CN209577527U - It is a kind of for the cleaning equipment containing arsenic, phosphor contaminant component - Google Patents
It is a kind of for the cleaning equipment containing arsenic, phosphor contaminant component Download PDFInfo
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- CN209577527U CN209577527U CN201821863895.1U CN201821863895U CN209577527U CN 209577527 U CN209577527 U CN 209577527U CN 201821863895 U CN201821863895 U CN 201821863895U CN 209577527 U CN209577527 U CN 209577527U
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- cleaning
- ontology
- cleaning equipment
- component
- containing arsenic
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Abstract
The utility model discloses a kind of for the cleaning equipment containing arsenic, phosphor contaminant component, and the cleaning equipment includes the cleaning ontology and cleaning device being arranged on the rack, and the cleaning device is set in cleaning ontology；The cleaning equipment further includes transmission device, driving mechanism, and the transmission device includes: at least one transport unit, for transmitting the pollutant component；The cleaning equipment further includes the transmission track with transport unit cooperation, and the pollutant component can be sent in the cleaning ontology by the transport unit along the transmission track；The driving mechanism is connect with the transport unit or the transmission track, for driving the transport unit or the transmission track to move.It is provided by the utility model to be directed to the cleaning equipment containing arsenic, phosphor contaminant component, it is realized and is cleaned in cleaning ontology by setting cleaning device, it is therefore prevented that noxious material sputtering causes personal injury and environmental pollution；Simultaneously, additionally it is possible to substantially reduce cleaning frequency and cleaning cost.
Description
Technical field
The utility model relates to semiconductor cleaning field more particularly to it is a kind of for containing arsenic, phosphor contaminant component it is clear
Wash equipment.
Background technique
Semicon industry leads to portion since process requirements, the solid or liquid wastes of generation are stained with inside part of appliance
Part reduced performance can not continue to use.
Currently, in actual treatment, in order to clean corresponding pollutant component, due to cleaning equipment occupy volume it is larger,
The reasons such as pollution cause workshop to need to send outside component to special cleaning producer and clean.
When so expending haulagman, when sacker, lead to excessive cycle, higher cost, and productivity declines；And it is voluntarily clear
Washing waste has and the phenomenon that air burning, can generate secondary pollution, life is easily caused to injure.
Utility model content
The purpose of the utility model is to provide a kind of for the cleaning equipment containing arsenic, phosphor contaminant component, existing to solve
There is the problems in technology, pollutant component is started the cleaning processing, avoid personal injury, reduce cleaning cost, improves production effect
Rate.
The utility model provides a kind of for the cleaning equipment containing arsenic, phosphor contaminant component, wherein the cleaning equipment
Including the cleaning ontology being arranged on the rack and cleaning device, the cleaning device is set in cleaning ontology.
Preferably, the cleaning equipment further includes transmission device, and the transmission device includes:
At least one transport unit, for transmitting the pollutant component；
With the transmission track of transport unit cooperation, the transport unit can be along the transmission track by the pollutant component
It is sent in the cleaning ontology；
Driving mechanism is connect with the transport unit or the transmission track, for driving the transport unit or the transmission
Track movement.
Preferably, the transport unit includes:
Turntable, for loading the pollutant component；
Rotating mechanism is connect with the turntable, for driving the turntable to rotate.
Preferably, the cleaning device includes:
Lifting device above the cleaning ontology is set；
Spray head is provided on the elevating lever of the lifting device, the elevating lever can drive the spray head to move up and down,
The spray head is used to clean the inside of the pollutant component.
Preferably, the cleaning device further include: multiple nozzles on the inside of the cleaning ontology are set, and the nozzle is used
In the outside for cleaning the pollutant component.
Preferably, the cleaning equipment further includes grease filtering separation device, the grease filtering separation device and cleaning
Device connection.
Preferably, the grease filtering separation device includes the water-oil separating being sequentially communicated with the cleaning body bottom portion
Device, coarse filter and fine filter.
Preferably, the cleaning ontology is enclosed construction, and is provided with visual windows and handle hole on the cleaning ontology.
Preferably, the cleaning bodies top is provided with fog discharge blower.
Preferably, the cleaning equipment further includes control cabinet, the control cabinet respectively with the cleaning ontology, the transmission
Device, the cleaning device, grease filtering separation device connection.
It is provided by the utility model to be directed to the cleaning equipment containing arsenic, phosphor contaminant component, existed by the way that cleaning device is arranged
It cleans and realizes cleaning in ontology, it is therefore prevented that noxious material sputtering causes personal injury and environmental pollution.In addition, practical new by this
Type can be directly realized by the cleaning of pollutant component, without being transferred to exterior washings company, greatly reduce cleaning frequency and cleaning
Cost.
Further, pollutant component is automatically delivered by transmission device realization, pollutant component is sent to clearly
It washes in ontology, is cleaned by cleaning device to intrinsic pollutant component is cleaned, held finally by filtering separation device
Waste liquid after connecing cleaning pollutant component, and separation is filtered to waste liquid；Wherein, filtering separation device carries out solid-liquid to waste liquid
Separation, to the solid containing arsenic, phosphorus, solution is individually handled, and reduces the pollution to environment.
Detailed description of the invention
Fig. 1 is the front view of cleaning equipment provided by the embodiment of the utility model；
Fig. 2 is the side view for the cleaning equipment that another embodiment of the utility model provides；
Fig. 3 is the top view for the cleaning equipment that another embodiment of the utility model provides；
Fig. 4 is the structural schematic diagram for the filtering separation device that another embodiment of the utility model provides.
Description of symbols:
1- pollutant component, 2- transmission device, 21- transport unit, 22- driving mechanism, 23- transmission track, 24- whirler
Structure, 25- spray pump, 3- clean ontology, 31- visual windows, 32- handle hole, 33- dodge gate, 34- fog discharge blower, 4- cleaning dress
It sets, 41- lifting device, 42- spray head, 43- nozzle, 5- grease filtering separation device, 51- coarse filter, 52- filter pump, 53- oil
Separator, 54- waste liquid tank, 55- precipitation tank, 56- solid-liquid interrupter, 6- rack, 7- control cabinet, 8- heating device.
Specific embodiment
The embodiments of the present invention are described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning
Same or similar element or element with the same or similar functions are indicated to same or similar label eventually.Below by ginseng
The embodiment for examining attached drawing description is exemplary, and is only used for explaining the utility model, and cannot be construed to the utility model
Limitation.
As shown in Figure 1-3, the utility model embodiment is provided and a kind of is set for the cleaning containing arsenic, phosphor contaminant component
Standby, the cleaning equipment includes the cleaning ontology 3 and cleaning device 4 being arranged in rack 6, and cleaning device 4 is set to cleaning ontology 3
It is interior.Wherein, ontology 3 is cleaned, for completing cleaning process, cleaning device 4 is used for the pollutant component in the cleaning ontology 3
1 is cleaned.Rack 6 is applied with steel plate using frame structure, and chassis uses channel steel, and material uses U304, U306, U316, Teflon
The materials such as dragon；For maintenance convenient for safeguarding, 6 upper cover of rack is using detachable, and good seal, it is ensured that cleaning solution will not be outer
It lets out.
It is provided by the embodiment of the utility model to be directed to the cleaning equipment containing arsenic, phosphor contaminant component, it is cleaned by setting
Device realizes cleaning in cleaning ontology, it is therefore prevented that noxious material sputtering causes personal injury and environmental pollution.In addition, passing through this
Utility model can be directly realized by the cleaning of pollutant component, without being transferred to exterior washings company, greatly reduce the cleaning frequency
With cleaning cost.
Preferably, above-mentioned cleaning equipment further includes transmission device 2, for the pollutant component 1 to be sent to cleaning originally
In body 3.
As shown in Figure 1-3, there are many implementations of transmission device 2 in the present embodiment, as long as realizing to pollutant component
1 transmitting, selectable, in the present embodiment, the transmission device 2 includes: at least one transport unit 21 and the biography
The transmission track 23 and driving mechanism 22 for sending portion 21 to cooperate.
Wherein, transport unit 21 is for transmitting the pollutant component 1；The transport unit 21 can be incited somebody to action along the transmission track 23
The pollutant component 1 is sent in the cleaning ontology 3；Driving mechanism 22 and the transport unit 21 or the transmission track
23 connections, for driving the transport unit 21 or the transmission track 23 to move.
Selectable, the transport unit 21 includes: turntable and rotating mechanism.Turntable is for loading the pollutant component 1；
Rotating mechanism 24 is connect with the turntable, for driving the turntable to rotate.
Wherein, motor all can be used in driving mechanism 22 and rotating mechanism 24, and turntable can be set up directly on transmission track 23,
It can also be arranged on transmission track 23 by trolley, trolley is equipped with traveling wheel, and power uses motor；It is arranged in moving trolley above-mentioned
Turntable.
Driving mechanism 22 can directly drive turntable and move along transmission track 23, can also connect with trolley, realize that driving is small
Vehicle is moved along transmission track 23, can also be connect with transmission track 23, is moved by driving transmission track 23, to realize band
Turn disk is mobile, according to actual needs flexible setting；When turntable is moved in cleaning ontology 3, turntable starts to rotate, on one side
Spray rotates on one side, improves cleaning effect, and turntable rotation speed is less than 100R/min；In addition, transmission uses chain type track certainly
Dynamic conveyer system, and there is corresponding PLC to carry out automatically controlling, it can avoid artificial work mistake problem and personnel safety problem.
Cleaning ontology 3 can generally accommodate pollutant component 1, and the pollutant component 1 that the transmission of transmission device 2 comes is hidden
Lid, so that cleaning process is implemented in a closed environment, avoids pollution.
As shown in Figure 1-3, selectable, the cleaning device 4 includes: the lifting that 3 top of cleaning ontology is arranged in
Device 41 and the spray head 42 being arranged on the elevating lever of the lifting device 41.The elevating lever can drive on the spray head 42
Lower movement, the spray head 42 are used to clean the inside of the pollutant component 1.
Selectable, the spray head 42 is spherical spray head 42, and the side of the spherical shape spray head 42 is provided with multiple spray orifices.
It is selectable, the cleaning device 4 further include: multiple nozzles 43 of 3 inside of cleaning ontology are set, it is described
Nozzle 43 is used to clean the outside of the pollutant component 1.
Wherein, the settable multiple groups of cleaning device 4, the spray head 42 and nozzle 43 of every group of cleaning device 4 can pass through spray pump 25
It controls respectively, to realize that different directions, different time etc. individually control；Cleaning solution generally uses high pressure water, avoids producing in waste liquid
Raw soda acid and respective acids alkali cpd, cause secondary pollution to increase respective handling difficulty；Lifting device 41 uses cylinder or hydraulic
Cylinder driving, with realize lifting move back and forth, spray head 42 by lifting device 41 drive the inside of pollutant component 1 up and down reciprocatingly
Movement, and spray orifice is respectively set in 42 side of spray head, it can be achieved that 1360 degree of pollutant component are cleaned without dead angle；Nozzle 43 is generally arranged
In cleaning 3 inner surface of ontology, the outside of the pollutant component 1 in cleaning ontology 3 is rinsed；Spray head 42 and nozzle 43
Quantity flexible setting is for a long time actually needed；After the scavenging period of setting arrives, spray water route is closed, and stops cleaning, dodge gate
33 automatically open, and transmission device 2 sends out pollutant component 1, manually take down.
On the basis of the above embodiments, cleaning equipment provided by the embodiment of the utility model further includes that grease is separated by filtration
Device 5, the grease filtering separation device 5 are connect with cleaning device 4, for accepting the waste liquid after cleaning the pollutant component 1,
And separation is filtered to the waste liquid.
The grease filtering separation device 5 may include the oil water separator being sequentially communicated with the cleaning body bottom portion
53, coarse filter 51 and fine filter.Coarse filter 51 may include drawer type strainer, and primary filtration falls bulky grain solid, then
The driving for passing through filter pump 52 after being filtered by fine filter flow to oil water separator 53 and carries out greasy dirt filtering, convenient
The removing of grease, to guarantee the cleanliness of cleaning solution.The fine filter can use the form of positive press filtration, and cylinder is using stainless
Steel material, filter bag type filter core.Filtered cleaning solution can enter clear water tanks from fine filter, subsequent to carry out cleaning workpiece again
With.The filter process of entire cleaning solution is as follows: cleaning ontology → cleaning sullage → coarse filter → foul water tank → oil water separator
→ filter pump → fine filter → clear water tanks → cleaning ontology.
As shown in figure 4, selectable, the grease filtering separation device 5 further include: successively with the oil water separator 53
Waste liquid tank 54, the precipitation tank 55 of connection, solid-liquid interrupter 56 is provided in the precipitation tank 55, and solid-liquid interrupter 56 is isolated
Liquid side connect with the cleaning device 4 by pipeline.
Selectable, the waste liquid tank 54 is connect by pipeline with the bottom of the precipitation tank 55, and the precipitation tank 55
Top sides be provided with liquid level warning device along the bottom edge for being lower than the waste liquid tank 54, along the precipitation tank 55, it is described solid
Liquid interrupter 56 includes the infundibulate separation net tipped upside down in precipitation tank 55.
Wherein, in the present embodiment, waste liquid tank 54 is higher than precipitation tank 55, and waste water utilization gravity principle may make to be directly discharged to
In specified precipitation tank 55, centre does not have to plus pump equal power device, saves cost, reduces leakage risk, and on precipitation tank 55
Portion installation mesh screen (infundibulate separation net) solid particle is filtered, by infundibulate separation net side, that is, the liquid being isolated into
Row extracts, and is delivered to cleaning device 4 and is recycled, avoids the pollution to environment；The then in addition individually processing of the solid of filtering；
Sensor sensing liquid level can be used in liquid level warning device, and can be alarmed by buzzing or light, prevents liquid level excessively high
And it overflows.
Selectable, the cleaning equipment further includes control cabinet 7, the control cabinet 7 respectively with the cleaning ontology 3, institute
State transmission device 2, the cleaning device 4, the grease filtering separation device 5 connection；PLC reality generally can be used in control cabinet 7
Show, touch screen operation, scram button is equipped at feeding, discharge；Box enclosure is greater than 1mm cold-reduced sheet using thickness, and plastic-spraying is handled；Temperature
Degree control uses digital readout temperature controller, automatically controls after artificial setting.
Pollutant component 1 is sent in cleaning ontology 3 by cleaning equipment provided by the utility model by transmission device 2,
The pollutant component 1 cleaned in ontology 3 by 4 Duis of cleaning device cleans, and accepts finally by grease filtering separation device 5
Waste liquid after cleaning pollutant component 1, and separation is filtered to waste liquid；Wherein, grease filtering separation device 5 carries out waste liquid
It is separated by solid-liquid separation, to the solid containing arsenic, phosphorus, solution is individually handled, and reduces environmental pollution；Moreover, the utility model is logical
It crosses transmission device 2 to automatically deliver the realization of pollutant component 1, and cleaning is realized in cleaning ontology 3 by cleaning device 4,
Prevent sputtering from causing personal injury and environmental pollution；In addition, the clear of pollutant component 1 can be directly realized by by the utility model
It washes, without being transferred to exterior washings company, substantially reduces cleaning frequency and cleaning cost.
As shown in Figure 1-3, selectable, the cleaning ontology 3 is enclosed construction, and is provided on the cleaning ontology 3
Visual windows 31 and on the cleaning ontology 3 be equipped with handle hole 32.Selectable, the cleaning ontology 3 is provided with can be automatic
The dodge gate 33 of opening and closing, setting is also provided with fog discharge blower 34 at the top of the cleaning ontology 3, so as in time will cleaning
The water mist of generation is discharged.
Wherein, cleaning 3 side of ontology be provided with can automatic shutter dodge gate 33, which generally passes through cylinder
Driving, and connect with control cabinet 7, comprehensively control is carried out, when before the mobile dodge gate 33 of pollutant component 1, dodge gate 33 is automatic
Opening makes pollutant component 1 enter cleaning ontology 3, is automatically closed again later, closed cleaning ontology 3 prevents liquid during rinsing
Rebound and splashing, protect the environment of staff and workspace；Fog discharge blower 34 for will the water mist that be generated in operation process and
When exhaust, can prevent from generating a large amount of water mists in operation process, not it is observed that actual operation；It is generally set at handle hole 32
The rubber gloves for setting sealing, when requiring manual intervention, operator is protruded into inside cleaning ontology 3 by rubber gloves and is grasped
Make.
As shown in Figure 1, selectable, the cleaning equipment further includes heating device 8, the heating device 8 with it is described clear
Cleaning device 4 contacts, for the cleaning solution heating to the cleaning device 4.
Wherein, to improve cleaning effect, so need to heat to cleaning solution, heating device 8 is generally using flange form electricity
Heating tube, temperature on cleaning device 4 by being arranged sensor feedback and carrying out flexible modulation.
The operating automation degree of the utility model field operation is higher, and personnel safety is protected, and treatment effeciency mentions
It is high.The structure, features, and effects of the present invention is described in detail based on the embodiments shown in the drawings, it is described above
The only preferred embodiment of the utility model, but the present invention does not limit the scope of implementation as shown in the drawings, it is all according to this reality
Change or equivalent example modified to equivalent change made by novel conception, are still contained without departing from specification and diagram
When the spirit of lid, it should be within the protection scope of the present utility model.
Claims (9)
1. a kind of for the cleaning equipment containing arsenic, phosphor contaminant component, the cleaning equipment include be arranged on the rack it is clear
Ontology and cleaning device are washed, the cleaning device is set in cleaning ontology,
It is characterized in that, the cleaning equipment further includes transmission device, the transmission device includes:
At least one transport unit, for transmitting the pollutant component；
With the transmission track of transport unit cooperation, the transport unit can be transmitted the pollutant component along the transmission track
In to the cleaning ontology；
Driving mechanism is connect with the transport unit or the transmission track, for driving the transport unit or the transmission track
Movement.
2. according to claim 1 be directed to the cleaning equipment containing arsenic, phosphor contaminant component, which is characterized in that the biography
The portion is sent to include:
Turntable, for loading the pollutant component；
Rotating mechanism is connect with the turntable, for driving the turntable to rotate.
3. according to claim 1 be directed to the cleaning equipment containing arsenic, phosphor contaminant component, which is characterized in that described clear
Cleaning device includes:
Lifting device above the cleaning ontology is set；
Spray head is provided on the elevating lever of the lifting device, the elevating lever can drive the spray head to move up and down, described
Spray head is used to clean the inside of the pollutant component.
4. according to claim 3 be directed to the cleaning equipment containing arsenic, phosphor contaminant component, which is characterized in that described clear
Cleaning device further include: multiple nozzles on the inside of the cleaning ontology are set, and the nozzle is for cleaning the pollutant component
Outside.
5. according to claim 1 be directed to the cleaning equipment containing arsenic, phosphor contaminant component, which is characterized in that described clear
Washing equipment further includes grease filtering separation device, and the grease filtering separation device is connect with cleaning device.
6. according to claim 5 be directed to the cleaning equipment containing arsenic, phosphor contaminant component, which is characterized in that the oil
Water filtering separation device includes oil water separator, coarse filter and the fine filter being sequentially communicated with the cleaning body bottom portion.
7. according to claim 1 be directed to the cleaning equipment containing arsenic, phosphor contaminant component, which is characterized in that described clear
Washing ontology is enclosed construction, and is provided with visual windows and handle hole on the cleaning ontology.
8. according to claim 5 be directed to the cleaning equipment containing arsenic, phosphor contaminant component, which is characterized in that described clear
It washes bodies top and is provided with fog discharge blower.
9. according to claim 5 be directed to the cleaning equipment containing arsenic, phosphor contaminant component, which is characterized in that described clear
Washing equipment further includes control cabinet, the control cabinet respectively with the cleaning ontology, the transmission device, the cleaning device, institute
State the connection of grease filtering separation device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821863895.1U CN209577527U (en) | 2018-11-13 | 2018-11-13 | It is a kind of for the cleaning equipment containing arsenic, phosphor contaminant component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821863895.1U CN209577527U (en) | 2018-11-13 | 2018-11-13 | It is a kind of for the cleaning equipment containing arsenic, phosphor contaminant component |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209577527U true CN209577527U (en) | 2019-11-05 |
Family
ID=68376635
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821863895.1U Active CN209577527U (en) | 2018-11-13 | 2018-11-13 | It is a kind of for the cleaning equipment containing arsenic, phosphor contaminant component |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209577527U (en) |
-
2018
- 2018-11-13 CN CN201821863895.1U patent/CN209577527U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20191121 Address after: 518112 Room 403, unit 2, building C, Dongfang Shengshi, Jinpai community, Buji street, Longgang District, Shenzhen City, Guangdong Province Patentee after: Shenzhen yongshenglong Technology Co., Ltd Address before: 102209, A129-1, Zhongxing Road, 10 Changping District science and Technology Park, Beijing Patentee before: Dongtai Hi-Tech Equipment Technology Co., Ltd. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210222 Address after: Unit 611, unit 3, 6 / F, building 1, yard 30, Yuzhi East Road, Changping District, Beijing 102208 Patentee after: Zishi Energy Co.,Ltd. Address before: Room 403, unit 2, building C, Dongfang Shengshi, Jinpai community, Buji street, Longgang District, Shenzhen, Guangdong 518112 Patentee before: Shenzhen yongshenglong Technology Co.,Ltd. |