CN209490666U - A kind of chemical vapor deposition process exhaust chimney - Google Patents
A kind of chemical vapor deposition process exhaust chimney Download PDFInfo
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- CN209490666U CN209490666U CN201821764404.8U CN201821764404U CN209490666U CN 209490666 U CN209490666 U CN 209490666U CN 201821764404 U CN201821764404 U CN 201821764404U CN 209490666 U CN209490666 U CN 209490666U
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- hot wind
- vapor deposition
- chemical vapor
- deposition process
- wind input
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- 238000000034 method Methods 0.000 title claims abstract description 29
- 238000005229 chemical vapour deposition Methods 0.000 title claims abstract description 27
- 230000008569 process Effects 0.000 title claims abstract description 27
- 239000007789 gas Substances 0.000 claims abstract description 45
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims abstract description 19
- 239000003546 flue gas Substances 0.000 claims abstract description 19
- 238000009413 insulation Methods 0.000 claims description 12
- 239000010815 organic waste Substances 0.000 claims description 6
- 238000004321 preservation Methods 0.000 claims description 3
- 239000011490 mineral wool Substances 0.000 claims 1
- 235000019504 cigarettes Nutrition 0.000 abstract description 8
- 230000000694 effects Effects 0.000 description 3
- 238000002485 combustion reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000011435 rock Substances 0.000 description 2
- 238000005201 scrubbing Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- 206010053615 Thermal burn Diseases 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000007726 management method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
The utility model discloses a kind of chemical vapor deposition process exhaust chimneys, and including chimney body and the hot wind input unit to be passed through high-temperature gas to the chimney body, the chimney body is connected by hot wind input pipe with the hot wind input unit.Hot wind input unit can generate high-temperature gas, and high-temperature gas is passed through in chimney body by hot wind input pipe, and then increase the delivery temperature of chemical vapor deposition process exhaust chimney.Nearby gas temperature is higher for the exhaust outlet of chimney body, condense vapor can not, to reduce the content of white cigarette in flue gas.
Description
Technical field
The utility model relates to photovoltaic manufacturing technology field, in particular to a kind of chemical vapor deposition process is vented cigarette
Chimney.
Background technique
It at present include scrubbing tower, the gas that scrubbing tower is discharged in chemical vapor deposition process equipment used by photovoltaic industry
Body humidity is higher, and for this portion gas after the discharge of chemical vapor deposition process exhaust chimney, vapor can be under cryogenic
Condense into " white cigarette ".With the raising of production environmental protection standard, the white cigarette content requirement of smoke stack emission is also increasingly stringenter.
Therefore, how to reduce the content of white cigarette in the gas that chemical vapor deposition process exhaust chimney is discharged is this field
Technical staff's technical problem urgently to be solved.
Utility model content
The purpose of the utility model is to provide a kind of chemical vapor deposition process exhaust chimneys, by improving exhaust temperature
Degree reduces Water vapor condensation, and then reduces the white cigarette content in flue gas.
To achieve the above object, the utility model provides a kind of chemical vapor deposition process exhaust chimney, including chimney sheet
Body and the hot wind input unit to be passed through high-temperature gas to the chimney body, the chimney body by hot wind input pipe with
The hot wind input unit is connected.
Preferably, the hot wind input pipe is equipped with the air-valve to control high-temperature gas flow.
Preferably, the hot wind input unit is organic waste gas treatment equipment, the hot wind input pipe and the organic waste
The high-temperature exhaust air mouth of gas disposal equipment is connected.
Preferably, hot wind input pipe periphery is equipped with thermal insulation layer.
Preferably, the thermal insulation layer is heat preservation rock thermal insulation layer.
Preferably, the air-valve is Electric air valve, and the chimney body is equipped with the of the Current Temperatures to detect flue gas
One temperature sensor further includes the control device to control the Electric air valve aperture according to the Current Temperatures.
Preferably, the hot wind input pipe is equipped with the second temperature sensor to detect hot blast temperature, second temperature
Degree sensor is connected with the control device.
Preferably, be equipped in the hot wind input pipe to the compressor that improves high-temperature gas flow velocity, the compressor with
The control device is connected.
Chemical vapor deposition process exhaust chimney provided by the utility model includes chimney body and hot wind input unit,
Chimney body is connected with hot wind input unit by hot wind input pipe, and hot wind input unit can generate high-temperature gas, and pass through
High-temperature gas is passed through in chimney body by hot wind input pipe, and then makes the delivery temperature liter of chemical vapor deposition process exhaust chimney
It is high.Nearby gas temperature is higher for the exhaust outlet of chimney body, condense vapor can not, to reduce containing for white cigarette in flue gas
Amount.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is the embodiments of the present invention, for those of ordinary skill in the art, without creative efforts, also
Other attached drawings can be obtained according to the attached drawing of offer.
Fig. 1 is the structural schematic diagram of chemical vapor deposition process exhaust chimney provided by the utility model.
Wherein, the appended drawing reference in Fig. 1 are as follows:
Chimney body 1, hot wind input unit 2, hot wind input pipe 3, Electric air valve 4, first the 5, second temperature of temperature sensor
Spend sensor 6.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
In order to make those skilled in the art more fully understand the utility model, with reference to the accompanying drawing and specifically
The utility model is described in further detail for embodiment.
Referring to FIG. 1, Fig. 1 is the structural representation of chemical vapor deposition process exhaust chimney provided by the utility model
Figure.
Chemical vapor deposition process exhaust chimney provided by the utility model, structure is as shown in Figure 1, include chimney body
1 and hot wind input unit 2, the two is connected by hot wind input pipe 3, and hot wind input unit 2 can generate high-temperature gas, chimney sheet
There is certain negative pressure, high-temperature gas can be passed through in chimney body 1 along hot wind input pipe 3, and then in chimney body 1 in body 1
Flue gas heated.The structure of chimney body 1 can refer to the prior art, for guarantee high-temperature gas to the heating effect of flue gas,
The outlet of hot wind input pipe 3 can be connected with the middle part of chimney body 1, on the one hand can guarantee that flue gas is sufficiently heated, another party
The heat loss that face also can be avoided high-temperature gas is excessive, influences heating effect.
Specifically, hot gas input unit can be specially gas heater or gas heat exchanger etc..The one of the utility model
In kind of specific embodiment, hot wind input unit 2 is organic waste gas treatment equipment, the combustion furnace of organic waste gas treatment equipment and is changed
Hot device can generate a large amount of high-temperature gases, and hot wind input pipe 3 is connected with the high-temperature exhaust air mouth of its combustion furnace or heat exchanger, can will be high
Wet body is passed through in chimney body 1.
In the present embodiment, hot wind input unit 2, hot wind input unit 2 are equipped in chemical vapor deposition process exhaust chimney
It is passed through high-temperature gas into chimney body 1 by hot wind input pipe 3, the flue gas in chimney body 1 is heated, improves chimney
The delivery temperature that ontology 1 exports, and then reduce the vapor in flue gas and condensed in the near exit of chimney body 1, reach reduction
The purpose of white cigarette.
Optionally, the settable air-valve of hot wind input pipe 3 controls high-temperature gas flow by the aperture of air-valve, avoids high temperature
The capacity of gas is excessive, causes the waste of heat.Air-valve can be specially butterfly valve, gate valve or ball valve etc..
In addition, the hot-gas temperature that hot wind input pipe 3 is conveyed is higher, for the heat loss for avoiding high-temperature gas, heat
3 periphery of wind input pipe is equipped with thermal insulation layer, and thermal insulation layer can be specially heat preservation rock thermal insulation layer.Certainly, user can also select as needed
With phenol formaldehyde foam thermal insulation layer etc., it is not limited here.
In addition, sufficiently exchanged heat to guarantee that high-temperature gas can evenly distribute in chimney body 1 with flue gas, hot wind
The settable orifice plate in the outlet of input pipe 3, orifice plate can make the VELOCITY DISTRIBUTION of high-temperature gas more uniform.Certainly, to avoid orifice plate
The flow of high-temperature gas is limited, the percent opening of orifice plate will be generally greater than or equal to 60%.
In the present embodiment, the periphery of hot wind input pipe 3 is equipped with thermal insulation layer, on the one hand thermal insulation layer can reduce dissipating for heat
It loses, on the other hand can be avoided staff and scald accident occurs due to directly contacting with the side wall of hot wind input pipe 3.Hot wind is defeated
Enter and be equipped with air-valve in pipe 3, the flow of high-temperature gas is adjusted by air-valve, avoids the waste of heat.The outlet of hot wind input pipe 3 is equipped with
Orifice plate, orifice plate can be such that the speed of high-temperature gas is uniformly distributed, and improve heat transfer effect.
Optionally, control device is additionally provided in chemical vapor deposition process exhaust chimney, air-valve is Electric air valve 4, chimney
Ontology 1 is equipped with the first temperature sensor 5, and Electric air valve 4 and the first temperature sensor 5 are connected with control device.First temperature
Sensor 5 can measure the Current Temperatures of flue gas in chimney body 1, and Current Temperatures are transferred to control device, control device
4 aperture of Electric air valve is adjusted according to flue gas Current Temperatures.Wherein, control device can be specially single-chip microcontroller or PLC controller.
Optionally, hot wind input pipe 3 is equipped with second temperature sensor 6, and second temperature sensor 6 is for detecting high-temperature gas
Hot blast temperature, be connected with control device, and send hot blast temperature to control device.It is pre- equipped with flue gas in control device
If temperature, and first temperature difference is calculated according to the preset temperature of flue gas and Current Temperatures, further according to the Current Temperatures and hot wind of flue gas
Second temperature difference of temperature computation.Rear control device has been calculated can increased or decrease the aperture of Electric air valve 4 according to first temperature difference, according to
The adjustment speed of second temperature difference control Electric air valve 4.
The entrance of hot gas input pipe is equipped with pressure sensor, and pressure sensor is connected with control device, pre- in control device
Equipped with range of pressure fluctuations, when the inlet pressure of hot gas input pipe is in range of pressure fluctuations, control device can be according to hot wind
The aperture of temperature and flue gas Current Temperatures control Electric air valve 4；When the inlet pressure of hot gas input pipe is more than range of pressure fluctuations
When, control device preferentially adjusts inlet pressure, makes it restore in range of pressure fluctuations.
In addition, to improve the flow of high-temperature gas, settable compressor in hot wind input pipe 3, when the Current Temperatures of flue gas
The flow for increasing high temperature air when lower by compressor, so that flue-gas temperature be made quickly to increase.Certainly, compressor can be with control
Device is connected, and the start and stop of compressor are controlled by control device.
In the present embodiment, control device is provided in chemical vapor deposition process exhaust chimney, chimney body 1 is equipped with first
Temperature sensor 5, hot wind input pipe 3 are equipped with second temperature sensor 6, and the two is connected with control device, and control device can
The feedback information of temperature sensor adjusts the aperture of Electric air valve 4, realizes intelligent management, ensure it is high performance simultaneously, make
Energy consumption minimizes, while meeting ecological requirements and ideas of energy-saving.
It should be noted that in the present specification, such as first and second etc relational terms are used merely to one
Entity is distinguished with other several entities, and without necessarily requiring or implying between these entities, there are any this actual
Relationship or sequence.
Chemical vapor deposition process exhaust chimney provided by the utility model is described in detail above.Herein
Specific case is applied to be expounded the principles of the present invention and embodiment, the explanation of above example is only intended to
Help understands the method and its core concept of the utility model.It should be pointed out that coming for those skilled in the art
It says, without departing from the principle of this utility model, several improvements and modifications can be made to this utility model, these change
Into in the protection scope for also falling into the utility model claims with modification.
Claims (8)
1. a kind of chemical vapor deposition process exhaust chimney, which is characterized in that including chimney body (1) and to the chimney
Ontology (1) is passed through the hot wind input unit (2) of high-temperature gas, and the chimney body (1) passes through hot wind input pipe (3) and the heat
Wind input unit (2) is connected.
2. chemical vapor deposition process exhaust chimney according to claim 1, which is characterized in that the hot wind input pipe
(3) it is equipped with the air-valve to control high-temperature gas flow.
3. chemical vapor deposition process exhaust chimney according to claim 2, which is characterized in that the hot wind input unit
It (2) is organic waste gas treatment equipment, the high-temperature exhaust air mouth phase of the hot wind input pipe (3) and the organic waste gas treatment equipment
Even.
4. chemical vapor deposition process exhaust chimney according to claim 3, which is characterized in that the hot wind input pipe
(3) periphery is equipped with thermal insulation layer.
5. chemical vapor deposition process exhaust chimney according to claim 4, which is characterized in that the thermal insulation layer is heat preservation
Rock wool thermal insulation layer.
6. according to chemical vapor deposition process exhaust chimney described in claim 2 to 5 any one, which is characterized in that described
Air-valve is Electric air valve (4), and the chimney body (1) is equipped with the first temperature sensor to detect the Current Temperatures of flue gas
It (5), further include to the control device according to Current Temperatures control Electric air valve (4) aperture.
7. chemical vapor deposition process exhaust chimney according to claim 6, which is characterized in that the hot wind input pipe
(3) it is equipped with the second temperature sensor (6) to detect hot blast temperature, the second temperature sensor (6) and the control fill
It sets connected.
8. chemical vapor deposition process exhaust chimney according to claim 7, which is characterized in that the hot wind input pipe
(3) compressor to improve high-temperature gas flow velocity is equipped in, the compressor is connected with the control device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821764404.8U CN209490666U (en) | 2018-10-29 | 2018-10-29 | A kind of chemical vapor deposition process exhaust chimney |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821764404.8U CN209490666U (en) | 2018-10-29 | 2018-10-29 | A kind of chemical vapor deposition process exhaust chimney |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209490666U true CN209490666U (en) | 2019-10-15 |
Family
ID=68141863
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821764404.8U Active CN209490666U (en) | 2018-10-29 | 2018-10-29 | A kind of chemical vapor deposition process exhaust chimney |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209490666U (en) |
-
2018
- 2018-10-29 CN CN201821764404.8U patent/CN209490666U/en active Active
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: No. 301 Huifa Road, Jiading District, Shanghai, 2018 Patentee after: Shanghai Shengjian Technology Co.,Ltd. Country or region after: China Address before: 201821 25F, Taihu Shijia International Building, 1198 De Fu Road, Jiading District, Shanghai Patentee before: SHANGHAI SHENGJIAN ENVIRONMENTAL SYSTEM TECHNOLOGY Co.,Ltd. Country or region before: China |