CN209589843U - Fluorescence enhancement chip based on the super surface of all dielectric artificial micro-structure - Google Patents

Fluorescence enhancement chip based on the super surface of all dielectric artificial micro-structure Download PDF

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CN209589843U
CN209589843U CN201822118146.2U CN201822118146U CN209589843U CN 209589843 U CN209589843 U CN 209589843U CN 201822118146 U CN201822118146 U CN 201822118146U CN 209589843 U CN209589843 U CN 209589843U
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nanometer
dielectric posts
dielectric
artificial micro
super surface
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何赛灵
龚晨晟
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Zhejiang University ZJU
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Zhejiang University ZJU
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Abstract

The utility model discloses a kind of fluorescence enhancement chip based on the super surface of all dielectric artificial micro-structure, which is made of the nanometer dielectric posts cluster of periodic arrangement, and lower layer is medium substrate;In the nanometer dielectric posts cluster of periodic arrangement, each periodic unit shape is the square or regular hexagon of identical size;It include the nanometer dielectric posts of four identical sizes in each periodic unit, the center of this four nanometer dielectric posts constitutes square.The utility model enhances fluorescence signal from enhancing exciting light local fields, raising radiative quantum efficiency and in terms of improving phosphor collection efficiency three simultaneously, substantially increases fluorescent marker detection sensitivity.Entire chip is arranged in low-refraction substrate, simple with low material loss, preparation, and can change advantage of the structure size work in different-waveband.

Description

Fluorescence enhancement chip based on the super surface of all dielectric artificial micro-structure
Technical field
The utility model belongs to surface-enhanced fluorescence signal field, more particularly to a kind of super based on all dielectric artificial micro-structure The fluorescence enhancement chip on surface is mainly used in detection by the substance of fluorescent molecule group label, identifies substance, analyze the property of substance Matter.
Background technique
In molecular biology, biochemistry, protein chip technology and other life sciences, people are often used glimmering Signal object realizes quantitative and qualitative detection to predetermined substance (such as nucleic acid, antigen, enzyme), and used fluorescent marker includes Cy3, Cy5, alexa488, upper conversion particles etc..Detection sensitivity is one of the important performance characteristic of fluorescent marker measurement, master It to be determined by the signal-to-noise ratio of system.However common fluorescent marker usually has lower fluorescence efficiency, so that fluorescence signal Very faint, this has seriously affected the sensitivity of detection system.It is glimmering for improving its to devise a variety of surface textures by people thus Light signal strength.Currently used surface texture is such as gold and silver based on metal material mostly, including nanometer gold bar particle, Silver-colored optical grating construction and metal nano antenna etc..But metal has biggish material loss in visible light and near infrared band, especially It is when fluorescent marker (less than 15 nanometers) excessively close apart from metal structure, and fluorescence efficiency will be greatly reduced, this existing As being also known as fluorescent quenching.
To solve the above-mentioned problems.The utility model devises a kind of fluorescence based on the super surface of all dielectric artificial micro-structure Enhance chip, the high refractive index medium structure of service life arrangement realizes the high magnification enhancing to fluorescence signal, has Low material loss, preparation are simple, and can change advantage of the structure size work in different-waveband.
Utility model content
The utility model aims to solve the problem that the fluorescence efficiency problem of fluorescent marker, proposes a kind of manually micro- based on all dielectric The fluorescence enhancement chip on the super surface of structure, while avoiding metal structure bring material loss.Only need adjustment structure size It just can be applied to different fluorescent materials.It can be applied to the fields such as specific protein quality detection, fluorescent marker imaging.
The purpose of this utility model is achieved through the following technical solutions: one kind is super based on all dielectric artificial micro-structure The fluorescence enhancement chip on surface, chip are divided into two layers, and upper layer is made of the nanometer dielectric posts cluster of periodic arrangement, and lower layer is medium Substrate;The test substance of fluorescent label is coated in chip surface;The nanometer dielectric posts of the periodic arrangement In cluster, each periodic unit shape is the square or regular hexagon of identical size;It include four phases in each periodic unit With the nanometer dielectric posts of size, the center of this four nanometer dielectric posts constitutes square.
Further, the material of the nanometer dielectric posts cluster is silicon, titanium dioxide or germanium.
Further, the material of the medium substrate is silica or benzocyclobutene.
Further, each periodic unit shape is the square or regular hexagon of identical size, its side length is 520nm;The side length for the square that the center of four nanometer dielectric posts of each periodic unit is constituted is 200nm;Nanometer dielectric posts Radius be 68nm, the height of nanometer dielectric posts is 270nm.
The utility model has the beneficial effect that:
(1) the utility model solves the difficulty of fluorescent marker low Poison efficiency by designing simple dielectric structure array Topic, realizes the enhancing to fluorescence signal, compared to the surface structure design based on metal material, can be effectively reduced material damage It consumes and avoids fluorescent quenching problem.
(2) the utility model from enhancing exciting light local fields, raising radiative quantum efficiency and improves phosphor collection effect simultaneously Three aspects of rate enhance fluorescence signal, substantially increase fluorescence signal detection sensitivity.
(3) the structure design of the utility model is very flexible, can adjust the position of formant by changing structure size It sets, makes its work in visible light or infrared band.
(4) the utility model can be effectively operating in liquid environment, it is safe and non-toxic and have good bio-compatibility, It is with a wide range of applications in field of biological detection.
Detailed description of the invention
Fig. 1 is a kind of signal of the fluorescence enhancement chip based on the super surface of all dielectric artificial micro-structure in square period Figure;
Fig. 2 is the resonance mode schematic diagram on the super surface of all dielectric artificial micro-structure;
Fig. 3 is that the obtained fluorescence enhancement chip of the numerical simulation Localized field enhancement that be averaged is composed;
Fig. 4 is the antenna pattern for the fluorescence enhancement chip that numerical simulation obtains;
Fig. 5 is the measurement that the fluorescent material on chip and in common substrate is imaged using fluorescence imaging device Result figure;
In figure, nanometer dielectric posts cluster 1, medium substrate 2, periodic unit 3.
Specific embodiment
The utility model is described in further detail in the following with reference to the drawings and specific embodiments.
It is as shown in Figure 1 the signal of fluorescence enhancement chip of the utility model based on the super surface of all dielectric artificial micro-structure Figure, chip are divided into two layers, and upper layer is made of (by taking the square period as an example) the nanometer dielectric posts cluster 1 of periodic arrangement, and lower layer is Medium substrate 2;It include the nanometer dielectric posts of four identical sizes in each periodic unit 3, this four dielectric posts all have radius r With height t, the line at the center of this four dielectric posts constitutes the square that side length is d.Each period is the pros that side length is p Shape.The lower left corner Fig. 1 is periodic unit schematic diagram.Test substance is painted on this chip surface, and exciting light is irradiated from dielectric posts surface The fluorescence signal of this chip, reflection is collected by detector.
The super surface of all dielectric artificial micro-structure disclosed in the utility model can support the eelctric dipole of collective to resonate simultaneously With magnetic dipole resonance mode, their field distribution is as shown in Figure 2.The left side Fig. 2 is that the magnetic field of collective's magnetic dipole resonance wave strong point is strong Distribution map is spent, wherein arrow indicates the displacement current direction of resonance wave strong point;It is collective's eelctric dipole resonance wave strong point on the right of Fig. 2 Electric-field intensity distribution figure, wherein arrow indicates the displacement current direction of resonance wave strong point.The profile of structure is indicated with black line.It can be with Observe that structure periphery obtains great Electromagnetic enhancement effect at resonant frequency.
The utility model can effectively regulate and control the radiation direction of fluorescent marker, and the fluorescence signal of radiation is made to concentrate on hanging down Histogram is to outgoing, to can more effectively be collected by detector.
Embodiment 1
The present embodiment is to be directed to excitation wavelength for 965nm, and radiation wavelength is the up-conversion fluorescent marking object of 800nm (NaYF4:Yb/Tm) chip of fluorescence signal enhancing is realized.Silicon (Si) is used as the material of nanometer dielectric posts, and substrate is then chosen Silica glass material (SiO2).Entire chip is submerged.Design parameter is as follows:
P=520nm, t=270nm, r=68nm, d=200nm
Average Localized field enhancement spectrum above this chip at 40nm is as shown in Figure 3.It can be observed that wavelength be 800nm and There are two fields to enhance peak at 965nm, corresponds respectively to the resonance of collective's magnetic dipole and eelctric dipole resonance.Adjust the height energy of silicon column Enough change the position of second formant, the radius for adjusting silicon column can change simultaneously the position of two formants.It can from figure To find that the average local electric field of excitation wave strong point has been enhanced about 65 times.
Meanwhile also there is Localized field enhancement peak at upper converted radiation wavelength, according to principle of reciprocity, this shows to be located at core The rate of irradiation of up-conversion fluorescent marking object above piece can be enhanced.The original quantum of this up-conversion fluorescent marking object is imitated Rate is 2%.It is computed, the radiation efficiency of this chip is about 95%, and the rate of irradiation of up-conversion fluorescent marking object enhances 3 times. According to expression formula (3), up-conversion fluorescence quantum efficiency intensification factor is about 2.88 times.
Fig. 4 shows the antenna pattern that numerical value is calculated, and up-conversion fluorescence signal is concentrated mainly on very as seen from the figure In small angular range, signal collection efficiency can be effectively improved.When the object lens collecting signal for the use of numerical aperture being 0.33 When, this Fluorescence chip is capable of providing up to 3 times of collection efficiency enhancing.
In order to confirm the actual effect of the utility model, we are prepared for a piece of up-conversion fluorescence in quartz glass substrate Enhance chip, and up-conversion fluorescent marking object is uniformly dispersed in surface, we have observed up to more than 400 times in an experiment Fluorescence signal enhancing.Fig. 5 is the up-conversion fluorescence image that experiment test obtains, and wherein the lower left corner placed on piece conversion Fluorescence enhancement chip.In contrast to substrate, it can be observed that there is the up-conversion fluorescence signal of up-conversion fluorescence enhancing chip area to obtain Obtained significant enhancing.
Above-described embodiment is used to illustrate the utility model, rather than limits the utility model, practical at this In novel spirit and scope of protection of the claims, to any modifications and changes that the utility model is made, this reality is both fallen within With novel protection scope.

Claims (4)

1. a kind of fluorescence enhancement chip based on the super surface of all dielectric artificial micro-structure, which is characterized in that chip is divided into two layers, on Layer is made of the nanometer dielectric posts cluster of periodic arrangement, and lower layer is medium substrate;Fluorescent marker is coated in chip surface The test substance of substance markers;In the nanometer dielectric posts cluster of the periodic arrangement, each periodic unit shape is identical size Square or regular hexagon;It include the nanometer dielectric posts of four identical sizes, this four nanometer media in each periodic unit The center of column constitutes square.
2. a kind of fluorescence enhancement chip based on the super surface of all dielectric artificial micro-structure as described in claim 1, feature exist In the material of the nanometer dielectric posts cluster is silicon, titanium dioxide or germanium.
3. a kind of fluorescence enhancement chip based on the super surface of all dielectric artificial micro-structure as described in claim 1, feature exist In the material of the medium substrate is silica or benzocyclobutene.
4. a kind of fluorescence enhancement chip based on the super surface of all dielectric artificial micro-structure as described in claim 1, feature exist In each periodic unit shape is the square or regular hexagon of identical size, and its side length is 520nm;Each periodic unit Four nanometer dielectric posts center constitute square side length be 200nm;The radius of nanometer dielectric posts is 68nm, and nanometer is situated between The height of matter column is 270nm.
CN201822118146.2U 2018-12-17 2018-12-17 Fluorescence enhancement chip based on the super surface of all dielectric artificial micro-structure Active CN209589843U (en)

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