CN209486466U - Liquid-supplying system - Google Patents
Liquid-supplying system Download PDFInfo
- Publication number
- CN209486466U CN209486466U CN201920482664.4U CN201920482664U CN209486466U CN 209486466 U CN209486466 U CN 209486466U CN 201920482664 U CN201920482664 U CN 201920482664U CN 209486466 U CN209486466 U CN 209486466U
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- China
- Prior art keywords
- liquid
- supplying system
- extensible member
- driving part
- bubble
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000007788 liquid Substances 0.000 claims abstract description 137
- 238000000034 method Methods 0.000 claims abstract description 22
- 238000001514 detection method Methods 0.000 claims description 38
- 229920002120 photoresistant polymer Polymers 0.000 claims description 18
- 239000002985 plastic film Substances 0.000 claims description 4
- 229920006255 plastic film Polymers 0.000 claims description 4
- 230000008569 process Effects 0.000 abstract description 15
- 239000012530 fluid Substances 0.000 abstract description 13
- 238000004090 dissolution Methods 0.000 abstract description 10
- 238000012423 maintenance Methods 0.000 abstract description 7
- 238000009434 installation Methods 0.000 abstract description 6
- 238000011049 filling Methods 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 16
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000001802 infusion Methods 0.000 description 4
- 238000001259 photo etching Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000004064 recycling Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
The utility model provides a kind of liquid-supplying system, and liquid-supplying system includes device for storing liquid and liquid handling device, wherein liquid handling device includes: extensible member and driving part；Extensible member is connected with device for storing liquid, and driving part is connected with extensible member, drives extensible member operation by driving part.The liquid-supplying system of the utility model draws mode using negative-pressure vacuum, can reduce the gas dissolution rate of liquid in extensible member, reduce the generation of bubble, and can realize automatic fluid filling function by including the liquid handling device of extensible member and driving part；To effectively improve process stability, product quality is improved, reduces liquid-consumed amount, reduces maintenance cost, improves utilization rate of equipment and installations.
Description
Technical field
The utility model belongs to field of semiconductor devices, is related to a kind of liquid-supplying system.
Background technique
In semiconductor field, photoetching process is had always been considered as the step of being most critical in semiconductors manufacture, entire
It is used multiple times in technical process, there is important influence to the quality of product.
In existing photolithography process, the important step that uniform photoresist is photoetching process is coated on the surface of wafer
Suddenly, currently, the photoresist feed liquid way of mainstream generallys use vapour-pressure type, such as in Track board in photoetching coating making technology
In, the feed liquid way of photoresist (N i.e. by the way of nitrogen pressurization2Press), this mode is due to using nitrogen pressurization photoetching
Glue, therefore in the solvent of photoresist, gas dissolution rate is substantially increased, and is caused in the supply of photoresist, and a large amount of gas can be generated
Bubble, to increase the burden of the bubble in subsequent board filtering photoresist.Especially when sky is presented in the liquid storage bottle for loading photoresist
When bottle (empty) state, the front end of the pipe-line system of photoresist is conveyed it is possible that lacking liquid phenomenon, this lacks liquid phenomenon and will cause
Gas enters in the pipeline of conveying photoresist, therefore after the liquid storage bottle of replacement photoresist, need to carry out excluding to be located at pipe manually
The operation of gas in road, the gas dissolution rate in solvent to reduce photoresist.Using the manual operation for excluding gas, wind
Danger is higher, to be easy to produce defect, and increases maintenance period, reduces the utilization rate of equipment.
Therefore, design a kind of novel liquid-supplying system, be effectively reduced in liquid-supplying system in liquid gas dissolution rate, reality
Existing automatic liquid supply and the automatic gas excluded in pipeline, reduce the generation of bubble, to effectively improve process stability, improve product
Quality reduces liquid-consumed amount, reduces maintenance cost, improves utilization rate of equipment and installations, is necessary.
Utility model content
In view of the foregoing deficiencies of prior art, it the purpose of this utility model is to provide a kind of liquid-supplying system, is used for
It solves in the prior art, liquid provided by liquid-supplying system contains a large amount of bubbles and need to exclude manually above-mentioned one caused by bubble
Series of problems.
In order to achieve the above objects and other related objects, the utility model provides a kind of liquid-supplying system, the liquid-supplying system
Including device for storing liquid and liquid handling device, wherein the liquid handling device includes:
Extensible member, the extensible member are connected with the device for storing liquid；
Driving part, the driving part are connected with the extensible member, by stretching described in driving part driving
The operation of contracting component.
Optionally, the liquid-supplying system further includes bubble detection device.
Optionally, the liquid-supplying system further includes liquid level detection device.
Optionally, the number of the liquid level detection device includes 2~5.
Optionally, the extensible member includes bellows, and the bellows includes plastic film capicitor.
Optionally, the driving part includes one in electric drive components, hydraulic driving part and strength driving part
Kind or combination.
Optionally, the method for operation of the driving part includes one of self-action and hand or combination.
Optionally, the liquid-supplying system further includes warning device.
Optionally, the liquid-supplying system further includes recyclable device.
Optionally, the liquid-supplying system includes photoresist liquid-supplying system.
As described above, the liquid-supplying system of the utility model, is filled by the liquid handling for including extensible member and driving part
It sets, mode is drawn using negative-pressure vacuum, the gas dissolution rate of liquid in extensible member can be reduced, reduce the generation of bubble, and can
Realize automatic fluid filling function；To effectively improve process stability, product quality is improved, reduces liquid-consumed amount, reduces maintenance
Cost improves utilization rate of equipment and installations.
Detailed description of the invention
Fig. 1 is shown as the structural schematic diagram of the liquid-supplying system in the utility model.
Fig. 2 is shown as the operating process schematic diagram of the liquid-supplying system in the utility model.
Component label instructions
100 device for storing liquid
200 liquid handling devices
210 extensible members
220 driving parts
300 bubble detection devices
400 liquid level detection devices
401 first liquid level detection devices
402 second liquid level detection devices
403 third liquid level detection devices
500 leakage fluid drams
Specific embodiment
The embodiments of the present invention is illustrated by particular specific embodiment below, those skilled in the art can be by this
Content disclosed by specification understands other advantages and effect of the utility model easily.
Fig. 1 is please referred to Fig. 2.It should be clear that this specification structure depicted in this specification institute accompanying drawings, ratio, size etc., only to
Cooperate the revealed content of specification, so that those skilled in the art understands and reads, is not intended to limit the utility model
Enforceable qualifications, therefore do not have technical essential meaning, the modification of any structure, the change of proportionate relationship or size
Adjustment, in the case where not influencing the effect of the utility model can be generated and the purpose that can reach, should all still fall in the utility model
Revealed technology contents obtain in the range of capable of covering.Meanwhile in this specification it is cited as "upper", "lower", " left side ",
The term on " right side ", " centre " and " one " etc. is merely convenient to being illustrated for narration, rather than enforceable to limit the utility model
Range, relativeness are altered or modified, under the content of no substantial changes in technology, enforceable when being also considered as the utility model
Scope.
The utility model provides a kind of liquid-supplying system, and the liquid-supplying system includes device for storing liquid and liquid handling device,
In, the liquid handling device includes:
Extensible member, the extensible member are connected with the device for storing liquid；
Driving part, the driving part are connected with the extensible member, by stretching described in driving part driving
The operation of contracting component.
The liquid-supplying system of the utility model, by including the liquid handling device of extensible member and driving part, using negative
Vacsorb mode is pressed, the gas dissolution rate of liquid in extensible member can be reduced, reduce the generation of bubble, and can realize automatic benefit
Liquid function；To effectively improve process stability, product quality is improved, reduces liquid-consumed amount, reduces maintenance cost, raising is set
Standby utilization rate.
Such as Fig. 1, a kind of liquid-supplying system is provided, the liquid-supplying system includes device for storing liquid 100 and liquid handling device 200,
Wherein, the liquid handling device 200 includes: extensible member 210 and driving part 220；The extensible member 210 and the storage
Liquid device 100 is connected；The driving part 220 is connected with the extensible member 210, and passes through the driving part 220
The extensible member 210 is driven to run.
Specifically, the driving part 220 can be located at the bottom end of the extensible member 210, the top of the extensible member 210
End is connected with the device for storing liquid 100, and the extensible member 210 can carry out compression and stretcher strain.Pass through the driving portion
Part 220 may make that the extensible member 210 is stretched, so that the liquid being located in the device for storing liquid 100 is by negative
Pressure can be had so that the liquid may make to enter in the extensible member 210 from the device for storing liquid 100 using this kind of mode
Effect avoids gas from entering in the liquid, to reduce the gas dissolution rate of the liquid.May be used also by the driving part 220
So that the extensible member 210 is compressed, so that the liquid being located in the extensible member 210 is squeezed,
To the liquid for excluding to be located in the extensible member 210 by the leakage fluid dram 500 on the top for being located at the extensible member 210
Body, to remove the bubble in the liquid, to improve the product quality of subsequent preparation.The driving part 220 is described stretches
The compression and stretcher strain of contracting component 210 provide power, by the operation of the extensible member 210, it can be achieved that the liquid
Supply and discharge, to reduce the gas dissolution rate of the liquid in the extensible member 210, reduce the generation of bubble, and
Liquid replenishing function can be achieved.
As the further embodiment of the embodiment, the liquid-supplying system further includes bubble detection device 300.
Specifically, the bubble detection device 300 can be located at the top of the extensible member 210, examined by the bubble
The air bubble content in the detectable liquid positioned in the extensible member 210 of device 300 is surveyed, to reduce the extensible member
The gas dissolution rate of the liquid in 210 improves the quality for the liquid being discharged from the extensible member 210, to have
Effect improves process stability, improves product quality, reduces the subsequent difficulty for carrying out de-soak processing to the liquid, reduces cost.
Specific location, type, number and the distribution of the bubble detection device 300 can be selected as needed, herein with no restriction.
As the further embodiment of the embodiment, the liquid-supplying system may also include liquid level detection device 400, the liquid
The number of level detecting apparatus 400 may include 2~5.
Specifically, the liquid level detection device 400 may include capacitance level transducer, pass through the liquid level detection device
The liquid level of the 400 detectable liquid in the extensible member 210, to control in the extensible member 210
The liquid content.In the present embodiment, the liquid-supplying system includes 3 liquid level detection devices 400, is stretched from described
The bottom end of component 210 extends to the top of the extensible member 210, successively includes the first liquid level detection device 401, the second liquid level
Detection device 402 and third liquid level detection device 403, wherein the position of first liquid level detection device 401 is located at described stretch
At the initial liquid level of the liquid in contracting component 210, the position of second liquid level detection device 402 is located at the liquid
At low liquid level, the position of the third liquid level detection device 403 is located at the high liquid level (HLL) of the liquid.The liquid level detection device
400 specific type, number and distribution, it is not limited to this.
As the further embodiment of the embodiment, the extensible member 210 may include bellows, and the bellows can wrap
Include plastic film capicitor.
Specifically, since there is bellows good elasticity can produce under pressure, axial force, cross force or Moment
Raw displacement, therefore can be used as a kind of foldable, telescopic tubular elastomeric sensing element.In the present embodiment, the extensible member
210 preferably have corrosion-resistant, high tenacity, high-impact, good bending property, the with higher sensitivity plastic film capicitor, such as PVC
Bellows, but the type of the extensible member 210 is not limited thereto, and the type of the extensible member 210 can be according to the liquid
The specific type of body is selected, and is not limited excessively herein.
As the further embodiment of the embodiment, the driving part 220 may include electric drive components, hydraulic-driven
One of component and strength driving part or combination, the method for operation of the driving part 220 may include self-action and manually
One of formula or combination.
Specifically, such as motor, cylinder can be used in the driving part 220, specific type does not limit excessively herein.This
In embodiment, the driving part 220 uses more common motor, and the method for operation of the driving part 220 uses certainly
The dynamic method of operation, thus realize the automatic running of the extensible member 210, to realize the process of automatic row's bubble and automatic liquid supply,
To improve efficiency, utilization rate of equipment and installations is improved, avoids being manually operated, reduces risk.Wherein, can by by the driving part 220,
The mode that bubble detection device 300 and liquid level detection device 400 and controller (not shown) are electrically connected, to realize automatic fortune
Row.But the mode that hand or self-action are combined with hand can also be used in the method for operation of the driving part 220, herein
It does not limit excessively.
As the further embodiment of the embodiment, the liquid-supplying system includes photoresist liquid-supplying system.
Specifically, the liquid in the device for storing liquid 100 may include photoresist, so that the liquid-supplying system may include
Photoresist liquid-supplying system is dissolved by the gas that the liquid-supplying system can reduce the photoresist in the extensible member 210
Rate reduces the generation of bubble, and can realize automatic fluid filling function, to effectively improve process stability, improves product quality, subtracts
The consumption of few photoresist, reduces maintenance cost, improves utilization rate of equipment and installations, but the type of the liquid is not limited to
This.
Such as Fig. 2, the present embodiment also provides a kind of flow diagram for operating the liquid-supplying system.
Specifically, when lacking the liquid in the device for storing liquid 100, the replaceable device for storing liquid 100 then leads to
The liquid level position that the liquid level detection device 400 detects the liquid being now placed in the extensible member 210 is crossed, that is, is passed through
The third liquid level detection device 403 detects whether the liquid is at the high liquid level (HLL).If the third level sensing dress
It sets 403 and detects the liquid, then detect in the liquid whether contain bubble by the bubble detection device 300, if nothing
Bubble, then the liquid in the extensible member 210 carries out normal feed flow, to be produced；If being examined by the bubble
It surveys device 300 and detects and contain bubble in the liquid, then the driving part 220 starts, and is pressed by the driving part 220
Contract the extensible member 210, thus by the leakage fluid dram 500, discharge is located at the upper end that is located in the extensible member 210
The liquid, to remove the bubble in the liquid.Wherein, excellent after carrying out the step of excluding the bubble in the liquid
Choosing repeats the step of bubble detection, in order to ensure that it is clean that the bubble in liquid excludes, improves subsequent product quality.If
After replacing the device for storing liquid 100, the liquid level detection device 400 detects the liquid of liquid described in the extensible member 210
Not at the high liquid level (HLL), i.e., the liquid is not detected in the described third liquid level detection device 403 in face, then passes through the driving portion
The stretching of part 220 is stretching the extensible member so that the bottom end of the extensible member 210 is retracted at the initial liquid level
While 210, so that the liquid generates negative pressure, thus under the action of negative pressure, the liquid is from 100 note of device for storing liquid
Enter in the extensible member 210, to complete the fluid infusion process of the extensible member 210.After fluid infusion process, preferably again
The liquid level of the liquid is detected whether at the high liquid level by the third liquid level detection device 403, if it is not, can carry out again
Secondary fluid infusion, if so, carrying out above-mentioned bubble detection operation carries out feed flow after bubble-free in the liquid.When the pars contractilis
When at the low liquid level where second liquid level detection device 402 in part 210, fluid infusion behaviour is carried out
Work, level sensing operation and bubble detection operation, to realize the circulation of the liquid.
As the further embodiment of the embodiment, the liquid-supplying system may also include warning device (not shown).
Specifically, the warning device can be electrically connected with second liquid level detection device 402, pass through the warning device
To warn the liquid in extensible member 210 described in staff to be lower than the low liquid level in time, so as to further drop
A possibility that low yield anger is steeped.The warning device may include one of sound alarm subsystem, light crossing-signal or combination, specific type
It can be selected as needed, herein with no restriction.
As the further embodiment of the embodiment, the liquid-supplying system may also include recyclable device (not shown).
Specifically, the recyclable device can be connected with the leakage fluid dram 500, when the extensible member 210 is compressed,
When discharge is with the bladdery liquid, the recyclable device recycling discharge being connected with the leakage fluid dram 500 can be passed through
The liquid then can carry out de-bubble processing to the liquid of recycling, recycle to the liquid, further to subtract
The consumption of few liquid, reduces cost.
In conclusion the liquid-supplying system of the utility model, is filled by the liquid handling for including extensible member and driving part
It sets, mode is drawn using negative-pressure vacuum, the gas dissolution rate of liquid in extensible member can be reduced, reduce the generation of bubble, and can
Realize automatic fluid filling function；To effectively improve process stability, product quality is improved, reduces liquid-consumed amount, reduces maintenance
Cost improves utilization rate of equipment and installations.So the utility model effectively overcomes various shortcoming in the prior art and has high industrial
Utility value.
The above embodiments are only illustrative of the principle and efficacy of the utility model, and not for limitation, this is practical new
Type.Any person skilled in the art can all carry out above-described embodiment under the spirit and scope without prejudice to the utility model
Modifications and changes.Therefore, such as those of ordinary skill in the art without departing from the revealed essence of the utility model
All equivalent modifications or change completed under mind and technical idea, should be covered by the claim of the utility model.
Claims (10)
1. a kind of liquid-supplying system, which is characterized in that the liquid-supplying system includes device for storing liquid and liquid handling device, wherein institute
Stating liquid handling device includes:
Extensible member, the extensible member are connected with the device for storing liquid；
Driving part, the driving part are connected with the extensible member, drive the pars contractilis by the driving part
Part operation.
2. liquid-supplying system according to claim 1, it is characterised in that: the liquid-supplying system further includes bubble detection device.
3. liquid-supplying system according to claim 1, it is characterised in that: the liquid-supplying system further includes liquid level detection device.
4. liquid-supplying system according to claim 3, it is characterised in that: the number of the liquid level detection device includes 2~5
It is a.
5. liquid-supplying system according to claim 1, it is characterised in that: the extensible member includes bellows, the ripple
Pipe includes plastic film capicitor.
6. liquid-supplying system according to claim 1, it is characterised in that: the driving part includes electric drive components, liquid
Press one of driving part and strength driving part or combination.
7. liquid-supplying system according to claim 1, it is characterised in that: the method for operation of the driving part includes self-action
And one of hand or combination.
8. liquid-supplying system according to claim 1, it is characterised in that: the liquid-supplying system further includes warning device.
9. liquid-supplying system according to claim 1, it is characterised in that: the liquid-supplying system further includes recyclable device.
10. any liquid-supplying system according to claim 1~9, it is characterised in that: the liquid-supplying system includes photoresist
Liquid-supplying system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920482664.4U CN209486466U (en) | 2019-04-10 | 2019-04-10 | Liquid-supplying system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920482664.4U CN209486466U (en) | 2019-04-10 | 2019-04-10 | Liquid-supplying system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209486466U true CN209486466U (en) | 2019-10-11 |
Family
ID=68135147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920482664.4U Expired - Fee Related CN209486466U (en) | 2019-04-10 | 2019-04-10 | Liquid-supplying system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209486466U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113655691A (en) * | 2020-05-12 | 2021-11-16 | 长鑫存储技术有限公司 | Extrusion device, photoresist supply system and photoresist supply method |
-
2019
- 2019-04-10 CN CN201920482664.4U patent/CN209486466U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113655691A (en) * | 2020-05-12 | 2021-11-16 | 长鑫存储技术有限公司 | Extrusion device, photoresist supply system and photoresist supply method |
| WO2021227909A1 (en) * | 2020-05-12 | 2021-11-18 | 长鑫存储技术有限公司 | Extrusion device, photoresist supply system and photoresist supply method |
| CN113655691B (en) * | 2020-05-12 | 2023-06-27 | 长鑫存储技术有限公司 | Extrusion device, photoresist supply system and photoresist supply method |
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| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191011 |