CN209532349U - Sleeve is used in a kind of welding of target - Google Patents
Sleeve is used in a kind of welding of target Download PDFInfo
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- CN209532349U CN209532349U CN201822164904.4U CN201822164904U CN209532349U CN 209532349 U CN209532349 U CN 209532349U CN 201822164904 U CN201822164904 U CN 201822164904U CN 209532349 U CN209532349 U CN 209532349U
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- penstock
- sealing ring
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Abstract
The utility model discloses a kind of target welding sleeve, it is related to target soldering tech field, it includes the first sleeve that engagement sleeves are set on target, one end of first sleeve is removably connected with the second casing, and the outer diameter of the second casing is greater than the internal diameter of first sleeve, and the second casing engagement sleeves are set in penstock, first sleeve inner wall is provided with coaxial sealing ring, the end abutment of second casing of sealing ring, the internal diameter of sealing ring is less than the outer diameter of penstock, and the outer diameter of sealing ring is greater than the internal diameter of target.The utility model has fixed penstock and target, the relative position of target and penstock is accurately positioned, and formed and sealed in bottom, so as to carry out brazing operation, improves the operability of soldering.
Description
Technical field
The utility model relates to target soldering tech fields, more particularly, to a kind of target welding sleeve.
Background technique
Plated film target be by magnetron sputtering, multi-arc ion coating or other kinds of coating system under appropriate process conditions
It sputters in penstock and forms the sputtering source of various function films.
Referring to Fig.1, the installation relation of target 5 and penstock 6 is shown, wherein target 5 and penstock 6 are arranged in a tubular form respectively,
And penstock 6 is sheathed in target 5, and the inner wall gap setting of the lateral wall of penstock 6 and target 5, to form an accommodating chamber, so
A sealing shroud is arranged in penstock 6 afterwards, to close an opening of accommodating chamber, then pours into thawing to another opening of accommodating chamber
Indium forms the welding layer 4 of connection a penstock 6 and target 5 after indium solidification.
But it when keeping penstock 6 and target 5 relatively fixed using sealing shroud, due to the easy deformation behavior of sealing shroud, is easy to cause
The relative position of target 5 and penstock 6 changes, so that the position of target and penstock is not fixed easily, and welding layer 4 is concentric
It spends undesirable.
Utility model content
The purpose of the utility model is to provide a kind of target welding sleeve, target is accurately positioned in fixed penstock and target
With the relative position of penstock, and bottom formed seal, so as to carry out brazing operation, improve the operability of soldering.
The purpose of this utility model has the technical scheme that
A kind of target welding sleeve, is set to the first sleeve on target including engagement sleeves, one end of first sleeve is removable
It unloading and is connected with the second casing, the outer diameter of the second casing is greater than the internal diameter of first sleeve, and the second casing engagement sleeves are set in penstock, the
A set of inside pipe wall is provided with coaxial sealing ring, and the internal diameter of the end abutment of the second casing of sealing ring, sealing ring is less than penstock
Outer diameter, and the outer diameter of sealing ring be greater than target internal diameter.
By adopting the above technical scheme, when installing target and penstock, the second casing is first relatively fixed to first sleeve
Then sealing ring can be sheathed on one end of penstock by one end, and since the internal diameter of sealing ring is less than the outer diameter of penstock, thus
It can be pushed against with penstock lateral wall to the inner wall of sealing ring, one end of the close sealing ring of penstock is then sequentially passed through into first sleeve
And second casing then target is covered so that sealing ring be made to be limited in the connection end of the second casing and the first lantern ring
It in penstock and is caught in first sleeve to target and sealing ring abutting, and pushes close seal in target self weight, thus to back
Accommodating chamber between pipe and target plays sealing process, then pours into the indium of thawing far from one end of sealing ring in accommodating chamber,
To weld penstock and target.By setting first sleeve and the second casing, to be played to the relative position of casing and target
The effect of limitation shakes relative to penstock to avoid target, improves its positioning accuracy.
The utility model is further arranged to: first sleeve inner wall offers separate cavities, and separate cavities are along first sleeve circumferential direction
Setting.
By adopting the above technical scheme, due to needing to be heated to presetting by target and penstock before installation penstock and target
Temperature plays the effect of heat preservation by the way that separate cavities are arranged；In the process of setting of indium, separate cavities can be opened, to accelerate to weld
The formation speed of layer, to improve whole working efficiency.
The utility model is further arranged to: the width of separate cavities is 1.8mm ~ 2.2mm.
By adopting the above technical scheme, it sets the width of separate cavities between 1.8mm ~ 2mm, not only ensure that separate cavities
Heat insulation effect also limits the volume of first sleeve.
The utility model is further arranged to: the outer wall of the second casing is fixed with ring block, is provided on ring block several
Screw, screw pass through ring block and are threadedly coupled with first sleeve.
By adopting the above technical scheme, by first the second casing of lantern ring face, and the axis of the two is overlapped, and initially passes through bolt
Then ring block is threadedly coupled with first sleeve, to realize the detachable installation of first sleeve and the second casing, have knot
The advantages of structure is simple and convenient to operate.
The utility model is further arranged to: the second casing is provided with transverse slat far from one end of first sleeve, and transverse slat is separate
The face of second casing is vertical with the axis of the second casing.
By adopting the above technical scheme, by the way that transverse slat is arranged, when penstock is vertically placed, penstock is being caught in the second casing
It also abuts with transverse slat, and target is abutted with sealing ring, to further limit the position between target and penstock, improves simultaneously
The precision of welding.
The utility model is further arranged to: transverse slat setting cylindrical, and the axis of the axis of transverse slat and the second casing
It is overlapped setting, the outer diameter of transverse slat is greater than the outer diameter of the second casing.
By adopting the above technical scheme, transverse slat setting cylindrical, to improve what transverse slat was placed in the indium that perfusion is melted
Stability, and the outer diameter of transverse slat is greater than the outer diameter of casing, so as to place iron block on transverse slat, to improve sleeve work
When stability.
The utility model is further arranged to: several through holes, the inside of through hole and the second casing are offered on transverse slat
It communicates.
By adopting the above technical scheme, it by the way that through hole is arranged, when the indium of thawing is perfused, improves inside outside air and penstock
Between air exchange.
The utility model is further arranged to: the length of first sleeve is equal to the sum of sealing ring and the length of target.
By adopting the above technical scheme, it is caught in first sleeve in target and is abutted with sealing ring, to keep first sleeve remote
It is concordant with the corresponding end surface of target from an end face of the second casing, it can be along the outer wall stream of first sleeve in indium spillage containment chamber
It walks, to reduce the influence to target lateral wall.
The utility model is further arranged to: first sleeve is fixed with coaxial spacing collar far from one end of the second casing,
The internal diameter of spacing collar is greater than the outer diameter of casing.
By adopting the above technical scheme, it by setting spacing collar, is limited in spacing collar in indium spillage containment chamber, thus
Stop perfusion indium, in time to avoid pollution target and the outer wall of first sleeve.
In conclusion the advantageous effects of the utility model are as follows:
(1) by setting first sleeve and the second casing, to play limitation to the relative position of casing and target
Effect shakes relative to penstock to avoid target, improves its location accuracy；
(2) by setting separate cavities, the effect of heat preservation is played；In the process of setting of indium, separate cavities can be opened, to add
The formation efficiency of fast welding layer, to improve whole working efficiency；
(3) by being arranged in transverse slat, when penstock is vertically placed, penstock is gone back while being caught in the second casing and transverse slat
It abuts, the position between target and penstock is further limited, the precision of welding is improved.
Detailed description of the invention
Fig. 1 is the attachment structure schematic diagram of target and penstock in background technique；
Fig. 2 is the overall structure diagram of the utility model；
Fig. 3 is the cross-sectional view of Fig. 2；
Fig. 4 is the partial enlargement diagram of part A in Fig. 3；
Fig. 5 is the partial enlargement diagram of part B in Fig. 3.
Appended drawing reference: 1, first sleeve；2, the second casing；3, transverse slat；4, welding layer；5, target；6, penstock；7, it limits
Circle；8, ring block；9, screw；10, sealing ring；11, through hole；12, separate cavities.
Specific embodiment
The utility model is described in further detail below in conjunction with attached drawing.
Referring to Fig. 2 and Fig. 3, a kind of target welding sleeve, including first sleeve 1, the second casing 2 and transverse slat 3.First
The axis of casing 1, the second casing 2 and transverse slat 3 is overlapped and is successively detachably connected.
Referring to Fig. 2 and Fig. 3, the cross section of first sleeve 1 is arranged in a ring, the length of first sleeve 1 can for 920mm ~
The length of 950mm, target 5 are 900mm, and wherein the outer diameter of internal diameter with target 5 of first sleeve 1 is identical, so that target 5 can block
Enter in first sleeve 1.
Referring to Fig. 2 and Fig. 3, the cross section of the second casing 2 is arranged in a ring, and the length of the second casing 2 can be 200mm,
And 6 length of penstock is 1300mm, wherein the internal diameter of the second casing 2 is identical as the internal diameter of penstock 6, so that penstock 6 can be caught in the
In two casings 2, the outer diameter of the second casing 2 is greater than the internal diameter of first sleeve 1, so that the second casing 2 can be supported with first sleeve 1
It connects.
Referring to Fig. 3 and Fig. 4, one end of the second casing 2 towards first sleeve 1 is fixed with ring block 8, ring block 8 and second
Casing 2 is coaxially disposed, and ring block 8 is concordant with the face of the second casing 2 towards first sleeve 1,2 one of ring block 8 and the second casing
Setting, the outer diameter of ring block 8 are greater than the outer diameter of first sleeve 1；Be provided with screw 9 on ring block 8, the setting of screw 9 there are six and
Axis is parallel with the axis of ring block 8, and screw 9 is uniformly distributed on ring block 8, and screw 9 passes through annular far from one end of nut
Block 8 is simultaneously threadedly coupled with first sleeve 1, realizes being detachably connected for first sleeve 1 and the second casing 2.
Referring to Fig. 3 and Fig. 4, sealing ring 10 is provided in first sleeve 1, the internal diameter of sealing ring 10 is less than the outer diameter of penstock 6,
And the outer diameter of sealing ring 10 is greater than the internal diameter of target 5.10 snare of sealing ring is set to one end of penstock 6 and is caught in the second casing 2
It is interior, so that sealing ring 10 be made to be limited in the end of the second casing 2, it is then caught in target 5, so that the circle of sealing ring 10 be made to push against
Between the second casing 2 and target 5.Wherein sealing ring 10 with a thickness of 20mm ~ 50mm, the length of first sleeve 1 is equal to sealing
The sum of the length of circle 10 and target 5.
Referring to Fig. 2 and Fig. 3, the setting cylindrical of transverse slat 3, the outer diameter of transverse slat 3 is greater than the outer diameter of the second casing 2, transverse slat 3
One end face offers thread groove, and the one end of the second casing 2 far from first sleeve 1 is connect with thread groove matching thread, and in transverse slat 3
When being installed on the second casing 2, the axis of transverse slat 3 is overlapped with the axis of the second casing 2, to realize limit of the transverse slat 3 to penstock 6
Effect and supporting function to entire sleeve.
Referring to Fig. 2 and Fig. 3, transverse slat 3 offers through hole 11, the setting cylindrical of through hole 11, and the axis of through hole 11
The axis of line and transverse slat 3 is arranged in parallel, to improve the heat dissipation effect of the second casing 2.
Referring to Fig. 3, wherein the inner wall of first sleeve 1 offers separate cavities 12, and separate cavities 12 are arranged in a ring and with first
The axis of casing 1 is overlapped, and the width of separate cavities 12 is 1.8mm ~ 2.2mm, to improve the heat insulation effect of the sleeve, moreover it is possible to open
Separate cavities 12 are contacted with air, to accelerate the coagulation efficacy of indium.
Referring to Fig. 3 and Fig. 5, first sleeve 1 is provided with spacing collar 7 far from one end of the second casing 2, and spacing collar 7 can glue
It is connected in first sleeve 1, and spacing collar 7 and first sleeve 1 are coaxially disposed, the internal diameter of spacing collar 7 is greater than the outer diameter of penstock 6, limit
The outer diameter of position circle 7 is less than the outer diameter of first sleeve 1, to be limited in spacing collar 7 in indium spillage containment chamber, to avoid dirt
Contaminate the outer wall of target 5 and first sleeve 1.
The implementation principle of the present embodiment are as follows: the second casing 2 is fixed between first sleeve 1 and transverse slat 3, by sealing ring 10
It is sheathed on one end of penstock 6, one end of the close sealing ring 10 of penstock 6 is then sequentially passed through into first sleeve 1, the second casing
2, so that sealing ring 10 is limited in the end of the second casing 2 and the first lantern ring, in penstock 6 and is caught in first sleeve 1 for 5 sets of target
Interior, target 5 pushes close seal 10 in self weight, by 7 sets of spacing collar in penstock 6 and adhesion and first sleeve 1 are far from second set
On the end face of pipe 2, the indium of thawing is poured into far from one end of sealing ring 10 in accommodating chamber, to weld penstock 6 and target 5.
The embodiment of present embodiment is the preferred embodiment of the utility model, and not limitation is originally practical new according to this
The protection scope of type, therefore: the equivalence changes that all structures, shape, principle according to the utility model are done should all be covered by practical
Within novel protection scope.
Claims (9)
1. a kind of target welding sleeve, which is characterized in that the first sleeve (1) on target (5) is set to including engagement sleeves, first
One end of casing (1) is removably connected with the second casing (2), and the outer diameter of the second casing (2) is greater than the internal diameter of first sleeve (1),
Second casing (2) engagement sleeves are set on penstock (6), and first sleeve (1) inner wall is provided with coaxial sealing ring (10), sealing ring
(10) end abutment of the second casing (2), the internal diameter of sealing ring (10) are less than the outer diameter of penstock (6), and sealing ring (10)
Outer diameter is greater than the internal diameter of target (5).
2. a kind of target welding sleeve according to claim 1, which is characterized in that first sleeve (1) inner wall offers
Separate cavities (12), separate cavities (12) are circumferentially arranged along first sleeve (1).
3. a kind of target welding sleeve according to claim 2, which is characterized in that the width of separate cavities (12) is
1.8mm~2.2mm。
4. a kind of target welding sleeve according to claim 2, which is characterized in that the outer wall of the second casing (2) is fixed
Have ring block (8), be provided on ring block (8) several screws (9), screw (9) pass through ring block (8) and with first sleeve (1)
It is threadedly coupled.
5. a kind of target welding sleeve according to claim 1, which is characterized in that the second casing (2) is far from first set
One end of pipe (1) is provided with transverse slat (3), and face of the transverse slat (3) far from the second casing (2) is vertical with the axis of the second casing (2).
6. a kind of target welding sleeve according to claim 5, which is characterized in that transverse slat (3) setting cylindrical, and
The axis of transverse slat (3) is overlapped setting with the axis of the second casing (2), and the outer diameter of transverse slat (3) is greater than the outer diameter of the second casing (2).
7. a kind of target welding sleeve according to claim 6, which is characterized in that transverse slat offers several pass through on (3)
It perforates (11), through hole (11) is communicated with the inside of the second casing (2).
8. a kind of target welding sleeve according to claim 1, which is characterized in that the length of first sleeve (1) is equal to
The sum of the length of sealing ring (10) and target (5).
9. a kind of target welding sleeve according to claim 8, which is characterized in that first sleeve (1) is far from second set
One end of pipe (2) is fixed with coaxial spacing collar (7), and the internal diameter of spacing collar (7) is greater than the outer diameter of first sleeve (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822164904.4U CN209532349U (en) | 2018-12-20 | 2018-12-20 | Sleeve is used in a kind of welding of target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822164904.4U CN209532349U (en) | 2018-12-20 | 2018-12-20 | Sleeve is used in a kind of welding of target |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209532349U true CN209532349U (en) | 2019-10-25 |
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ID=68265920
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822164904.4U Active CN209532349U (en) | 2018-12-20 | 2018-12-20 | Sleeve is used in a kind of welding of target |
Country Status (1)
| Country | Link |
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| CN (1) | CN209532349U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111408864A (en) * | 2020-04-27 | 2020-07-14 | 宁波江丰电子材料股份有限公司 | Assembly method of rotary target material |
| CN113427096A (en) * | 2021-07-01 | 2021-09-24 | 中国航发贵州黎阳航空动力有限公司 | Tool for sample brazing and sample charging method |
-
2018
- 2018-12-20 CN CN201822164904.4U patent/CN209532349U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111408864A (en) * | 2020-04-27 | 2020-07-14 | 宁波江丰电子材料股份有限公司 | Assembly method of rotary target material |
| CN111408864B (en) * | 2020-04-27 | 2022-01-11 | 宁波江丰电子材料股份有限公司 | Assembly method of rotary target material |
| CN113427096A (en) * | 2021-07-01 | 2021-09-24 | 中国航发贵州黎阳航空动力有限公司 | Tool for sample brazing and sample charging method |
| CN113427096B (en) * | 2021-07-01 | 2022-06-03 | 中国航发贵州黎阳航空动力有限公司 | Tool for sample brazing and sample charging method |
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