CN209400725U - Extinction film and optical image equipment - Google Patents
Extinction film and optical image equipment Download PDFInfo
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- CN209400725U CN209400725U CN201920277751.6U CN201920277751U CN209400725U CN 209400725 U CN209400725 U CN 209400725U CN 201920277751 U CN201920277751 U CN 201920277751U CN 209400725 U CN209400725 U CN 209400725U
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- adhesive layer
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Abstract
The utility model provides a kind of extinction film and optical image equipment, is related to optical film technology field, which includes alloy substrate, adhesive layer and antireflection layer, and adhesive layer is arranged on alloy substrate, and antireflection layer is arranged on adhesive layer.The extinction film can reach absorption effects by alloy substrate and antireflection layer, to further reduced stray light, improve the applicability in the optical image equipment for needing ultralow stray light；The conjugation of alloy substrate and antireflection layer is enhanced by adhesive layer, to reduce the risk that falls off of antireflection layer.In addition, alloy substrate has preferable ductility, it is not easy to which fragmentation, hot tolerance is preferable, may be used as the protective layer under certain dark background.
Description
Technical field
The utility model relates to optical film technology fields, more particularly, to a kind of extinction film and optical image equipment.
Background technique
Antireflective coating, also known as anti-reflection film, its major function are to reduce or eliminate the optics table such as lens, prism, plane mirror
The reflected light in face reduces or eliminates the stray light of system to increase the light transmission capacity of these elements.
The antireflective coating of antiradar reflectivity is to reduce reflected light by way of increasing transmitance at present, to reduce spuious
Light.However inside the optical element of such as high-end optical image equipment, ultralow stray light is usually required that, and existing anti-reflection
It penetrates film and is unable to satisfy its stray light requirement.
Utility model content
In view of this, the purpose of this utility model is to provide a kind of extinction film and optical image equipments, to reach extinction
Effect improves the applicability in the optical image equipment for needing ultralow stray light to further decrease stray light.
In a first aspect, the utility model embodiment provides a kind of extinction film, including alloy substrate, adhesive layer and antireflective
Layer, the adhesive layer are arranged on the alloy substrate, and the antireflection layer is arranged on the adhesive layer.
With reference to first aspect, the utility model embodiment provides the first possible embodiment of first aspect,
In, the material of the alloy substrate includes stainless steel or aluminium alloy.
With reference to first aspect, the utility model embodiment provides second of possible embodiment of first aspect,
In, the alloy substrate with a thickness of 0.01mm-0.05mm.
With reference to first aspect, the utility model embodiment provides the third possible embodiment of first aspect,
In, the material of the adhesive layer includes titanium, chromium, copper or aluminium.
With reference to first aspect, the utility model embodiment provides the 4th kind of possible embodiment of first aspect,
In, the adhesive layer with a thickness of 50nm-200nm.
With reference to first aspect, the utility model embodiment provides the 5th kind of possible embodiment of first aspect,
In, the antireflection layer is the multilayered structure being made of the low-index layer and high refractive index layer being arranged alternately, wherein near
One layer of the alloy substrate is the low-index layer, and one layer farthest away from the alloy substrate is the high refractive index layer.
The 5th kind of possible embodiment with reference to first aspect, the utility model embodiment provide the of first aspect
Six kinds of possible embodiments, wherein the low-index layer includes silica coating；The high refractive index layer includes titanyl
Compound film layer, chromium oxide film layer or aluminum oxide film layer.
With reference to first aspect, the utility model embodiment provides the 7th kind of possible embodiment of first aspect,
In, the sum of thickness of the adhesive layer and the antireflection layer is no more than 500nm.
The 6th kind of possible embodiment with reference to first aspect, the utility model embodiment provide the of first aspect
Eight kinds of possible embodiments, wherein the material of the titanium oxide film layer includes TiO2、Ti2O3And TiO3One of or it is more
Kind.
Second aspect, the utility model embodiment also provide a kind of optical image equipment, including such as above-mentioned first aspect institute
The extinction film stated.
The utility model embodiment bring it is following the utility model has the advantages that
In the utility model embodiment, extinction film includes alloy substrate, adhesive layer and antireflection layer, and adhesive layer setting is being closed
On gold base, antireflection layer is arranged on adhesive layer.The extinction film can reach extinction work by alloy substrate and antireflection layer
With improving the applicability in the optical image equipment for needing ultralow stray light to further reduced stray light；Pass through
Adhesive layer enhances the conjugation of alloy substrate and antireflection layer, to reduce the risk that falls off of antireflection layer.In addition, alloy
Substrate has preferable ductility, it is not easy to which fragmentation, hot tolerance is preferable, may be used as the protective layer under certain dark background.
Other feature and advantage of the utility model will illustrate in the following description, also, partly from specification
In become apparent, or understood and implementing the utility model.The purpose of this utility model and other advantages are illustrating
Specifically noted structure is achieved and obtained in book and attached drawing.
To enable the above objects, features, and advantages of the utility model to be clearer and more comprehensible, preferred embodiment is cited below particularly, and
Cooperate appended attached drawing, is described in detail below.
Detailed description of the invention
It, below will be right in order to illustrate more clearly of specific embodiment of the present invention or technical solution in the prior art
Specific embodiment or attached drawing needed to be used in the description of the prior art are briefly described, it should be apparent that, it is described below
In attached drawing be that some embodiments of the utility model are not paying creativeness for those of ordinary skill in the art
Under the premise of labour, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is a kind of structural schematic diagram of extinction film provided by the embodiment of the utility model；
Fig. 2 is the structural schematic diagram of another extinction film provided by the embodiment of the utility model；
Fig. 3 is a kind of reflectance test result figure of extinction film provided by the embodiment of the utility model；
Fig. 4 is a kind of flow diagram of the preparation method of extinction film provided by the embodiment of the utility model；
Fig. 5 is the flow diagram of the preparation method of another extinction film provided by the embodiment of the utility model.
Icon:
100- alloy substrate；200- adhesive layer；300- antireflection layer；301- low-index layer；302- high refractive index layer.
Specific embodiment
To keep the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, below in conjunction with attached drawing to this
The technical solution of utility model is clearly and completely described, it is clear that described embodiment is that the utility model a part is real
Example is applied, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art are not making
Every other embodiment obtained, fall within the protection scope of the utility model under the premise of creative work.
The antireflective coating plated film of antiradar reflectivity at present, is commonly used on the substrates such as glass, brittleness and ductility relative deficiency,
Cause antireflective coating easy to break, hot tolerance is poor, it is most important that be unable to reach absorption effects, thus be unable to satisfy spuious
The use demand of the more demanding optical image equipment of light.Based on this, a kind of extinction film provided by the embodiment of the utility model and
Optical image equipment can be such that extinction film reaches and be lower than 0.3% extinction in 400nm~700nm spectral band average reflectance
Effect, and alloy substrate has preferable ductility, may be used as the protective layer under certain dark background.
To be carried out to a kind of extinction film disclosed in the utility model embodiment first convenient for understanding the present embodiment
It is discussed in detail.
Embodiment one:
Fig. 1 is a kind of structural schematic diagram of extinction film provided by the embodiment of the utility model, as shown in Figure 1, the extinction film
Including alloy substrate 100, adhesive layer 200 and antireflection layer 300, adhesive layer 200 is arranged on alloy substrate 100, antireflection layer
300 are arranged on adhesive layer 200.
Specifically, alloy substrate 100 and antireflection layer 300 can combine to reach absorption effects.In view of using existing
There is coating technique, antireflection layer 300 and 100 surface conjugation of alloy substrate are poor, are easy to fall off, pass through bonding in the present embodiment
The conjugation of both 200 enhancings of layer.
Optionally, the material of alloy substrate 100 includes stainless steel or aluminium alloy.
Optionally, alloy substrate 100 with a thickness of 0.01mm-0.05mm.
For example, using stainless steel thin slice as alloy substrate 100, thickness is no more than 0.05mm, plated film (adhesive layer 200
With antireflection layer 300) extinction function is formed afterwards, 99% or more can be reached in 400nm~700nm spectral band absorptance, instead
Rate is penetrated lower than 0.3%.
Optionally, the material of adhesive layer 200 includes titanium Ti, chromium Cr, copper Cu or aluminium Al.
In some possible embodiments, the material selection Ti of adhesive layer 200.With Ti layers be adhesive layer 200 when have with
Lower advantage: advantage one, Ti spreadability is good, and the cavity of plated film is few, and compactness is good；The light absorptive of advantage two, Ti is good, in film layer design
Ti layers are played absorption effects, the light absorptive needed；The caking property of advantage three, Ti and alloy substrate 100 and antireflection layer 300
It is good；The chemical stability of advantage four, Ti is good.
Optionally, adhesive layer 200 with a thickness of 50nm-200nm.
Optionally, total film thickness (overall thickness of adhesive layer 200 and antireflection layer 300) is within 500nm.
In the utility model embodiment, extinction film includes alloy substrate, adhesive layer and antireflection layer, and adhesive layer setting is being closed
On gold base, antireflection layer is arranged on adhesive layer.The extinction film can reach extinction work by alloy substrate and antireflection layer
With improving the applicability in the optical image equipment for needing ultralow stray light to further reduced stray light；Pass through
Adhesive layer enhances the conjugation of alloy substrate and antireflection layer, to reduce the risk that falls off of antireflection layer.In addition, alloy
Substrate has preferable ductility, it is not easy to which fragmentation, hot tolerance is preferable, may be used as the protective layer under certain dark background.
Fig. 2 is the structural schematic diagram of another extinction film provided by the embodiment of the utility model, as shown in Fig. 2, antireflective
Layer 300 is the multilayered structure being made of the low-index layer 301 and high refractive index layer 302 being arranged alternately, wherein near alloy
One layer of substrate 100 (or adhesive layer 200) is low-index layer 301, farthest away from the one of alloy substrate 100 (or adhesive layer 200)
Layer is high refractive index layer 302.
Optionally, low-index layer 301 includes silica coating；High refractive index layer 302 includes titanium oxide film layer, oxygen
Change chromium film layer or aluminum oxide film layer.
Further, the material of above-mentioned titanium oxide film layer includes TiO2、Ti2O3And TiO3One of or it is a variety of.
For example, being adopted in stainless steel thin slice basic surface (stainless steel surface) plated film (adhesive layer 200 and antireflection layer 300)
It is designed with specific film layer, is allowed to bond with stainless steel surface precision, and can reach flat in 400nm~700nm spectral band
Equal reflectivity is lower than 0.3% absorption effects.
Fig. 3 is a kind of reflectance test result figure of extinction film provided by the embodiment of the utility model, as shown in figure 3, logical
Coating Materials and film layer design are crossed, there is the extinction characteristic of superelevation in the 400nm-700nm wave band extinction film, average reflectance is low
In 0.3% or less.In addition, for the reflected light of 400nm-700nm wave band under the extinction film, chromameter L value less than 2, coloration A value
Absolute value is less than 1.5, and coloration B value is between -3 to 0.5.
In summary, can reach in the extinction film that stainless steel thin slice surface coating obtains in 400nm~700nm spectrum wave
Section average reflectance is lower than 0.3% absorption effects, and the extinction film have it is thin, be not easy that fragmentation, compatible degree be high, extinction effect
Good feature.
Embodiment two:
Fig. 4 is a kind of flow diagram of the preparation method of extinction film provided by the embodiment of the utility model, and this method can
To be completed in vacuum sputtering film plating machine, to obtain the extinction film such as above-described embodiment one.As shown in figure 4, the system of extinction film
Preparation Method the following steps are included:
Step S402, forms adhesive layer on alloy substrate.
Specifically, it is formed between adhesive layer on alloy substrate, it usually needs the surface of alloy substrate is cleaned, example
ICP (Inductive Coupled Plasma Emission Spectrometer, inductively coupled plasma can such as be used
Body) Ion Cleaning, the time of cleaning can be, but not limited to 2min-5min, the flow of plasma can be, but not limited to for
50sccm (standard-state cubic centimeter per minute, standard milliliters/minute) -100sccm.
Can be by vacuum sputtering coating technique, the adhesive layer of the surface sputter such as titanium of alloy substrate after cleaning,
With a thickness of 50nm-200nm.
Step S404, forms antireflection layer on adhesive layer, to obtain extinction film.
Optionally, antireflection layer is the multilayered structure being made of the low-index layer and high refractive index layer being arranged alternately,
In, one layer near alloy substrate is low-index layer, and one layer farthest away from alloy substrate is high refractive index layer.Based on this,
The process of step S404 is as follows: first forming low-index layer on adhesive layer, then forms high refraction on the low-index layer
Rate layer is alternatively formed low-index layer and high refractive index layer on the high refractive index layer later again, wants until reaching film layer design
It asks.
In the utility model embodiment, adhesive layer is formed on alloy substrate；Antireflection layer is formed on adhesive layer, with
To extinction film.The extinction film can reach absorption effects by alloy substrate and antireflection layer, to further reduced spuious
Light improves the applicability in the optical image equipment for needing ultralow stray light；By adhesive layer enhance alloy substrate with
The conjugation of antireflection layer, to reduce the risk that falls off of antireflection layer.In addition, alloy substrate has preferable ductility,
It is not easy fragmentation, hot tolerance is preferable, may be used as the protective layer under certain dark background.
Fig. 5 is the flow diagram of the preparation method of another extinction film provided by the embodiment of the utility model, wherein on
Alloy substrate is stated using stainless steel substrate, adhesive layer uses titanium Ti material, and above-mentioned antireflection layer is the titanium dioxide by being arranged alternately
The multilayered structure that silicon film and titanium oxide layer are constituted, and this method is completed in vacuum sputtering film plating machine.Base of the Fig. 5 in Fig. 4
It is refined on plinth, as shown in figure 5, method includes the following steps:
Step S502, stainless steel substrate is put into vacuum sputtering film plating machine, and is evacuated to the area 4E-4~2.0E-3Pa
In.
This is conventional cavity vacuum step.
Step S504 carries out ICP ion prerinse 2min-5min to stainless steel substrate surface.
The flow of ICP can be, but not limited to as 50sccm-100sccm when prerinse.
Step S506, in stainless steel substrate surface sputter Ti, with a thickness of 50nm-200nm.
Step S508, as sputter SiO on cephacoria2。
It is alternatively possible to using Si target and be filled with oxygen, aoxidizes and formed in the case where being oxygenated environment after excitation Si atom ionization
SiO2And it is sputtered onto when on cephacoria.With directly adopt SiO in the prior art2Target activation SiO2Molecule carrys out sputter SiO2It compares, it is this
It is more preferable using the plated film mode quality of forming film of Si target.
Step S510, as sputter TiO on cephacoria2。
It is alternatively possible to using Ti target and be filled with oxygen, aoxidizes and formed in the case where being oxygenated environment after excitation Ti atom ionization
TiO2And it is sputtered onto when on cephacoria.With directly adopt TiO in the prior art2Target activation TiO2Molecule carrys out sputter TiO2It compares, it is this
It is more preferable using the plated film mode quality of forming film of Ti target.
Step S512 repeats step S508 and step S510 until reaching requirement.
It is designed according to predetermined film layer, completes SiO2And TiO2Be coated with.
The preparation method of extinction film provided in this embodiment, film layer is coated with relatively easy.In addition, being plated using sputter coating machine
System, based on two kinds of materials of Ti target and Si target, is filled with the gas (such as oxygen) of different content, is capable of forming the change of multiple material
Object is closed, to reach film layer absorption effects.
Embodiment three:
The utility model embodiment additionally provides a kind of optical image equipment, which includes such as above-mentioned implementation
The extinction film of example one.
In the utility model embodiment, extinction film includes alloy substrate, adhesive layer and antireflection layer, and adhesive layer setting is being closed
On gold base, antireflection layer is arranged on adhesive layer.The extinction film can reach extinction work by alloy substrate and antireflection layer
With improving the applicability in the optical image equipment for needing ultralow stray light to further reduced stray light；Pass through
Adhesive layer enhances the conjugation of alloy substrate and antireflection layer, to reduce the risk that falls off of antireflection layer.In addition, alloy
Substrate has preferable ductility, it is not easy to which fragmentation, hot tolerance is preferable, may be used as the protective layer under certain dark background.
Optical image equipment provided by the embodiment of the utility model, it is having the same with extinction film provided by the above embodiment
Technical characteristic reaches identical technical effect so also can solve identical technical problem.
It is apparent to those skilled in the art that for convenience and simplicity of description, the optics of foregoing description
The specific work process of image documentation equipment, can be with reference to the corresponding process in aforementioned extinction film embodiment, and details are not described herein.
In all examples being illustrated and described herein, any occurrence should be construed as merely illustratively, without
It is as limitation, therefore, other examples of exemplary embodiment can have different values.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.
In addition, in the description of the utility model embodiment unless specifically defined or limited otherwise, term " installation ",
" connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally connect
It connects；It can be mechanical connection, be also possible to be electrically connected；It can be directly connected, can also indirectly connected through an intermediary, it can
To be the connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood with concrete condition
Concrete meaning in the present invention.
It is in the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", " perpendicular
Directly ", the orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, and is only
For ease of description the utility model and simplify description, rather than the device or element of indication or suggestion meaning must have it is specific
Orientation, be constructed and operated in a specific orientation, therefore should not be understood as limiting the present invention.In addition, term " the
One ", " second ", " third " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.
Finally, it should be noted that embodiment described above, only specific embodiment of the present utility model, to illustrate this
The technical solution of utility model, rather than its limitations, the protection scope of the utility model is not limited thereto, although referring to aforementioned
The utility model is described in detail in embodiment, those skilled in the art should understand that: it is any to be familiar with this skill
The technical staff in art field within the technical scope disclosed by the utility model, still can be to skill documented by previous embodiment
Art scheme modify or can readily occur in variation or equivalent replacement of some of the technical features；And these modifications,
Variation or replacement, the spirit and model of the utility model embodiment technical solution that it does not separate the essence of the corresponding technical solution
It encloses, should be covered within the scope of the utility model.Therefore, the protection scope of the utility model is answered described is wanted with right
Subject to the protection scope asked.
Claims (10)
1. a kind of extinction film, which is characterized in that including alloy substrate, adhesive layer and antireflection layer, the adhesive layer is arranged in institute
It states on alloy substrate, the antireflection layer is arranged on the adhesive layer.
2. extinction film according to claim 1, which is characterized in that the material of the alloy substrate includes that stainless steel or aluminium close
Gold.
3. extinction film according to claim 1, which is characterized in that the alloy substrate with a thickness of 0.01mm-0.05mm.
4. extinction film according to claim 1, which is characterized in that the material of the adhesive layer includes titanium, chromium, copper or aluminium.
5. extinction film according to claim 1, which is characterized in that the adhesive layer with a thickness of 50nm-200nm.
6. extinction film according to claim 1, which is characterized in that the antireflection layer is the low-refraction by being arranged alternately
The multilayered structure that layer and high refractive index layer are constituted, wherein one layer near the alloy substrate is the low-index layer, most
One layer far from the alloy substrate is the high refractive index layer.
7. extinction film according to claim 6, which is characterized in that the low-index layer includes silica coating；Institute
Stating high refractive index layer includes titanium oxide film layer, chromium oxide film layer or aluminum oxide film layer.
8. extinction film according to claim 1, which is characterized in that the sum of the adhesive layer and the thickness of the antireflection layer
No more than 500nm.
9. extinction film according to claim 7, which is characterized in that the material of the titanium oxide film layer includes TiO2、
Ti2O3And TiO3One of or it is a variety of.
10. a kind of optical image equipment, which is characterized in that including such as above-mentioned extinction film of any of claims 1-9.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920277751.6U CN209400725U (en) | 2019-03-05 | 2019-03-05 | Extinction film and optical image equipment |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201920277751.6U CN209400725U (en) | 2019-03-05 | 2019-03-05 | Extinction film and optical image equipment |
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| CN209400725U true CN209400725U (en) | 2019-09-17 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109738976A (en) * | 2019-03-05 | 2019-05-10 | 浙江水晶光电科技股份有限公司 | Extinction film and preparation method thereof, optical image equipment |
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2019
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109738976A (en) * | 2019-03-05 | 2019-05-10 | 浙江水晶光电科技股份有限公司 | Extinction film and preparation method thereof, optical image equipment |
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Effective date of registration: 20191230 Address after: 318000 3rd Floor-A of Phase I Joint Workshop of 2198 East Development Avenue, Jiaojiang District, Taizhou City, Zhejiang Province Patentee after: Zhejiang Jingchi Photoelectric Technology Co., Ltd. Address before: 318000, Star Electronics Industrial District A5, Jiaojiang District, Zhejiang City, Taizhou Province Patentee before: Zhejiang Quartz Crystal Optoelectronic Technology Co., Ltd. |
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