CN209557213U - Air compressor machine controlgear is used in chip production - Google Patents

Air compressor machine controlgear is used in chip production Download PDF

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Publication number
CN209557213U
CN209557213U CN201920137135.0U CN201920137135U CN209557213U CN 209557213 U CN209557213 U CN 209557213U CN 201920137135 U CN201920137135 U CN 201920137135U CN 209557213 U CN209557213 U CN 209557213U
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China
Prior art keywords
pressure
air compressor
fuzzy
fuzzy controller
chip production
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Expired - Fee Related
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CN201920137135.0U
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Chinese (zh)
Inventor
崔超
林伟斌
匡晓云
杨祎巍
李舟
黄开天
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China South Power Grid International Co ltd
China Southern Power Grid Co Ltd
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China South Power Grid International Co ltd
China Southern Power Grid Co Ltd
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Priority to CN201920137135.0U priority Critical patent/CN209557213U/en
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Abstract

The application discloses air compressor machine controlgear is used in chip production includes: the sensing device is used for acquiring steady-state working condition data of the air compressor, the pressure of the air storage tank and the exhaust pressure; the fuzzy controller is connected with the sensing device, sets a fuzzy rule according to the steady-state working condition data, and outputs a variable frequency control signal obtained by fuzzy inference according to the input pressure and the exhaust pressure of the gas storage tank; the frequency conversion device is connected with the fuzzy controller and used for controlling the motor rotating speed of the air compressor according to the frequency conversion control signal so as to stabilize the pressure of the air storage tank; and the power supply device is used for supplying power to the sensing device, the fuzzy controller and the frequency conversion device. According to the method and the device, the fuzzy controller is utilized, the variable frequency control signal for carrying out variable frequency control on the rotating speed of the motor is output according to the pressure and the exhaust pressure of the air storage tank, the rotating speed and the exhaust pressure of the motor are guaranteed to accord with the fuzzy rule of the fuzzy controller, the pressure of the air storage tank is enabled to be more stable, the vertical fluctuation is avoided to be large, and the requirement for high-quality pneumatic production environment for chip production is met.

Description

A kind of chip production air compressor machine control equipment
Technical field
The utility model relates to field of intelligent control technology, in particular to a kind of chip production controls equipment with air compressor machine.
Background technique
Air compressor is the core equipment of pneumatic production system, drives compressor rotation will by motor or diesel engine Compressed air is stored in air accumulator and uses for production equipment, provides power for starting production equipment.Structure overhead air pressure contracting Machine is generally made of gas compressor and air accumulator two parts, and the gas pressure in air accumulator needs to keep stablizing, to guarantee to give birth to Produce the service life of safety and production equipment.
Currently, the air pressure adjustment of air accumulator generally uses the limit pressure regulation method up and down based on reservoir pressure, that is, set One air accumulator air pressure upper lower limit value, when the air pressure of air accumulator is higher than upper limit value, air compressor stops working, when air accumulator Air pressure is lower than lower limitation, air compressor restarting.This pressure regulation method will lead to air compressor pressure at expulsion and exist always Fluctuation, can not provide pressure stable high quality aerodynamic energy, can reduce the longevity of production equipment activation member in upper and lower limits Life can not be suitable for the higher pneumatic production process such as chip production of precision, start-up operation meeting is frequently shut down to air compressor Expend unnecessary power.
Therefore, how to provide a kind of scheme of solution above-mentioned technical problem is that current those skilled in the art need to solve Problem.
Utility model content
In view of this, the purpose of this utility model is to provide a kind of chip production air compressor machines to control equipment.It is specific Scheme is as follows:
A kind of chip production air compressor machine control equipment, comprising:
For obtaining the steady state condition data of air compressor, the sensing device of reservoir pressure and pressure at expulsion;
It is connect with the sensing device, according to the steady state condition data setting fuzzy rule, according to the storage of input Gas tank pressure and the pressure at expulsion, the fuzzy controller for the frequency change control signal that output fuzzy reasoning obtains;
It is connect with the fuzzy controller, for controlling the motor of the air compressor according to the frequency change control signal Revolving speed, to stablize the converter plant of the reservoir pressure;
Power supply device for powering for the sensing device, fuzzy controller and converter plant.
Preferably, the chip production controls equipment with air compressor machine further include:
For establishing the wireless of communication connection between the sensing device, the fuzzy controller, the converter plant Communication device.
Preferably, the power supply device specifically includes:
Access the reduction voltage circuit of power frequency AC;
The rectification circuit being connect with the voltage changing module;
The filter circuit being connect with the rectification module;
The voltage regulator circuit of direct current is connect, exported with the filter circuit.
Preferably, the sensing device includes:
For obtaining the first pressure sensor of the reservoir pressure;
For obtaining the second pressure sensor of the pressure at expulsion;
For obtaining the velocity sensor of the motor speed of the air compressor;
It is connect respectively with the first pressure sensor, the second pressure sensor, the velocity sensor, it will be described The pressure at expulsion that reservoir pressure corresponds to stable state in pre-set pressure range and the motor speed are as the stable state work The data storage device of condition data storage.
Preferably, the data storage device specifically includes:
It is connected respectively with the first pressure sensor, the second pressure sensor, the velocity sensor, stores institute State the memory of the initial data of reservoir pressure, the pressure at expulsion and the motor speed;
It is connect respectively with the memory, the fuzzy controller, to the initial data optimal screening, determines and export The processor of the steady working condition data.
Preferably, chip production air compressor machine control equipment further includes for the data storage device, described fuzzy The clock apparatus of controller offer timeticks.
Preferably, the fuzzy controller periodically receives the steady state condition data of the update processor, to update The fuzzy rule.
The utility model discloses a kind of chip production air compressor machines to control equipment, comprising: for obtaining air compressor Steady state condition data, reservoir pressure and pressure at expulsion sensing device;It is connect with the sensing device, according to the stable state Floor data sets fuzzy rule, according to the reservoir pressure of input and the pressure at expulsion, exports fuzzy reasoning and obtains Frequency change control signal fuzzy controller;It is connect with the fuzzy controller, for being controlled according to the frequency change control signal The motor speed of the air compressor, to stablize the converter plant of the reservoir pressure;For for the sensing device, mould The power supply device of fuzzy controllers and converter plant power supply.The utility model utilizes fuzzy controller, according to reservoir pressure and row Atmospheric pressure exports the frequency change control signal that frequency control is carried out to motor speed to air compressor, guarantees motor speed and exhaust Pressure meets the fuzzy rule of fuzzy controller, keeps reservoir pressure more stable, avoids the occurrence of and fluctuates larger situation up and down, The pneumatic production environment of high quality needed for meeting chip production.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only It is the embodiments of the present invention, for those of ordinary skill in the art, without creative efforts, also Other attached drawings can be obtained according to the attached drawing of offer.
Fig. 1 is a kind of structure distribution figure of chip production air compressor machine control equipment in the utility model embodiment;
Fig. 2 is the structure distribution figure that another chip production air compressor machine controls equipment in the utility model embodiment.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work Every other embodiment obtained, fall within the protection scope of the utility model.
The utility model embodiment discloses a kind of chip production air compressor machine control equipment, shown in Figure 1, comprising:
For obtaining the steady state condition data of air compressor, the sensing device 1 of reservoir pressure P1 and pressure at expulsion P2;
It is connect with the sensing device 1, according to the steady state condition data setting fuzzy rule, according to the storage of input The gas tank pressure P1 and pressure at expulsion P2, the fuzzy controller 2 for the frequency change control signal that output fuzzy reasoning obtains;
It is connect with the fuzzy controller 2, for controlling the electricity of the air compressor according to the frequency change control signal Machine revolving speed W, to stablize the converter plant 3 of the reservoir pressure P1;
Power supply device 4 for powering for the sensing device 1, fuzzy controller 2 and converter plant 3.
Wherein, fuzzy controller 2 is based on steady working condition data, using mining fuzzy association rules algorithms, to stable state Pressure at expulsion P2 and motor speed W in floor data are associated rule-based reasoning, are formed such asIF-THEN shape Formula correlation rule sentence, is finally constituted the fuzzy rule of fuzzy controller.
In specifically setting fuzzy rule, fuzzy controller 2 is performed the steps of
The pressure at expulsion P2 and the motor speed W of corresponding stable state are blurred respectively;
According to the corresponding relationship of pressure at expulsion P2 and motor speed W after blurring, level-one fuzzy rule base is constructed RULE1;
Merge identical rule in the level-one fuzzy rule base RULE1, obtains two pole fuzzy rule base RULE2;
The support s and confidence level c of each rule in the two pole fuzzy rule base RULE2 are calculated, retains to meet and preset The rule of support and default confidence level obtains three-level fuzzy rule base RULE3;
Judge in the three-level fuzzy rule base RULE3 between rule whether contradiction, if it is, calculating contradictory rule Interest-degree I, retain interest-degree it is highest rule and noncontradictory other rule, obtain level Four fuzzy rule base RULE4;
It is the fuzzy rule by the rule settings in the level Four fuzzy rule base RULE4.
Wherein, fuzzy set number is 5, and corresponding linguistic variable is being represented sequentially as NB (extremely low), NS (low), ZR (just Often), PS (height), PB (high).
Calculate the formula of support s and confidence level c are as follows:
In formula, s is the regular grid DEM;C is the confidence level of the rule;U (P2 ∪ W) is the degree of membership of the rule, etc. The product of the degree of membership u (W) of the degree of membership u (P2) and motor speed W of pressure at expulsion P2 when blurring;M is the rule Frequency of occurrence.
Wherein, the formula of interest-degree I is calculated specifically:
After setting fuzzy rule, fuzzy controller 2 is according to the reservoir pressure P1 of input and the exhaust pressure Power P2, the obtained frequency change control signal of output fuzzy reasoning, specifically, inside fuzzy controller 2 can first by pressure at expulsion P2 into Row blurring carries out fuzzy reasoning according to the corresponding fuzzy rule of reservoir pressure P1, the pressure at expulsion P2 after being blurred Corresponding frequency change control signal exports after carrying out anti fuzzy method to frequency change control signal.
Wherein, the present embodiment can be blurred pressure at expulsion P2 using Triangleshape grade of membership function, can also adopt The operation of blurring is realized with other subordinating degree functions;The present embodiment can use gravity model appoach, maximum membership degree method or weighting The method of average realizes the operation to frequency change control signal anti fuzzy method.
Wherein, converter plant 3 controls the motor speed W of air compressor according to frequency change control signal.Specifically, frequency conversion There are three interfaces for device 3, are the power input to connect with power frequency supply respectively, receive the signal control of frequency change control signal End, and the power output end to connect with the motor of air compressor.Converter plant 3 can be according to the received frequency conversion of signal control terminal Signal is controlled, the power frequency supply of input is converted into corresponding variable-frequency power sources and is exported to the motor of air compressor.
The utility model discloses a kind of chip production air compressor machines to control equipment, comprising: for obtaining air compressor Steady state condition data, reservoir pressure and pressure at expulsion sensing device;It is connect with the sensing device, according to the stable state Floor data sets fuzzy rule, according to the reservoir pressure of input and the pressure at expulsion, exports fuzzy reasoning and obtains Frequency change control signal fuzzy controller;It is connect with the fuzzy controller, for being controlled according to the frequency change control signal The motor speed of the air compressor, to stablize the converter plant of the reservoir pressure;For for the sensing device, mould The power supply device of fuzzy controllers and converter plant power supply.The utility model utilizes fuzzy controller, according to reservoir pressure and row Atmospheric pressure exports the frequency change control signal that frequency control is carried out to motor speed to air compressor, guarantees motor speed and exhaust Pressure meets the fuzzy rule of fuzzy controller, keeps reservoir pressure more stable, avoids the occurrence of and fluctuates larger situation up and down, The pneumatic production environment of high quality needed for meeting chip production.
The utility model embodiment discloses a kind of specific chip production air compressor machine control equipment, real relative to upper one Example is applied, the present embodiment has made further instruction and optimization to technical solution.
Shown in Figure 2, the chip production controls equipment with air compressor machine further include:
For establishing the nothing of communication connection between the sensing device 1, the fuzzy controller 2, the converter plant 3 Line communication device 5.
It is understood that realized since the signal between each device is transmitted through wireless communication apparatus 5, it is each The physical location of a device is no longer influenced by the restriction of communication line, and the chip production air compressor machine control equipment in the present embodiment can To be flexibly installed near pneumatic production system with split type structure.
Further, wireless communication apparatus 5 can also undertake a part of data packing, parsing and pretreated work, mention Arithmetic speed inside high two devices for needing to communicate.
Specifically, the power supply device 4 specifically includes:
Access the reduction voltage circuit 41 of power frequency AC;
41 rectification circuit 42 is connect with the voltage changing module;
42 filter circuit 43 is connect with the rectification module;
The voltage regulator circuit 44 of direct current is connect, exported with the filter circuit 43.
Specifically, the sensing device 1 includes:
For obtaining the first pressure sensor 11 of the reservoir pressure P1;
For obtaining the second pressure sensor 12 of the pressure at expulsion P2;
For obtaining the velocity sensor 13 of the motor speed W of the air compressor;
It is connect respectively with the first pressure sensor 11, the second pressure sensor 12, the velocity sensor 13, Using the reservoir pressure P1 corresponded in pre-set pressure range the pressure at expulsion P2 and the motor speed W of stable state as The data storage device 14 of the steady state condition data storage.
It is understood that first pressure sensor 11 is typically located at air compressor air storage tank surface, sensing is visited Head is goed deep into inside air accumulator by Special valve, acquires pressure data in air compressor air storage tank in real time;Second pressure sensing Device 12 is typically located on air compressor air storage tank outlet conduit, and sensing probe gos deep into air accumulator exhaust outlet by Special valve In pipeline, air compressor gas storage Guan County outlet data is acquired in real time;Velocity sensor 13 is specially tachometer generator, is arranged in At air compressor motor rotor, the motor speed W of air compressor is acquired in real time.
Preferably, the data storage device 14 specifically includes:
It is connected respectively with the first pressure sensor 11, the second pressure sensor 12, the velocity sensor 13, Store the memory of the initial data of the reservoir pressure P1, the pressure at expulsion P2 and the motor speed W;
It is connect respectively with the memory, the fuzzy controller 2, it is determining and defeated to the initial data optimal screening The processor of the steady working condition data out.
Specifically, processor is acquired initial data with certain acquisition interval, acquisition interval can be set as 5 minutes or Other durations.When carrying out data acquisition, storage is grouped to operation data with sampling instant, every group includes synchronization Reservoir pressure P1, pressure at expulsion P2 and motor speed W.
Further, history data set is constructed to historical data, it is main to use the classification schemes based on cluster centre, The data of 3 operation variables of acquisition are clustered one by one, calculate the cluster centre of each variable, are selected in every one kind and poly- Class center screens out the point apart from each other with cluster centre, reaches data cleansing and pretreated purpose, then at a distance of closer point Construct history data set.
Based on history data set, using the slip window sampling based on characteristic variable, with reservoir pressure P1 It is characterized variable to differentiate steady state condition data point, chooses reservoir pressure P1 and fluctuate lesser data group as stable state Floor data, building process are as follows:
The gas tank pressure value P 1 of air compressor is chosen as differentiation steady state characteristic variable;
In history data set, reservoir pressure value P1 is close to specified pressure under preliminary screening difference pressure at expulsion P2 Sample data when force value;
It chooses a width and is the data window of N, and window is slided n-N+1 times in selected sample data, Middle n is the number for the sample data chosen;
The mean value of data in each window after sliding every time is calculated using following formulaWith standard deviation sigma, it is big to reject standard deviation Data in the window of given threshold;
Data sample standard deviation being less than in the window of given threshold directly as steady state condition data and exports.
Other than data acquisition system above-mentioned, other processing can also be carried out to data, to advanced optimize stable state work Condition data can be realized using existing conventional means, herein and be not described in detail.
Further, chip production air compressor machine control equipment further includes for the data storage device 14, described The clock apparatus 6 of the offer timeticks of fuzzy controller 2.
It is understood that clock apparatus 6 can guarantee each device according to the unified normal work of clock rate synchronization Make.
Further, the fuzzy controller periodically receives the steady state condition data of the update processor, with more The new fuzzy rule.
It is understood that in view of in the actual moving process of air compressor, the mechanical knot of starting production system Changes will occur for structure, operating parameter and corresponding data, therefore the precision of voltage regulation in order to guarantee the present embodiment, needs according to air The actual motion feedback check and correction adjustment fuzzy controller of compressor, specifically, historical data when according to operation periodically obtains newly Steady state condition data, update fuzzy rule according to new steady state condition data, guarantee the fuzzy rule for applying fuzzy controller When, the expected precision of voltage regulation can be reached.
The foregoing description of the disclosed embodiments makes those skilled in the art can be realized or use the utility model. Various modifications to these embodiments will be apparent for a person skilled in the art, general original as defined herein Reason can be realized in other embodiments without departing from the spirit or scope of the present utility model.Therefore, this is practical new Type is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase Consistent widest scope.

Claims (7)

1. a kind of chip production controls equipment with air compressor machine characterized by comprising
For obtaining the steady state condition data of air compressor, the sensing device of reservoir pressure and pressure at expulsion;
It is connect with the sensing device, according to the steady state condition data setting fuzzy rule, according to the air accumulator of input Pressure and the pressure at expulsion, the fuzzy controller for the frequency change control signal that output fuzzy reasoning obtains;
It is connect with the fuzzy controller, the motor for controlling the air compressor according to the frequency change control signal turns Speed, to stablize the converter plant of the reservoir pressure;
Power supply device for powering for the sensing device, fuzzy controller and converter plant.
2. chip production controls equipment with air compressor machine according to claim 1, which is characterized in that further include:
For establishing the wireless telecommunications of communication connection between the sensing device, the fuzzy controller, the converter plant Device.
3. chip production controls equipment with air compressor machine according to claim 1, which is characterized in that the power supply device specifically wraps It includes:
Access the reduction voltage circuit of power frequency AC;
The rectification circuit being connect with the reduction voltage circuit;
The filter circuit being connect with the rectification circuit;
The voltage regulator circuit of direct current is connect, exported with the filter circuit.
4. chip production controls equipment with air compressor machine according to any one of the claim 1 to 3, which is characterized in that the sensing Device includes:
For obtaining the first pressure sensor of the reservoir pressure;
For obtaining the second pressure sensor of the pressure at expulsion;
For obtaining the velocity sensor of the motor speed of the air compressor;
It is connect respectively with the first pressure sensor, the second pressure sensor, the velocity sensor, by the gas storage The pressure at expulsion that pressure tank corresponds to stable state in pre-set pressure range and the motor speed are as the steady state condition number According to the data storage device of storage.
5. chip production controls equipment with air compressor machine according to claim 4, which is characterized in that the data storage device tool Body includes:
It is connected respectively with the first pressure sensor, the second pressure sensor, the velocity sensor, stores the storage The memory of the initial data of gas tank pressure, the pressure at expulsion and the motor speed;
It is connect respectively with the memory, the fuzzy controller, to the initial data optimal screening, determines and export described The processor of steady state condition data.
6. chip production controls equipment with air compressor machine according to claim 5, which is characterized in that further include being deposited for the data Storage device, the fuzzy controller provide the clock apparatus of timeticks.
7. chip production controls equipment with air compressor machine according to claim 6, which is characterized in that
The fuzzy controller periodically receives the steady state condition data of the update processor, to update the fuzzy rule Then.
CN201920137135.0U 2019-01-25 2019-01-25 Air compressor machine controlgear is used in chip production Expired - Fee Related CN209557213U (en)

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CN201920137135.0U CN209557213U (en) 2019-01-25 2019-01-25 Air compressor machine controlgear is used in chip production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201920137135.0U CN209557213U (en) 2019-01-25 2019-01-25 Air compressor machine controlgear is used in chip production

Publications (1)

Publication Number Publication Date
CN209557213U true CN209557213U (en) 2019-10-29

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Granted publication date: 20191029