CN209526075U - A kind of PECVD graphite boat baffle porcelain ring - Google Patents
A kind of PECVD graphite boat baffle porcelain ring Download PDFInfo
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- CN209526075U CN209526075U CN201920392105.4U CN201920392105U CN209526075U CN 209526075 U CN209526075 U CN 209526075U CN 201920392105 U CN201920392105 U CN 201920392105U CN 209526075 U CN209526075 U CN 209526075U
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- porcelain ring
- graphite boat
- porcelain
- baffle
- notch
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Abstract
The utility model relates to a kind of PECVD graphite boat baffle porcelain rings, muti-piece carbon barrier (2) are uniformly arranged in graphite boat (4), multiple porcelain rings are arranged in two sides between carbon barrier (2), wherein the porcelain ring close to the outermost row of graphite boat is arranged to notch porcelain ring, it is the first notch porcelain ring (1a) respectively, second porcelain ring (1b), third porcelain ring (1c) and the 4th porcelain ring (1d), the main body of notch porcelain ring (1) is the porcelain ring cylinder (12) done using ceramic material, four square breach (11) are uniformly arranged on the upside of porcelain ring cylinder (12), downside is uniformly arranged four square breach (11), square breach (11) size is identical, shape is rectangular；The utility model mainly solves the problems, such as silicon chip edge very popular actor or actress occur in PECVD plating by improving specification and the shape of porcelain ring.
Description
Technical field
The utility model relates to a kind of photovoltaic cell PECVD filming process, in particular to a kind of PECVD graphite boat baffle
Porcelain ring.
Background technique
PECVD filming process is that silicon chip of solar cell is made to be warming up to scheduled temperature using plasma gas, is then led to
Enter suitable reaction gas, gas passes through series of chemical and plasma reaction, forms solid film in silicon chip surface
Method, be to process an important process during silicon chip of solar cell.
In silicon chip of solar cell production process, the thickness of PECVD filming process, plated film is influenced very by graphite boat
Greatly, especially graphite boat baffle position is because close to tube wall in boiler tube, temperature can a 30-50 degree left side higher than graphite boat central area
The right side causes the film thickness of baffle position than center mean height 3-5nm, whole film color concentration degree is influenced, so having in industry
Technological innovation is exactly to change the film color of the position by changing the spacing of baffle position, by by the spacing of the position by
11mm is adjusted to 12mm, keeps the discharge power of baffle position smaller than other positions, slows down coating speed, make film thickness with it is other
Position is almost the same.The problem of technology segment producer is applying, but the prior art solves only whole boat irregular colour,
Graphite boat baffle position silicon wafer very popular actor or actress is not solved the problems, such as.
Utility model content
The utility model against the above deficiency, proposes a kind of PECVD graphite boat baffle porcelain ring, is uniformly arranged in graphite boat
There is muti-piece carbon barrier, porcelain ring is arranged in two sides between baffle, wherein the porcelain ring close to the outermost row of ink boat is arranged to lack
Mouth porcelain ring.
The main body of notch porcelain ring include porcelain ring cylinder, be uniformly arranged on the upside of porcelain ring cylinder four it is rectangular lack
Mouthful, downside is uniformly arranged four square breach, and square breach size is identical, the size of porcelain ring cylinder are as follows: outer diameter 7.8-
8.3mm, internal diameter 6-6.5mm, length 12mm.
Graphite boat baffle is the thin plate made of graphite material, evenly distributed, the weight as carrying photovoltaic silicon wafer
Component is wanted, with good conduction, heating conduction, while chemical stability are good, in the arrangement of muti-piece graphite boat baffle, use
The identical porcelain ring of size separates.
Because the very popular actor or actress position of silicon wafer concentrates on graphite boat, outermost 1 scheduled production is raw, as long as lacking in outermost 1 be set with of graphite boat
Mouth porcelain ring.
In PECVD coating process, gas is filled in graphite boat, and gas is connected in the square breach of notch porcelain ring, is subtracted
Lack the blocked up blocking to silicon wafer corner reaction gas of porcelain ring, and enhances the electric field of edge, it can be to avoid corner electricity
Field dies down and plated film is caused to cause very popular actor or actress extremely.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model embodiment.
Fig. 2 is graphite boat baffle combination schematic diagram together.
Fig. 3 is common porcelain ring schematic diagram.
Legend: carbon barrier 2, the first notch porcelain ring 1a, the second porcelain ring 1b, third porcelain ring 1c and the 4th porcelain ring
1d, conventional ceramic circle 3, porcelain ring cylinder 12, square breach 11.
Specific embodiment
The utility model is described in detail below with reference to specific embodiments and the drawings.
The utility model against the above deficiency, proposes a kind of PECVD graphite boat baffle porcelain ring,
Fig. 1-3 is please referred to, the structure of PECVD graphite boat baffle porcelain ring is shown.
Such as Fig. 2, it is uniformly arranged muti-piece carbon barrier 2 in graphite boat 4, multiple ceramics are arranged in two sides between carbon barrier 2
Circle, wherein the porcelain ring close to the outermost row of graphite boat 4 is arranged to notch porcelain ring, it is the first notch porcelain ring 1a respectively, the
Two porcelain ring 1b, third porcelain ring 1c and the 4th porcelain ring 1d, other porcelain rings are conventional ceramic circles, in the utility model example
In, it is conventional ceramic circle.
Such as Fig. 2, the corner that A is graphite boat is enclosed, because it is located at corner, if the 4th porcelain ring 1d is thicker, meeting
Stop the flowing of edge gas, temperature herein, which compares central area with gas flow, relatively big difference, and final embody arrives silicon wafer
When coating effects it is different, i.e., generation corner very popular actor or actress phenomenon.
If the main body of Fig. 1, notch porcelain ring 1 are porcelain ring cylinder 12, four are uniformly arranged in the upside of porcelain ring cylinder 12
A square breach 11, downside are uniformly arranged four square breach, and 11 size of square breach is identical, the size of porcelain ring cylinder 12
Are as follows: outer diameter 7.8-8.3mm, internal diameter 6-6.5mm, length 12mm, the specification within the scope of this work well in an experiment.
Such as Fig. 3, the structure of conventional ceramic circle is illustrated, is directly an outer diameter 10mm* internal diameter 6.3mm* length 12mm
Porcelain ring.
Graphite boat baffle is the thin plate made of graphite material, evenly distributed, the weight as carrying photovoltaic silicon wafer
Component is wanted, with good conduction, heating conduction, while chemical stability are good, arrange in muti-piece stone two rows graphite boat baffle
When, being separated using the identical porcelain ring of size, porcelain ring insulate and stability is good, graphite boat baffle can be separated well,
Because graphite boat baffle is powered, graphite boat baffle belt electric field is especially relatively weak in corner electrical field if porcelain ring is blocked up
Place, the degree for influencing electric field can be reacted on plated film.
In PECVD coating process, gas is filled in graphite boat, while graphite boat baffle can be powered, notch porcelain ring
Square breach gas is connected, reduce the blocked up blocking to silicon wafer corner reaction gas of porcelain ring, while porcelain ring is thinned
Thickness, which reaches, enhances the effect of the electric field of edge, and can die down to avoid corner electrical field causes plated film to cause very popular actor or actress extremely.
Above disclosed is only a kind of preferred embodiment of the utility model, certainly cannot be practical to limit with this
Novel interest field, therefore equivalent variations made according to the claim of the utility model still belong to what the utility model was covered
Range.
Claims (4)
1. a kind of PECVD graphite boat baffle porcelain ring, which is characterized in that graphite boat is uniformly arranged muti-piece carbon barrier in (4)
(2), multiple porcelain rings are arranged in two sides between carbon barrier (2), wherein the porcelain ring close to the outermost row of graphite boat is arranged to
Notch porcelain ring (1) is the first notch porcelain ring (1a), the second porcelain ring (1b), third porcelain ring (1c) and the 4th pottery respectively
The main body of porcelain circle (1d), notch porcelain ring (1) is the porcelain ring cylinder (12) done using ceramic material, in porcelain ring cylinder (12)
Upside be uniformly arranged four square breach (11), downside is uniformly arranged four square breach (11), square breach (11) size
Identical, shape is rectangular.
2. a kind of PECVD graphite boat baffle porcelain ring according to claim 1, which is characterized in that porcelain ring cylinder (12)
Outer diameter be 7.8-8.3mm.
3. a kind of PECVD graphite boat baffle porcelain ring according to claim 1, which is characterized in that porcelain ring cylinder (12)
Internal diameter be 6-6.5mm.
4. a kind of PECVD graphite boat baffle porcelain ring according to claim 1, which is characterized in that porcelain ring cylinder (12)
Length 12mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920392105.4U CN209526075U (en) | 2019-03-26 | 2019-03-26 | A kind of PECVD graphite boat baffle porcelain ring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920392105.4U CN209526075U (en) | 2019-03-26 | 2019-03-26 | A kind of PECVD graphite boat baffle porcelain ring |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209526075U true CN209526075U (en) | 2019-10-22 |
Family
ID=68232497
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920392105.4U Active CN209526075U (en) | 2019-03-26 | 2019-03-26 | A kind of PECVD graphite boat baffle porcelain ring |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209526075U (en) |
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2019
- 2019-03-26 CN CN201920392105.4U patent/CN209526075U/en active Active
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