CN209554770U - Filling adaptor, photoresist packaging material system - Google Patents

Abstract

The utility model discloses a kind of filling adaptors, photoresist packaging material system, belong to the filling field of photoresist.The filling adaptor includes: outer cover, joint body and the inlet tube being connected to respectively with the holding vessel tank mouth of photoresist packaging material, inner lining bag sack；Outer cover is connect with joint body, and is provided with multiple gas vents with the perforation of the holding vessel of photoresist packaging material；Fluid passage, gas passage are provided on joint body, the upper port of fluid passage is connect and penetrated through with photoresist supply pipe by the first flare type joint, and the inner lining bag of gas passage and photoresist packaging material penetrates through；The upper port of inlet tube is connected and is connected by the lower port of the second flare type joint and fluid passage, and lower port stretches in the inner lining bag of photoresist packaging material.The utility model both not only can avoid during photoresist filling to inner lining bag, and the dust in atmosphere enters in inner lining bag, and the gas that also can avoid in inner lining bag is expelled in atmosphere；And have the characteristics that easy to operate, labor intensity and activity duration can be reduced.

Description

Filling adaptor, photoresist packaging material system

Technical field

The utility model relates to the filling field of photoresist, in particular to a kind of filling adaptor, photoresist packaging material system.

Background technique

Photoresist as a kind of light-sensitive material, be usually applied in microelectronics manufacturing industry with realize fine-line and figure plus Work.In order to avoid photoresist is using prior exposure, it is carried out every light processing using photoresist packaging material generally in storage and transport.Its In, photoresist packaging material includes: holding vessel and the inner lining bag that is arranged in holding vessel；Inner lining bag sack is connect with holding vessel tank mouth, And the gas vent with holding vessel perforation is provided on inner lining bag sack.

Currently, first blowing into inner lining bag in the filling photoresist into photoresist packaging material, until inner lining bag and storage top tank structure It fits closely, and the gas between inner lining bag and holding vessel passes through the gas vent discharge on inner lining bag sack simultaneously.Later, by light Resistance supply pipe is inserted into inner lining bag by holding vessel tank mouth, and it is filling to carry out photoresist, and the gas in inner lining bag is supplied from photoresist simultaneously To the gap discharge between pipe and holding vessel tank mouth.

The existing technology has at least the following problems for designer's discovery:

Due to having gap between photoresist supply pipe and holding vessel tank mouth, the dust in atmosphere is not only made to enter inner lining bag In, the cleanliness of photoresist in inner lining bag can be impacted, will cause scrapping for photoresist when serious；And make to inner lining bag During injecting photoresist, the gas in inner lining bag can be emitted into atmosphere, pollute environment.

Utility model content

The utility model embodiment provides a kind of filling adaptor, photoresist packaging material system, can solve the above problem.It is described Technical solution is as follows:

On the one hand, a kind of filling adaptor is provided, the filling adaptor includes: the holding vessel tank with photoresist packaging material respectively Outer cover, joint body and the inlet tube that mouth, inner lining bag sack are detachably connected and penetrate through；

The outer cover is connect with the joint body, and is provided with multiple rows with the perforation of the holding vessel of the photoresist packaging material Stomata；

Fluid passage, gas passage are provided on the joint body, the upper port of the fluid passage expands by first Mouth connector connect and penetrates through with photoresist supply pipe, and the inner lining bag of the gas passage and the photoresist packaging material penetrates through；

The upper port of the inlet tube is connect and is connected with the lower port of the fluid passage by the second flare type joint, under Port stretches in the inner lining bag of the photoresist packaging material.

In a kind of possible design method, the joint body includes: the cylindrical body connecting with the outer cover, Yi Jifen Upper cylinder boss, the lower cylinder boss of the cylindrical body upper and lower end are not set；

The cylindrical body, the upper cylinder boss and the lower cylinder boss are respectively arranged with the first liquid along axial direction and lead to Road, second liquid channel, third fluid passage, first fluid passage, the second liquid channel and the third liquid Channel cooperation constitutes the fluid passage；

The lower end of the cylindrical body stretches in the outer cover and connect with the inner lining bag sack, and the gas passage is set It sets on the cylindrical body；

The upper cylinder boss is connect and is penetrated through with the photoresist supply pipe by first flare type joint；

The lower cylinder boss is detachably connected and is passed through by the upper port of second flare type joint and the inlet tube It is logical.

In a kind of possible design method, mounting groove is provided on the outer wall of the cylindrical body；

The filling adaptor further include: the circlip on the mounting groove, top of the circlip also with the outer cover are set Wall offsets.

In a kind of possible design method, the stem of the circlip and tail portion are detachably connected by fastener.

In a kind of possible design method, positive stop lug boss is additionally provided on the outer wall of the cylindrical body；

The outer cover is from top to bottom sequentially arranged first through hole, the second through-hole, third through-hole that aperture is gradually increased；

The roof of second through-hole offsets with the positive stop lug boss；

The inner wall of the third through-hole is threadedly coupled with the holding vessel tank mouth.

In a kind of possible design method, sealing is provided between the lower end of the cylindrical body and the inner lining bag sack Part.

In a kind of possible design method, it is provided with what aperture from top to bottom was gradually increased on first flare type joint Fourth hole, fifth hole；

The lower end of the fifth hole is connect with the lower thread of the upper cylinder boss；

The upper end of the upper cylinder boss is set in the flared end of the photoresist supply pipe, and makes the photoresist supply pipe Flared end and the roof of the fifth hole offset.

In a kind of possible design method, the lower end outer wall of first flare type joint is circumferentially arranged multiple first Screw convex block.

In a kind of possible design method, second flare type joint is from top to bottom disposed with aperture and gradually decreases The 6th through-hole, the 7th through-hole；

The upper end of 6th through-hole is connect with the threaded upper ends of the lower cylinder boss；

The lower end of the lower cylinder boss is set in the flared end of the inlet tube, and makes the flared end of the inlet tube It offsets with the bottom wall of the 6th through-hole.

It is circumferentially arranged on the outer wall of second flare type joint to have multiple second rotations in a kind of possible design method Twist convex block.

In a kind of possible design method, the lower port of the inlet tube stretches to the bottom of the inner lining bag.

In a kind of possible design method, drain through-hole and described is provided in the bottom side of the wall of the inlet tube The lower port of inlet tube is provided with drain through slot.

On the other hand, a kind of photoresist packaging material system is provided, the photoresist packaging material system includes: holding vessel, inner lining bag, with And filling adaptor described in any of the above embodiments；

The inner lining bag is set in the holding vessel；

The tank mouth of the outer cover of the filling adaptor and the holding vessel is detachably connected and is connected；

The joint body upper end of the filling adaptor is connect and is penetrated through with photoresist supply pipe by the first flare type joint, lower end It is detachably connected and is connected with the sack of the inner lining bag；

The upper port of the inlet tube of the filling adaptor is connect by the second flare type joint with the joint body, lower port It stretches in the inner lining bag.

Technical solution bring beneficial effect provided by the embodiment of the utility model is at least are as follows:

The filling adaptor of photoresist packaging material provided by the embodiment of the utility model passes through the gas vent and joint body covered outside On fluid passage, gas passage cooperation so that in the inner lining bag air blowing process to photoresist packaging material, inner lining bag and holding vessel Between gas can the gas vent discharge through covering outside, and during photoresist filling to inner lining bag, photoresist is through joint body On fluid passage flow into inner lining bag, and the gas in inner lining bag can be discharged through the gas passage on joint body simultaneously, It is collected, is can avoid in this way during photoresist filling to inner lining bag, the dust in atmosphere enters in inner lining bag, in turn It can avoid impacting the cleanliness of photoresist in inner lining bag, the gas that also can avoid in inner lining bag is expelled in atmosphere, in turn It can reduce and external environment is polluted.

In addition, filling adaptor provided by the embodiment of the utility model has the characteristics that easy to operate, labor intensity can be reduced And the activity duration.

Detailed description of the invention

It, below will be to required in embodiment description in order to illustrate more clearly of the technical scheme in the embodiment of the utility model Attached drawing to be used is briefly described, it should be apparent that, the accompanying drawings in the following description is only some realities of the utility model Example is applied, it for those of ordinary skill in the art, without creative efforts, can also be according to these attached drawings Obtain other attached drawings.

Fig. 1, Fig. 2 are the schematic diagrames of filling adaptor provided by the embodiment of the utility model；

Fig. 3 is the diagrammatic cross-section of filling adaptor provided by the embodiment of the utility model；

Fig. 4 is the structural schematic diagram of outer cover provided by the embodiment of the utility model；

Fig. 5 is the diagrammatic cross-section of joint body provided by the embodiment of the utility model；

Fig. 6 is the connection of joint body provided by the embodiment of the utility model and the first flare type joint, the second flare type joint Schematic diagram；

Fig. 7 is the structural schematic diagram of circlip provided by the embodiment of the utility model；

Fig. 8 is the diagrammatic cross-section of outer cover provided by the embodiment of the utility model；

Fig. 9 is the structural schematic diagram of inlet tube provided by the embodiment of the utility model；

Figure 10 is partial enlargement diagram of the Fig. 3 provided by the embodiment of the utility model at A；

Figure 11 is partial enlargement diagram of the Fig. 3 provided by the embodiment of the utility model at B.

Wherein, each label declaration in attached drawing is as follows:

1- outer cover；

1a- gas vent；

1b- first through hole；

The second through-hole of 1c-；

1d- third through-hole；

2- joint body；

21- cylindrical body；

21a- mounting groove；

211- positive stop lug boss；

The upper cylinder boss of 22-；

Cylinder boss under 23-；

24- sealing element；

2a- fluid passage；

2b- gas passage；

3- inlet tube；

3a- drain through-hole；

3b- drain through slot；

The first flare type joint of 4-；

4a- fourth hole；

4b- fifth hole；

41- first screws convex block；

The second flare type joint of 5-；

The 6th through-hole of 5a-；

The 7th through-hole of 5b-；

51- second screws convex block；

6- circlip；

61- fastener；

M- photoresist supply pipe.

Specific embodiment

It is practical new to this below in conjunction with attached drawing to keep the purpose of this utility model, technical solution and advantage clearer Type embodiment is described in further detail.

On the one hand, the utility model embodiment provides a kind of filling adaptor, and as shown in attached drawing 1, attached drawing 2, this is filling to be connect Head includes: the outer cover 1 for being detachably connected and penetrating through with the holding vessel tank mouth of photoresist packaging material, and the inner lining bag sack with photoresist packaging material can Dismantling connection and the joint body 2 and inlet tube 3 penetrated through.Further, outer cover 1 is connect with joint body 2, is set on outer cover 1 It is equipped with multiple gas vent 1a with the perforation of the holding vessel of photoresist packaging material；Fluid passage 2a, gas passage are provided on joint body 2 The upper port of 2b (referring to attached drawing 3), fluid passage 2a are connect and are penetrated through, gas with photoresist supply pipe M by the first flare type joint 4 The inner lining bag of channel 2b and photoresist packaging material penetrates through；The upper port of inlet tube 3 passes through under the second flare type joint 5 and fluid passage 2a Port connection, the lower port of inlet tube 3 stretch in the inner lining bag of photoresist packaging material.

It should be noted that the inner lining bag sack of photoresist packaging material, which such as is generally connected through a screw thread at the modes, is arranged in photoresist packaging material Holding vessel tank mouth in, and the gas vent being connected to holding vessel is provided on inner lining bag sack.

The working principle with regard to the filling adaptor of photoresist packaging material provided by the embodiment of the utility model, which is given, below describes:

In application, first connect filling adaptor with photoresist packaging material, photoresist supply pipe M respectively, specifically: by filling adaptor The holding vessel tank mouth of outer cover 1 and photoresist packaging material is connected to (connect and be connected), and by the joint body 2 of filling adaptor respectively with The inner lining bag sack of photoresist packaging material, photoresist supply pipe M connection, and the lower port of inlet tube 3 is made to stretch to photoresist packaging material simultaneously In inner lining bag.

When the filling photoresist into photoresist packaging material, the gas passage 2b first passed through on joint body 2 blows into inner lining bag, Until inner lining bag fits closely with holding vessel tank skin, and simultaneously the gas between inner lining bag and holding vessel tank skin successively through inner lining bag Gas vent 1a discharge on gas vent, outer cover 1 on sack.

After to the end of blowing to inner lining bag, using photoresist supply pipe M by photoresist followed by the liquid on joint body 2 Channel 2a, inlet tube 3 flow into inner lining bag.And the gas in inner lining bag can be successively through the exhaust on inner lining bag sack simultaneously Hole, gas passage 2b discharge, are collected.

After to the end of to the filling photoresist of inner lining bag, filling adaptor is disassembled from photoresist packaging material, i.e., is connect filling The outer cover 1 of head is disassembled from the holding vessel tank mouth of photoresist packaging material and joint body 2 is from the inner lining bag sack of photoresist packaging material On disassemble, and holding vessel tank mouth is sealed.

As it can be seen that filling adaptor provided by the embodiment of the utility model, passes through the gas vent 1a and joint body 2 on outer cover 1 On fluid passage 2a, gas passage 2b cooperation so that in the inner lining bag air blowing process to photoresist packaging material, inner lining bag and storage Depositing the gas between tank can be discharged through the gas vent 1a on outer cover 1, and during photoresist filling to inner lining bag, photoresist is through connecing Fluid passage 2a on head ontology 2 is flowed into inner lining bag, and the gas in inner lining bag can be through the gas on joint body 2 simultaneously Channel 2b discharge, is collected, and is can avoid within during photoresist filling to inner lining bag, the dust in atmosphere enters in this way It serves as a contrast in bag, and then can avoid impacting the cleanliness of photoresist in inner lining bag, the gas that also can avoid in inner lining bag is expelled to In atmosphere, and then it can reduce and external environment is polluted.

In addition, filling adaptor provided by the embodiment of the utility model has the characteristics that easy to operate, labor intensity can be reduced And the activity duration.

As described above, multiple gas vent 1a are provided on outer cover 1, so that when blowing to inner lining bag, inner lining bag and storage Gas discharge between tank tank skin.Wherein, above-mentioned multiple gas vent 1a can be uniformly distributed along the circumferential direction of outer cover 1 (referring to attached drawing 1, Fig. 4), it is discharged conducive to the gas between inner lining bag and holding vessel tank skin.

About the setting number of gas vent 1a, it may be configured as 8~10, such as settable 8,9,10 etc..This Utility model embodiment does not carry out concrete restriction to the setting number of gas vent 1a, as long as can guarantee inner lining bag and holding vessel tank skin Between gas be effectively discharged.

About the structure of joint body 2, the utility model embodiment provides a kind of example, as shown in Fig. 5, joint body 2 include: cylindrical body 21, and is separately positioned on the upper cylinder boss 22 of 21 upper and lower end of cylindrical body, lower cylinder boss 23；Cylinder Body 21, upper cylinder boss 22 and lower cylinder boss 23 are respectively arranged with the first fluid passage, second liquid channel, along axial direction Three fluid passages, the first fluid passage, second liquid channel and the cooperation of third fluid passage constitute fluid passage 2a；Cylindrical body 21 Lower end stretch in outer cover 1 and connect with inner lining bag sack, and gas passage 2b setting is on cylindrical body 21；Upper cylinder boss 22 It connect and penetrates through with photoresist supply pipe M by the first flare type joint 4；Lower cylinder boss 23 passes through the second flare type joint 5 and feed liquor The upper port of pipe 3 is connected and is penetrated through.

It is understood that being provided with the first fluid passage on cylindrical body 21, the second liquid is provided on upper cylinder boss 22 Body channel is provided with third fluid passage, and second liquid channel, the first fluid passage, third liquid on lower cylinder boss 23 Channel is from top to bottom sequentially connected to, to form fluid passage 2a.

By being as above arranged, under the premise of realizing that joint body 2 is connect with photoresist supply pipe M, inner lining bag sack, can subtract The size of small joint body 2, conducive to the installation and removal of joint body 2.

Wherein, cylindrical body 21, upper cylinder boss 22 and lower cylinder boss 23 can integrated molding, to improve between this three Bonding strength.

In addition, the structure about gas passage 2b, the utility model embodiment provides a kind of example, as shown in Fig. 3, should Gas passage 2b includes: the horizontal gas channel to connect, vertical gas passage.It is understood that horizontal gas channel Port is the upper port of gas passage 2b, and the port of vertical gas passage is the lower port of gas passage 2b, is used for and inner lining bag Sack connection.

In the joint body 2 based on above structure, for the ease of the installation and replacement of joint body 2, the utility model is just Connection type between joint body 2 and inner lining bag sack provides a kind of example, as shown in Fig. 6, on the outer wall of cylindrical body 21 It is provided with mounting groove 21a；Filling adaptor further include: the circlip 6 on mounting groove 21a, roof of the circlip 6 also with outer cover 1 are set It offsets (referring to attached drawing 3).

Wherein, in order to avoid the fixation that circlip 6 deformed and be unfavorable for joint body 2, in the utility model embodiment, As shown in Fig. 7, the stem of circlip 6 is detachably connected with tail portion by fastener 61.

Above-mentioned fastener 61 can be bolt, such fastener 61 is convenient for obtaining, and cheap.

As described above, joint body 2 takes circlip 6 to connect with inner lining bag sack, then first will when assembling filling adaptor Inlet tube 3 is connect by the second flare type joint 5 with the lower cylinder boss 23 of joint body 2, and the upper cylinder of joint body 2 is convex Platform 22 from top to bottom passes through outer cover 1 and exposes to the outside of outer cover 1.Then mounting groove 21a circlip 6 being placed on cylindrical body 21 It is interior, and circlip 6 and the roof of outer cover 1 is made to offset, later using fastener 61 (such as bolt) by the stem of circlip 6, tail portion into Row connection.Finally, the upper cylinder boss 22 of joint body 2 is connect by the first flare type joint 4 with photoresist supply pipe M again.

For the ease of installing the circlip 6 connecting with inner lining bag sack, the utility model on the cylindrical body 21 of joint body 2 In embodiment, as shown in attached drawing 3, attached drawing 6, positive stop lug boss 211 is additionally provided on the outer wall of cylindrical body 21；Outer cover 1 is from top to bottom It is sequentially arranged first through hole 1b, the second through-hole 1c, third through-hole 1d that aperture is gradually increased (referring to attached drawing 8)；Second through-hole The roof of 1c offsets with positive stop lug boss 211；The inner wall of third through-hole 1d is threadedly coupled with holding vessel tank mouth.

It is understood that be provided with screw thread on the outer wall of holding vessel tank mouth, be provided on the inner wall of third through-hole 1d with The compatible screw thread of the screw thread of holding vessel tank mouth.

As it can be seen that may make when installing circlip 6, limit convex by the way that positive stop lug boss 211 is arranged on the outer wall of cylindrical body 21 Platform 211 and the roof of the second through-hole 1c offset, conducive to the installation of circlip 6；In addition, passing through inner wall in third through-hole 1d and storage Tank tank mouth is threadedly coupled, conducive to the installation and removal of outer cover 1.

Wherein, positive stop lug boss 211 can with 21 integrated molding of cylindrical body, with improve positive stop lug boss 211 and cylindrical body 21 it Between bonding strength.

In addition, screwing for the ease of outer cover 1, the outer wall of outer cover 1 is circumferentially arranged have multiple thirds screw convex block (referring to Attached drawing 4).Wherein, third screws convex block and can be also convenient for improving both conducive to the production of outer cover 1, processing with 1 integrated molding of outer cover Third screws the bonding strength between convex block and outer cover 1.

The lower end of above-mentioned cylindrical body 21 can be caught in inner lining bag sack, be fixed in inner lining bag sack convenient for cylindrical body 21 Or extracted from inner lining bag sack, operating time and operation intensity can be saved.

In order to avoid the dust in external environment is by between gas vent 1a, cylindrical body 21 and the inner lining bag sack on outer cover 1 Gap enter in inner lining bag, and photoresist in inner lining bag is avoided to be flowed by the gap between cylindrical body 21 and inner lining bag sack Corrode outer cover 1 out, in this regard, being provided between the lower end and inner lining bag sack of cylindrical body 21 close in the utility model embodiment Sealing 24 (referring to attached drawing 3 and attached drawing 6).

Wherein, sealing element 24 can be prepared by PTFE (Poly Tetra Fluoroethylene, polytetrafluoroethylene (PTFE)) and be obtained It takes, such sealing element 24 has the characteristics that anticorrosion.

About the setting position of sealing element 24, sealing element 24 can be arranged on the outer wall of cylindrical body 21 or inner lining bag bag On the inner wall of mouth.The characteristics of based on by being arranged on the outer wall of cylindrical body 21 on sealing element 24, being conveniently replaceable sealing element 24, this reality It is preferentially used with new embodiment.Specifically, the holding tank for accommodating sealing element 24 can be set on the outer wall of cylindrical body 21.

Above-mentioned sealing element 24 can be bonded in the holding tank on 21 outer wall of cylindrical body, to avoid falling off for sealing element 24.

The side that the utility model embodiment realizes photoresist supply pipe M and joint body 2 with regard to how to pass through the first flare type joint 4 Formula provides a kind of example, as shown in Fig. 10, the four-way that aperture from top to bottom is gradually increased is provided on the first flare type joint 4 Hole 4a, fifth hole 4b；The lower end of fifth hole 4b is connect with the lower thread of upper cylinder boss 22；Upper cylinder boss 22 it is upper End cap is located in the flared end of photoresist supply pipe M, and the flared end of photoresist supply pipe M and the roof of fifth hole 4b is made to offset.

By being as above arranged, both it is convenient for the installation and replacement of the first flare type joint 4, is also supplied conducive to the photoresist of hose materials Pipe M is fixed on the first flare type joint 4.

The installation process of photoresist supply pipe M is described below: the lower port of photoresist supply pipe M being first inserted into first In the fifth hole 4b of flare type joint 4, and the lower port of photoresist supply pipe M is expanded using flaring tool, to form photoresist confession To the flared end of pipe M.Then, the first flare type joint 4 is sleeved on to the outside of upper cylinder boss 22, and is made under fifth hole 4b End is connect with the lower thread of upper cylinder boss 22, and the flared end of photoresist supply pipe M is sleeved on upper cylinder boss 22 simultaneously Upper end.Again since the flared end of photoresist supply pipe M and the roof of fifth hole 4b offset, and then it can make photoresist supply pipe M's Flared end is securely disposed at the outside of cylinder boss 22.

It is understood that screw thread is provided on the lower end outer wall of upper cylinder boss 22, four-way in the first flare type joint 4 Screw thread compatible with the screw thread of upper 22 outer wall of cylinder boss is provided on the inner wall of the hole lower end 4a.

The first flare type joint 4 is rotated in order to be conducive to operator, the lower end outer wall of the first flare type joint 4 is circumferentially arranged to be had Multiple first screw convex block 41 (referring to attached drawing 6).By so set, when can reduce the installation and removal of the first flare type joint 4 Between.

Wherein, it first screws convex block 41 and can screw convex block 41 with 4 integrated molding of the first flare type joint conducive to raising first With the bonding strength of the first flare type joint 4.

In addition, the setting number for screwing convex block 41 about first, can be uniformly arranged 8 along the circumferential direction of the first flare type joint 4 ~10, such as 8,9,10 etc..The setting number that the utility model embodiment does not screw convex block 41 to first has Body limitation, as long as the first flare type joint 4 can be screwed effectively.

How the utility model embodiment is with regard to give in such a way that the second flare type joint 5 realizes inlet tube 3 and joint body 2 A kind of example out, the second flare type joint 5 are from top to bottom disposed with the 6th through-hole 5a, the 7th through-hole that aperture gradually decreases 5b；The upper end of 6th through-hole 5a is connect with the threaded upper ends of lower cylinder boss 23；The lower end of lower cylinder boss 23 is set in feed liquor In the flared end of pipe 3, and the flared end of inlet tube 3 and the bottom wall of the 6th through-hole 5a is made to offset (referring to attached drawing 11).

By being as above arranged, both it is convenient for the installation and replacement of the second flare type joint 5, is also conducive to the inlet tube 3 of hose materials It is fixed on the second flare type joint 5.

The installation process of inlet tube 3 is described below: the upper port of inlet tube 3 being first inserted into the second flare type joint In 5 the 6th through-hole 5a, and the upper port of inlet tube 3 is expanded using flaring tool, to form the flared end of inlet tube 3.So Afterwards, the second flare type joint 5 is sleeved on to the outside of lower cylinder boss 23, and makes the upper end of the 6th through-hole 5a and lower cylinder boss 23 Threaded upper ends connection, and the flared end of inlet tube 3 is sleeved on to the lower end of lower cylinder boss 22 simultaneously.Again due to inlet tube 3 Flared end and the bottom wall of the 6th through-hole 5a offset, and then the flared end of inlet tube 3 can be made to be securely disposed at lower cylinder boss 23 outside.

It is understood that being provided with screw thread on the upper end outer wall of lower cylinder boss 23, the 6th is logical in the second flare type joint 5 Screw thread compatible with the screw thread of lower 23 outer wall of cylinder boss is provided on the inner wall of the hole upper end 5a.

The second flare type joint 5 is rotated in order to be conducive to operator, the lower end outer wall of the second flare type joint 5 is circumferentially arranged to be had Multiple second screw convex block 51 (referring to attached drawing 6).By so set, when can reduce the installation and removal of the second flare type joint 5 Between.

Wherein, it second screws convex block 51 and can screw convex block 51 with 5 integrated molding of the second flare type joint conducive to raising second With the bonding strength of the second flare type joint 5.

In addition, the setting number for screwing convex block 51 about second, can be uniformly arranged 8 along the circumferential direction of the second flare type joint 5 ~10, such as 8,9,10 etc..The setting number that the utility model embodiment does not screw convex block 51 to second has Body limitation, as long as the second flare type joint 5 can be screwed effectively.

In order to avoid during photoresist filling to inner lining bag, the photoresist in inner lining bag generates a large amount of bubbles and influences photoresist Quality, in the utility model embodiment, the lower port of inlet tube 3 stretches to the bottom of inner lining bag.

In order to avoid the lower port of inlet tube 3 is contacted with inner lining bag and it is unfavorable for photoresist and inner lining bag is flowed by inlet tube 3 In, in the utility model embodiment, as shown in Fig. 9, drain through-hole 3a, Yi Jijin are provided in the bottom side of the wall of inlet tube 3 The lower port of liquid pipe 3 is provided with drain through slot 3b.

It is understood that above-mentioned drain through-hole 3a, drain through slot 3b are penetrated through with the inner cavity of inlet tube 3, so that feed liquor Photoresist in pipe 3 can drain through-hole 3a, drain through slot 3b through inlet tube 3 flow into inner lining bag.

About the setting number of above-mentioned drain through-hole 3a, drain through slot 3b, 1~3, such as settable 1 can be respectively provided with A, 2,3.The utility model embodiment does not carry out concrete restriction to the setting number of drain through-hole 3a, drain through slot 3b, only It can guarantee that the photoresist in inlet tube 3 can be flowed into smoothly in inner lining bag.

In addition, above-mentioned drain through-hole 3a can be set to round hole or strip-shaped hole, above-mentioned drain through slot 3b, which can be set into, to be opened Arc groove of the mouth towards the setting of inner lining bag bottom.

In the utility model embodiment, outer cover 1, joint body 2 and the inlet tube 3 of filling adaptor can pass through PTFE, PVDF (Polyvinylidene Fluoride, polyvinylidene fluoride), PFA (Polyfluoroalkoxy, tetrafluoroethene-perfluor alkane Ethoxy ethylene base ether copolymer) etc. solvent resistants, acid and alkali-resistance material preparation obtain.

In addition, the photoresist packaging material in the utility model embodiment can be the photoresist of 200L with storage volume.

On the other hand, the utility model embodiment additionally provides a kind of photoresist packaging material system, which includes: Holding vessel, inner lining bag and filling adaptor described in any of the above embodiments；Inner lining bag is set in holding vessel；Outside filling adaptor The tank mouth of lid 1 and holding vessel is detachably connected and is connected；The joint body 2 of filling adaptor passes through the first flare type joint 4 and photoresist Supply pipe M is connected and is penetrated through, and the sack of lower end and inner lining bag is detachably connected and is connected；The upper end of the inlet tube 3 of filling adaptor Mouth is connect by the second flare type joint 5 with joint body 2, and lower port stretches in the inner lining bag of photoresist packaging material.

Photoresist packaging material system provided by the embodiment of the utility model, integrates and blows bag, liquid filling and exhaust, can avoid in this way During photoresist filling to inner lining bag, the dust in atmosphere enters in inner lining bag, and then can avoid to light in inner lining bag The cleanliness of resistance impacts, and the gas that also can avoid in inner lining bag is expelled in atmosphere, and then can be reduced and be made to external environment At pollution.In addition, photoresist packaging material system provided by the embodiment of the utility model has the characteristics that easy to operate, it is strong that labour can be reduced Degree and activity duration.

All the above alternatives can form the alternative embodiment of the disclosure, herein no longer using any combination It repeats one by one.

The foregoing is merely the illustrative embodiments of the utility model, the protection model that is not intended to limit the utility model It encloses, within the spirit and principle of the utility model, any modification, equivalent replacement, improvement and so on should be included in this Within the protection scope of utility model.

Claims (13)

1. a kind of filling adaptor, which is characterized in that the filling adaptor include: respectively with the holding vessel tank mouth of photoresist packaging material, interior Outer cover (1), joint body (2) and the inlet tube (3) that lining bag sack is detachably connected and penetrates through；

The outer cover (1) connect with the joint body (2), and is provided with multiple with the perforation of the holding vessel of the photoresist packaging material Gas vent (1a)；

Fluid passage (2a), gas passage (2b), the upper port of the fluid passage (2a) are provided on the joint body (2) It connect and penetrates through with photoresist supply pipe (M) by the first flare type joint (4), the gas passage (2b) and the photoresist packaging material Inner lining bag perforation；

The upper port of the inlet tube (3) is connect simultaneously by the second flare type joint (5) with the lower port of the fluid passage (2a) Conducting, lower port stretch in the inner lining bag of the photoresist packaging material.

2. filling adaptor according to claim 1, which is characterized in that the joint body (2) includes: and the outer cover (1) cylindrical body (21) connected, and it is separately positioned on the upper cylinder boss (22), lower circle of the cylindrical body (21) upper and lower end Column boss (23)；

The cylindrical body (21), the upper cylinder boss (22) and the lower cylinder boss (23) are respectively arranged with along axial direction One fluid passage, second liquid channel, third fluid passage, first fluid passage, the second liquid channel with it is described The cooperation of third fluid passage constitutes the fluid passage (2a)；

The lower end of the cylindrical body (21) stretches in the outer cover (1) and connect with the inner lining bag sack, and the gas is logical Road (2b) is arranged on the cylindrical body (21)；

The upper cylinder boss (22) is connect and is penetrated through with the photoresist supply pipe (M) by first flare type joint (4)；

The lower cylinder boss (23) is connect and is passed through with the upper port of the inlet tube (3) by second flare type joint (5) It is logical.

3. filling adaptor according to claim 2, which is characterized in that be provided with installation on the outer wall of the cylindrical body (21) Slot (21a)；

The filling adaptor further include: circlip (6) on the mounting groove (21a) is set, the circlip (6) also with it is described outer The roof of lid (1) offsets.

4. filling adaptor according to claim 3, which is characterized in that the stem of the circlip (6) and tail portion pass through fastening Part (61) is detachably connected.

5. filling adaptor according to claim 3, which is characterized in that also set up on the outer wall of the cylindrical body (21) limited Position boss (211)；

The outer cover (1) is from top to bottom sequentially arranged first through hole (1b), the second through-hole (1c), third that aperture is gradually increased Through-hole (1d)；

The roof of second through-hole (1c) offsets with the positive stop lug boss (211)；

The inner wall of the third through-hole (1d) is threadedly coupled with the holding vessel tank mouth.

6. filling adaptor according to claim 2, which is characterized in that the lower end of the cylindrical body (21) and the inner lining bag Sealing element (24) are provided between sack.

7. filling adaptor according to claim 2, which is characterized in that be provided on first flare type joint (4) by upper Fourth hole (4a), the fifth hole (4b) being gradually increased to lower aperture；

The lower end of the fifth hole (4b) is connect with the lower thread of the upper cylinder boss (22)；

The upper end of the upper cylinder boss (22) is set in the flared end of the photoresist supply pipe (M), and supplies the photoresist The roof of flared end and the fifth hole (4b) to pipe (M) offsets.

8. filling adaptor according to claim 7, which is characterized in that the lower end outer wall edge of first flare type joint (4) Circumferentially being provided with multiple first screws convex block (41).

9. filling adaptor according to claim 8, which is characterized in that second flare type joint (5) is from top to bottom successively It is provided with the 6th through-hole (5a), the 7th through-hole (5b) that aperture gradually decreases；

The upper end of 6th through-hole (5a) is connect with the threaded upper ends of the lower cylinder boss (23)；

The lower end of the lower cylinder boss (23) is set in the flared end of the inlet tube (3), and makes the inlet tube (3) Flared end and the bottom wall of the 6th through-hole (5a) offset.

10. filling adaptor according to claim 9, which is characterized in that along week on the outer wall of second flare type joint (5) Convex block (51) are screwed to being provided with multiple second.

11. described in any item filling adaptors according to claim 1~10, which is characterized in that the lower port of the inlet tube (3) Stretch to the bottom of the inner lining bag.

12. filling adaptor according to claim 11, which is characterized in that be arranged in the bottom side of the wall of the inlet tube (3) There is the lower port of drain through-hole (3a) and the inlet tube (3) to be provided with drain through slot (3b).

13. a kind of photoresist packaging material system, which is characterized in that the photoresist packaging material system includes: holding vessel, inner lining bag, Yi Jiquan Benefit requires 1~12 described in any item filling adaptors；

The inner lining bag is set in the holding vessel；

The outer cover (1) of the filling adaptor connect and is connected with the tank mouth of the holding vessel；

Joint body (2) upper end of the filling adaptor is connect and is passed through with photoresist supply pipe (M) by the first flare type joint (4) Logical, the sack of lower end and the inner lining bag is detachably connected and is connected；

The upper port of the inlet tube (3) of the filling adaptor is connect by the second flare type joint (5) with the joint body (2), Lower port stretches in the inner lining bag.