CN209481774U - A kind of coating machine cooling device - Google Patents
A kind of coating machine cooling device Download PDFInfo
- Publication number
- CN209481774U CN209481774U CN201920122110.3U CN201920122110U CN209481774U CN 209481774 U CN209481774 U CN 209481774U CN 201920122110 U CN201920122110 U CN 201920122110U CN 209481774 U CN209481774 U CN 209481774U
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- CN
- China
- Prior art keywords
- wall surface
- servo motor
- coating machine
- hole
- rotating disk
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Abstract
The utility model discloses a kind of coating machine cooling devices, including cooler bin and mounting base, if the cooler bin upper wall surface offers the identical venthole of stem structure, the mounting base is placed in cooler bin lower inner wall face, rotation cooling structure is installed in the mounting base, the utility model relates to coating machine cooling technology fields, cooling structure is rotated in the present apparatus, end is driven to be rotated by the second servo motor and swingle of the electronic threaded rod of spill spin block and threaded rod both ends by first servo motor, second servo motor drives threaded rod to carry out positive and negative rotation, make a pair of of movable block of threaded rod outside wall surface that the fan of its upper wall surface be driven to move back and forth, it is cooling to heat sink by semiconductor chilling plate, it is sent cold air in by the through-hole of fan and heat sink to cavity, it is excessively high to machine to solve coating machine cavity Nei Ruochang phase temperature Damage, and if natural cooling expend the long time the problem of.
Description
Technical field
The utility model relates to coating machine cooling technology field, specially a kind of coating machine cooling device.
Background technique
Vacuum coating equipment refers mainly to a kind of plated film for needing to carry out under higher vacuum, specifically includes many types, wraps
It includes vacuum ionic to evaporate, magnetron sputtering, MBE molecular beam epitaxy, many kinds such as PLD pulsed laser deposition, main thought is divided into
Two kinds of evaporation and sputtering.
Coating machine is widely used in every field, and coating machine is after plated film, after discarded Coating Materials outflow, machine cavity
Interior temperature is excessively high, if natural cooling or a cooling of opening the cabin, overlong time, and open the cabin that a temperature is excessively high easily to be caused to hurt to staff
Evil, if not cooling down, normal phase high temperature easily causes device to damage in cavity, in consideration of it, in view of the above-mentioned problems, further investigation, there is this then
Case generates.
Utility model content
In view of the deficiencies of the prior art, the utility model provides a kind of coating machine cooling device, solves coating machine
Cavity Nei Ruochang phase temperature is excessively high to damage machine, and if natural cooling expend the long time the problem of.
In order to achieve the above object, the utility model is achieved by the following technical programs: a kind of cooling dress of coating machine
It sets, specifically includes that cooler bin and mounting base, if the cooler bin upper wall surface offers the identical venthole of stem structure, institute
It states mounting base and is placed in cooler bin lower inner wall face, and upper wall surface offers circular groove, opens up in the cooler bin circular groove
Have in being equipped with rotation cooling structure on circular mounting slot, the mounting base；
The rotation cooling structure comprising: if the identical arc of first servo motor, rotating disk, spill spin block, stem structure
Sliding rail, the second servo motor, swingle, threaded rod, the identical movable block of a pair of of structure, the identical fan of a pair of of structure, heat dissipation
Plate and semiconductor chilling plate；
The first servo motor is placed in mounting base upper wall surface circular groove, and the rotating disk lower wall surface offers circle
Shape through-hole, and upper wall surface offers round slide, the rotating disk is placed on servo motor by circular through hole and drives end, the rotation
Switch block is placed in first servo motor driving end upper wall surface, and side wall surface offers tapped through hole, several arc-shaped slide rail peaces
It is placed in rotating disk circular groove inner wall, rounded installation, it is sliding that second servo motor is plugged in several arc-shaped slide rails
In slot, the swingle lower wall surface is plugged in the round slide of rotating disk circular groove upper wall surface, and side wall surface offers circle
Shape through-hole, described threaded rod one end are placed in the second servo motor driving end, and the other end is inserted by the tapped through hole of spill spin block
In in the circular through hole of swingle, a pair of movable block side wall surface offers tapped through hole, and a pair of fan is placed in
A pair of movable block upper wall surface, the heat sink is placed in cooler bin inner wall, and is located above the rotating disk, the heat sink
If upper wall surface offers the identical heat release hole of stem structure, and offers mounting groove at center, the semiconductor chilling plate is placed in
In the mounting groove of heat sink.
Preferably, if the rotating disk lower wall surface is equipped with the identical support rod of stem structure: the support rod is used to support rotation
Turntable.
Preferably, the second servo motor driving end is equipped with gasket: the gasket prevents servo motor driving end and spiral shell
Play occurs between rasp bar.
Preferably, the first servo motor outside wall surface is equipped with guard box.
Preferably, a pair of movable block is staggered relatively by thread rotary orientation: the rotation direction is convenient for a pair of movable block phase when rotation
To movement.
Beneficial effect
The utility model provides a kind of coating machine cooling device, has following the utility model has the advantages that rotating in the present apparatus cold
But structure, drive end by second servo motor at the electronic threaded rod of spill spin block and threaded rod both ends by first servo motor and
Swingle is rotated, and the second servo motor drives threaded rod to carry out positive and negative rotation, makes a pair of of movable block band of threaded rod outside wall surface
The fan for moving its upper wall surface moves back and forth, and gives heat sink cooling by semiconductor chilling plate, passes through fan and heat sink
Through-hole is sent cold air in cavity, solves that coating machine cavity Nei Ruochang phase temperature is excessively high to damage machine, and if from
So cooling the problem of expending the long time.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of coating machine cooling device described in the utility model；
Fig. 2 is a kind of overlooking structure diagram of coating machine cooling device described in the utility model；
In figure, 1, cooler bin；2, mounting base；3, first servo motor；4, rotating disk；5, spill spin block；6, arc-shaped slide rail；7,
Second servo motor；8, swingle；9, threaded rod；10, movable block；11, fan；12, heat sink；13, semiconductor chilling plate；
14, support rod；15, guard box.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
Under be classified as type and effect that electricity piece in this case uses:
Motor driver: using the S700 series of driver of Killmorgen servo-driver, driver is also known as " servo control
Device processed ", " servo amplifier " are a kind of controllers for controlling servo motor, and effect acts on general similar to frequency converter
Logical alternating current motor, belongs to a part of servo-system, is mainly used in high-precision positioning system.Generally by position, speed
Degree and three kinds of modes of torque control servo motor, realize high-precision transmission system positioning, are currently drive technology
High-end product.
First servo motor and the second servo motor: the servo motor of 110AEA12020-SH3 model, servo motor are taken
Refer to the engine for controlling mechanical organ operating in servo-system, is a kind of indirect speed change gear of subsidy motor, servo motor
It can make to control speed, position precision is very accurate, can convert voltage signal to torque and revolving speed with drive control object.It watches
It takes rotor revolving speed to be controlled by input signal, and energy fast reaction, in automatic control system, is used as executive component, and have
The characteristics such as organic electrical time constant is small, the linearity is high, pickup voltage can be converted into the electric signal received on motor reel
Angular displacement or angular speed output.It is divided into direct current and AC servomotor two major classes.
Using 12704*30*30 model, semiconductor chilling plate is also thermoelectric module, is a kind of heat pump, and its advantages are
There is no slide unit, apply and be restricted in some spaces, reliability requirement is high, the occasion of no refrigerant pollution, using partly leading
The Peltier effect of body material, when the galvanic couple that direct current is connected by two kinds of different semiconductor materials, at the both ends of galvanic couple
Heat can be absorbed respectively and releases heat, and the purpose of refrigeration may be implemented, it is a kind of Refrigeration Technique for generating negative thermal resistance,
Feature is movement-less part, and reliability is also relatively high.
Under be classified as the explanation of heat dissipation plate shape and material in this case；
Heat sink: if offering the round plate of the identical circular through hole of stem structure for metal material.
By those skilled in the art, the power supply that electricity pieces all in this case are adapted to it is attached by conducting wire, and
Suitable controller and encoder should be selected according to the actual situation, to meet demand for control, specifically connect and control and is suitable
Sequence, should be with reference in following working principles, and successive job order is completed to be electrically connected between each electricity piece, detailed connection means,
It is following mainly to introduce working principle and process for techniques well known, no longer electrical control is explained.
Embodiment: according to Figure of description 1-2 it is found that a kind of coating machine cooling device, including cooler bin 1 and installation
Seat 2, if 1 upper wall surface of cooler bin offers the identical venthole of stem structure, mounting base 2 is placed in 1 lower inner wall face of cooler bin, and on
Wall surface offers circular groove, offers in 1 circular groove of cooler bin cold in being equipped with rotation on circular mounting slot, mounting base 2
But structure；
Rotate cooling structure comprising: if first servo motor 3, rotating disk 4, spill spin block 5, the identical arc of stem structure
Sliding rail 6, the second servo motor 7, swingle 8, threaded rod 9, the identical movable block 10 of a pair of of structure, the identical fan of a pair of of structure
11, heat sink 12 and semiconductor chilling plate 13；
First servo motor 3 is placed in 2 upper wall surface circular groove of mounting base, and 4 lower wall surface of rotating disk offers round logical
Hole, and upper wall surface offers round slide, rotating disk 4 is placed on servo motor by circular through hole and drives end, and spill spin block 5 is placed in
First servo motor 3 drives end upper wall surface, and side wall surface offers tapped through hole, and several arc-shaped slide rails 6 are placed in the circle of rotating disk 4
Connected in star inner wall, rounded installation, the second servo motor 7 are plugged in several 6 sliding slots of arc-shaped slide rail, 8 lower wall surface of swingle
It is plugged in the round slide of 4 circular groove upper wall surface of rotating disk, and side wall surface offers circular through hole, 9 one end of threaded rod peace
It is placed in the second servo motor 7 driving end, the other end is plugged in the circular through hole of swingle 8 by the tapped through hole of spill spin block 5,
A pair of of 10 side wall surface of movable block offers tapped through hole, and a pair of of fan 11 is placed in a pair of of 10 upper wall surface of movable block, heat sink
12 are placed in 1 inner wall of cooler bin, and are located at 4 top of rotating disk, if 12 upper wall surface of heat sink offers, stem structure is identical to be dissipated
Hot hole, and mounting groove is offered at center, semiconductor chilling plate 13 is placed in the mounting groove of heat sink 12；
In conclusion staff starts the device, the driving termination of first servo motor 3 receives what motor driver transmitted
Signal, first servo motor 3 drive end that spill spin block 5 is driven to rotate, and spill spin block 5 drives second servo at both ends by threaded rod 9
Motor 7 and the rotational slide in several arc-shaped slide rails 6 and round slide respectively of swingle 8, a pair of of fan 11 start, the second servo
The signal that the driving termination winding motor driver of motor 7 transmits, the second servo motor 7 drive end to drive 9 main story of threaded rod, screw thread
Bar 9 passes through a pair of of movable block 10 for being screwed on therewith and a pair of of fan 11 is driven inwardly to be moved, when moving at spill spin block 5, the
The reversion of two servo motors 7, moves out a pair of of fan 11, while semiconductor chilling plate 13 starts, and passes through heat sink 12
Metallic character cool down rapidly, cold air is blown into coating machine cavity by a pair of of fan 11 by several through-holes of heat sink 12,
It is cooled down, fan 11 comprehensive can carry out cold air by rotation and movement into cavity and blow, comprehensive cooling.
Preferably, further, if 4 lower wall surface of rotating disk is equipped with the identical support rod 14 of stem structure: should
Support rod 14 is used to support rotating disk 4.
Preferably, further, the second servo motor 7 driving end is equipped with gasket: the gasket prevents servo
Play occurs between motor drive terminal and threaded rod 9.
Preferably, further, 3 outside wall surface of first servo motor is equipped with guard box 15.
Preferably, further, a pair of of movable block 10 is staggered relatively by thread rotary orientation, and the rotation direction is convenient for rotation
When 10 relative motion of a pair of movable block.
It should be noted that, in this document, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to
Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those
Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or equipment
Intrinsic element.In the absence of more restrictions.By sentence " element limited including one ..., it is not excluded that
There is also other identical elements in the process, method, article or apparatus that includes the element ".
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art,
It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired
Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.
Claims (5)
1. a kind of coating machine cooling device, including cooler bin (1) and mounting base (2), which is characterized in that the cooler bin
(1) if upper wall surface offers the identical venthole of stem structure, the mounting base (2) is placed in cooler bin (1) lower inner wall face, and on
Wall surface offers circular groove, offers in cooler bin (1) circular groove on circular mounting slot, the mounting base (2)
Rotation cooling structure is installed；
The rotation cooling structure comprising: first servo motor (3), rotating disk (4), spill spin block (5) if, stem structure it is identical
Arc-shaped slide rail (6), the second servo motor (7), swingle (8), threaded rod (9), the identical movable block (10) of a pair of of structure, one
To the identical fan of structure (11), heat sink (12) and semiconductor chilling plate (13)；
The first servo motor (3) is placed in mounting base (2) upper wall surface circular groove, and rotating disk (4) lower wall surface is opened
Equipped with circular through hole, and upper wall surface offers round slide, and the rotating disk (4) is placed on servo motor by circular through hole and drives
End, the spill spin block (5) is placed in first servo motor (3) driving end upper wall surface, and side wall surface offers tapped through hole, several
The arc-shaped slide rail (6) is placed in rotating disk (4) circular groove inner wall, rounded installation, and second servo motor (7) is inserted
Loaded in several arc-shaped slide rail (6) sliding slots, swingle (8) lower wall surface is plugged in rotating disk (4) circular groove upper wall
In the round slide in face, and side wall surface offers circular through hole, and described threaded rod (9) one end is placed in the second servo motor (7)
End is driven, the other end is plugged in the circular through hole of swingle (8) by the tapped through hole of spill spin block (5), a pair of movement
Block (10) side wall surface offers tapped through hole, and a pair of fan (11) is placed in a pair of movable block (10) upper wall surface,
The heat sink (12) is placed in cooler bin (1) inner wall, and is located above rotating disk (4), heat sink (12) upper wall surface
If offering the identical heat release hole of stem structure, and mounting groove is offered at center, the semiconductor chilling plate (13) is placed in scattered
In the mounting groove of hot plate (12).
2. a kind of coating machine cooling device according to claim 1, which is characterized in that rotating disk (4) lower wall surface
If being equipped with the identical support rod of stem structure (14): the support rod (14) is used to support rotating disk (4).
3. a kind of coating machine cooling device according to claim 1, which is characterized in that second servo motor (7)
Driving end is equipped with gasket: the gasket prevents that play occurs between servo motor driving end and threaded rod (9).
4. a kind of coating machine cooling device according to claim 1, which is characterized in that the first servo motor (3)
Outside wall surface is equipped with guard box (15).
5. a kind of coating machine cooling device according to claim 1, which is characterized in that a pair of movable block (10) by
Thread rotary orientation is staggered relatively: the rotation direction is convenient for a pair of movable block (10) relative motion when rotation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920122110.3U CN209481774U (en) | 2019-01-24 | 2019-01-24 | A kind of coating machine cooling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920122110.3U CN209481774U (en) | 2019-01-24 | 2019-01-24 | A kind of coating machine cooling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209481774U true CN209481774U (en) | 2019-10-11 |
Family
ID=68132317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920122110.3U Expired - Fee Related CN209481774U (en) | 2019-01-24 | 2019-01-24 | A kind of coating machine cooling device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209481774U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112672587A (en) * | 2020-12-14 | 2021-04-16 | 合肥诺必达信息技术有限责任公司 | Data storage system based on artificial intelligence |
-
2019
- 2019-01-24 CN CN201920122110.3U patent/CN209481774U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112672587A (en) * | 2020-12-14 | 2021-04-16 | 合肥诺必达信息技术有限责任公司 | Data storage system based on artificial intelligence |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191011 Termination date: 20220124 |