CN209525010U - Rpyroelectric infrared sensing element and its infrared sensor - Google Patents
Rpyroelectric infrared sensing element and its infrared sensor Download PDFInfo
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- CN209525010U CN209525010U CN201920185024.7U CN201920185024U CN209525010U CN 209525010 U CN209525010 U CN 209525010U CN 201920185024 U CN201920185024 U CN 201920185024U CN 209525010 U CN209525010 U CN 209525010U
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Abstract
A kind of rpyroelectric infrared sensing element, including pyroelectricity substrate, the first and second sensing units.The upper and lower electrode of first sensing unit is L-shaped, and the upper and lower electrode of the second sensing unit is in backward L-shaped;The top electrode of first and second sensing unit is in same vertical direction;The cross edge of the top electrode of second sensing unit is located at the top of the top electrode of the first sensitive member, and the vertical edge portion of the top electrode of the second sensing unit is partly relative to the vertical edge portion of the top electrode of the first sensing unit.It is respectively formed bent gap between the top electrode of first, second sensing unit and between the lower electrode of the first, second sensing unit, which is made of two sections of different circular arcs of bending direction.The invention also discloses a kind of pyroelectric infrared sensors using above-mentioned rpyroelectric infrared sensing element.The utility model is either arranged on wall or when being arranged on the ceiling, and test object can be detected along the linear motion of any direction.
Description
Technical field
The utility model relates to pyroelectric infrared sensor technologies.
Background technique
Figures 1 and 2 show that a kind of structure of existing rpyroelectric infrared sensing element.As depicted in figs. 1 and 2, existing
Rpyroelectric infrared sensing element include pyroelectricity substrate 90, the first sensing unit and the second sensing unit.First sensing unit
It is arranged on pyroelectricity substrate 90 with the second sensing unit, and the first sensing unit with the second sensing unit reversed polarity company of series connection
It connects, i.e., the anode of the first sensing unit is electrically connected by connecting line with the anode of the second sensing unit.First sensing unit has
Top electrode 911, the lower electrode 912 being oppositely arranged with top electrode 911 and be sandwiched in pyroelectricity substrate 90 top electrode 911 with
Part 913 between lower electrode 912;The lower electrode that second sensing unit has top electrode 921, is oppositely arranged with top electrode 921
922 and in the part 923 being sandwiched in pyroelectricity substrate 90 between top electrode 921 and lower electrode 922.Rpyroelectric infrared is sensitive
Element is connect using pyroelectricity substrate 90, supporting mass 96 with circuit board 97.Pyroelectricity substrate 90 is made of pyroelectricity material.
In Fig. 1 and rpyroelectric infrared sensing element illustrated in fig. 2, the shape of the upper and lower electrode of the first sensing unit
In inverted trapezoidal, and the shape of the upper and lower electrode of the second sensing unit is trapezoidal, using the sensitive member of the rpyroelectric infrared of this shape
Part is arranged on wall in use, when the test objects such as human body are along the direction (X-direction) for crossing rpyroelectric infrared sensing element
Movement is parallel to rpyroelectric infrared sensing element (Y-direction) movement and can be exported when moving along 45 ° of directions.But
It is, when the rpyroelectric infrared sensing element is arranged on the ceiling, as ceiling type in application, quick along first in test object
When feeling the gap direction linear movement between the top electrode of unit and the top electrode of the second sensing unit, because of rpyroelectric infrared sensitivity
"+the output " and "-output " of element generates simultaneously, since there are neutralization effects without effectively detecting signal output.
Summary of the invention
The technical problem to be solved by the utility model is to provide a kind of rpyroelectric infrared sensing element and its infrared biographies
Sensor is either arranged on wall or is arranged on the ceiling in use, for test object along any direction
Linear motion can detected.
The technical scheme adopted by the utility model is
A kind of rpyroelectric infrared sensing element, including pyroelectricity substrate, the first sensing unit and the second sensing unit, first
Sensing unit and the second sensing unit are arranged on pyroelectricity substrate, and the first sensing unit and the second sensing unit reversed polarity
It is connected in series;Each sensing unit has top electrode, the lower electrode being oppositely arranged with top electrode and the quilt in pyroelectricity substrate
It is clipped in the part between top electrode and lower electrode;Wherein, the top electrode of the first sensing unit and the shape of lower electrode are L-shaped, the
The top electrode of two sensing units and the shape of lower electrode are in backward L-shaped;The top electrode of first sensing unit and the second sensing unit
Top electrode be in same vertical direction;The cross edge of the top electrode of second sensing unit is located at the top electrode of the first sensitive member
Top, the vertical edge portion of the top electrode of the second sensing unit are partly relative to the vertical edge portion of the top electrode of the first sensing unit;The
The upper side edge in the vertical edge portion of the top electrode of one sensing unit and lower electrode is the convex arch of evagination, and the first sensing unit powers on
The upper side edge of the right edge and cross edge in pole and the vertical edge portion of lower electrode is linked to be the curved section of concave arc shape jointly, and second is sensitive single
The lower side in the vertical edge portion of the top electrode and lower electrode of member is the convex arch of evagination, the second sensing unit top electrode and lower electricity
The left side in the vertical edge portion of pole and the lower side of cross edge are linked to be the curved section of concave arc shape jointly, thus in the first sensing unit
Top electrode and the second sensing unit top electrode between and the lower electrode and the second sensing unit of the first sensing unit under
Bent gap is respectively formed between electrode, which is made of two sections of different circular arcs of bending direction.
The utility model additionally provides a kind of pyroelectric infrared sensor comprising the sensitive member of above-mentioned rpyroelectric infrared
Part.
The top electrode of first sensing unit of the present embodiment and the shape of lower electrode are L-shaped, and the second sensing unit powers on
The shape of pole and lower electrode in fall backward L-shaped, and between the top electrode of the first sensing unit and the top electrode of the second sensing unit,
And first sensing unit lower electrode and the lower electrode of the second sensing unit between form respectively it is different by bending direction
Two sections of circular arcs composition bent gap, when be disposed on wall or on ceiling in use, no matter test object along
Which direction moves linearly, all because crossing the area difference of each sensing unit without generating "+output " and "-output " mutually
The case where counteracting, and then it is capable of detecting when test object.
Detailed description of the invention
Fig. 1 shows a kind of schematic top plan view of existing rpyroelectric infrared sensing element.
Fig. 2 shows the A-A schematic cross-sectional views of Fig. 1.
Fig. 3 shows the schematic top plan view of the rpyroelectric infrared sensing element according to an embodiment of the present invention.
Fig. 4 shows the elevational schematic view of the rpyroelectric infrared sensing element according to an embodiment of the present invention.
Fig. 5 shows the A-A cross-section structure and supporting mass and circuit board of the rpyroelectric infrared sensing element in Fig. 3
Cross-section structure.
Specific embodiment
Further explanation is made to the utility model with reference to the accompanying drawing.
Fig. 3 to Fig. 5 shows a kind of structure of rpyroelectric infrared sensing element according to an embodiment of the present invention.Such as
It include the first sensing unit, second according to the rpyroelectric infrared sensing element of an embodiment of the present invention shown in Fig. 3 to Fig. 5
Sensing unit and pyroelectricity substrate 3.First sensing unit and the second sensing unit are arranged on pyroelectricity substrate 3, and first is quick
Sense unit is connected in series with the second sensing unit reversed polarity, i.e. the anode of the anode and the second sensing unit of the first sensing unit
Electrical connection.First sensing unit has top electrode 11, the lower electrode 12 being oppositely arranged with top electrode 11 and in pyroelectricity substrate 3
In be sandwiched in part 13 between top electrode 11 and lower electrode 12;Second sensing unit have top electrode 21, with 21 phase of top electrode
Lower electrode 22 to setting and in the part 23 being sandwiched in pyroelectricity substrate 3 between top electrode 21 and lower electrode 22.Heat is released
Electric infrared sensor is connect using pyroelectricity substrate 3, supporting mass 4 with circuit board 5.Pyroelectricity substrate 3 is by pyroelectricity material
It is made, in a specific embodiment, the material of pyroelectricity substrate 3 uses pyroelectric ceramics.
The top electrode 11 of first sensing unit and the shape of lower electrode 12 are L-shaped, the top electrode 21 of the second sensing unit and
The shape of lower electrode 22 is in backward L-shaped.The top electrode 11 of first sensing unit and the top electrode 21 of the second sensing unit are in same
One vertical direction;The cross edge 2b of the top electrode 21 of second sensing unit is located at the top of the top electrode 11 of the first sensitive member, the
The vertical edge portion 2a of the top electrode 21 of two sensing units is partly relative to the vertical edge portion 1a of the top electrode 11 of the first sensing unit.By
It is oppositely arranged in the top electrode of each sensing unit with lower electrode, therefore, similarly, the lower electrode 12 of the first sensing unit and
The lower electrode 22 of two sensing units is also at same vertical direction;The cross edge 2d of the lower electrode 22 of second sensing unit is located at the
The top of the lower electrode 12 of one sensitive member, the vertical edge portion 2c of the lower electrode 22 of the second sensing unit are partly relative to the first sensitivity
The vertical edge portion 1c of the lower electrode 12 of unit.
The upper side edge 111 of the vertical edge portion 1a of the top electrode 11 of first sensing unit is the convex arch of evagination, and first is sensitive
The right edge 114 of vertical edge portion 1a and the upper side edge 115 of cross edge 1b of the top electrode 11 of unit are linked to be the song of concave arc shape jointly
Line segment, the lower side 212 of the vertical edge portion 2a of the top electrode 21 of the second sensing unit are the convex arch of evagination, the second sensing unit
The left side 213 of vertical edge portion 2a and the lower side 216 of cross edge 2b of top electrode 21 are linked to be the curved section of concave arc shape jointly, from
And bent gap 1g is formed between the top electrode of the first sensing unit 11 and the top electrode of the second sensing unit 21, bent gap
It is made of bending direction different two sections of circular arcs 11g, 12g.
Similarly, the upper side edge 121 of the vertical edge portion 1c of the lower electrode 12 of the first sensing unit is the convex arch of evagination, the
The right edge 124 of vertical edge portion 1c and the upper side edge 125 of cross edge 1d of the lower electrode 12 of one sensing unit are linked to be concave arc jointly
The curved section of shape, the lower side 222 of the vertical edge portion 2c of the lower electrode 22 of the second sensing unit are the convex arch of evagination, and second is quick
The left side 223 of vertical edge portion 2c of electrode 22 and the lower side 226 of cross edge 2d are linked to be the song of concave arc shape jointly under sense unit
Line segment, to form a bent gap between the lower electrode 12 of the first sensing unit and the lower electrode 22 of the second sensing unit
2g, bent gap are made of bending direction different two sections of circular arcs 21g, 22g.
The top electrode 11 of first sensing unit of the present embodiment and the shape of lower electrode 12 are L-shaped, the second sensing unit
Top electrode 21 and the shape of lower electrode 22 are in falling backward L-shaped, and in the top electrode of the first sensing unit 11 and the second sensing unit
It is formed respectively between top electrode 21 and between the lower electrode 12 of the first sensing unit and the lower electrode 22 of the second sensing unit
The bent gap being made of two sections of different circular arcs of bending direction, when be disposed on wall or on ceiling in use,
No matter test object moves linearly along which direction, all because cross the area difference of each sensing unit without generate "+it is defeated
The case where out " and "-output " cancels out each other, and then it is capable of detecting when test object.
In the present embodiment, the right edge 114 of the vertical edge portion 1a of the top electrode 11 of the first sensing unit passes through the first connection
Line 61 is electrically connected with the left side 213 of the vertical edge portion 2a of the top electrode 21 of the second sensing unit.The lower electrode of first sensing unit
The lower side 126 of 12 cross edge 1d is electrically connected with the second connecting line 62, the cross edge 2d of the lower electrode 22 of the second sensing unit
Upper side edge 225 be electrically connected with third connecting line 63.Second connecting line 62 and third connecting line 63 are for the mould respectively with outside
The input terminal connection of quasi- formula semiconductor devices or modulus hybrid semiconductor devices.In other embodiments, the first connecting line
61, the second connecting line 62 and third connecting line 63 also can be set in other positions.
In the present embodiment, the downside of the lower side 112 of the vertical edge portion 1a of the first sensing unit top electrode and cross edge 1b
Side 116 is linked to be the curved section of convex arch jointly, the lower side 122 and cross edge of the vertical edge portion 1c of electrode under the first sensing unit
The lower side 126 of 1d is linked to be the curved section of convex arch jointly;The upper side edge 215 of the cross edge 2b of second sensing unit top electrode
It is linked to be the curved section of convex arch jointly with the upper side edge 211 of vertical edge portion 2a, the cross edge 2d of electrode under the second sensing unit
The upper side edge 221 of upper side edge 225 and vertical edge portion 2c are linked to be the curved section of convex arch jointly.The top electrode of first sensing unit is perpendicular
The left side 113 of edge 1a and the left side 123 of lower electrode vertical edge portion 1c are the straight line extended along the vertical direction;Second
The right edge 224 of the vertical edge portion 2c of the right edge 214 and lower electrode of the top electrode vertical edge portion 2a of sensing unit is along vertical side
To the straight line of extension.It is arranged to above-mentioned shape i.e. and can guarantee the convenience of processing, while can ensure that rpyroelectric infrared sensing element has
There is higher detection sensitivity.
The utility model additionally provides a kind of pyroelectric infrared sensor comprising the sensitive member of above-mentioned rpyroelectric infrared
Part.
In the description of the present invention, it should be understood that used direction term " on ", "lower", "left", "right"
The orientation or positional relationship of equal instructions is to be based on the orientation or positional relationship shown in the drawings, and being merely for convenience of description, this is practical new
Type and simplified description, rather than the device or element of indication or suggestion meaning must have a particular orientation, with specific orientation
Construction and operation, therefore should not be understood as limiting the present invention.In addition, term " first ", " second " are only used for describing
Purpose is not understood to indicate or imply relative importance or implicitly indicates the quantity of indicated technical characteristic.
Obviously, it is practical without departing from this can to carry out various modification and variations to the utility model by those skilled in the art
Novel spirit and scope.If in this way, these modifications and variations of the present invention belong to the utility model claims and
Within the scope of its equivalent technologies, then the utility model is also intended to include these modifications and variations.
Claims (6)
1. a kind of rpyroelectric infrared sensing element, including pyroelectricity substrate, the first sensing unit and the second sensing unit, described
First sensing unit and the second sensing unit are arranged on the pyroelectricity substrate, and the first sensing unit and the second sensing unit
Reversed polarity it is connected in series;Each sensing unit has top electrode, the lower electrode being oppositely arranged with the top electrode and in institute
State the part being sandwiched between the top electrode and the lower electrode in pyroelectricity substrate;It is characterized in that, the first sensing unit
Top electrode and lower electrode shape it is L-shaped, the shape of the top electrode of the second sensing unit and lower electrode is in falling backward L-shaped;First
The top electrode of sensing unit and the top electrode of the second sensing unit are in same vertical direction;The top electrode of second sensing unit
Cross edge is located at the top of the top electrode of the first sensitive member, and the vertical edge portion of the top electrode of the second sensing unit is partly relative to the
The vertical edge portion of the top electrode of one sensing unit;
The upper side edge in the vertical edge portion of the top electrode of the first sensing unit and lower electrode is the convex arch of evagination, and first is sensitive single
The right edge in the vertical edge portion of first top electrode and lower electrode and the upper side edge of cross edge are linked to be the curved section of concave arc shape jointly, and second
The lower side in the vertical edge portion of the top electrode of sensing unit and lower electrode is the convex arch of evagination, the second sensing unit top electrode
And the left side in the vertical edge portion of lower electrode and the lower side of cross edge are linked to be the curved section of concave arc shape jointly, thus quick first
Feel between the top electrode of unit and the top electrode of the second sensing unit and the lower electrode of the first sensing unit with second it is sensitive singly
It is respectively formed bent gap between the lower electrode of member, the bent gap is made of two sections of different circular arcs of bending direction.
2. rpyroelectric infrared sensing element as described in claim 1, which is characterized in that the vertical edge of the first sensing unit top electrode
The lower side of the cross edge of the lower side in portion and the first sensing unit top electrode is linked to be the curved section of convex arch jointly, and first is quick
The lower side of the cross edge of electrode is linked to be dome jointly under the lower side and the first sensing unit in the vertical edge portion of electrode under sense unit
The curved section of arc;The vertical edge portion of the upper side edge of the cross edge of second sensing unit top electrode and the second sensing unit top electrode
Upper side edge is linked to be the curved section of convex arch jointly, the upper side edge of the cross edge of electrode and the second sensitive list under the second sensing unit
The upper side edge in the vertical edge portion of the lower electrode of member is linked to be the curved section of convex arch jointly.
3. rpyroelectric infrared sensing element as claimed in claim 1 or 2, which is characterized in that the top electrode of the first sensing unit
And the left side in the vertical edge portion of lower electrode is the straight line extended along the vertical direction;The top electrode vertical edge portion of second sensing unit
Right edge and the right edge in lower electrode vertical edge portion are the straight line extended along the vertical direction.
4. rpyroelectric infrared sensing element as described in claim 1, which is characterized in that the vertical edge of the first sensing unit top electrode
The right edge in portion is electrically connected by connecting line with the left side in the vertical edge portion of the second sensing unit top electrode.
5. rpyroelectric infrared sensing element as described in claim 1, which is characterized in that the material of the pyroelectricity substrate is heat
Release electroceramics.
6. a kind of pyroelectric infrared sensor, which is characterized in that the pyroelectric infrared sensor includes such as claim 1 to 5
Any one of described in rpyroelectric infrared sensing element.
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