CN209478632U - Scribing machine is used in a kind of cutting of wafer wet type - Google Patents
Scribing machine is used in a kind of cutting of wafer wet type Download PDFInfo
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- CN209478632U CN209478632U CN201821865428.2U CN201821865428U CN209478632U CN 209478632 U CN209478632 U CN 209478632U CN 201821865428 U CN201821865428 U CN 201821865428U CN 209478632 U CN209478632 U CN 209478632U
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- scribing machine
- fixedly installed
- sliding rail
- scribing
- wet type
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Abstract
The utility model relates to wafer dicing technique fields, and disclose a kind of wafer wet type cutting scribing machine, including scribing machine body, the first sliding rail is fixedly installed at the top of the scribing machine body, the top movable of first sliding rail is equipped with the second sliding rail, the top movable of second sliding rail is equipped with the first sliding block, is fixedly installed with workbench at the top of first sliding block.Wafer wet type cutting scribing machine; pass through the stretching motion of hydraulic cylinder; fixed link can be driven to move; to drive the second sliding block side-to-side movement; and then drive super high pressure water jet generator side-to-side movement; complete scribing movement; by super high pressure water jet generator, water high speed can be made to be discharged by sprinkler head, form water knife; scribing work is carried out to wafer; the scribing by the way of the cutting of this wet type, precision is higher, and pollution-free; high temperature will not be generated simultaneously, there is certain protective effect.
Description
Technical field
The utility model relates to wafer dicing technique field, scribing machine is used in specially a kind of wafer wet type cutting.
Background technique
Wafer is to melt first by silicon by purifying, after distillation, silicon crystal stick is made, fab takes these again
The grinding of silicon crystal stick, polishing and slice become wafer master slice, since circular wafer itself is without directionality, are not suitable for electronics
Transmission, therefore these wafers must also cut out a side, as the bottom of similar triangle, so wafer is growed unlike family
DVD is the circle of standard, but is cut off a side, becomes circle with the end.
Existing wafer uses laser score piece when carrying out scribing mostly, and laser scribing is easy to produce high temperature, easily right
Wafer generates certain damage, while existing scribing machine is mobile mostly inconvenient, so propose a kind of wafer wet type
Scribing machine is used in cutting.
Utility model content
(1) the technical issues of solving
In view of the deficiencies of the prior art, the utility model provides a kind of wafer wet type cutting scribing machine, has and cuts
The advantages that effect is good is cut, existing wafer is solved and uses laser score piece mostly when carrying out scribing, laser scribing is easy
High temperature is generated, certain damage, while the problem of the mobile inconvenience mostly of existing scribing machine are easily generated to wafer.
(2) technical solution
For the purpose for realizing above-mentioned good cutting effect, the utility model is provided the following technical solutions: a kind of wafer wet type
It cuts and uses scribing machine, including scribing machine body, the first sliding rail is fixedly installed at the top of the scribing machine body, described first is sliding
The top movable of rail is equipped with the second sliding rail, and the top movable of second sliding rail is equipped with the first sliding block, first sliding block
Top be fixedly installed with workbench, the workbench is internally provided with leakage hole, the fixed peace in the bottom of first sliding block
Equipped with limited block, the inside of second sliding rail is fixedly installed with motor, and the output shaft of the motor is fixedly installed with gear, institute
It states gear to engage with limited block, support frame is fixedly installed at the top of the scribing machine body, the bottom of support frame as described above is fixed
Third sliding rail is installed, the bottom of the third sliding rail is movably installed with the second sliding block, the fixed peace in the bottom of second sliding block
Equipped with super high pressure water jet generator, the bottom of the super high pressure water jet generator is fixedly installed with sprinkler head, the scribing
It is fixedly installed with hydraulic cylinder on the left of the inner wall of machine body, fixed link, the fixed link are fixedly installed on the left of the hydraulic cylinder
It is fixedly mounted with the second sliding block, the bottom of the scribing machine body is fixedly installed with pedestal, and the bottom of the scribing machine body is solid
Dingan County is equipped with universal wheel.
Preferably, the limited block extends to the inside of the second sliding rail, and the bottom of limited block offers gear grooved, gear grooved
It is adapted with gear.
Preferably, sliding slot is offered at left and right sides of second sliding rail, sliding slot is adapted with the first sliding block.
Preferably, the quantity of the pedestal is four, and four pedestals are uniformly distributed in the bottom four corners of scribing machine body, bottom
The external screw-thread of seat is connected with fixture nut.
Preferably, the quantity of the universal wheel is four, and four universal wheels are uniformly distributed in the bottom four of scribing machine body
Angle.
Preferably, the quantity of the leakage hole is two, mounting hole is offered at the top of workbench, mounting hole is located at leak
The top in hole.
(3) beneficial effect
Compared with prior art, the utility model provides a kind of wafer wet type cutting scribing machine, and having following has
Beneficial effect:
Wafer wet type cutting scribing machine, is rotated by electrical power, can be rotated with moving gear, to drive limit
Block is moved forward and backward, and limited block, which is moved forward and backward, drives the first sliding block to be moved forward and backward, final that workbench is driven to be moved forward and backward, and can be played
The effect of operating position is adjusted, so that it is more accurate in scribing, by the stretching motion of hydraulic cylinder, fixed link can be driven
Movement to drive the second sliding block side-to-side movement, and then drives super high pressure water jet generator side-to-side movement, it is dynamic to complete scribing
Make, by super high pressure water jet generator, water high speed can be made to be discharged by sprinkler head, form water knife, wafer is carried out
Scribing work, the scribing by the way of the cutting of this wet type, precision is higher, and pollution-free, while will not generate high temperature, there is one
Fixed protective effect can be convenient the movement of the scribing machine by universal wheel.
Detailed description of the invention
FIG. 1 is a schematic structural view of the utility model；
Fig. 2 is structure enlargement diagram at the utility model A.
In figure: 1 scribing machine body, 2 first sliding rails, 3 second sliding rails, 4 first sliding blocks, 5 workbench, 6 leakage holes, 7 limits
Block, 8 motors, 9 gears, 10 support frames, 11 third sliding rails, 12 second sliding blocks, 13 super high pressure water jet generators, 14 sprinkler heads,
15 hydraulic cylinders, 16 fixed links, 17 pedestals, 18 universal wheels.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
A kind of cutting of wafer wet type scribing machine, including scribing machine body 1 referring to FIG. 1-2, scribing machine body 1
Top is fixedly installed with the first sliding rail 2, and the top movable of the first sliding rail 2 is equipped with the second sliding rail 3, and the top of the second sliding rail 3 is living
Dynamic to be equipped with the first sliding block 4, the left and right sides of the second sliding rail 3 offers sliding slot, and sliding slot is adapted with the first sliding block 4, and first is sliding
The top of block 4 is fixedly installed with workbench 5, and workbench 5 is internally provided with leakage hole 6, and the quantity of leakage hole 6 is two, work
The top for making platform 5 offers mounting hole, and mounting hole is located at the top of leakage hole 6, and the bottom of the first sliding block 4 is fixedly installed with limit
Block 7, limited block 7 extend to the inside of the second sliding rail 3, and the bottom of limited block 7 offers gear grooved, and the inside of the second sliding rail 3 is solid
Dingan County is equipped with motor 8, the model Y-160M 2-2 of motor 8, and the output shaft of motor 8 is fixedly installed with gear 9, gear grooved and tooth
Wheel 9 is adapted, and gear 9 is engaged with limited block 7, and the top of scribing machine body 1 is fixedly installed with support frame 10, the bottom of support frame 10
Portion is fixedly installed with third sliding rail 11, and the bottom of third sliding rail 11 is movably installed with the second sliding block 12, the bottom of the second sliding block 12
It is fixedly installed with super high pressure water jet generator 13, the bottom of super high pressure water jet generator 13 is fixedly installed with sprinkler head 14,
Hydraulic cylinder 15, the model Φ 140/100-800 of hydraulic stem 15, hydraulic cylinder are fixedly installed on the left of the inner wall of scribing machine body 1
15 left side is fixedly installed with fixed link 16, and fixed link 16 and the second sliding block 12 are fixedly mounted, and the bottom of scribing machine body 1 is fixed
Pedestal 17 is installed, the quantity of pedestal 17 is four, and four pedestals 17 are uniformly distributed in the bottom four corners of scribing machine body 1, bottom
The external screw-thread of seat 17 is connected with fixture nut, and the bottom of scribing machine body 1 is fixedly installed with universal wheel 18, the number of universal wheel 18
Amount is four, and four universal wheels 18 are uniformly distributed in the bottom four corners of scribing machine body 1, and scribing is used in wafer wet type cutting
Machine is powered by motor 8 and is rotated, can rotated with moving gear 9, so that limited block 7 be driven to be moved forward and backward, limited block 7 is moved forward and backward
The first sliding block 4 is driven to be moved forward and backward, it is final that workbench 5 is driven to be moved forward and backward, it can play the role of adjusting 5 position of workbench,
So that it is more accurate in scribing, by the stretching motion of hydraulic cylinder 15, fixed link 16 can be driven to move, to drive second
12 side-to-side movement of sliding block, and then 13 side-to-side movement of super high pressure water jet generator is driven, scribing movement is completed, high-pressure water is passed through
Fluidic generator 13 can make water high speed pass through sprinkler head 14 and be discharged, form water knife, carry out scribing work to wafer, adopt
The mode scribing cut with this wet type, precision is higher, and pollution-free, while will not generate high temperature, has certain protection to make
With can be convenient the movement of the scribing machine by universal wheel 18.
In conclusion wafer wet type cutting scribing machine, is powered by motor 8 and is rotated, can rotated with moving gear 9,
To drive limited block 7 to be moved forward and backward, limited block 7, which is moved forward and backward, drives the first sliding block 4 to be moved forward and backward, final to drive workbench 5
It is moved forward and backward, can play the role of adjusting 5 position of workbench, so that it is more accurate in scribing, pass through stretching for hydraulic cylinder 15
Contracting movement, can drive fixed link 16 to move, to drive 12 side-to-side movement of the second sliding block, and then drive ultra-high pressure water fluid jet hair
Scribing movement is completed in raw 13 side-to-side movement of device, by super high pressure water jet generator 13, water high speed can be made to pass through sprinkler head
14 discharges, form water knife, carry out scribing work to wafer, and the scribing by the way of the cutting of this wet type, precision is higher, and
It is pollution-free, while high temperature will not be generated, there is certain protective effect, by universal wheel 18, can be convenient the movement of the scribing machine,
It solves existing wafer and uses laser score piece mostly when carrying out scribing, laser scribing is easy to produce high temperature, easily to crystalline substance
Disk generates certain damage, while the problem of the mobile inconvenience mostly of existing scribing machine.
It should be noted that, in this document, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to
Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those
Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or equipment
Intrinsic element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that
There is also other identical elements in process, method, article or equipment including the element.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art,
It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired
Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.
Claims (6)
1. a kind of cutting of wafer wet type scribing machine, including scribing machine body (1), it is characterised in that: the scribing machine body
(1) it is fixedly installed at the top of the first sliding rail (2), the top movable of first sliding rail (2) is equipped with the second sliding rail (3), institute
The top movable for stating the second sliding rail (3) is equipped with the first sliding block (4), is fixedly installed with work at the top of first sliding block (4)
Platform (5), the workbench (5) are internally provided with leakage hole (6), and the bottom of first sliding block (4) is fixedly installed with limit
The inside of block (7), second sliding rail (3) is fixedly installed with motor (8), and the output shaft of the motor (8) is fixedly mounted with teeth
It takes turns (9), the gear (9) is engaged with limited block (7), support frame (10) are fixedly installed at the top of the scribing machine body (1),
The bottom of support frame as described above (10) is fixedly installed with third sliding rail (11), and the bottom of the third sliding rail (11) is movably installed with
The bottom of two sliding blocks (12), second sliding block (12) is fixedly installed with super high pressure water jet generator (13), the super-pressure
The bottom of fluid generator (13) is fixedly installed with sprinkler head (14), fixed peace on the left of the inner wall of the scribing machine body (1)
It equipped with hydraulic cylinder (15), is fixedly installed with fixed link (16) on the left of the hydraulic cylinder (15), the fixed link (16) and second
Sliding block (12) is fixedly mounted, and the bottom of the scribing machine body (1) is fixedly installed with pedestal (17), the scribing machine body (1)
Bottom be fixedly installed with universal wheel (18).
2. a kind of wafer wet type cutting scribing machine according to claim 1, it is characterised in that: the limited block (7)
The inside of the second sliding rail (3) is extended to, the bottom of limited block (7) offers gear grooved, and gear grooved is adapted with gear (9).
3. a kind of wafer wet type cutting scribing machine according to claim 1, it is characterised in that: second sliding rail
(3) sliding slot is offered at left and right sides of, sliding slot is adapted with the first sliding block (4).
4. a kind of wafer wet type cutting scribing machine according to claim 1, it is characterised in that: the pedestal (17)
Quantity is four, and four pedestals (17) are uniformly distributed in the bottom four corners of scribing machine body (1), and the external screw-thread of pedestal (17) connects
It is connected to fixture nut.
5. a kind of wafer wet type cutting scribing machine according to claim 1, it is characterised in that: the universal wheel (18)
Quantity be four, four universal wheels (18) are uniformly distributed in the bottom four corners of scribing machine body (1).
6. a kind of wafer wet type cutting scribing machine according to claim 1, it is characterised in that: the leakage hole (6)
Quantity be two, offer mounting hole at the top of workbench (5), mounting hole is located at the top of leakage hole (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821865428.2U CN209478632U (en) | 2018-11-13 | 2018-11-13 | Scribing machine is used in a kind of cutting of wafer wet type |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821865428.2U CN209478632U (en) | 2018-11-13 | 2018-11-13 | Scribing machine is used in a kind of cutting of wafer wet type |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209478632U true CN209478632U (en) | 2019-10-11 |
Family
ID=68115706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821865428.2U Active CN209478632U (en) | 2018-11-13 | 2018-11-13 | Scribing machine is used in a kind of cutting of wafer wet type |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209478632U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114227481A (en) * | 2021-12-14 | 2022-03-25 | 湖南艾凯瑞斯智能科技有限公司 | Multi-station synchronous feeding grinding wheel scribing machine for wafer processing |
| CN114227959A (en) * | 2021-12-14 | 2022-03-25 | 湖南艾凯瑞斯智能科技有限公司 | Grinding wheel scribing machine with auxiliary cutting and positioning function for wafer processing |
-
2018
- 2018-11-13 CN CN201821865428.2U patent/CN209478632U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114227481A (en) * | 2021-12-14 | 2022-03-25 | 湖南艾凯瑞斯智能科技有限公司 | Multi-station synchronous feeding grinding wheel scribing machine for wafer processing |
| CN114227959A (en) * | 2021-12-14 | 2022-03-25 | 湖南艾凯瑞斯智能科技有限公司 | Grinding wheel scribing machine with auxiliary cutting and positioning function for wafer processing |
| CN114227481B (en) * | 2021-12-14 | 2023-03-24 | 湖南艾凯瑞斯智能科技有限公司 | Multi-station synchronous feeding grinding wheel scribing machine for wafer processing |
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