CN209533114U - A kind of process equipment for sputtering target material - Google Patents
A kind of process equipment for sputtering target material Download PDFInfo
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- CN209533114U CN209533114U CN201920173201.XU CN201920173201U CN209533114U CN 209533114 U CN209533114 U CN 209533114U CN 201920173201 U CN201920173201 U CN 201920173201U CN 209533114 U CN209533114 U CN 209533114U
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Abstract
The utility model relates to a kind of process equipments for sputtering target material, belong to sputtering target material technical field of processing equipment, solves the technical issues of sandblasting is carried out to standby pipe surface using artificial method in the prior art, including pedestal, two support plates, two drive shafts, driving mechanism, installing mechanism between two drive shafts is set, sandblasting mechanism, installing mechanism includes two installation molds, installation mold includes the rotation axis for installing standby pipe, connection component between rotation axis and drive shaft is set, it is set in the first tensioning arc plate and the second tensioning arc plate of rotation axis outer peripheral surface, first adjusts component, second adjusts component, first tensioning arc plate, the bending direction of second tensioning arc plate is directed to rotation axis.This is used for the process equipment of sputtering target material, increases the roughness of standby pipe surface and forms sputtering target material, reduces the labor intensity of operator, improve the production efficiency and quality of product, and then improve the practicability of process equipment.
Description
Technical field
The utility model relates to sputtering target material technical field of processing equipment, in particular to a kind of processing for sputtering target material
Equipment.
Background technique
The processing method of existing standby pipe surface roughness mainly has mechanical mill elimination and etch.Machinery mill elimination is to use
Fine grinding wheel or abrasive material carry out mill to standby pipe surface and disappear, and are then carrying out surface clean, the standby pipe surface roughness processed is uneven
It is even.Etch is to corrode standby pipe to surface by electrolytic method in strong acid, and wherein there are strong acid, highly basic in corrosive liquid
Equal substances, not only cause large effect to environment, but also the life of operator is be easy to cause to injure, in order to solve standby pipe table
The problem of surface roughness processing, part operation personnel attempt for the grains of sand to be sprayed on standby tube outer surface and increase the coarse of its surface
Degree not only increases the labor intensity of operator in this way, and due to the difference of operator's proficiency, causes
Keep standby pipe surface roughness uneven, therefore, not only increases the labor intensity of operator, and reduce the matter of product
Amount.
Utility model content
The purpose of this utility model is to provide a kind of process equipments for sputtering target material, and standby pipe is mounted on fitting machine
On structure, the grains of sand are ejected into the outer surface of standby pipe by sandblasting mechanism, to increase the roughness of standby pipe surface and form sputtering target
Material keeps the processing of sputtering target material more convenient, reduces the labor intensity of operator, improve the production efficiency and matter of product
Amount, and then improve the practicability of process equipment.
The above-mentioned technical purpose of the utility model has the technical scheme that
A kind of process equipment for sputtering target material, including in the horizontal direction pedestal, two it is parallel and interval is installed in
The support plate of base top surface, rotation connection on the supporting plate and with one-to-one two drive shafts of two support plates, be used for
Make the driving mechanism of drive shaft rotation, be arranged between two drive shafts and for installing the installing mechanism for pipe, setting
Between two support plates and for the grains of sand to be ejected into the sandblasting mechanism that standby tube outer surface forms sputtering target material, the driving turns
Axis is horizontally disposed, and the axis of two drive shafts is overlapped, and two drive shafts are between its axis direction
Every setting, the installing mechanism include two for install standby pipe and with two one-to-one installation molds of drive shaft, institute
Stating installation mold includes turning for installing the standby rotation axis managed and be overlapped with the axis of drive shaft, setting in rotation axis and driving
It both between axis and realizes the connection component being detachably connected, be set in rotation axis outer peripheral surface and for clamping for first of pipe
Tight arc plate and the second tensioning arc plate are arranged between the first tensioning arc plate and rotation axis and for adjusting distance between the two
One adjusting component, the second adjusting group for being arranged between the second tensioning arc plate and rotation axis and being used to adjust distance between the two
Part, the axis of the first tensioning arc plate, axis, the axis of rotation axis of the second tensioning arc plate are parallel, the first tensioning arc
Plate, the second bending direction for being tensioned arc plate are directed to rotation axis.
It, will when carrying out sandblasting to increase its surface roughness to standby tube outer surface by using above-mentioned technical proposal
Standby pipe sleeve is located on the outer peripheral surface of the first tensioning arc plate of two installation molds, the second tensioning arc plate, outside the first tensioning arc plate
Curved surface is under the action of first adjusts component and the medial surface of standby pipe is inconsistent, and the positive camber of the second tensioning arc plate is adjusted second
Under the action of component and the medial surface of standby pipe is inconsistent, thus on the rotating shaft by the standby stable installation of pipe, and make standby pipe and turn
Moving axis rotates together, at this point, sandblasting mechanism carries out sandblasting to standby pipe surface, while drive shaft turns under the action of the driving mechanism
Dynamic, drive shaft drives rotation axis rotation, and then standby pipe is driven to rotate, to realize the sandblasting of standby tube outer surface, and is formed and is splashed
Shoot at the target material, keep the processing of sputtering target material more convenient, reduce the labor intensity of operator, improve product production efficiency and
Quality, and then improve the practicability of process equipment.
The utility model is further arranged to: the first tensioning arc plate, the second tensioning arc board group close to form an annulus.
By using above-mentioned technical proposal, connecing for the first tensioning arc plate, the second tensioning arc plate and standby pipe medial surface is increased
Contacting surface product improves the frictional force of the first tensioning arc plate, the second tensioning arc plate and standby pipe medial surface, reduces standby pipe and has skidded
The case where occur, improve the stability that installing mechanism uses.
The utility model is further arranged to: the connection component includes the first installation for being installed in drive shaft outer peripheral surface
Plate, be installed in rotation axis outer peripheral surface and second mounting plate inconsistent with the first mounting plate, multiple settings in the first mounting plate and
Fastening bolt between second mounting plate, the fastening nut being threadedly coupled with fastening bolt, the screw rod of the fastening bolt run through
First mounting plate, the second mounting plate and fastening nut are threadedly coupled.
By using above-mentioned technical proposal, the first mounting plate and the second mounting plate are removable by fastening bolt, fastening nut
Connection is unloaded, thus realize being detachably connected for drive shaft and rotation axis, convenient for being replaced to rotation axis, consequently facilitating according to
Length, the interior diameter size etc. of standby pipe replace installation mold, improve the practicability of installing mechanism.
The utility model is further arranged to: the first adjusting component includes being installed in the first tensioning arc plate negative camber
The first adjusting rod for being arranged radially along rotation axis is opened in rotation axis outer peripheral surface and compatible with the first adjusting rod first is adjusted
Groove, the first compressed spring being installed between the first adjusting rod and the first adjusting grooves inner bottom surface, first adjusting rod are remote
One end from the first tensioning arc plate is located in the first adjusting grooves.
By using above-mentioned technical proposal, when standby pipe is mounted on installation mold, the first tensioning arc sleeve-board is located at standby pipe
It is interior, and the positive camber of the first tensioning arc plate is under the action of the first compressed spring and the medial surface of standby pipe is inconsistent, and pass through the
The mutual cooperation of one tensioning arc plate, the second tensioning arc plate rotates together standby pipe and rotation axis to realize the fixation of standby pipe,
Not only make the use of the first adjusting component more convenient, and make installing mechanism using more stable.
The utility model is further arranged to: the second adjusting component includes being installed in the second tensioning arc plate negative camber
The second adjusting rod for being arranged radially along rotation axis is opened in rotation axis outer peripheral surface and compatible with the second adjusting rod second is adjusted
Groove, the second compressed spring being installed between the second adjusting rod and the second adjusting grooves inner bottom surface, second adjusting rod are remote
One end from the second tensioning arc plate is located in the second adjusting grooves.
By using above-mentioned technical proposal, when standby pipe is mounted on installation mold, the second tensioning arc sleeve-board is located at standby pipe
It is interior, and the positive camber of the second tensioning arc plate is under the action of the second compressed spring and the medial surface of standby pipe is inconsistent, and pass through the
The mutual cooperation of one tensioning arc plate, the second tensioning arc plate rotates together standby pipe and rotation axis to realize the fixation of standby pipe,
Not only make the use of the second adjusting component more convenient, and make installing mechanism using more stable.
The utility model is further arranged to: the outer peripheral surface of the first tensioning arc plate of one of them installation mold is fixed
Have for standby the first inconsistent limit plate of end surfaces.
By using above-mentioned technical proposal, when standby pipe is mounted on installation mold, the end face of standby pipe one end and the first limit
Position plate is inconsistent, is determined convenient for the installation site to standby pipe, keeps the use of installing mechanism more convenient, more stable.
The utility model is further arranged to: the sandblasting mechanism includes being rotatably connected between two support plates and and driving
The parallel sandblasting screw rod of turn axis, for make sandblasting screw rod rotate driving assembly, be set in sandblasting screw rod outer peripheral surface and and its
The sandblasting mounting base of threaded connection is arranged between sandblasting mounting base and two support plates and makes sandblasting mounting base along sandblasting screw rod
The first mobile guidance set of length direction, is installed in storage at the material storing box for being installed in sandblasting mounting base and being used to store the grains of sand
Sandblasting pipette tips on hopper and for the grains of sand to be ejected into standby tube outer surface, the discharge port of the sandblasting pipette tips is along drive shaft diameter
It is arranged to direction.
By using above-mentioned technical proposal, when carrying out sandblasting to standby pipe surface, drive of the sandblasting screw rod in driving assembly
Lower rotation, sandblasting screw rod drive mounting base to move along sandblasting spiro rod length direction, and then drive sandblasting pipette tips mobile, due to sandblasting
Screw rod is parallel with drive shaft, to drive sandblasting pipette tips to move along standby length of tube direction, at this point, the grains of sand in material storing box are spraying
It is sprayed under the action of sand pipette tips, meanwhile, standby pipe rotates under the drive of driving mechanism, to realize the sandblasting of standby tube outer surface simultaneously
Sputtering target material is formed, the production efficiency and quality of product are improved.
The utility model is further arranged to: first guidance set includes being installed between two support plates and and spraying
The first parallel guide rod of sand screw rod, first guide rod, which runs through sandblasting mounting base and slides with it, to be connect.
It by using above-mentioned technical proposal, moves sandblasting mounting base along sandblasting spiro rod length direction, and then makes sand-blasting gun
Head is moved along standby length of tube direction, not only makes the processing and installation of the first guidance set more convenient, but also improve sandblasting mechanism
The stability used.
The utility model is further arranged to: spacer sleeve sets that there are two slide the of connection with it on first guide rod
One spacing collar, the sandblasting mounting base are located between two the first spacing collars, on two first spacing collars respectively
It is threaded with the first fixing bolt, first fixing bolt runs through the periphery of the first spacing collar side wall and the first guide rod
Face is inconsistent.
By using above-mentioned technical proposal, sandblasting mounting base moves between two the first spacing collars, installs to sandblasting
The mobile position of seat is defined, and improves the stability that sandblasting mechanism uses, while the first spacing collar is fixed by first
Bolt is fixed, and keeps the use of the first spacing collar more convenient.
The utility model is further arranged to: the driving component includes the second driving motor, the second fixed plate, and described the
Two driving motors are fixed on the supporting plate by the second fixed plate, one end of the sandblasting screw rod and the output of the second driving motor
Axis is fixedly connected.
By using above-mentioned technical proposal, when needing sandblasting screw rod to rotate, start the second driving motor, the second driving electricity
Machine drives the rotation of sandblasting screw rod, keeps the use of sandblasting screw rod more convenient.
In conclusion the utility model has the following beneficial effects:
1, standby pipe is mounted on installing mechanism, sandblasting mechanism by the process equipment for sputtering target material of the utility model
The grains of sand are ejected into the outer surface of standby pipe, to increase the roughness of standby pipe surface and form sputtering target material, make sputtering target material
Processing it is more convenient, reduce the labor intensity of operator, improve the production efficiency and quality of product, so improve plus
The practicability of construction equipment.
2, rotation axis is removably mounted in drive shaft by connection component, is not only convenient for replacing rotation axis,
And length, the interior diameter size etc. convenient for the standby pipe of basis replace installation mold, improve the practicability of installation mold,
And then improve the practicability of installing mechanism.
3, it by the way that the first limit plate is arranged in the outer peripheral surface of the first tensioning arc plate, is carried out convenient for the installation site to standby pipe true
It is fixed, keep the use of installing mechanism more convenient, more stable.
4, on the first guide rod be arranged two the first spacing collars, and sandblasting mounting base two the first spacing collars it
Between move, be defined convenient for the position mobile to sandblasting mounting base, improve the stability that sandblasting mechanism uses, while first
Spacing collar is fixed by the first fixing bolt, keeps the use of the first spacing collar more convenient.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of embodiment；
Fig. 2 is the structural schematic diagram in order to indicate drive shaft；
Fig. 3 is the portion the A enlarged drawing in Fig. 2；
Fig. 4 is to indicate that the first adjusting component, second adjust the partial sectional view of component；
Fig. 5 is the portion the B enlarged drawing in Fig. 4；
Fig. 6 is the structural schematic diagram in order to indicate the first spacing collar, the first fixing bolt；
Fig. 7 is the structural schematic diagram in order to indicate recovering mechanism；
Fig. 8 is the structural schematic diagram in order to indicate the second spacing collar, the second fixing bolt.
In figure, 1, pedestal；11, support plate；2, drive shaft；3, driving mechanism；31, the first driving motor；32, first is solid
Fixed board；4, installation mold；41, rotation axis；411, the first adjusting grooves；4111, the first spacing block set；412, the second adjusting is recessed
Slot；4121, the second spacing block set；42, connection component；421, the first mounting plate；422, the second mounting plate；423, fastening bolt；
424, fastening nut；43, the first tensioning arc plate；44, the second tensioning arc plate；45, first component is adjusted；451, the first adjusting rod；
452, the first compressed spring；4511, the first retention bead；46, second component is adjusted；461, the second adjusting rod；462, the second pressure
Contracting spring；4611, the second retention bead；5, sandblasting mechanism；51, sandblasting screw rod；52, sandblasting mounting base；53, material storing box；54, it sprays
Sand pipette tips；55, driving assembly；551, the second driving motor；552, the second fixed plate；56, the first guidance set；561, it first leads
To bar；562, the first spacing collar；563, the first fixing bolt；6, recovering mechanism；61, screw rod is recycled；62, mounting base is recycled；
63, recycling bins；631, collection tank；632, cabinet is recycled；64, fixed ring flat-plate；641, clamping screw；65, linkage unit；651,
First interlocking bar；652, the first bevel gear；653, the second bevel gear；654, third bevel gear；655, the 4th bevel gear；66,
Two guidance sets；661, the second guide rod；662, the second spacing collar；663, the second fixing bolt；71, the first limit plate；72,
Second limit plate.
Specific embodiment
The utility model is described in further detail below in conjunction with drawings and examples.
A kind of process equipment for sputtering target material, as depicted in figs. 1 and 2, including pedestal 1, pedestal 1 are set in the horizontal direction
It sets, and the cross section of pedestal 1 is rectangle.The top surface of pedestal 1 is vertically fixed, and there are two support plates 11, and two support plates 11 are the bottom of along
The setting of 1 length direction interval of seat, and support plate 11 is arranged along 1 width direction of pedestal.It is rotatablely connected respectively in two support plates 11
There is drive shaft 2, i.e. the quantity of drive shaft 2 is two, and two drive shafts 2 are arranged along 1 length direction interval of pedestal, and two
The axis of a drive shaft 2 is overlapped, and drive shaft 2 is arranged along 1 length direction of pedestal.It is arranged in one of support plate 11 useful
It is provided with the installing mechanism for installing standby pipe in the driving mechanism 3 for rotating drive shaft 2, between two drive shafts 2, two
A support plate 11 is provided in the side of installing mechanism for the grains of sand to be ejected into the sandblasting that standby tube outer surface forms sputtering target material
Mechanism 5, two support plates 11 are provided with the recovering mechanism 6 for recycling waste material, i.e. installing mechanism in the other side of installing mechanism
Between sandblasting mechanism 5 and recovering mechanism 6.
As shown in Fig. 2, driving mechanism 3 includes the first driving motor 31, the first driving motor 31 passes through the first fixed plate 32
It is installed on side of the support plate 11 far from drive shaft 2, support plate 11 and the first driving motor are run through in one end of drive shaft 2
31 output shaft is fixedly connected.
As shown in Figures 2 and 3, installing mechanism includes two for installing the installation mold 4 of standby pipe, two installation molds 4
It is corresponded with two drive shafts 2, and installation mold 4 is removably mounted in drive shaft 2.Installation mold 4 includes along drive
The rotation axis 41 of 2 length direction of turn axis setting, the axis of rotation axis 41 and the axis of drive shaft 2 are overlapped, and rotation axis 41
Side positioned at drive shaft 2 far from support plate 11.Both realizations are provided between rotation axis 41 and drive shaft 2 detachably to connect
The connection component 42 connect.Rotation axis 41 far from the outer peripheral surface of 2 one end of drive shaft be arranged with for the standby pipe of clamping and in standby pipe
The compatible first tensioning arc plate 43 in side and the second tensioning arc plate 44.The axis of first tensioning arc plate 43, the second tensioning arc plate
44 axis, the axis of rotation axis 41 are parallel, and the bending direction of the first tensioning arc plate 43 is directed toward rotation axis 41, the second tensioning arc
The bending direction of plate 44 is directed toward rotation axis 41.In the first tensioning arc plate 43 and inconsistent the second tensioning arc plate 44, the first tensioning
Arc plate 43 and the second tensioning combination of arc plate 44 form an annulus.In conjunction with shown in Fig. 4 and Fig. 5, the first tensioning arc plate 43 and rotation
Between axis 41 be arranged there are three for adjusts distance between the two first adjust component 45, three first adjusting components 45 along turn
The setting of 41 axis direction interval of moving axis.There are three for adjusting between the two for setting between second tensioning arc plate 44 and rotation axis 41
The second of distance adjusts component 46, and three second adjusting components 46 are arranged along 41 axis direction interval of rotation axis.
As shown in Figure 3 and Figure 5, connection component 42 includes being installed in drive shaft 2 close to 41 one end outer peripheral surface of rotation axis
First mounting plate 421, the first mounting plate 421 be in circular ring shape, outer peripheral surface of the rotation axis 41 close to 2 one end of drive shaft be installed with
The second inconsistent mounting plate 422 of first mounting plate 421, the second mounting plate 422 are in circular ring shape.Second mounting plate 422 and first
Multiple fastening bolts 423 are provided between mounting plate 421, multiple fastening bolts 423 are uniform along 421 circumferential direction of the first mounting plate
The screw rod of setting, fastening bolt 423 is threaded with fastening nut 424 through the first mounting plate 421, the second mounting plate 422, i.e.,
First mounting plate 421, the second mounting plate 422 are detachably connected by fastening bolt 423, fastening nut 424.
As shown in Figure 3 and Figure 5, the first adjusting component 45 includes being installed in the first of 43 negative camber of the first tensioning arc plate to adjust
Bar 451, the first adjusting rod 451 are arranged along 41 radial direction of rotation axis, and the outer peripheral surface of rotation axis 41 offers and the first adjusting rod
451 compatible first adjusting grooves 411, the first adjusting rod 451 are located at first far from one end of the first tensioning arc plate 43 and adjust
In groove 411.The first compressed spring 452 is installed between 411 inner bottom surface of first adjusting rod 451 and the first adjusting grooves.In order to
The first adjusting rod 451 is prevented to be detached from the first adjusting grooves 411, the first adjusting rod 451 is outer far from first tensioning 43 one end of arc plate
Circumferential surface is installed with the first retention bead 4511, and the medial surface of 411 open end of the first adjusting grooves is installed with and the first retention bead
4511 compatible first spacing block sets 4111.
As shown in Figure 3 and Figure 5, the second adjusting component 46 includes being installed in the second of 44 negative camber of the second tensioning arc plate to adjust
Bar 461, the second adjusting rod 461 are arranged along 41 radial direction of rotation axis, and the outer peripheral surface of rotation axis 41 offers and the second adjusting rod
461 compatible second adjusting grooves 412, the second adjusting rod 461 are located at second far from one end of the second tensioning arc plate 44 and adjust
In groove 412.The second compressed spring 462 is installed between 412 inner bottom surface of second adjusting rod 461 and the second adjusting grooves.In order to
The second adjusting rod 461 is prevented to be detached from the second adjusting grooves 412, the second adjusting rod 461 is outer far from second tensioning 44 one end of arc plate
Circumferential surface is installed with the second retention bead 4611, and the medial surface of 412 open end of the second adjusting grooves is installed with and the second retention bead
4611 compatible second spacing block sets 4121.
As shown in Figure 3 and Figure 5, in order to keep the installation of standby pipe more convenient, the first tensioning arc plate of one of installation mold 4
43 outer peripheral surface is installed with the first limit plate 71, and the first limit plate 71 is in fan annular setting.Second tensioning arc of the installation mold 4
The outer peripheral surface of plate 44 is installed with the second limit plate 72, and the second limit plate 72 is in fan annular setting.
When that will be mounted on installing mechanism for pipe, the end face of standby pipe one end and the first limit plate 71, the second limit plate 72
Inconsistent, the first tensioning arc plate 43, second that standby pipe sleeve is located at two installation molds 4 is tensioned on the outer peripheral surface of arc plate 44, and the
The positive camber of one tensioning arc plate 43 is under the action of the first compressed spring 452 and the medial surface of standby pipe is inconsistent, the second tensioning arc
The positive camber of plate 44 is under the action of the second compressed spring 462 and the medial surface of standby pipe is inconsistent, by the first tensioning arc plate 43,
The mutual cooperation of second tensioning arc plate 44 rotates together standby pipe and rotation axis 41 to realize the fixation of standby pipe, not only makes the
One adjust component 45, second adjust component 46 use it is more convenient, and make installing mechanism using more stable, while the first peace
Loading board 421 and the second mounting plate 422 are detachably connected by fastening bolt 423, fastening nut 424, to realize drive shaft 2
It is mentioned with being detachably connected for rotation axis 41 convenient for being replaced according to length, the interior diameter size etc. of standby pipe to installation mold 4
The high practicability of installing mechanism.
As shown in Fig. 2, sandblasting mechanism 5 includes the sandblasting screw rod 51 being rotatably connected between two support plates 11, sandblasting spiral shell
Bar 51 and drive shaft 2 are arranged in parallel.The outer peripheral surface of sandblasting screw rod 51 is threaded with sandblasting mounting base 52, sandblasting mounting base 52
Side close to installing mechanism is installed with the material storing box 53 for storing the grains of sand, is installed on material storing box 53 for spraying the grains of sand
Discharge port to the sandblasting pipette tips 54 of standby tube outer surface, sandblasting pipette tips 54 is arranged along 2 radial direction of drive shaft.Setting first is driven
The driving assembly 55 for rotating sandblasting screw rod 51, two support plates 11 and sandblasting are provided in the support plate 11 of dynamic motor 31
The first guidance set 56 for moving sandblasting mounting base 52 along 51 length direction of sandblasting screw rod is provided between mounting base 52.
As shown in Fig. 2, driving assembly 55 includes the second driving motor 551, the second driving motor 551 passes through the second fixed plate
552 are installed on side of the support plate 11 far from sandblasting screw rod 51, and one end of sandblasting screw rod 51 is driven through support plate 11 and second
The output shaft of dynamic motor 551 is fixedly connected.
As shown in Figure 2 and Figure 6, the first guidance set 56 includes the first guide rod being installed between two support plates 11
561, the first guide rod 561 and sandblasting screw rod 51 are arranged in parallel, one end of the first guide rod 561 through sandblasting mounting base 52 and with
It slides connection.The outer peripheral surface of first guide rod 561 is arranged there are two sliding the first spacing collar 562 of connection with it, and two
First spacing collar 562 is arranged along 561 length direction interval of the first guide rod, and sandblasting mounting base 52 is located at two first limits
Between sleeve 562.The first fixing bolt 563, and two the first fixing bolts are respectively arranged on two the first spacing collars 562
563 and two the first spacing collars 562 correspond.The screw rod of first fixing bolt 563 is through the first spacing collar 562 and the
The outer peripheral surface of one guide rod 561 is inconsistent, and the screw rod of the first fixing bolt 563 and the first spacing collar 562 are threadedly coupled.
As shown in fig. 7, recovering mechanism 6 includes the recycling screw rod 61 being rotatably connected between two support plates 11, spiral shell is recycled
Bar 61 and sandblasting screw rod 51 are arranged in parallel.The outer peripheral surface of recycling screw rod 61 is threaded with recycling mounting base 62, recycles mounting base
62 are provided with the recycling bins 63 for recycling waste material close to the side of installing mechanism.Recycling bins 63 include setting in recycling mounting base
Collection tank 631 between 62 and drive shaft 2, collection tank 631 are arranged in cuboid-type open at one end and hollow, collect
The open end of cabinet 631 forms feed inlet, and the feed inlet of collection tank 631 is arranged along the radial direction of drive shaft 2, and collects
The feed inlet of cabinet 631 and the discharge port of sandblasting pipette tips 54 are located along the same line.As shown in connection with fig. 8, collection tank 631 is close
The outer peripheral surface of recycling 62 one end of mounting base is installed with matched fixation ring flat-plate 64, and fixed ring flat-plate 64 passes through clamping screw
641 are removably mounted in recycling mounting base 62.The bottom end of collection tank 631 is installed with the recycling cabinet being connected with inside it
632, recycling cabinet 632 is in top end opening and hollow cuboid-type is arranged, and recycles cabinet 632 close to recycling mounting base 62 1
Medial surface of the medial surface and collection tank 631 at end close to mounting base one end is located on same vertical guide.Recycle screw rod 61 and spray
It is provided with the linkage unit 65 for realizing the two linkage between sand screw rod 51, is arranged between two support plates 11 and recycling mounting base 62
Having makes to recycle the second guidance set 66 that mounting base 62 is moved along recycling 61 length direction of screw rod.
As shown in fig. 7, sandblasting screw rod 51 runs through support plate 11 far from one end of the second driving motor 551, screw rod 61 is recycled
Support plate 11 is run through in one end far from the second driving motor 551.Linkage unit 65, driving assembly 55 are separately positioned on sandblasting screw rod
51 both ends, i.e. two support plates 11 are located between linkage unit 65 and the second driving motor 551.Linkage unit 65 includes rotation
It is supported on 11 side of support plate and along the first interlocking bar 651 of 1 width direction of pedestal setting, the first interlocking bar 651 is located at spray
Between sand screw rod 51 and recycling screw rod 61.The outer peripheral surface of the first interlocking bar 651 one end along its length is installed with and its axis
The first bevel gear 652 being overlapped, the outer peripheral surface of sandblasting screw rod 51 are installed with the second bevel gear being meshed with the first bevel gear 652
653, the axis of the second bevel gear 653 and the axis of sandblasting screw rod 51 are overlapped.First interlocking bar 651 along its length another
The outer peripheral surface at end is installed with the third bevel gear 654 being overlapped with its axis, and the outer peripheral surface of recycling screw rod 61 is installed with and third umbrella
The 4th bevel gear 655 that gear 654 is meshed, the axis of the 4th bevel gear 655 and the axis of recycling screw rod 61 are overlapped.
As shown in Figure 7 and Figure 8, the second guidance set 66 includes the second guide rod being installed between two support plates 11
661, the second guide rod 661 and recycling screw rod 61 are arranged in parallel, one end of the second guide rod 661 through recycling mounting base 62 and with
It slides connection.The outer peripheral surface of second guide rod 661 is arranged there are two sliding the second spacing collar 662 of connection with it, and two
Second spacing collar 662 is arranged along 661 length direction interval of the second guide rod, and recycles mounting base 62 and be located at two second limits
Between sleeve 662.The second fixing bolt 663, and two the second fixing bolts are respectively arranged on two the second spacing collars 662
663 and two the second spacing collars 662 correspond.The screw rod of second fixing bolt 663 is through the second spacing collar 662 and the
The outer peripheral surface of two guide rods 661 is inconsistent, and the screw rod of the second fixing bolt 663 and the second spacing collar 662 are threadedly coupled.
When carrying out sandblasting to increase its surface roughness to standby tube outer surface, standby pipe is mounted on installing mechanism,
Sandblasting screw rod 51 rotates under the drive of the second driving motor 551, and sandblasting screw rod 51 drives sandblasting mounting base 52 along sandblasting screw rod
51 length directions are mobile, and then drive sandblasting pipette tips 54 mobile, since sandblasting screw rod 51 is parallel with drive shaft 2, to drive
Sandblasting pipette tips 54 are moved along standby length of tube direction, meanwhile, drive shaft 2 rotates under the drive of the first driving motor 31, driving
Shaft 2 drives rotation axis 41 to rotate, and rotation axis 41 drives the first tensioning arc plate 43, second to be tensioned arc plate 44 and rotates, and then drives
Standby pipe rotates, to realize the sandblasting of standby tube outer surface, and forms sputtering target material, meanwhile, sandblasting screw rod 51 passes through linkage unit
65 drive recycling screw rod 61 to rotate, and recycling screw rod 61 drives recycling mounting base 62 mobile, and recycling mounting base 62 drives recycling bins 63
It is mobile, to realize the synchronizing moving of recycling bins 63 and sandblasting pipette tips 54, recycle recycling bins 63 to waste material, to make to splash
Shoot at the target material processing it is more convenient, reduce the labor intensity of operator, improve the production efficiency and quality of product, drop simultaneously
Low pollutions of the grains of sand to environment, and then improve the practicability of process equipment.
This specific embodiment is only the explanation to the utility model, is not limitations of the present invention, ability
Field technique personnel can according to need the modification that not creative contribution is made to the present embodiment after reading this specification, but
As long as all by the protection of Patent Law in the scope of the claims of the utility model.
Claims (10)
1. a kind of process equipment for sputtering target material, it is characterised in that: including in the horizontal direction pedestal (1), two it is parallel
And interval be installed in pedestal (1) top surface support plate (11), be rotatably connected on support plate (11) and with two support plates (11)
One-to-one two drive shafts (2), the driving mechanism (3) for rotating drive shaft (2), setting turn in two drivings
The grains of sand between two support plates (11) and for being ejected by the installing mechanism, setting between axis (2) and for installing standby pipe
Standby tube outer surface forms the sandblasting mechanism (5) of sputtering target material, and the drive shaft (2) is horizontally disposed, two drives
The axis of turn axis (2) is overlapped, and two drive shafts (2) are arranged along its axis direction interval, the installing mechanism packet
Include two for install standby pipe and with the one-to-one installation mold (4) of two drive shafts (2), installation mold (4) packet
The rotation axis (41) for installing standby pipe and being overlapped with the axis of drive shaft (2), setting is included to turn in rotation axis (41) and driving
It both between axis (2) and realizes the connection component (42) being detachably connected, be set in rotation axis (41) outer peripheral surface and for clamping
The first tensioning arc plate (43) and the second tensioning arc plate (44) of standby pipe, setting first be tensioned arc plate (43) and rotation axis (41) it
Between and first for adjusting distance between the two adjust component (45), setting and be tensioned arc plate (44) and rotation axis (41) second
Between and for adjusts distance between the two second adjust component (46), it is described first be tensioned arc plate (43) axis, second
Axis, the axis of rotation axis (41) for being tensioned arc plate (44) are parallel, first tensioning arc plate (43), the second tensioning arc plate (44)
Bending direction be directed to rotation axis (41).
2. a kind of process equipment for sputtering target material according to claim 1, it is characterised in that: the first tensioning arc
Plate (43), the second tensioning arc plate (44) combination form an annulus.
3. a kind of process equipment for sputtering target material according to claim 1, it is characterised in that: the connection component
(42) include the first mounting plate (421) for being installed in drive shaft (2) outer peripheral surface, be installed in rotation axis (41) outer peripheral surface and with the
Inconsistent the second mounting plate (422) of one mounting plate (421), multiple settings are in the first mounting plate (421) and the second mounting plate
(422) fastening bolt (423) between, the fastening nut (424) being threadedly coupled with fastening bolt (423), the fastening bolt
(423) screw rod is threadedly coupled through the first mounting plate (421), the second mounting plate (422) and fastening nut (424).
4. a kind of process equipment for sputtering target material according to claim 1, it is characterised in that: the first adjusting group
Part (45) includes being installed in the first adjusting rod being arranged radially in first tensioning arc plate (43) negative camber along rotation axis (41)
(451), rotation axis (41) outer peripheral surface and the first adjusting grooves compatible with the first adjusting rod (451) (411), fixed are opened in
The first compressed spring (452) between the first adjusting rod (451) and the first adjusting grooves (411) inner bottom surface, described first adjusts
Pole (451) is located in the first adjusting grooves (411) far from one end of the first tensioning arc plate (43).
5. a kind of process equipment for sputtering target material according to claim 1, it is characterised in that: the second adjusting group
Part (46) includes being installed in the second adjusting rod being arranged radially in second tensioning arc plate (44) negative camber along rotation axis (41)
(461), rotation axis (41) outer peripheral surface and the second adjusting grooves compatible with the second adjusting rod (461) (412), fixed are opened in
The second compressed spring (462) between the second adjusting rod (461) and the second adjusting grooves (412) inner bottom surface, described second adjusts
Pole (461) is located in the second adjusting grooves (412) far from one end of the second tensioning arc plate (44).
6. a kind of process equipment for sputtering target material according to claim 1, it is characterised in that: one of them described peace
The outer peripheral surface of first tensioning arc plate (43) of die-filling tool (4) be installed with for standby the first inconsistent limit plate of end surfaces
(71)。
7. a kind of process equipment for sputtering target material according to claim 1, it is characterised in that: the sandblasting mechanism
(5) include be rotatably connected between two support plates (11) and the sandblasting screw rod (51) parallel with drive shaft (2), for making to spray
The driving assembly (55) of sand screw rod (51) rotation, the sandblasting installation for being set in sandblasting screw rod (51) outer peripheral surface and being threadedly coupled with it
Seat (52) is arranged between sandblasting mounting base (52) and two support plates (11) and makes sandblasting mounting base (52) along sandblasting screw rod
(51) mobile the first guidance set (56) of length direction, the storing for being installed on sandblasting mounting base (52) and being used to store the grains of sand
Case (53) is installed on material storing box (53) and for the grains of sand to be ejected into the sandblasting pipette tips (54) for tube outer surface, the sandblasting
The discharge port of pipette tips (54) is arranged along drive shaft (2) radial direction.
8. a kind of process equipment for sputtering target material according to claim 7, it is characterised in that: the first guiding group
Part (56) includes being installed in the first guide rod (561) between two support plates (11) and parallel with sandblasting screw rod (51), described
First guide rod (561), which runs through sandblasting mounting base (52) and slides with it, to be connect.
9. a kind of process equipment for sputtering target material according to claim 8, it is characterised in that: first guide rod
(561) spacer sleeve is set there are two the first spacing collar (562) for sliding connection with it on, and the sandblasting mounting base (52) is located at two
Between a first spacing collar (562), it is threaded with the first fixing bolt respectively on two first spacing collars (562)
(563), first fixing bolt (563) runs through the outer peripheral surface of the first spacing collar (562) side wall and the first guide rod (561)
It is inconsistent.
10. a kind of process equipment for sputtering target material according to claim 7, it is characterised in that: the driving component
It (55) include the second driving motor (551), the second fixed plate (552), second driving motor (551) passes through the second fixed plate
(552) it is installed on support plate (11), one end of the sandblasting screw rod (51) and the output shaft of the second driving motor (551) are fixed
Connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920173201.XU CN209533114U (en) | 2019-01-31 | 2019-01-31 | A kind of process equipment for sputtering target material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920173201.XU CN209533114U (en) | 2019-01-31 | 2019-01-31 | A kind of process equipment for sputtering target material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209533114U true CN209533114U (en) | 2019-10-25 |
Family
ID=68272679
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920173201.XU Active CN209533114U (en) | 2019-01-31 | 2019-01-31 | A kind of process equipment for sputtering target material |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209533114U (en) |
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2019
- 2019-01-31 CN CN201920173201.XU patent/CN209533114U/en active Active
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