CN209471047U - Transmittance etalon, transmittance measuring device - Google Patents

Transmittance etalon, transmittance measuring device Download PDF

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Publication number
CN209471047U
CN209471047U CN201821471377.5U CN201821471377U CN209471047U CN 209471047 U CN209471047 U CN 209471047U CN 201821471377 U CN201821471377 U CN 201821471377U CN 209471047 U CN209471047 U CN 209471047U
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CN
China
Prior art keywords
transmittance
occulter
etalon
photochopper
area
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CN201821471377.5U
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Inventor
李奕
林延东
张帆
孙若端
徐楠
张晓颖
毕磊
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JIANGSU MEASURING SCIENCE INSTITUTE
SHANXI INSTITUTE OF METROLOGY
National Institute of Metrology
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JIANGSU MEASURING SCIENCE INSTITUTE
SHANXI INSTITUTE OF METROLOGY
National Institute of Metrology
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Abstract

The utility model discloses a kind of transmittance etalon and transmittance measuring device, which includes: a fixing piece and one or more occulters, and the occulter is sector structure;The occulter is arranged on the fixing piece, by rotating the occulter for received continuous light modulation into the light of corresponding frequencies, transmits when uncertainty according to the optical oomputing of the corresponding frequencies of the modulation.Pass through the occulter that at least one Ultra-precision Turning is set alternate on fixing piece, the accounting for setting occulter improves the measurement upper limit of transmittance, greatly improve the measurement range when transmittance magnitude calibration of transmittance measuring device, the measurement result uncertainty for substantially reducing transmittance measuring device transmittance magnitude simultaneously, greatly improves the rated capacity of transmittance measuring device transmittance resolution ratio.

Description

Transmittance etalon, transmittance measuring device
Technical field
The utility model relates to technical field of optical measurement more particularly to a kind of transmittance etalons and transmittance to measure Device.
Background technique
Transmittance is the very important optical parameter of technical field of optical measurement, is the important parameter for evaluating optical property, It is commonly applied to optical element, optical thin film, on transmittance meter.Being constantly progressive and develop, laser skill with science and technology Art and optical film technique are rapidly developed, and are required the transmittance of optical element higher and higher.
The method of common measurement optical element transmittance is measured using spectrophotometry, and spectrophotometry is in spy The transmittance of light in given wavelength or a wavelength range carries out qualitative or quantitative analysis to the substance.Spectrophotometer is light Field of measuring techniques is learned to be usually used in measuring the device of the media spectral transmittances such as optical element.With the transmittance to optical element It is required that it is higher and higher, the highly transmissive of similar transmittance meter device is also mentioned than parameter progress high accuracy calibration and real time calibration Higher requirement out.
At present spectrophotometer or transmittance meter or energy are calibrated and/or measured using the higher optical filter of transmittance The transmittance magnitude of degree of opinion measuring instrument is greater than transmittance 0.970 height because of the limitation of filter material and surface reflection It is highly transmissive than the accuracy of this parameter measurement or/and small measurement knot to carry out and guarantee that transmittance measurement lacks effective means Fruit uncertainty.
Summary of the invention
The utility model embodiment provides a kind of transmittance etalon and transmittance measuring device, for solving existing skill The highly transmissive problem bigger than magnitude measurement result uncertainty in art.
The utility model embodiment provides a kind of transmittance etalon, comprising: a fixing piece and one or more shadings Body, the occulter are sector structure;
The occulter is arranged on the fixing piece, by rotating the occulter for received continuous light modulation into phase The light for answering frequency transmits when uncertainty according to the optical oomputing of the corresponding frequencies of the modulation.
Preferably, symmetrical sector structure centered on the occulter, is fixed on the fixation by occulter central point On part.
Preferably, described filter is body elliptical cone or diamond shape cone or trapezoidal pyramidal, and alternate setting is in the fixed body On, the maximum of the occulter effectively shading-area and minimum effectively shading-area are unequal.
Preferably, effective shading-area of the occulter by the occulter area and the etalon area Accounting calculates gained, or calculates gained according to the fan-shaped central angle accounting of the occulter.
Preferably, when effective shading-area of the occulter is maximum effective shading-area, the transmittance standard The measurable transmittance of measurer is the first transmittance.
Preferably, when effective shading-area of the occulter is minimum effective shading-area, the transmittance standard The measurable transmittance of measurer is the second transmittance.
Preferably, when occulter setting alternate with air, effective shading-area accounting of the occulter is smaller, The measurable transmittance of transmittance etalon is higher.
Preferably, the utility model embodiment also provides a kind of transmittance measuring device, comprising:
The front of photochopper is arranged in light source emitter, for emitting continuous light;
Photochopper, any of the above-described etalon of photochopper;
The rear side of photochopper is arranged in photodetector, for receiving the light of corresponding frequencies after photochopper is modulated to export Photosignal;
Signal processor, the signal processor calculate transmittance based on the photosignal that the photodetector exports And/or visibility and its measurement result uncertainty.
Preferably, described device further include: the rear side of the photochopper is arranged in photodetector, penetrates for receiving The pulsed light energy of the photochopper is based on the photosignal and is calculated transmittance with output photoelectric signal, the signal processor And/or visibility.
Preferably, the light source emitter can be visible light emitter, or ultraviolet radioactive transmitter is infrared Radiation transmitter.
The utility model the utility model has the advantages that
Transmittance etalon provided by the embodiment of the utility model and transmittance measuring device, pass through the phase on fixing piece Between at least one fan-shaped occulter is set, effective shading-area accounting by adjusting occulter improves in the measurement of transmittance Limit, greatly improves the measurement range of transmittance measuring device, while substantially reducing the uncertainty of measurement of transmittance, substantially mentions The rated capacity of transmittance resolution ratio is risen, and under the different application scenarios of transmittance demand, has been changed by rotation occulter The demand of measurement different transmittance can be realized in effective shading-area.
Other features and advantages of the utility model will illustrate in the following description, also, partly from specification In become apparent, or understood and implementing the utility model.The purpose of this utility model and other advantages can pass through Structure specifically indicated in the written description, claims, and drawings is achieved and obtained.
Detailed description of the invention
Attached drawing described herein is used to provide a further understanding of the present invention, and constitutes one of the utility model Point, the exemplary embodiment of the utility model and the description thereof are used to explain the utility model, does not constitute to the utility model Improper restriction.In the accompanying drawings:
Fig. 1 is a kind of structural schematic diagram of transmittance etalon provided by the embodiment of the utility model;
Fig. 2 is the structural schematic diagram of another transmittance etalon provided by the embodiment of the utility model;
Fig. 3 is the structural schematic diagram of another transmittance etalon provided by the embodiment of the utility model;
Fig. 3 a and Fig. 3 b are the cross section signal of the occulter of transmittance etalon provided by the embodiment of the utility model Figure;
Fig. 4 a is a kind of cross-sectional view of the occulter of transmittance etalon provided by the embodiment of the utility model;
Fig. 4 b is that a kind of cross section of the another occulter of transmittance etalon provided by the embodiment of the utility model shows It is intended to;
Fig. 5 provides a kind of structural schematic diagram of transmittance measuring device for the utility model embodiment.
Specific embodiment
A kind of transmittance etalon provided by the embodiment of the utility model and transmittance measuring device, it is existing for solving The highly transmissive of transmittance measuring device can not calibrate than magnitude in technology, the big problem of transmittance uncertainty of measurement.
It is illustrated below in conjunction with preferred embodiment of the Figure of description to the utility model, it should be understood that retouch in this place The preferred embodiment stated is only used for describing and explaining the present invention, and is not used to limit the utility model, and do not conflicting In the case where, the feature in the embodiments of the present invention and embodiment can be combined with each other.
A kind of structural schematic diagram for transmittance etalon that the utility model embodiment one provides.The utility model is implemented The transmittance etalon that example one provides to promote the measurement range of transmittance, and reduces transmittance magnitude measurement result Uncertainty.The transmittance etalon includes:
One fixing piece and one or more occulters, the occulter are sector structure;The occulter is arranged described On fixing piece, by rotating the occulter for received continuous light tune
The light of corresponding frequencies is made, it is not true according to the optical oomputing transmittance and its measurement result of the corresponding frequencies of the modulation Fixed degree.
In the utility model embodiment, transmittance etalon can only include an occulter, as shown in FIG. 1, FIG. 1 is A kind of structural schematic diagram of the occulter of transmittance etalon provided by the embodiment of the utility model, the occulter are fan-shaped knot The occulter of structure.
Certainly, in the utility model embodiment, transmittance etalon also may include multiple occulters, such as Fig. 2 institute Show, the occulter of transmittance etalon is two sector structures, is fixed on fixing piece by occulter center point symmetry.
As shown in figure 3, in the utility model embodiment, the structural schematic diagram of another etalon, the etalon packet Include the occulter of fixing piece and 3 sector structures.
Further, in the utility model embodiment, the occulter of transmittance etalon is also cone, and the cone is from outer It encloses to the center of circle gradually from the coarse to fine.
Optionally, in the utility model embodiment, the occulter of the etalon can be trapezoidal pyramidal, the occulter Cross section be it is trapezoidal, as shown in Figure 3a.
Optionally, in the utility model embodiment, the occulter of the etalon is rectangular cone, the occulter it is transversal Face is rectangle, as shown in Figure 3b.
Preferably, as shown in fig. 4 a, the occulter of transmittance etalon is the shading of elliptical cone structure to cone cone The cross section of body, the occulter of the etalon is ellipse, and the elliptical cone occulter is from periphery to the center of circle gradually by thick Attenuate;As shown in Figure 4 b, the occulter of transmittance etalon is the occulter of diamond shape cone structure, the shading of the etalon The cross section of body is diamond shape, the diamond shape cone occulter from periphery to the center of circle gradually from the coarse to fine.
If transmittance etalon includes multiple occulters, alternate can be arranged on fixed body, wherein transmittance mark The maximum of the occulter of quasi- measurer effectively shading-area and minimum effectively shading-area are unequal, i.e., maximum effectively shading-area is big In minimum effective shading-area.
Optionally, in the utility model embodiment, effective shading-area of the occulter of transmittance etalon is by shading The accounting of body and etalon calculates gained, alternatively, if the occulter of transmittance etalon is fan-shaped occulter, transmittance Effective shading-area of the occulter of etalon can calculate gained by the fan-shaped central angle accounting of occulter.
Preferably, in the utility model embodiment, when occulter is elliptical cone or diamond shape cone, the occulter cross section Long axis/long-diagonal it is vertical with continuous light when for maximum effective shading-area, short axle/short diagonal of the occulter cross section It is minimum effective shading-area when vertical with continuous light.When effective shading-area of occulter is maximum effective shading-area, The transmittance that the transmittance etalon can be used for measuring is the first transmittance;Correspondingly, working as effective shading-area of occulter When for minimum effective shading-area, the transmittance that transmittance etalon can be used for measuring is the second transmittance.The elliptical cone Or diamond shape cone occulter can be rotatably fixed on fixing piece by shaft or other modes, can be changed by rotation and be hidden Effective shading-area of body of light carrys out the transmittance of adjustment criteria gage measuring.
In practical application, the occulter of transmittance etalon can setting alternate with air, when occulter and air phase Between when being arranged, effective shading-area of occulter is smaller, and the measurable transmittance of transmittance etalon is higher;It is corresponding, Effective shading-area of occulter is bigger, and the measurable transmittance of transmittance etalon is lower.
Further, in the utility model embodiment, a kind of transmittance measuring device is also provided, as shown in figure 5, the transmission Include: light source emitter than measuring device, the front of photochopper is set, for emitting continuous light;
Photochopper, the photochopper include above-mentioned transmittance etalon, the transmittance etalon include a fixing piece and One or more occulters, occulter are sector structure, are arranged on fixing piece;
The rear side of photochopper is arranged in photodetector, for receiving the light of corresponding frequencies after photochopper is modulated to export Photosignal;
Signal processor, the photosignal for being exported based on above-mentioned photodetector calculate transmittance and its measurement result Uncertainty.
In practical application, light source emitter is the device of light needed for generating transmittance measurement, before photochopper is arranged in Side.Preferably, the light which generates is continuous light.The light source emitter can be sent out for laser emitter, LED light source Any one of emitter, halogen tungsten lamp light source transmitter are also possible to visible light emitter, ultraviolet radioactive transmitter or infra-red radiation Any one of transmitter can be selected as needed.The light source emitter can be placed in black shield, to prevent light source from sending out The extra light that emitter generates serves as noise.Preferably, which further includes a condenser lens, for generate light source Light-ray condensing is at collimated light beam.Optionally, a glass optical fiber can be also set in light source emitter, for producing light source emitter Raw light is reduced to minimum mode with light loss and is sent to photochopper.
Photochopper is a kind of precision rotation motor instrument of periodical truncated beam, for the transmitting of modulated light source transmitter Continuous light beam.Photochopper includes power supply, rotating electric machine, controller, optoelectronic switch and above-mentioned standard measurer.The power supply respectively with rotation Rotating motor, controller are connected with optoelectronic switch, for being driven by electricity to photochopper offer;The controller respectively with rotating electric machine, Optoelectronic switch connection, for controlling the revolving speed and optoelectronic switch of rotating electric machine, can obtain reference signal by optoelectronic switch;The mark Quasi- measurer is connect with rotating electric machine, optoelectronic switch respectively, and the rotating electric machine for driving the etalon to rotate, use by optoelectronic switch The rotation of etalon is opened or closed in control rotating electric machine.
The etalon of transmittance measuring device provided by the utility model includes a fixing piece and occulter.Optionally, The occulter is sector structure, and the occulter can be elliptical cone or diamond shape cone or rectangular cone or trapezoidal pyramidal, The cross section of the cone occulter can be ellipse or diamond shape or rectangle or trapezoidal.The cone occulter can be one, Or it is multiple, alternate it can be arranged on the fixing piece, when the occulter is elliptical cone or diamond shape cone, institute Effective shading-area, the maximum of occulter effectively shading-area and minimum effective shading surface can be adjusted by rotation by stating occulter Product is unequal, i.e., position of the occulter relative to the fixing piece is adjusted by rotation, to adjust the occulter Effective shading-area.
Preferably, the occulter is arranged on fixing piece by screw or other modes.The company of light source emitter transmitting Continuous illumination is mapped on photochopper, is opened optoelectronic switch and is powered to photochopper, is controlled rotating electric machine driving by controller and is hidden The occulter of light device rotates, and continuous light passes through continuous light modulation after occulter into the light of corresponding fixed frequency.
Embodiment one
In the following, by taking occulter is elliptic conic shape as an example, a kind of etalon provided by the utility model.The etalon packet Fixed body 1 and elliptical cone 2 are included, elliptical cone 2 is arranged on fixed body 1, the elliptical cone can be rotated around a certain axis, Gu Determining part 1 is circular ring shape fixing piece, and one end of any elliptical cone 2 is set on the annulus of fixing piece 1, and other end setting is solid On the central point for determining part 1, can by ellipse of revolution cone, can be realized with it is conplane where fixing piece 1, elliptical cone The size (i.e. the effective shading-area size of elliptical cone) of cross-sectional area.If the rotation of elliptical cone 2 is to relative to fixed body 1 When first position, i.e., the occulter cross section longest diameter institute it is planar vertical with continuous light when, elliptical cone 2 it is effective Shading-area is maximum, can measure or the transmittance of calibration is the first transmittance.If the rotation of elliptical cone 2 is to relative to fixed body 1 The second position when, i.e. when plane where the most short diameter of the occulter cross section is vertical with continuous light, elliptical cone it is effective Shading-area is minimum, then effective shading-area accounting of elliptical cone 2 is minimum, can measure or adjustable transmittance is second saturating Ratio is penetrated, effective shading-area can rotate as needed elliptical cone and be adjusted.
Certainly, etalon can be made of centrosymmetric two elliptical cones.Correspondingly, etalon can also be by Asymmetrical elliptical cone structure, can be set multiple, and the setting of equidistant interval is on fixing piece.
Effective shading-area accounting of the occulter can be as needed, the position by adjusting occulter relative to fixing piece It sets to adjust, certainly, adjustable range (a fixed range) can only be adjusted in adjustable extent, it is also possible to can only be adjusted To two or more fixed values (e.g., the maximum of occulter effectively corresponding effective shading-area of maximum of shading-area Accounting and the corresponding minimum effectively shading-area accounting of the minimum of occulter effectively shading-area).In calibration transmittance measurement When instrument, other operations are not required to, only rotation adjustment cone can reappear the first transmittance and the second transmittance, take the difference of two transmittances Value, i.e. the transmittance resolution ratio of adjustable transmittance meter, this operating process almost avoid its introduced in addition to rotating factor His uncertainty source, greatly improves the rated capacity of transmittance resolution ratio.
The method and process of etalon measurement transmittance are illustrated in detail below.
When occulter setting alternate with air (does not consider the influence of other factors, the transmittance of air is 1.000), then thoroughly The transmittance penetrated than measuring device can calculate are as follows:
Assuming that the effective shading-area accounting of occulter is the p=1/10 of the gross area, the then transmittance of the etalon are as follows:
T=1.000* (1-1/10)=0.900
Assuming that the effective shading-area accounting of occulter is the p=1/20 of the gross area, the then transmittance of the etalon are as follows:
T=1.000* (1-1/20)=0.950
Assuming that the effective shading-area accounting of occulter is the p=1/50 of the gross area, the then transmittance of the etalon are as follows:
T=1.000* (1-1/50)=0.980
According to the above data that calculate it is found that the effective shading-area accounting of the occulter is smaller, then the saturating etalon can be surveyed The transmittance of amount is higher.
The etalon that the utility model embodiment one provides, passes through at least one shading of setting alternate on fixing piece Body, effective shading-area accounting by adjusting occulter calculate the transmittance of etalon, improve the measurement upper limit of transmittance, Greatly improve the transmittance measurement range of etalon.
Embodiment two
The utility model embodiment two provides a kind of etalon on the basis of example 1, using occulter as elliptic cone For shape, which includes:
One fixing piece and one or more occulters, the occulter are arranged on the fixing piece, by described in rotation Occulter can adjust the size of the effective shading-area of the occulter, by continuous light modulation at the light of corresponding frequencies;
Preferably, the centrosymmetric two elliptical cone structures of the occulter, the central symmetry point of the occulter with The central point of fixing piece is overlapped.The occulter can setting alternate with air, the transmittance of described two elliptical cones can phase Together, it can also be different, set with specific reference to demand.
Specifically, substantially subtracted using the uncertainty of the etalon transmittance magnitude measurement result of the sector occulter It is small.
For example, at present the uncertainty of the transmittance magnitude measurement result in optical metrology field all a ten thousandth with On, and ultraprecise machining in geometric sense magnitude measurement result uncertainty, be much better than optical quantities magnitude measurement result Uncertainty.If ultraprecise maching dimension and position precision d are (0.01~0.3) μm, it is assumed that take d=0.1 μm, sector hides The radius R of body of light be 10cm, by formula L5=π R α/180*2 calculate occulter the length L5 at the 5cm of the center of circle value, Occulter is calculated in the value of the length L10 at the 10cm of the center of circle by formula L10=π R α/180, and L takes putting down for L5 and L10 Mean value.Calculate transmittance uncertainty are as follows:
Urel=d/L (k=2)
As known from the above, in the occulter for using Ultra-precision Turning and air (assuming that the transmittance of air for 1.000) phase Between when being arranged, when central angle is 1 degree, uncertainty Urel=0.000076 at this time is lower than a ten thousandth, super by geometric sense Precise processing precision uncertainty substantially reduces relative to optical transmittance uncertainty of measurement.
The etalon that the utility model embodiment two provides, passes through at least one shading of setting alternate on fixing piece Body, the occulter use Ultra-precision Turning, and the chain of tracing to the source of optical transmittance parameter measurement can be followed by tracing to the source, and preferably follow geometry The chain of tracing to the source for measuring parameter measurement, greatly reduces the uncertainty of transmittance magnitude measurement result.
Embodiment three
As shown in figure 5, the utility model embodiment provides a kind of transmittance measuring device on the basis of the above embodiments, To promote the measurement range of transmittance, and reduction transmittance magnitude measurement result uncertainty.The transmittance measuring device Include:
The front of photochopper is arranged in light source emitter, for emitting continuous light;
Photochopper, the photochopper include an etalon, and the etalon includes a fixing piece and one or more Occulter, the occulter are arranged on the fixing piece, can adjust the occulter by the rotation occulter and effectively hide The size of light area, the continuous light modulation that the light source emitter is emitted at corresponding frequencies light;
The rear side of photochopper is arranged in photodetector, and the light of the fixed frequency for receiving photochopper modulation will receive To the light of fixed frequency be transformed into electric signal to export modulating frequency;
Signal processor transmits described in the optical oomputing for the corresponding frequencies that the signal processor is modulated based on the photochopper Than the transmission when uncertainty of measuring device.
Light source emitter is the device of light needed for generating transmittance measurement, and the front of photochopper is arranged in.Preferably, should The light that light source emitter generates is continuous light.The light source emitter can be laser emitter, LED light source emitter, tungsten halogen lamp Any one of light source emitter is also possible to appointing for visible light emitter, ultraviolet radioactive transmitter or infra-red radiation transmitter It anticipates one kind, can select as needed.The light source emitter can be placed in black shield, to prevent light source emitter from generating Extra light serves as noise.Preferably, which further includes a condenser lens, the light-ray condensing for generating light source at Collimated light beam.Optionally, a glass optical fiber can be also set in light source emitter, and the light for generating light source emitter is with light Loss is reduced to minimum mode and is sent to photochopper.
Photochopper is a kind of precision rotation motor instrument of periodical truncated beam, for the transmitting of modulated light source transmitter Continuous light beam.Photochopper includes power supply, rotating electric machine, controller, optoelectronic switch and above-mentioned standard measurer.The power supply respectively with rotation Rotating motor, controller are connected with optoelectronic switch, for being driven by electricity to photochopper offer;The controller respectively with rotating electric machine, Optoelectronic switch connection, for controlling the revolving speed and optoelectronic switch of rotating electric machine, can obtain reference signal by optoelectronic switch;The mark Quasi- measurer is connect with rotating electric machine, optoelectronic switch respectively, and the rotating electric machine for driving the etalon to rotate, use by optoelectronic switch The rotation of etalon is opened or closed in control rotating electric machine.Transmittance measuring device provided by the embodiment of the utility model, By at least one occulter of setting alternate on fixing piece, effective shading-area accounting by adjusting occulter calculates transmission Than the transmittance of measuring device, the measurement upper limit of transmittance is improved, greatly improves the measurement range of transmittance measuring device, together The occulter of Shi Caiyong Ultra-precision Turning traces to the source and preferably follows the chain of tracing to the source of geometric sense parameter measurement, greatly reduces transmission Than magnitude measurement result uncertainty.
Although the preferred embodiment of the utility model has been described, once a person skilled in the art knows basic Creative concept, then additional changes and modifications can be made to these embodiments.It is wrapped so the following claims are intended to be interpreted as It includes preferred embodiment and falls into all change and modification of the scope of the utility model.
Obviously, it is practical without departing from this can to carry out various modification and variations to the utility model by those skilled in the art Novel spirit and scope.If in this way, these modifications and variations of the present invention belong to the utility model claims and Within the scope of its equivalent technologies, then the utility model is also intended to include these modifications and variations.

Claims (10)

1. a kind of transmittance etalon characterized by comprising
One fixing piece and one or more occulters, the occulter are sector structure;
The occulter is arranged on the fixing piece, by rotating the occulter for received continuous light modulation into respective tones The light of rate, according to the optical oomputing transmittance and/or visibility of the corresponding frequencies of the modulation and its uncertainty of measurement result.
2. etalon according to claim 1, which is characterized in that symmetrical sector structure centered on the occulter, It is fixed on the fixing piece by occulter central point.
3. etalon according to claim 1, which is characterized in that the occulter be elliptical cone or diamond shape cone or Trapezoidal pyramidal, alternate to be arranged on the fixing piece, the maximum of the occulter effectively shading-area and minimum effective shading surface Product is unequal.
4. etalon according to claim 3, which is characterized in that effective shading-area of the occulter is by the screening Body of light and the accounting of the etalon calculate gained, or calculate gained according to the fan-shaped central angle accounting of the occulter.
5. etalon according to claim 4, which is characterized in that when effective shading-area of the occulter is maximum When effective shading-area, the measurable transmittance of transmittance etalon is the first transmittance.
6. etalon according to claim 5, which is characterized in that when effective shading-area of the occulter is minimum When effective shading-area, the measurable transmittance of transmittance etalon is the second transmittance.
7. etalon according to claim 5, which is characterized in that when occulter setting alternate with air, institute The effective shading-area accounting for stating occulter is smaller, and the measurable transmittance of transmittance etalon is higher.
8. a kind of transmittance measuring device characterized by comprising
Light source emitter is connected electrically in the front of photochopper, for emitting continuous light;
Photochopper, the photochopper includes etalon described in any one of 1-7 claim, with the light source emitter and letter The electrical connection of number processor;
Signal processor, the signal processor are electrically connected with photochopper, and the photosignal based on photochopper output calculates Transmittance and its measurement result uncertainty.
9. device according to claim 8, which is characterized in that described device further include: photodetector is arranged described The rear side of photochopper, links with photochopper and signal processor, for receiving the pulsed light energy through the photochopper with defeated Photosignal out, the signal processor are based on the photosignal and calculate transmittance and/or visibility.
10. device according to claim 9, which is characterized in that the light source emitter is visible light emitter, ultraviolet spoke Penetrate transmitter or infra-red radiation transmitter.
CN201821471377.5U 2018-09-07 2018-09-07 Transmittance etalon, transmittance measuring device Active CN209471047U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109752348A (en) * 2018-09-07 2019-05-14 中国计量科学研究院 Transmittance etalon, transmittance measuring device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109752348A (en) * 2018-09-07 2019-05-14 中国计量科学研究院 Transmittance etalon, transmittance measuring device

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