CN209513424U - A kind of silicon wafer strength test tooling - Google Patents
A kind of silicon wafer strength test tooling Download PDFInfo
- Publication number
- CN209513424U CN209513424U CN201920194123.1U CN201920194123U CN209513424U CN 209513424 U CN209513424 U CN 209513424U CN 201920194123 U CN201920194123 U CN 201920194123U CN 209513424 U CN209513424 U CN 209513424U
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- Prior art keywords
- testboard
- sliding
- docking
- fixed
- silicon wafer
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- 238000012360 testing method Methods 0.000 title claims abstract description 43
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 34
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 34
- 239000010703 silicon Substances 0.000 title claims abstract description 34
- 238000003032 molecular docking Methods 0.000 claims abstract description 34
- 238000005096 rolling process Methods 0.000 claims abstract description 15
- 239000007787 solid Substances 0.000 claims description 4
- 238000009423 ventilation Methods 0.000 claims description 3
- 238000009434 installation Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
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- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The utility model discloses a kind of silicon wafer strength test toolings, including tool shell, testboard, combine kelly and sliding strip, the sliding strip is movably arranged on the outer surface of upper of testboard, and it is fixed between sliding strip and testboard by docking bottom plate docking, the upper end outer surface of the docking bottom plate is fixedly installed with spring top pillar, and the lower inner surface for docking bottom plate is equidistantly movably installed with four groups of rolling rods, the upper end outer surface of the docking bottom plate is fixedly installed with connection loop bar close to the side of spring top pillar, the forward outer surface of the testboard, which is movably installed with sliding and pushes away, buckles, the sliding pushes away and docks fixation by rotating strut between button and connection loop bar;The setting that the utility model passes through combination kelly and sliding strip, so that the test fixture in the utility model has slidingtype fixed structure, enable it test operation can be fixed to the silicon wafer of different size, so that the part replacement of test fixture is more convenient, it is more practical.
Description
Technical field
The utility model belongs to silicon test technical field, is related to a kind of strength test tooling, and specifically a kind of silicon wafer is strong
Spend test fixture.
Background technique
The strength test tooling is a kind of device that a kind of pair of silicon wafer intensity is tested, and user is by the silicon of required test
Piece sample is placed in strength test tooling, using the fixed silicon chip sample of fastener, by starting strength test tooling, so that intensity
The measuring head of test fixture moves down, so that measuring head striking silicon slice sample, user can pass through the silicon after observation shock
Piece sample obtains the intensity data of silicon chip sample;
But existing strength test tooling, when in use there is also certain drawbacks, conventional strength test fixture, which does not have, to be slided
Dynamic formula adjustment structure so that strength test tooling can not the silicon chip sample of different sizes to shape specification be fixed test behaviour
Make, reduce the scope of application of strength test tooling, the measuring head of conventional strength test fixture is fixed structure, works as strength test
When the measuring head of tooling generates wear phenomenon, user can not carry out replacement operation to it in time, bring to user certain
Inconvenience now provides a solution to solve drawbacks described above.
Utility model content
The purpose of this utility model is to provide a kind of silicon wafer strength test toolings.
The purpose of this utility model can be achieved through the following technical solutions:
A kind of silicon wafer strength test tooling, including tool shell, testboard, combination kelly and sliding strip, the sliding
Strip is movably arranged on the outer surface of upper of testboard, and slides and fixed between strip and testboard by docking bottom plate docking,
The upper end outer surface of the docking bottom plate is fixedly installed with spring top pillar, and the equidistant activity peace of the lower inner surface for docking bottom plate
Equipped with four groups of rolling rods, the upper end outer surface of the docking bottom plate is fixedly installed with connection loop bar close to the side of spring top pillar,
The forward outer surface of the testboard, which is movably installed with sliding and pushes away, buckles, and the sliding pushes away between button and connection loop bar through rotation support
Bar docking is fixed, and the bottom of the tool shell is movably installed with measuring head, and passes through between tool shell and measuring head and combine
Kelly docking is fixed, and the upper inside surface of the combination kelly offers fixed translot, and the outer surface of upper for combining kelly is solid
Surely it is socketed with docking washer, fixation, the combination kelly are docked by abutted flange between combination kelly and the tool shell
Front inner surface offer lifting sliding slot.
Further, the outer surface of upper of the testboard is fixedly installed with fixing strip close to the side of sliding strip,
And the side inner surface of testboard is movably installed with pull inner box, passes through limit sliding chutes pair between the testboard and pull inner box
Connect fixation.
Further, two side external surfaces of the pull inner box are fixedly installed with limited cap, the tool shell it is upper
Portion outer surface is movably installed with upturning lid, and the outer surface of upper of tool shell is movably installed with two groups close to the side of upturning lid
Fixation pushes away button.
Further, the front of the testboard offers several groups ventilation slot, a side external surface of the tool shell
Be movably installed with pushing handle, the outer surface of upper fixing sleeve for pushing handle is connected to Anti-slip cover, the abutted flange it is upper
Portion's inner surface, which runs through, offers fixed circular groove.
Further, the outer surface of the rotation strut is fixedly installed with two groups of mandrils, and rotates one end appearance of strut
Face offers fixed thread, and another side external surface of the tool shell is fixedly installed with telescopic handle.
Further, the sliding pushes away button and the fixed outer surface for pushing away button offers anti-skidding shading, and sliding push away button with
The fixed fixed form for pushing away button is that buckle is fixed.
Further, the both ends inner surface of the rolling rod is fixedly installed with rotation axis, and the outer surface of rolling rod is solid
Surely it is socketed with striped casing.
The utility model has the beneficial effects that the utility model is surveyed in user using the intensity by setting sliding strip
When test operation is fixed in the silicon wafer of trial work dress different model, user utilizes rolling rod by pushing sliding to push away button
Driving docking bottom plate contacts so that docking bottom plate drives sliding strip to laterally move when sliding strip is generated with silicon wafer side
Afterwards, user pushes away button by rotating sliding, so that sliding pushes away button driving rotation strut rotation, the mandril for rotating strut is caught in cunning
Strip and the fluting for docking bottom plate are moved, the sliding strip after movement is fixed, it can be to different sizes using sliding strip
Silicon wafer be fixed, to effectively increase the use scope of the strength test tooling, kelly is combined by setting, works as survey
When wear phenomenon occurs in examination head, user is by rotation measuring head, so that measuring head divides with the fixation translot for combining kelly
From by the fixation translot of new measuring head alignment combination kelly, insertion measuring head, carries out measuring head by 90 degree of lateral rotation
It is fixed, so that the strength test tooling has combined type fixed structure, replacement maintenance behaviour is carried out to its components convenient for user
Make, it is easy to use.
Detailed description of the invention
In order to facilitate the understanding of those skilled in the art, the utility model will be further described below with reference to the accompanying drawings.
Fig. 1 is the utility model structure diagram;
Fig. 2 is the overall structure figure of the utility model combination kelly;
Fig. 3 is the overall structure figure of the utility model sliding strip.
In figure: 1, sliding pushes away button;2, limit sliding chutes;3, pull inner box;4, fixing strip;5, tool shell;6, fixation pushes away
Button;7, upturning lid;8, handle is pushed;9, measuring head;10, testboard;11, strip is slided;12, sliding slot is gone up and down;13, rendezvous method
It is blue;14, kelly is combined;15, washer is docked;16, fixed translot;17, rolling rod;18, bottom plate is docked;19, loop bar is connected;20,
Rotate strut;21, spring top pillar.
Specific embodiment
As shown in Figure 1-3, a kind of silicon wafer strength test tooling, including tool shell 5, testboard 10, combination kelly 14 with
Slide strip 11, sliding strip 11 is movably arranged on the outer surface of upper of testboard 10, and slide strip 11 and testboard 10 it
Between fixed by the docking docking of bottom plate 18, the upper end outer surface of docking bottom plate 18 is fixedly installed with spring top pillar 21, and docks bottom
The lower inner surface of plate 18 is equidistantly movably installed with four groups of rolling rods 17, can make to dock bottom plate using four groups of rolling rods 17
18 laterally move operation, and the upper end outer surface of docking bottom plate 18 is fixedly installed with connection loop bar close to the side of spring top pillar 21
19, the forward outer surface of testboard 10, which is movably installed with sliding and pushes away, buckles 1, and sliding, which pushes away, passes through rotation between button 1 and connection loop bar 19
The docking of strut 20 is fixed, and the bottom of tool shell 5 is movably installed with measuring head 9, and passes through between tool shell 5 and measuring head 9
It combines the docking of kelly 14 to fix, the upper inside surface of combination kelly 14 offers fixed translot 16, and combines the top of kelly 14
Outer surface fixing sleeve is connected to docking washer 15, combines and docks fixation by abutted flange 13 between kelly 14 and tool shell 5, right
The installation of 13 pairs of acting flange combination kellies 14 plays main fixed function, and the front inner surface of combination kelly 14 offers lifting sliding slot
12。
The outer surface of upper of testboard 10 is fixedly installed with fixing strip 4, and testboard close to the side of sliding strip 11
10 side inner surface is movably installed with pull inner box 3, is docked admittedly between testboard 10 and pull inner box 3 by limit sliding chutes 2
It is fixed, the storage space of test fixture can be increased using pull inner box 3.
Two side external surfaces of pull inner box 3 are fixedly installed with limited cap, the outer surface of upper activity installation of tool shell 5
There is upturning lid 7, and the outer surface of upper of tool shell 5 is movably installed with two groups of fixations close to the side of upturning lid 7 and pushes away button 6, Gu
Surely the upturning lid 7 after pushing away 6 pairs of closures of button plays fixed function.
The front of testboard 10 offers several groups ventilation slot, and a side external surface of tool shell 5 is movably installed with pushing
Handle 8, the outer surface of upper fixing sleeve for pushing handle 8 are connected to Anti-slip cover, and the upper inside surface of abutted flange 13, which runs through, to be offered
Fixed circular groove, pressing, which pushes handle 8, can drive measuring head 9 to move down.
The outer surface of rotation strut 20 is fixedly installed with two groups of mandrils, and one end outer surface for rotating strut 20 offers admittedly
Determine screw thread, another side external surface of tool shell 5 is fixedly installed with telescopic handle, and tool shell can be carried by holding telescopic handle
5。
Sliding pushes away button 1 and the fixed outer surface for pushing away button 6 and offers anti-skidding shading, and sliding pushes away button 1 and the fixed button 6 that pushes away
Fixed form is that buckle is fixed, and anti-skidding shading can increase sliding and push away button 1 and the fixed frictional force for pushing away button 6.
The both ends inner surface of rolling rod 17 is fixedly installed with rotation axis, and the outer surface fixing sleeve of rolling rod 17 is connected to item
Line casing, striped casing avoid rolling rod 17 from having skidded phenomenon during rotation.
A kind of silicon wafer strength test tooling, when in use, the silicon wafer of required test is placed on testboard 10 by user
Top pushes sliding strip 11 that it is fixed using fixing strip 4, and user pushes handle 8 by pressing, utilizes gear
The lifting driving combination kelly 14 of sliding slot 12 is driven through to move down so that 9 striking silicon slice surface of measuring head, to silicon wafer intensity into
Row test, user carry out maintenance behaviour to the components in tool shell 5 by pushing the fixed button 6 that pushes away that can open upturning lid 7
Make, user pull pull inner box 3, pull inner box 3 is extracted out using limit sliding chutes 2, can be to test using pull inner box 3 after
Silicon wafer be collected operation, using abutted flange 13 can to combination kelly 14 installation play docking fixed function so that
Being more firmly mounted for combination kelly 14, it is more practical.
The utility model utilizes the silicon wafer of the strength test tooling different model by setting sliding strip 11, in user
When test operation is fixed, user drives docking bottom plate 18 by pushing sliding to push away button 1, using rolling rod 17, makes
Bottom plate 18, which must be docked, drives sliding strip 11 to laterally move, after sliding strip 11 and silicon wafer side generates contact, user
Button 1 is pushed away by rotating sliding, so that sliding pushes away 1 driving rotation strut 20 of button and rotates, the mandril for rotating strut 20 is caught in sliding
Strip 11 and the fluting for docking bottom plate 18, are fixed the sliding strip 11 after movement, can be to not using sliding strip 11
Silicon wafer with size is fixed, so that the use scope of the strength test tooling is effectively increased, by the way that composite card is arranged
Bar 14, when there is wear phenomenon in measuring head 9, user by rotation measuring head 9 so that measuring head 9 with combine kelly
14 fixation translot 16 separates, and by the fixation translot 16 of the new alignment combination kelly 14 of measuring head 9, is inserted into measuring head 9, laterally turns
It is 90 degree dynamic, measuring head 9 is fixed, so that the strength test tooling has combined type fixed structure, is convenient for user couple
Its components carries out replacement attended operation, easy to use.
Above content is only to the utility model structure example and explanation, the technology people of affiliated the art
Member makes various modifications or additions to the described embodiments or is substituted in a similar manner, without departing from reality
With novel structure or beyond the scope defined by this claim, all should belong to the protection range of the utility model.
Claims (7)
1. a kind of silicon wafer strength test tooling, which is characterized in that including tool shell (5), testboard (10), combination kelly (14)
With sliding strip (11), sliding strip (11) is movably arranged on the outer surface of upper of testboard (10), and slides strip
(11) it is fixed between testboard (10) by docking bottom plate (18) docking, the upper end outer surface of docking bottom plate (18) is fixed
It is equipped with spring top pillar (21), and the lower inner surface for docking bottom plate (18) is equidistantly movably installed with four groups of rolling rods (17),
The upper end outer surface of docking bottom plate (18) is fixedly installed with connection loop bar (19) close to the side of spring top pillar (21), described
The forward outer surface of testboard (10), which is movably installed with sliding and pushes away, buckles (1), the sliding push away button (1) with connect between loop bar (19)
It is fixed by rotation strut (20) docking, the bottom of the tool shell (5) is movably installed with measuring head (9), and tool shell
(5) it is fixed between measuring head (9) by combining kelly (14) docking, the upper inside surface of combination kelly (14) offers
Fixed translot (16), and the outer surface of upper fixing sleeve for combining kelly (14) is connected to docking washer (15), the combination kelly
(14) fixation is docked by abutted flange (13) between tool shell (5), the front inner surface of combination kelly (14) is opened
Equipped with lifting sliding slot (12).
2. a kind of silicon wafer strength test tooling according to claim 1, which is characterized in that the top of the testboard (10)
Outer surface is fixedly installed with fixing strip (4) close to the side of sliding strip (11), and the side inner surface of testboard (10) is living
It is dynamic to be equipped with pull inner box (3), fixation is docked by limit sliding chutes (2) between the testboard (10) and pull inner box (3).
3. a kind of silicon wafer strength test tooling according to claim 2, which is characterized in that the two of the pull inner box (3)
Side external surface is fixedly installed with limited cap, and the outer surface of upper of the tool shell (5) is movably installed with upturning lid (7), and
The outer surface of upper of tool shell (5) is movably installed with two groups of fixations close to the side of upturning lid (7) and pushes away button (6).
4. a kind of silicon wafer strength test tooling according to claim 1, which is characterized in that the front of the testboard (10)
Several groups ventilation slot is offered, a side external surface of the tool shell (5), which is movably installed with, pushes handle (8), the pushing
The outer surface of upper fixing sleeve of handle (8) is connected to Anti-slip cover, and the upper inside surface of the abutted flange (13) is solid through offering
Determine circular groove.
5. a kind of silicon wafer strength test tooling according to claim 1, which is characterized in that outside rotation strut (20)
Surface is fixedly installed with two groups of mandrils, and one end outer surface for rotating strut (20) offers fixed thread, the tool shell
(5) another side external surface is fixedly installed with telescopic handle.
6. a kind of silicon wafer strength test tooling according to claim 1, which is characterized in that the sliding pushes away button (1) and solid
Surely the outer surface for pushing away button (6) offers anti-skidding shading, and it is card that sliding, which pushes away button (1) to push away the fixed form of button (6) with fixation,
Button is fixed.
7. a kind of silicon wafer strength test tooling according to claim 1, which is characterized in that the both ends of the rolling rod (17)
Inner surface is fixedly installed with rotation axis, and the outer surface fixing sleeve of rolling rod (17) is connected to striped casing.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201920194123.1U CN209513424U (en) | 2019-02-13 | 2019-02-13 | A kind of silicon wafer strength test tooling |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201920194123.1U CN209513424U (en) | 2019-02-13 | 2019-02-13 | A kind of silicon wafer strength test tooling |
Publications (1)
Publication Number | Publication Date |
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CN209513424U true CN209513424U (en) | 2019-10-18 |
Family
ID=68204163
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201920194123.1U Expired - Fee Related CN209513424U (en) | 2019-02-13 | 2019-02-13 | A kind of silicon wafer strength test tooling |
Country Status (1)
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CN (1) | CN209513424U (en) |
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2019
- 2019-02-13 CN CN201920194123.1U patent/CN209513424U/en not_active Expired - Fee Related
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Legal Events
Date | Code | Title | Description |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP03 | Change of name, title or address |
Address after: 243000 Tianjin Road, Ma'anshan, Ma'anshan City, Anhui Province, undertake industrial transfer demonstration park, No. 1505 Patentee after: Anhui Zhidian Power Technology Co.,Ltd. Address before: No. 1505 Tianjin Road, Maanshan City, Anhui Province, 243000 Industrial Transfer Demonstration Zone Patentee before: ANHUI UZON PHOTOVOLTAIC TECHNOLOGY Co.,Ltd. |
|
CP03 | Change of name, title or address | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191018 |
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CF01 | Termination of patent right due to non-payment of annual fee |