CN209379580U - A kind of novel vacuum plasma cleaning machine tank body structure - Google Patents
A kind of novel vacuum plasma cleaning machine tank body structure Download PDFInfo
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- CN209379580U CN209379580U CN201822208140.4U CN201822208140U CN209379580U CN 209379580 U CN209379580 U CN 209379580U CN 201822208140 U CN201822208140 U CN 201822208140U CN 209379580 U CN209379580 U CN 209379580U
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Abstract
The utility model discloses a kind of novel vacuum plasma cleaning machine tank body structures, including vacuum chamber, the front end of vacuum chamber is equipped with fixed frame, electrode feed is accessed at the back side of vacuum chamber, the anode connector and positive connector that the electrode feed connection is mounted on vacuum chamber inner sidewall, the vertical vertical plate close to inner sidewall setting is installed on the two sides inner sidewall of the vacuum chamber, the vertical plate is equipped with several fixing grooves for being used to install positive plate and negative plate, the positive plate and negative plate successively interval setting from top to bottom, and it is fixed in the fixing groove of vertical plate by the insulating sheath at both ends, the positive plate and negative plate are the square hole equipped with multiple uniform arrangements and hollow out, rectangular electrode plate structure is when plasma power supply works, the more effective indoor gas of electric vacuum case of meeting, so that in vacuum tank room Portion's plasma concentration is higher, more evenly, effectively raise surface treatment effect, electrode plate structure is using whole positive plates on top, negative plate is in lower part, product is handled in intermediate mode, so that between every layer treatment effect more evenly, stablize, front door using self-priming hinge structure design, can preferably guarantee vacuum chamber leakproofness.
Description
Technical field
The utility model relates to plasma cleaning equipment technical field, in particular to a kind of novel vacuum plasma cleaning
Box body structure.
Background technique
The body structure of conventional vacuum plasma cleaner is all that positive/negative plate is interleaved alternately with.Every layer of product processing when,
Upper plates not can guarantee pole plate polarity, and one layer of polarity is anode above every two layers for the treatment of region, and one layer is cathode, because of electrode plate category
Sex differernce, processed rear article surface processed have differences phenomenon, and uniformity is inconsistent after processing, lead to bad, raising life
Produce cost.
Summary of the invention
In order to overcome drawbacks described above, the utility model provides a kind of novel vacuum plasma cleaning machine tank body structure,
So that between every layer treatment effect more evenly, stablize, front door using self-priming hinge structure design, can preferably guarantee vacuum tank
Room leakproofness.
The utility model is to solve technical solution used by its technical problem: a kind of novel vacuum plasma is clear
Washing machine body structure, including vacuum chamber, the front end of vacuum chamber are equipped with fixed frame, and feedthrough electrode is accessed at the back side of vacuum chamber
Enter part, the anode connector and positive connector that the electrode feed connection is mounted on vacuum chamber inner sidewall are described true
The vertical vertical plate close to inner sidewall setting is installed, the vertical plate is equipped with several for pacifying on the two sides inner sidewall of empty van body
The fixing groove of positive plate and negative plate, the positive plate and negative plate successively interval setting from top to bottom are filled, and passes through both ends
Insulating sheath is fixed in the fixing groove of vertical plate, and the negative plate is support board, between top positive plate and lower section negative plate
Space be object carrying area, the positive plate and negative plate are the square hole equipped with multiple uniform arrangements and hollow out.
The positive connector is equipped with positive load point as a further improvement of the utility model, and the cathode connects
Fitting is equipped with cathode load point, and the anode load point and cathode load point are connect with electrode feed by electrode plug,
And it is arranged electrode feed-in insulating part outside.
The bottom of the positive connector and anode connector is equipped with support as a further improvement of the utility model,
Part, for fixing and supporting positive connector and anode connector.
The beneficial effects of the utility model are: the vacuum plasma cleaning machine tank body structure of the utility model is engraved using rectangular
Empty electrode plate structure design and unified pole plate discharging structure design, rectangular electrode plate structure, can be more effective when plasma power supply works
The indoor gas of electric vacuum case effectively raise surface so that vacuum tank chamber interior plasma concentration is higher, more evenly
Treatment effect, for electrode plate structure using whole positive plates on top, negative plate handles product in intermediate mode in lower part, so that
Between every layer treatment effect more evenly, stablize, front door using self-priming hinge structure design, can preferably guarantee that vacuum chamber is close
Feng Xing.
Detailed description of the invention
FIG. 1 is a schematic structural view of the utility model；
Fig. 2 is the top view of Fig. 1；
It is indicated in figure: 1- vacuum chamber；2- fixed frame；3- electrode feed；4- anode connector；5- anode connector；
6- vertical plate；7- positive plate；8- negative plate；9- insulating sheath；10- electrode plug；11- anode load point；12- cathode load point；
13- electrode feed-in insulating part；14- supporting element.
Specific embodiment
In order to deepen the understanding to the utility model, the utility model is made below in conjunction with embodiment and attached drawing further
It is described in detail, which is only used for explaining the utility model, does not constitute the restriction to scope of protection of the utility model.
Fig. 1 illustrates a kind of a kind of embodiment of novel vacuum plasma cleaning machine tank body structure of the utility model,
Including vacuum chamber 1, the front end of vacuum chamber 1 is equipped with fixed frame 2, and electrode feed 3, institute are accessed in the back side of vacuum chamber 1
It states electrode feed 3 and connects the anode connector 4 being mounted on 1 inner sidewall of vacuum chamber and positive connector 5, the vacuum tank
The vertical vertical plate 6 close to inner sidewall setting is installed, the vertical plate 6 is equipped with several for pacifying on the two sides inner sidewall of body 1
The fixing groove of positive plate 7 and negative plate 8, the positive plate 7 and the successively interval setting from top to bottom of negative plate 8 are filled, and passes through two
The insulating sheath 9 at end is fixed in the fixing groove of vertical plate, and the negative plate 8 is support board, top positive plate and lower section cathode
Space between plate is object carrying area, and the positive plate 7 and negative plate 8 are equipped with the square hole of multiple uniform arrangements and hollow out.
The anode connector 5 is equipped with positive load point 11, and the anode connector 4 is equipped with cathode load point 12,
The anode load point 11 and cathode load point 12 are connect with electrode feed 3 by electrode plug 10, and are arranged electricity outside
Pole feed-in insulating part 13.
The bottom of the anode connector 5 and anode connector 4 is equipped with supporting element 14, for fixing and supporting positive connection
Part and anode connector.
Claims (3)
1. a kind of novel vacuum plasma cleaning machine tank body structure, including vacuum chamber (1), the front end peace of vacuum chamber (1)
Equipped with fixed frame (2), electrode feed (3) are accessed at the back side of vacuum chamber (1), it is characterised in that: the electrode feed (3)
The anode connector (4) being mounted on vacuum chamber (1) inner sidewall and positive connector (5) are connected, the vacuum chamber (1)
The vertical vertical plate (6) close to inner sidewall setting is installed, the vertical plate (6) is equipped with several for installing on the inner sidewall of two sides
The successively interval setting from top to bottom of the fixing groove of positive plate (7) and negative plate (8), the positive plate (7) and negative plate (8), and
It is fixed in the fixing groove of vertical plate by the insulating sheath (9) at both ends, and the negative plate (8) is support board, top positive plate
Space between the negative plate of lower section is object carrying area, and the positive plate (7) and negative plate (8) are equipped with multiple uniform arrangements and engrave
Empty square hole.
2. the novel vacuum plasma cleaning machine tank body structure of one kind according to claim 1, it is characterised in that: it is described just
Pole connector (5) is equipped with positive load point (11), and the anode connector (4) is equipped with cathode load point (12), it is described just
Pole load point (11) and cathode load point (12) are connect with electrode feed (3) by electrode plug (10), and are arranged outside
Electrode feed-in insulating part (13).
3. the novel vacuum plasma cleaning machine tank body structure of one kind according to claim 1, it is characterised in that: it is described just
The bottom of pole connector (5) and anode connector (4) is equipped with supporting element (14), for fixing and supporting positive connector and cathode
Connector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822208140.4U CN209379580U (en) | 2018-12-27 | 2018-12-27 | A kind of novel vacuum plasma cleaning machine tank body structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822208140.4U CN209379580U (en) | 2018-12-27 | 2018-12-27 | A kind of novel vacuum plasma cleaning machine tank body structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209379580U true CN209379580U (en) | 2019-09-13 |
Family
ID=67874033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822208140.4U Active CN209379580U (en) | 2018-12-27 | 2018-12-27 | A kind of novel vacuum plasma cleaning machine tank body structure |
Country Status (1)
| Country | Link |
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| CN (1) | CN209379580U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110890267A (en) * | 2019-12-24 | 2020-03-17 | 昆山索坤莱机电科技有限公司 | Plasma photoresist device |
| CN111299259A (en) * | 2020-04-20 | 2020-06-19 | 昆山索坤莱机电科技有限公司 | Integrated plasma treatment box |
-
2018
- 2018-12-27 CN CN201822208140.4U patent/CN209379580U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110890267A (en) * | 2019-12-24 | 2020-03-17 | 昆山索坤莱机电科技有限公司 | Plasma photoresist device |
| CN111299259A (en) * | 2020-04-20 | 2020-06-19 | 昆山索坤莱机电科技有限公司 | Integrated plasma treatment box |
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