equipped with above Supporting network (21), the supporting network (21) and the cabinet (1) snap connection, and the fixture (7) is far from the dust cover (8) one Side is provided with support tube (2), and the support tube (2) is equipped with direction flexible (3) above, the direction flexible (3) and the branch Stay tube (2) plug connection, described direction flexible (3) one end are equipped with nozzle (4), and nozzle (4) shape is platypelloid type, described Nozzle (4) and the direction flexible (3) sealing are threadedly coupled, and are equipped with appendix (12) below the support tube (2), described defeated It is equipped with air pump (11) below tracheae (12), the air pump (11) and the cabinet (1) are bolted, peace in the cabinet (1) Equipped with the dust-collecting box (9), the dust-collecting box (9) and the cabinet (1) plug connection, the dust-collecting box (9) includes bottom plate (17), it is provided with foreboard (16) before the bottom plate (17), is provided with hand groove (18), the bottom plate before the foreboard (16) (17) side is provided with the first side plate (14), and the first side plate (14) side is provided with the second side plate (15), described second side The height of plate (15) is less than the height of first side plate (14), and dust-collecting box (9) side is provided with filter screen (10), described Filter screen (10) and the cabinet (1) plug connection, filter screen (10) front are equipped with handle (19).
2. it is according to claim 1 for electronic component processing lithographic equipment, it is characterised in that: the column (5) with The cabinet (1) welds together, and the head (6) and the column (5) are bolted.
3. the lithographic equipment according to claim 1 for electronic component processing, it is characterised in that: the dust-exhausting port (20) Across the cabinet (1), the support tube (2) passes through the cabinet (1).
4. the lithographic equipment according to claim 1 for electronic component processing, it is characterised in that: the bottom plate (17), The foreboard (16), first side plate (14) and second side plate (15) weld together.
5. the lithographic equipment according to claim 1 for electronic component processing, it is characterised in that: the appendix (12) Respectively with the support tube (2) and the air pump (11) clamp connection.
6. the lithographic equipment according to claim 1 for electronic component processing, it is characterised in that: the support tube (2), The direction flexible (3) and the nozzle (4) are respectively arranged with 2.
7. it is according to claim 1 for electronic component processing lithographic equipment, it is characterised in that: the handle (19) with The filter screen (10) welds together.
CN201920488424.5U 2019-04-12 2019-04-12 Lithographic equipment for electronic component processing Expired - Fee Related CN209606773U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201920488424.5U CN209606773U (en) 2019-04-12 2019-04-12 Lithographic equipment for electronic component processing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201920488424.5U CN209606773U (en) 2019-04-12 2019-04-12 Lithographic equipment for electronic component processing

Publications (1)

Publication Number Publication Date
CN209606773U true CN209606773U (en) 2019-11-08

Family

ID=68407272

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201920488424.5U Expired - Fee Related CN209606773U (en) 2019-04-12 2019-04-12 Lithographic equipment for electronic component processing

Country Status (1)

Country Link
CN (1) CN209606773U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113156775A (en) * 2021-04-27 2021-07-23 华中科技大学 Proximity type exposure light source and exposure method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113156775A (en) * 2021-04-27 2021-07-23 华中科技大学 Proximity type exposure light source and exposure method

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CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20191108