CN209522917U - A kind of oil bath device for gas cylinder MOCVD deposition nickel - Google Patents
A kind of oil bath device for gas cylinder MOCVD deposition nickel Download PDFInfo
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- CN209522917U CN209522917U CN201821903919.1U CN201821903919U CN209522917U CN 209522917 U CN209522917 U CN 209522917U CN 201821903919 U CN201821903919 U CN 201821903919U CN 209522917 U CN209522917 U CN 209522917U
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- gas cylinder
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- cylinder
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- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 title claims abstract description 136
- 229910052759 nickel Inorganic materials 0.000 title claims abstract description 47
- 238000000151 deposition Methods 0.000 title claims abstract description 25
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 title claims abstract description 25
- 230000008021 deposition Effects 0.000 title claims abstract description 23
- 238000010438 heat treatment Methods 0.000 claims abstract description 49
- 238000012546 transfer Methods 0.000 claims abstract description 18
- 239000003638 chemical reducing agent Substances 0.000 claims description 25
- 239000013589 supplement Substances 0.000 claims description 23
- 239000000565 sealant Substances 0.000 claims description 22
- 230000003139 buffering effect Effects 0.000 claims description 14
- 230000008676 import Effects 0.000 claims description 10
- 238000005192 partition Methods 0.000 claims description 10
- 239000012530 fluid Substances 0.000 claims description 9
- 238000001802 infusion Methods 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 7
- 230000009469 supplementation Effects 0.000 claims description 3
- 230000008901 benefit Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 10
- 239000011248 coating agent Substances 0.000 abstract description 6
- 238000000576 coating method Methods 0.000 abstract description 6
- 238000010923 batch production Methods 0.000 abstract description 2
- 230000006315 carbonylation Effects 0.000 abstract description 2
- 238000005810 carbonylation reaction Methods 0.000 abstract description 2
- 239000012535 impurity Substances 0.000 abstract description 2
- 238000005272 metallurgy Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 134
- 238000006243 chemical reaction Methods 0.000 description 10
- 230000006872 improvement Effects 0.000 description 8
- 238000007747 plating Methods 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- XTEGARKTQYYJKE-UHFFFAOYSA-M Chlorate Chemical compound [O-]Cl(=O)=O XTEGARKTQYYJKE-UHFFFAOYSA-M 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010224 classification analysis Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000003305 oil spill Substances 0.000 description 1
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
- 231100000167 toxic agent Toxicity 0.000 description 1
- 239000003440 toxic substance Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
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- Chemical Vapour Deposition (AREA)
Abstract
The utility model discloses a kind of oil bath devices for gas cylinder MOCVD deposition nickel, belong to carbonylation production field of metallurgy, solve the problems, such as the non-uniform of the uneven caused nickel layer thickness of heating temperature.The utility model includes gas cylinder heating room, the first Heat-transfer Oil Pump and the hotline heater being connected on heat conducting oil pipe, and gas cylinder heating indoor location has at least one gas cylinder to be deposited.The utility model is constantly recycled using conduction oil to be heated indoor multiple gas cylinders to gas cylinder while being heated the batch production, it can be achieved that the MOCVD uniform deposition product of gas cylinder, high production efficiency；The utility model is evenly heated gas cylinder by oil bath, keep nickel coating formed in gas cylinder uniform, fine and close, smooth, the purity requirements of gas cylinder internal can sufficiently be met, and be wherein formed by that nickel coating impurity content is low, the use demand of special gas can be met.
Description
Technical field
The utility model belongs to carbonylation production field of metallurgy, and in particular to a kind of oil bath for gas cylinder MOCVD deposition nickel
Device.
Background technique
With essence harsh in the fast development of modern electronics industry, especially super large-scale integration (VLSI) production
Close processing request, using the biggish high-purity gas of chip factory's usage amount as representative, to the purity of raw material before 30 years
99.9% rises to current 99.9999%, has reached 99.9999999% individually.So harsh gas purity is to packing material
The purity requirements of gas cylinder internal are also higher and higher.Polishing, nickel phosphor plating processing carried out in traditional handicraft to interior of steel bottle etc. is
It is difficult to meet pollution problem of the packing material to gas in hyperpure gas production and transportation dispatching.Conventional nickel plating is using plating simultaneously
Technique, nickel are anode, and plating piece is cathode, and electrolyte is applied direct current and obtained on cathode surface based on sulfate and chlorate
Deposited to metallic nickel, but there are current density unevenness to cause thickness of coating difference big for electroplating technology, be easy to produce hydrogen embrittlement, fulcrum at
For blind area, and the problems such as size is larger and complex-shaped plating piece operation is difficult to realize and inefficiency.It is therefore necessary to
Develop new nickel deposition process.Carrying out MOCVD deposition nickel using carbonyl nickel is a kind of feasible alternative techniques.But due to carbonyl nickel
Manufacturing enterprise is less, and the relevant technologies are in a few countries and business monopoly state.By to MOCVD nickel deposition process, device
Information collect and classification analysis, current MOCVD depositing operation be primarily present following problems: (1) carbonyl nickel be extremely toxic substance,
Carrying out MOCVD deposition nickel using carbonyl nickel, there is a certain security risk；(2) reaction temperature to the sedimentation time of deposited nickel layer,
Deposition surface pattern and the thickness uniformity have strong influence；(3) internal diameter becomes smaller after bottle mouth of gas cylinder internal thread buckle deposition nickel, nothing
Method is normally connect with original connector.
Utility model content
The purpose of the utility model is to provide a kind of oil bath devices for gas cylinder MOCVD deposition nickel, to solve heating temperature
The non-uniform problem of the uneven caused nickel layer thickness of degree.
The technical solution of the utility model is: a kind of oil bath device for gas cylinder MOCVD deposition nickel, including is connected on and leads
Gas cylinder heating room, the first Heat-transfer Oil Pump and hotline heater on hot oil pipeline, gas cylinder heating indoor location have at least one
Gas cylinder to be deposited.
Gas cylinder heating room includes cylindric heating room middle section, import variable diameter as a further improvement of the utility model,
Section and outlet reducer, import reducer and outlet reducer are located at the both ends in heating room middle section, in import reducer and
Outlet reducer and the junction for heating room middle section are respectively provided with two partitions, and aperture, similar two partitions are evenly equipped on partition
On aperture be staggeredly arranged.The effect of partition is to guarantee that gas cylinder heats indoor conduction oil and uniformly spreads, each point contacted with gas cylinder
Temperature is uniform.
As a further improvement of the utility model, further include conduction oil sealant supplement cylinder and conduction oil overflow tank, heats in room
Section top is equipped with buffering connector, and conduction oil overflow tank is connected with buffering connector by buffering pipe, heating room middle section top
Portion is equipped with fluid infusion connector, and fluid infusion connector passes through liquid supplementation pipe close to outlet reducer, conduction oil sealant supplement cylinder and fluid infusion connector
Road is connected, and is equipped with exhaust outlet at the top of conduction oil sealant supplement cylinder and conduction oil overflow tank and is communicated with the atmosphere.Conduction oil sealant supplement cylinder and
Conduction oil overflow tank can cope with the change of expanding with heat and contract with cold of conduction oil, and conduction oil sealant supplement cylinder is for supplementing conduction oil, conduction oil overflow
Tank is used for the conduction oil that access overflow goes out.Fluid infusion connector is positioned close to the position of outlet reducer, the conduction oil covered
It can be flowed out in time by outlet reducer, prevent gas cylinder from heating indoor conduction oil and generate temperature fluctuation.
It is respectively provided with a temperature measuring point at heating room middle section both ends as a further improvement of the utility model, is respectively used to
Measure feed liquor and the out temperature of liquid.
Gas cylinder is mounted on gas cylinder heating interior, gas by passing in and out gas connector as a further improvement of the utility model,
Bottle heating ceiling portion is equipped at least one gas cylinder installing port, gas cylinder installing port and disengaging gas connector top by flanged joint,
By flanged joint, disengaging gas connector is interior to be equipped with air inlet pipe and an air outlet pipe for gas cylinder and disengaging gas connector lower end.Pass through disengaging
The Seal Design of gas connector and gas cylinder and gas cylinder heating room, ensure that safety and the environment friendly of production.
The bottleneck upper surface of gas cylinder is higher than buffering connector 1-2cm.The bottleneck of gas cylinder not directly through heat-conducting oil heating so that
Nickel plating thickness accordingly reduces at bottleneck screw thread, due to preventing bottle mouth of gas cylinder internal thread buckle internal diameter after depositing nickel from becoming smaller can not with it is original
Connector normally connects.
Conduction oil sealant supplement cylinder top is equipped with overflow port as a further improvement of the utility model, and overflow port passes through first
Connecting pipe is connected with conduction oil overflow tank.Conduction oil in conduction oil sealant supplement cylinder can be flowed to conduction oil overflow by overflow port
Tank prevents conduction oil from emerging from conduction oil sealant supplement cylinder.
Also connect as a further improvement of the utility model, by second between conduction oil sealant supplement cylinder and conduction oil overflow tank
It threads a pipe and is connected, the second connecting pipe is equipped with the second Heat-transfer Oil Pump.By the second Heat-transfer Oil Pump, in conduction oil overflow tank
Conduction oil is reflowable to conduction oil sealant supplement cylinder, on the one hand can supplement the conduction oil in conduction oil sealant supplement cylinder, on the other hand can protect
Demonstrate,prove the overflow volume in conduction oil overflow tank.
First filter is equipped in the inlet of the first Heat-transfer Oil Pump as a further improvement of the utility model,.
The second filter is equipped in the inlet of the second Heat-transfer Oil Pump as a further improvement of the utility model,.
The beneficial effects of the utility model are:
Indoor multiple gas cylinders are heated to gas cylinder while being heated 1. the utility model is constantly recycled using conduction oil,
The batch production of the MOCVD uniform deposition product of gas cylinder, high production efficiency can be achieved；
2. the utility model is evenly heated gas cylinder by oil bath, make nickel coating formed in gas cylinder uniformly, cause
It is close, smooth, it can sufficiently meet the purity requirements of gas cylinder internal, and it is low to be wherein formed by nickel coating impurity content, can expire
The use demand of sufficient special gas；
3. the utility model makes to pass in and out gas connector and gas cylinder by flange and gas cylinder heats room and is tightly connected, ensure that
The safety of production and environment friendly.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the scheme of installation of gas cylinder in the utility model.
In figure, 1- passes in and out gas connector；101- air inlet pipe；102- escape pipe；2- gas cylinder；3- gas cylinder heats room；301- adds
Hot cell middle section；302- import reducer；303- fluid infusion connector；304- buffers connector；305- partition；306- temperature measuring point；
307- gas cylinder installing port；308- exports reducer；4- hotline heater；5- heat conducting oil pipe；6- liquid supplementation channel；7- conduction oil
Sealant supplement cylinder；701- overflow port；8- flange；The first Heat-transfer Oil Pump of 9-；10- buffering pipe；11- conduction oil overflow tank；12- first connects
It threads a pipe；The second connecting pipe of 13-；The second Heat-transfer Oil Pump of 14-；15- first filter；The second filter of 16-.
Specific embodiment
The utility model is described in detail with reference to embodiments.
As shown in Figure 1 and Figure 2, a kind of oil bath device for gas cylinder MOCVD deposition nickel, including it is connected on heat conducting oil pipe 5
On gas cylinder heating room 3, the first Heat-transfer Oil Pump 9 and hotline heater 4, gas cylinder heating is equipped at least one gas cylinder in room 3
2。
Gas cylinder heats room 3 and includes cylindric heating room middle section 301, import reducer 302 and export reducer 308, into
Mouth reducer 302 and outlet reducer 308 are located at the both ends in heating room middle section 7, in import reducer 302 and export variable diameter
Section 308 and the junction in heating room middle section 7 are respectively provided with two partitions 305, are evenly equipped with aperture on partition 305, similar two every
Aperture on plate 305 is staggeredly arranged.
It further include conduction oil sealant supplement cylinder 7 and conduction oil overflow tank 11, heating 301 top of room middle section is equipped with buffering connector
304, conduction oil overflow tank 11 is connected with buffering connector 304 by buffering pipe 10, is heated to be equipped at the top of room middle section 301 and be mended
Liquid connector 303, fluid infusion connector 303 pass through benefit close to outlet reducer 308, conduction oil sealant supplement cylinder 7 and fluid infusion connector 303
Liquid pipe road 6 is connected, and is equipped with exhaust outlet at the top of conduction oil sealant supplement cylinder 7 and conduction oil overflow tank 11.
A temperature measuring point 306 is respectively provided at heating 301 both ends of room middle section.
Gas cylinder 2 is mounted in gas cylinder heating room 3 by passing in and out gas connector 1, and gas cylinder heats and is equipped at least one at the top of room 3
Gas cylinder installing port 307, gas cylinder installing port 307 are connect with disengaging 1 top of gas connector by flange 8, and gas cylinder 2 is connect with disengaging gas
1 lower end of part is connected by flange 8, is equipped with air inlet pipe 101 and escape pipe 102 in disengaging gas connector 1.
The bottleneck upper surface of gas cylinder 2 is higher than buffering connector (304) 1-2cm.
7 top of conduction oil sealant supplement cylinder is equipped with overflow port 701, and overflow port 701 passes through the first connecting pipe 12 and thermally conductive oil spill
Stream tank 11 is connected.
Also it is connected by the second connecting pipe 13 between conduction oil sealant supplement cylinder 7 and conduction oil overflow tank 11, the second connection
Pipeline 13 is equipped with the second Heat-transfer Oil Pump 14.
First filter 15 is equipped in the inlet of the first Heat-transfer Oil Pump 9.
The second filter 16 is equipped in the inlet of the second Heat-transfer Oil Pump 14.
The precursors of MOCVD are nickel carbonyl gas, participate in the mixed gas that reaction gas is carbonyl nickel and CO.Production
Method is as follows:
A, the bottleneck of gas cylinder 2 is first subjected to following reduction processing: acid etching 30-60min is carried out to bottleneck with hydrochloric acid, then
Washing, finally with being dried with nitrogen；Gas cylinder 2 is mounted in gas cylinder heating room 3 by passing in and out gas connector 1, gas cylinder installing port 307
It is connect with disengaging 1 top of gas connector by flange 8, gas cylinder 2 is connect with disengaging 1 lower end of gas connector by flange 8, gas cylinder 2
Bottleneck upper surface be higher than buffering connector (304) 1-2cm, the bottleneck of gas cylinder 2 is not directly through heat-conducting oil heating, at bottleneck screw thread
Nickel plating thickness accordingly reduces, and due to previously carrying out reduction processing to bottleneck with hydrochloric acid, anti-corrosion demand can be both met after nickel plating,
Close connection can also be realized in the case where not changing original jointing；Air inlet pipe 101 is connected with nitrogen storage tank, will be gone out
Tracheae 102 is connected with decomposer, and nitrogen is passed through in gas cylinder 2 by air inlet pipe 101 and carries out pressure test；
B, air inlet pipe 101 is connected with CO gas reservoir, CO gas is passed through in gas cylinder 2 by air inlet pipe 101 and is carried out
Gas after displacement is expelled to decomposer by escape pipe 102 by pressure test and CO gas displacement；
C, after test passes, Heat-transfer Oil Pump 9 and hotline heater 4, under the action of Heat-transfer Oil Pump 9, conduction oil are opened
After the heating of hotline heater 4, gas cylinder is entered by import reducer 302 and heats room 3, after conduction oil heats gas cylinder 2,
Gas cylinder is flowed out by outlet reducer 308 and heats room 3, is again introduced into hotline heater 4, so circulation constantly carries out gas cylinder 2
Heating；
D, carbonyl nickel and the mixed gas of CO are passed through into gas cylinder 2 by air inlet pipe 101, in the heating condition of conduction oil
Under, it carries out MOCVD and deposits nickel, one layer of uniform, fine and close, smooth nickel coating is deposited on 2 inner wall of gas cylinder.
Embodiment 1,
In the mixed gas of carbonyl nickel and CO, the molar fraction of carbonyl nickel is 30%, the mixing of carbonyl nickel and CO in gas cylinder 2
The charge flow rate of gas is 600g/min, and the temperature into the conduction oil of gas cylinder heating room 3 is 120 DEG C, gas cylinder 2 in reaction process
Internal pressure is 2KPa.Obtained about 25 μm of carbonyl nickel deposited nickel layer thickness of the present embodiment, and it is fine and close, uniform, smooth.
Embodiment 2,
In the mixed gas of carbonyl nickel and CO, the molar fraction of carbonyl nickel is 30%, the mixing of carbonyl nickel and CO in gas cylinder 2
The charge flow rate of gas is 600g/min, and the temperature into the conduction oil of gas cylinder heating room 3 is 150 DEG C, gas cylinder 2 in reaction process
Internal pressure is 2KPa.Obtained about 65 μm of carbonyl nickel deposited nickel layer thickness of the present embodiment, and it is fine and close, uniform, smooth.
Embodiment 3,
In the mixed gas of carbonyl nickel and CO, the molar fraction of carbonyl nickel is 30%, the mixing of carbonyl nickel and CO in gas cylinder 2
The charge flow rate of gas is 600g/min, and the temperature into the conduction oil of gas cylinder heating room 3 is 180 DEG C, gas cylinder 2 in reaction process
Internal pressure is 2KPa.Obtained about 333 μm of carbonyl nickel deposited nickel layer thickness of the present embodiment, and it is fine and close, uniform, smooth.
Embodiment 4,
In the mixed gas of carbonyl nickel and CO, the molar fraction of carbonyl nickel is 30%, the mixing of carbonyl nickel and CO in gas cylinder 2
The charge flow rate of gas is 1200g/min, and the temperature into the conduction oil of gas cylinder heating room 3 is 150 DEG C, gas cylinder in reaction process
2 internal pressures are 2KPa.Obtained about 95 μm of carbonyl nickel deposited nickel layer thickness of the present embodiment, and it is fine and close, uniform, smooth.
Embodiment 5,
In the mixed gas of carbonyl nickel and CO, the molar fraction of carbonyl nickel is 30%, the mixing of carbonyl nickel and CO in gas cylinder 2
The charge flow rate of gas is 2000g/min, and the temperature into the conduction oil of gas cylinder heating room 3 is 150 DEG C, gas cylinder in reaction process
2 internal pressures are 2KPa.Obtained about 107 μm of carbonyl nickel deposited nickel layer thickness of the present embodiment, and it is fine and close, uniform, smooth.
Embodiment 6,
In the mixed gas of carbonyl nickel and CO, the molar fraction of carbonyl nickel is 30%, the mixing of carbonyl nickel and CO in gas cylinder 2
The charge flow rate of gas is 1200g/min, and the temperature into the conduction oil of gas cylinder heating room 3 is 150 DEG C, gas cylinder in reaction process
2 internal pressures are 1KPa.Obtained about 100 μm of carbonyl nickel deposited nickel layer thickness of the present embodiment, and it is fine and close, uniform, smooth.
Embodiment 7,
In the mixed gas of carbonyl nickel and CO, the molar fraction of carbonyl nickel is 30%, the mixing of carbonyl nickel and CO in gas cylinder 2
The charge flow rate of gas is 1200g/min, and the temperature into the conduction oil of gas cylinder heating room 3 is 150 DEG C, gas cylinder in reaction process
2 internal pressures are 3KPa.Obtained about 93 μm of carbonyl nickel deposited nickel layer thickness of the present embodiment, and it is fine and close, uniform, smooth.
Embodiment 8,
In the mixed gas of carbonyl nickel and CO, the molar fraction of carbonyl nickel is 17%, the mixing of carbonyl nickel and CO in gas cylinder 2
The charge flow rate of gas is 1200g/min, and the temperature into the conduction oil of gas cylinder heating room 3 is 150 DEG C, gas cylinder in reaction process
2 internal pressures are 2KPa.Obtained about 36 μm of carbonyl nickel deposited nickel layer thickness of the present embodiment, and it is fine and close, uniform, smooth.
Embodiment 9,
In the mixed gas of carbonyl nickel and CO, the molar fraction of carbonyl nickel is 10%, the mixing of carbonyl nickel and CO in gas cylinder 2
The charge flow rate of gas is 1200g/min, and the temperature into the conduction oil of gas cylinder heating room 3 is 150 DEG C, gas cylinder in reaction process
2 internal pressures are 2KPa.Obtained about 8 μm of carbonyl nickel deposited nickel layer thickness of the present embodiment, and it is fine and close, uniform, smooth.
Claims (10)
1. a kind of oil bath device for gas cylinder MOCVD deposition nickel, it is characterised in that: including being connected on heat conducting oil pipe (5)
Gas cylinder heating room (3), the first Heat-transfer Oil Pump (9) and hotline heater (4), gas cylinder heating room (3) is interior be equipped with to
A few gas cylinder (2).
2. a kind of oil bath device for gas cylinder MOCVD deposition nickel according to claim 1, it is characterised in that: the gas
Bottle heating room (3) includes cylindric heating room middle section (301), import reducer (302) and outlet reducer (308), import
Reducer (302) and outlet reducer (308) are located at the both ends of heating room middle section (301), in import reducer (302) and
Outlet reducer (308) and the junction for heating room middle section (301) are respectively provided with two partitions (305), and partition is evenly equipped on (305)
Aperture, the aperture on similar two partitions (305) are staggeredly arranged.
3. a kind of oil bath device for gas cylinder MOCVD deposition nickel according to claim 2, it is characterised in that: further include
Conduction oil sealant supplement cylinder (7) and conduction oil overflow tank (11), heating room middle section (301) top is equipped with buffering connector (304), described
Conduction oil overflow tank (11) is connected with buffering connector (304) by buffering pipe (10), is set at the top of heating room middle section (301)
Have fluid infusion connector (303), fluid infusion connector (303) is close to outlet reducer (308), the conduction oil sealant supplement cylinder (7) and benefit
Liquid connector (303) is connected by liquid supplementation channel (6), is all provided at the top of conduction oil sealant supplement cylinder (7) and conduction oil overflow tank (11)
There is exhaust outlet.
4. a kind of oil bath device for gas cylinder MOCVD deposition nickel according to claim 3, it is characterised in that: heating
Room middle section (301) both ends are respectively provided with a temperature measuring point (306).
5. a kind of oil bath device for gas cylinder MOCVD deposition nickel, feature described in any one of -4 exist according to claim 1
In: gas cylinder (2) is mounted in gas cylinder heating room (3) by passing in and out gas connector (1), and gas cylinder heats to be equipped at least at the top of room (3)
One gas cylinder installing port (307), gas cylinder installing port (307) are connect with disengaging gas connector (1) top by flange (8), gas cylinder
(2) it is connect, air inlet pipe (101) are equipped in disengaging gas connector (1) and gone out by flange (8) with disengaging gas connector (1) lower end
Tracheae (102).
6. a kind of oil bath device for gas cylinder MOCVD deposition nickel according to claim 5, it is characterised in that: the gas
The bottleneck upper surface of bottle (2) is higher than buffering connector (304) 1-2cm.
7. a kind of oil bath device for gas cylinder MOCVD deposition nickel according to claim 3, it is characterised in that: described to lead
Hot oil sealant supplement cylinder (7) top is equipped with overflow port (701), and overflow port (701) passes through the first connecting pipe (12) and conduction oil overflow
Tank (11) is connected.
8. a kind of oil bath device for gas cylinder MOCVD deposition nickel according to claim 7, it is characterised in that: described to lead
Also it is connected by the second connecting pipe (13) between hot oil sealant supplement cylinder (7) and conduction oil overflow tank (11), the second connecting pipe
(13) the second Heat-transfer Oil Pump (14) are equipped with.
9. a kind of oil bath device for gas cylinder MOCVD deposition nickel according to claim 8, it is characterised in that: first
The inlet of Heat-transfer Oil Pump (9) is equipped with first filter (15).
10. a kind of oil bath device for gas cylinder MOCVD deposition nickel according to claim 9, it is characterised in that: second
The inlet of Heat-transfer Oil Pump (14) is equipped with the second filter (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821903919.1U CN209522917U (en) | 2018-11-19 | 2018-11-19 | A kind of oil bath device for gas cylinder MOCVD deposition nickel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821903919.1U CN209522917U (en) | 2018-11-19 | 2018-11-19 | A kind of oil bath device for gas cylinder MOCVD deposition nickel |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209522917U true CN209522917U (en) | 2019-10-22 |
Family
ID=68213338
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821903919.1U Active CN209522917U (en) | 2018-11-19 | 2018-11-19 | A kind of oil bath device for gas cylinder MOCVD deposition nickel |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209522917U (en) |
-
2018
- 2018-11-19 CN CN201821903919.1U patent/CN209522917U/en active Active
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Effective date of registration: 20240218 Address after: 737100 No. 2 Lanzhou Road, Beijing Road Street, Jinchuan District, Jinchang City, Gansu Province Patentee after: Jinchuan Group Nickel Cobalt Co.,Ltd. Country or region after: China Address before: 737103 No. 98, Jinchuan Road, Jinchang, Gansu Patentee before: JINCHUAN GROUP Co.,Ltd. Country or region before: China |