CN209597800U - A kind of device capable of cleaning fragments - Google Patents
A kind of device capable of cleaning fragments Download PDFInfo
- Publication number
- CN209597800U CN209597800U CN201822197769.3U CN201822197769U CN209597800U CN 209597800 U CN209597800 U CN 209597800U CN 201822197769 U CN201822197769 U CN 201822197769U CN 209597800 U CN209597800 U CN 209597800U
- Authority
- CN
- China
- Prior art keywords
- device capable
- supporting element
- scraper plate
- interconnecting piece
- cleaning fragments
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
The utility model relates to the Removal Technology fields of tubular type PECVD boiler tube, disclose a kind of device capable of cleaning fragments for tubular type PECVD boiler tube, supporting element, scraper plate, hairbrush and the first actuator including lengthwise, wherein the scraper plate is connect with the end of the supporting element；The end close to the scraper plate of the hairbrush and the supporting element is rotatablely connected；First actuator and the hairbrush are sequentially connected.Biggish fragment in PECVD boiler tube can be cleared up using scraper plate, the hairbrush rotated automatically can clean away fragment fine crushing in PECVD boiler tube, to realize the purpose of silicon wafer fragment quick, efficiently and thoroughly in removal PECVD boiler tube.
Description
Technical field
The utility model relates to the Removal Technology fields of tubular type PECVD boiler tube, more particularly to one kind to be used for tubular type PECVD furnace
The device capable of cleaning fragments of pipe.
Background technique
Cell piece in process of production, needs to plate one layer of antireflective coating on the surface of silicon wafer.Currently, using plasma
Enhance chemical vapor deposition method (Plasma Enhanced Chemical Vapor Deposition, PECVD), makes gas
Occur to chemically react on silicon cell surface and forms coating, i.e. antireflective coating.The main function of this antireflective coating is: reducing
Reflectivity, the passivation of good body and surface passivation, and strong compactness and resistance to most acid-base property using silicon nitride film, in silicon
Piece surface forms protective layer.The PECVD process of cell piece generally passes through PECVD machine and completes, and PECVD machine is logical at the both ends of quartz ampoule
Ammonia and silane are resolved into energetic ion state under conditions of vacuumizing by microwave source, surface, are turned by series of chemical
Become silicon nitride gas, in silicon chip surface deposited silicon nitride solid film, while decompositing the hydrogen ion come, by silicon chip surface original
Defective passivation.
At present there are mainly two types of the equipment of deposited silicon nitride solid film, board-like PECVD device and tubular type PECVD boiler tube.
Tubular type PECVD boiler tube can accumulate a large amount of fragments in boiler tube bottom and be covered on thermocouple, influence entire furnace since long-time uses
The Temperature Distribution of pipe causes plated film color difference occur and degrades, into influence A superfine product rate.The fragment of traditional tubular type PECVD boiler tube is clear
Managing device is that a quartz glass plate is socketed on stainless steel tube, in use, device capable of cleaning fragments is protruded into PECVD boiler tube, is made
Quartz glass plate is contacted with boiler tube bottom and is moved along boiler tube bottom, and fragment is taken out of outside boiler tube.Although the device capable of cleaning fragments
Fragment can be cleared up, but cleaning is not thorough enough and clearance time is longer, it is larger to the friction injury of boiler tube.
In view of the above shortcomings, the designer, is actively subject to research and innovation, to found, one kind is new structural to be used for
The device capable of cleaning fragments of tubular type PECVD boiler tube makes it with more the utility value in industry.
Utility model content
The purpose of this utility model is that propose a kind of device capable of cleaning fragments for tubular type PECVD boiler tube, can quickly,
Efficiently and thoroughly remove the silicon wafer fragment in PECVD boiler tube.
For this purpose, the utility model uses following technical scheme:
A kind of device capable of cleaning fragments, supporting element, scraper plate, hairbrush and the first actuator including lengthwise, in which:
The scraper plate is connect with the end of the supporting element；
The end close to the scraper plate of the hairbrush and the supporting element is rotatablely connected；
First actuator and the hairbrush are sequentially connected.
By the way that hairbrush is arranged, and hairbrush is driven to rotate, cooperate scraper plate, can quickly, efficiently and thoroughly remove PECVD furnace
Silicon wafer fragment in pipe.
As a kind of preferred embodiment of above-mentioned device capable of cleaning fragments, the scraper plate is included
Interconnecting piece, the interconnecting piece are connect with the end of the supporting element；
Contact portion, the contact portion are connect with the interconnecting piece, and the edge of the contact portion is arc, and the contact
The edge in portion is equipped with escape port and multiple sawtooth；
Shielding plate, the shielding plate and the contact portion or the interconnecting piece are rotatablely connected, and the shielding plate can block
The escape port.By the way that sawtooth is arranged on the edge that scraper plate is contacted with PECVD boiler tube, it is possible to reduce scraper plate and PECVD boiler tube
Contact area, to reduce scraper plate to the frictionally damage of PECVD boiler tube.
As a kind of preferred embodiment of above-mentioned device capable of cleaning fragments, the device capable of cleaning fragments further includes dust exhaust apparatus, institute
Stating dust exhaust apparatus includes hose, dust catcher interface, and the hose is detachably connected with the supporting element, and the suction
One end of dirt hose is suction inlet, and the suction inlet is close to the scraper plate；The dust catcher interface is another with the hose
One end connects and can connect with dust catcher.The fragment for being difficult to clear up in PECVD boiler tube can be effectively removed using dust exhaust apparatus.
As a kind of preferred embodiment of above-mentioned device capable of cleaning fragments, the supporting element is the steel pipe of stretching structure, the steel
Pipe is driven flexible by the second actuator.Flexible structure is convenient to clean the fragment of any place in PECVD boiler tube.
As a kind of preferred embodiment of above-mentioned device capable of cleaning fragments, the interconnecting piece is detachably connected with the steel pipe.
As a kind of preferred embodiment of above-mentioned device capable of cleaning fragments, the interconnecting piece is equipped with internal diameter and is greater than the outer diameter of steel pipes
Axis hole, the inner wall of the axis hole is connected with multiple press parts that can be supported with the outer wall of the steel pipe.
As a kind of preferred embodiment of above-mentioned device capable of cleaning fragments, the steel pipe be equipped with control first actuator and
The switch of the second actuator opening and closing.
As a kind of preferred embodiment of above-mentioned device capable of cleaning fragments, the end of the steel pipe is connected with handle.
As a kind of preferred embodiment of above-mentioned device capable of cleaning fragments, the handle is equipped with anti-skid structure.
As a kind of preferred embodiment of above-mentioned device capable of cleaning fragments, the contact portion is shaped to the interconnecting piece by quartz
One.
The utility model has the following beneficial effects: biggish fragment in PECVD boiler tube can be cleared up using scraper plate, it is automatic to rotate
Hairbrush fragment fine crushing in PECVD boiler tube can be cleaned away, thus realize it is quick, efficiently and thoroughly remove
The purpose of silicon wafer fragment in PECVD boiler tube.
Detailed description of the invention
Fig. 1 is the structural schematic diagram for the device capable of cleaning fragments that specific embodiment of the present invention provides；
Fig. 2 is the structural schematic diagram of the scraper plate in device capable of cleaning fragments；
Fig. 3 is the structural schematic diagram of the press part in scraper plate.
In figure: 10- supporting element, 20- scraper plate, 21- interconnecting piece, 22- contact portion, 23- escape port, 24- sawtooth, 25- are blocked
Piece, 26- axis hole, 27- press part, 271- connection sheet, 272- spring, 273- arrived tableting, 30- hairbrush, the first actuator of 40-,
51- hose, 52- dust catcher interface, 53- suction inlet, 60- switch, 70- handle, 71- anti-skid structure.
Specific embodiment
Further illustrate the technical solution of the utility model below with reference to the accompanying drawings and specific embodiments.
As shown in Figure 1, the device capable of cleaning fragments for tubular type PECVD boiler tube of the utility model includes the supporting element of lengthwise
10, scraper plate 20, hairbrush 30 and the first actuator 40.Wherein, supporting element 10 is telescopic steel pipe；Scraper plate 20 and supporting element 10
End connection；The end of the close scraper plate 20 of hairbrush 30 and supporting element 10 is rotatablely connected；First actuator 40 is driven with hairbrush 30
Connection.Biggish fragment in PECVD boiler tube can be cleared up using scraper plate 20, the hairbrush 30 rotated automatically can be by PECVD boiler tube
Interior fragment fine crushing cleans away, to realize the mesh of silicon wafer fragment quick, efficiently and thoroughly in removal PECVD boiler tube
's.
Specifically, supporting element 10 can be set to the steel pipe of automatic telescopic structure, steel pipe is by the second actuator (not shown)
Driving is flexible.Set steel pipe to the structure of more piece socket, the second actuator can be used multiposition cylinder, utilize multiposition cylinder
Realize the adjusting of the multiple length of steel pipe.Supporting element 10 uses stretching structure, is convenient to clean the fragment of any place in PECVD boiler tube.
As shown in Figures 2 and 3, the scraper plate 20 in the utility model has interconnecting piece 21, contact portion 22 and shielding plate 25,
Wherein, interconnecting piece 21 is connect with the end of supporting element 10；Contact portion 22 is connect with interconnecting piece 21, and the edge of contact portion 22 is arc
Shape, and the edge of contact portion 22 is equipped with escape port 23 and multiple sawtooth 24；Shielding plate 25 and contact portion 22 or 21 turns of interconnecting piece
Dynamic connection, shielding plate 25 can block escape port 23.By the way that sawtooth is arranged on the edge that scraper plate 20 is contacted with PECVD boiler tube
24, it is possible to reduce the contact area of scraper plate 20 and PECVD boiler tube, to reduce scraper plate 20 to the frictionally damage of PECVD boiler tube；It keeps away
Allow the setting of mouth 23, can be when scraper plate 20 to scrape the boiler tube bottom PECVD, the thermocouple of PECVD boiler tube bottom leads to from escape port 23
It crosses, damage thermocouple is avoided that while scraping off fragment.In the case where not needing evacuation thermocouple, shielding plate 25 is rotated, is made
Shielding plate blocks escape port 23, to scrape off the fragment of PECVD boiler tube bottom to the maximum extent.
Scraper plate 20 is detachably connected by the installation for scraper plate 20, the utility model with steel pipe, specifically, by interconnecting piece 21
It is detachably connected with steel pipe, the utility model is equipped with the axis hole 26 that internal diameter is greater than outer diameter of steel pipes on interconnecting piece 21, axis hole 26
Inner wall is connected with multiple press parts 27 that can be supported with the outer wall of steel pipe.Steel pipe passes through axis hole 26, and each press part 27 is tightly
The outer wall of steel pipe is resisted, scraper plate 20 can be installed on steel pipe.Specifically, press part 27 include across 26 inner wall of axis hole with
The spring 272 and connect with 272 other end of spring that connection sheet 271, one end and the connection sheet 271 of the inside connection of interconnecting piece 21 connect
The arrived tableting 273 connect, arrived tableting 273 is arc, convenient for being bonded with the outer wall of steel pipe.It can be uniformly provided with and support on interconnecting piece 21
The equal mounting groove of 27 numbers of casting die, and mounting groove is connected to axis hole 26, and press part 27 is installed on mounting groove correspondingly
.
In addition, contact portion 22 is molded as one with interconnecting piece 21 by quartz, it is easy to process.
As preferred embodiments of the present invention, the device capable of cleaning fragments of the utility model further includes dust exhaust apparatus,
Dust exhaust apparatus includes hose 51, dust catcher interface 52, and hose 51 is detachably connected with supporting element 10, and dust suction is soft
One end of pipe 51 is suction inlet 53, and suction inlet 53 is close to scraper plate 20；Dust catcher interface 52 is connect with the other end of hose 51
And it can be connect with dust catcher.Fragment tiny in PECVD boiler tube is drawn using dust exhaust apparatus, can effectively remove PECVD furnace
The fragment cleared up, more thoroughly the silicon wafer fragment in removal PECVD boiler tube are difficult in pipe.
In order to facilitate hairbrush 30 is opened, make hairbrush rotary cleaning PECVD boiler tube bottom and flexible, this reality that controls steel pipe simultaneously
With the novel switch 60 for being equipped with the first actuator 40 of control and the opening and closing of the second actuator on steel pipe.
Of course for gripping steel pipe is facilitated, steel pipe is put in PECVD boiler tube, the utility model is connected in the end of steel pipe
There is handle 70, and is equipped with anti-skid structure 71 on handle 70, such as antiskid thread, skidding when can prevent from holding.
To sum up, the device capable of cleaning fragments for tubular type PECVD boiler tube of the utility model can quickly, efficiently and thoroughly
Remove the silicon wafer fragment in PECVD boiler tube.
Technical principle of the utility model has been described above with reference to specific embodiments.These descriptions are intended merely to explain this reality
With novel principle, and it cannot be construed to the limitation to scope of protection of the utility model in any way.Based on the explanation herein,
Those skilled in the art, which does not need to pay for creative labor, can associate with other specific implementation modes of this utility model,
These modes are fallen within the protection scope of the utility model.
Claims (10)
1. a kind of device capable of cleaning fragments, which is characterized in that the supporting element (10), scraper plate (20), hairbrush (30) including lengthwise and
One actuator (40), in which:
The scraper plate (20) connect with the end of the supporting element (10)；
The end close to the scraper plate (20) of the hairbrush (30) and the supporting element (10) is rotatablely connected；
First actuator (40) and the hairbrush (30) are sequentially connected.
2. device capable of cleaning fragments according to claim 1, which is characterized in that the scraper plate (20) includes
Interconnecting piece (21), the interconnecting piece (21) connect with the end of the supporting element (10)；
Contact portion (22), the contact portion (22) connect with the interconnecting piece (21), and the edge of the contact portion (22) is arc
Shape, and the edge of the contact portion (22) is equipped with escape port (23) and multiple sawtooth (24)；
Shielding plate (25), the shielding plate (25) and the contact portion (22) or the interconnecting piece (21) are rotatablely connected, the screening
Baffle (25) can block the escape port (23).
3. device capable of cleaning fragments according to claim 2, which is characterized in that the device capable of cleaning fragments further includes dust suction dress
It sets, the dust exhaust apparatus includes hose (51), dust catcher interface (52), the hose (51) and the supporting element
(10) it is detachably connected, and one end of the hose (51) is suction inlet (53), the suction inlet (53) is scraped close to described
Plate (20)；The dust catcher interface (52) connect with the other end of the hose (51) and can connect with dust catcher.
4. device capable of cleaning fragments according to claim 3, which is characterized in that the supporting element (10) is the steel of stretching structure
Pipe, the steel pipe are driven flexible by the second actuator.
5. device capable of cleaning fragments according to claim 4, which is characterized in that the interconnecting piece (21) and the steel pipe are removable
Unload connection.
6. device capable of cleaning fragments according to claim 5, which is characterized in that the interconnecting piece (21) is equipped with internal diameter and is greater than institute
State the axis hole (26) of outer diameter of steel pipes, the inner wall of the axis hole (26) is connected with and multiple can support with what the outer wall of the steel pipe supported
Casting die (27).
7. device capable of cleaning fragments according to claim 4, which is characterized in that the steel pipe, which is equipped with, controls first drive
The switch (60) of moving part (40) and second actuator opening and closing.
8. device capable of cleaning fragments according to claim 4, which is characterized in that the end of the steel pipe is connected with handle
(70)。
9. device capable of cleaning fragments according to claim 8, which is characterized in that the handle (70) is equipped with anti-skid structure
(71)。
10. device capable of cleaning fragments according to claim 2, which is characterized in that the contact portion (22) and the interconnecting piece
(21) it is molded as one by quartz.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822197769.3U CN209597800U (en) | 2018-12-25 | 2018-12-25 | A kind of device capable of cleaning fragments |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822197769.3U CN209597800U (en) | 2018-12-25 | 2018-12-25 | A kind of device capable of cleaning fragments |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209597800U true CN209597800U (en) | 2019-11-08 |
Family
ID=68397225
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822197769.3U Expired - Fee Related CN209597800U (en) | 2018-12-25 | 2018-12-25 | A kind of device capable of cleaning fragments |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209597800U (en) |
-
2018
- 2018-12-25 CN CN201822197769.3U patent/CN209597800U/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TW200845195A (en) | Cleaning hardware kit for composite showerhead electrode assemblies for plasma processing apparatuses | |
| CN209597800U (en) | A kind of device capable of cleaning fragments | |
| TWI426579B (en) | Semiconductor equipment and method for cleaning semiconductor equipment | |
| CN101270849B (en) | Gas diverter | |
| CN105003928B (en) | A kind of emission-control equipment suitable for semiconductor fabrication process | |
| CN210207950U (en) | Novel pipe cleaning device convenient for dust removal and used for tobacco production | |
| CN209174529U (en) | One kind being used for OIL IN LUBRICATING OIL PRODUCTION pipe clearing apparatus | |
| JP2015006642A (en) | Cleaning device | |
| CN211098234U (en) | Dust treatment recovery unit of pushed slab kiln | |
| CN210676199U (en) | Mechano-electronic component cleaning device for mechano-electronic engineering | |
| CN113941938A (en) | Scrap iron remover for machining precise parts based on negative pressure | |
| CN210253295U (en) | Cleaning and drying equipment for medical appliances | |
| CN207871770U (en) | A kind of high-efficiency environment friendly Air Filter easy to clean | |
| CN205628815U (en) | Clear away connector device of interior dirt of condenser | |
| JP3083397B2 (en) | Piping cleaning mechanism | |
| CN215391388U (en) | Liquid crystal substrate high-temperature furnace cleaning device | |
| CN220437165U (en) | Cooling device with filtering structure | |
| CN217662010U (en) | Constant temperature oil groove with oil residue processing function | |
| CN213613122U (en) | Pipeline cleaning device | |
| CN215113190U (en) | Novel stainless steel silencer of air conditioner | |
| CN220708203U (en) | Inner wall rust cleaning device for heat exchanger | |
| CN218599928U (en) | Ventilating duct with dust deposition prevention function | |
| CN208005412U (en) | A kind of Hardware fitting derusting device with cleaning function | |
| CN206716656U (en) | A kind of food cleaner that can be removed contamination certainly | |
| CN209926754U (en) | Oven of automatically cleaning industrial chemicals processing |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No.88, Xiexin Avenue, Funing Economic Development Zone, Yancheng City, Jiangsu Province Patentee after: Funing atlas sunshine Power Technology Co.,Ltd. Patentee after: Atlas sunshine Power Group Co.,Ltd. Address before: No.88, Xiexin Avenue, Funing Economic Development Zone, Yancheng City, Jiangsu Province Patentee before: CSI-GCL SOLAR MANUFACTURING (YANCHENG) Co.,Ltd. Patentee before: CSI SOLAR POWER GROUP Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191108 Termination date: 20211225 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |