CN209356628U - The test equipment of semiconductor temperature-control device - Google Patents

The test equipment of semiconductor temperature-control device Download PDF

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Publication number
CN209356628U
CN209356628U CN201821638561.4U CN201821638561U CN209356628U CN 209356628 U CN209356628 U CN 209356628U CN 201821638561 U CN201821638561 U CN 201821638561U CN 209356628 U CN209356628 U CN 209356628U
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China
Prior art keywords
plug
sub
control device
semiconductor temperature
output
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CN201821638561.4U
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Inventor
何茂栋
芮守祯
常鑫
赵力行
蒋俊海
于浩
邹昭平
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Beijing Jingyi Automation Equipment Co Ltd
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Beijing Jingyi Automation Equipment Co Ltd
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Abstract

The utility model embodiment provides a kind of test equipment of semiconductor temperature-control device, comprising: the matched input plug of switch value input interface on toggle switch and side and semiconductor temperature-control device;Each sub- plug of the other side of the input plug is connect with one of toggle switch one end respectively, and one other end of the toggle switch is connect with DC power supply.The test equipment of the semiconductor temperature-control device provided in the utility model embodiment, pass through setting toggle switch and input plug, each On-off signal sub-interface in switch value input interface may be implemented independently to test, also multiple switch amount input sub-interface may be implemented while testing, it is high-efficient and more intuitive, it is easy to operate, it is easy to accomplish.

Description

The test equipment of semiconductor temperature-control device
Technical field
The utility model embodiment is related to technical field of semiconductors, more particularly, to the test of semiconductor temperature-control device Equipment.
Background technique
Semiconductor temperature-control device, which usually requires to be attached with Main industry equipment, is just able to achieve communication, carries out the acquisition of data And it sends.In use, Main industry equipment is needed to send various switching values, semiconductor temperature-control device receives switching value and holds Row corresponding actions, while semiconductor temperature-control device sends operating status amount and operation after executing corresponding actions to Main industry equipment Data value then needs itself whether can to semiconductor temperature control device when semiconductor temperature-control device is not connected with Main industry equipment Normal operation is tested.
Semiconductor temperature-control device is during carrying out switch interface communication test at present, the survey of switch amount input interface Examination is switching signal to be generated using control switch, and each On-off signal respectively into switch value input interface connects manually Mouthful input switch signal each is opened what the conducting wire that transmission has switching signal was respectively connected into switch value input interface manually In the amount input sub-interface of pass.Wherein switching signal high voltage representative has a switching signal, and 0 voltage is represented without switching signal, respectively into Row test, checks whether semiconductor temperature-control device can execute corresponding movement.Test process is extremely inconvenient, inefficiency, and holds It is error-prone.
Now it is badly in need of providing a kind of test equipment of semiconductor temperature-control device, to solve in the prior art in switch amount interface It is extremely inconvenient when being tested, inefficiency, and it is easy the problem of malfunctioning.
Utility model content
In order to overcome the problems referred above or it at least is partially solved the above problem, the utility model embodiment provides a kind of half The test equipment of conductor temperature control device.
The utility model embodiment provides a kind of test equipment of semiconductor temperature-control device, comprising: toggle switch, and The matched input plug of switch value input interface on side and semiconductor temperature-control device;
Each sub- plug of the other side of the input plug is connect with one of toggle switch one end respectively, institute One other end for stating toggle switch is connect with DC power supply.
Preferably, the side of the input plug includes the first preset quantity sub- plug, the input plug it is another Side includes first preset quantity sub- plug, and the sub- plug of the side of the input plug is another with the input plug The sub- plug of side corresponds.
Preferably, the quantity of the toggle switch is one or more.
Preferably, further includes: the output of the output switch parameter Interface Matching on side and the semiconductor temperature-control device is inserted Head and the identical resistance of sub- plug quantity in the output plug and identical as the sub- plug quantity in the output plug Light emitting diode;
Sub- plug, the resistance and the light emitting diode of the other side of the output plug connect one to one.
Preferably, the side of the output plug includes the second preset quantity sub- plug, the output plug it is another Side includes the sub- plug of the second preset quantity, the other side of the sub- plug and output plug of the side of the output plug Sub- plug corresponds.
Preferably, the output plug is specially the plug of model DB15.
Preferably, the DC power supply is specially 24V DC power supply.
Preferably, the input plug is specially the plug of model DB15.
A kind of test equipment of semiconductor temperature-control device provided by the embodiment of the utility model, by setting toggle switch with And input plug, each On-off signal sub-interface in switch value input interface may be implemented and independently test, it can also be real Existing multiple switch amount input sub-interface is tested simultaneously, high-efficient and more intuitive, easy to operate, it is easy to accomplish.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is Some embodiments of the utility model, for those of ordinary skill in the art, without creative efforts, It is also possible to obtain other drawings based on these drawings.
Fig. 1 is a kind of structural schematic diagram of the test equipment of semiconductor temperature-control device provided by the embodiment of the utility model;
Fig. 2 is a kind of structural schematic diagram of the test equipment of semiconductor temperature-control device provided by the embodiment of the utility model.
Specific embodiment
It is practical new below in conjunction with this to keep the objectives, technical solutions, and advantages of the embodiments of the present invention clearer Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that is retouched The embodiment stated is the utility model a part of the embodiment, instead of all the embodiments.Based on the implementation in the utility model Example, every other embodiment obtained by those of ordinary skill in the art without making creative efforts belong to The range of the utility model protection.
In the description of the utility model embodiment, it should be noted that term " center ", "upper", "lower", " left side ", The orientation or positional relationship of the instructions such as " right side ", "vertical", "horizontal", "inner", "outside" is orientation based on the figure or position Relationship, be merely for convenience of description the utility model embodiment and simplify description, rather than the device of indication or suggestion meaning or Element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as implementing the utility model The limitation of example.In addition, term " first ", " second ", " third " are used for description purposes only, it is not understood to indicate or imply phase To importance.
In the description of the utility model embodiment, it should be noted that unless otherwise clearly defined and limited, term " installation ", " connected ", " connection " shall be understood in a broad sense, for example, it may be fixedly connected, may be a detachable connection or one Connect to body;It can be mechanical connection, be also possible to be electrically connected;It can be directly connected, it can also be indirect by intermediary It is connected, can be the connection inside two elements.For the ordinary skill in the art, on being understood with concrete condition State concrete meaning of the term in the utility model embodiment.
The utility model embodiment provides a kind of test equipment of semiconductor temperature-control device, comprising: toggle switch, and The matched input plug of switch value input interface on side and semiconductor temperature-control device;Each son of the other side of input plug Plug is connect with one of toggle switch one end respectively, and one other end of toggle switch is connect with DC power supply.
Specifically, semiconductor temperature-control device is semiconductor temperature-control device to be tested, semiconductor in the utility model embodiment Temperature control device is mainly used in manufacture of semiconductor being precisely controlled reaction chamber temperature, mainly by heat exchanger, circulating pump, pressure The homeostatic circulator that contracting machine and control system are constituted, belongs to the temperature control device in production process.This is practical new The test equipment for the semiconductor temperature-control device that type embodiment provides mainly connects the On-off signal in semiconductor temperature control device The communication state of mouth is tested, that is, judges whether Main industry equipment can succeed for the switching signal that semiconductor temperature-control device provides It is received by semiconductor temperature-control device and semiconductor temperature-control device is made to generate corresponding actions.For example, Main industry equipment is to semiconductor temperature The switching signal that device sends control heat exchanger switch state is controlled, corresponds to the switch of heat exchanger in semiconductor temperature-control device Amount input sub-interface works normally and in the correct situation of wiring, and heat exchanger receives switching signal and changes respective switch shape State.It during the test, can be directly in the man-machine of semiconductor temperature-control device if a certain On-off signal sub-interface works normally Observe that semiconductor temperature-control device executes the result of corresponding actions on interactive interface.
In the utility model embodiment, input plug includes two sides, and every side includes multiple sub- plugs, input plug Side is matched with the switch value input interface on semiconductor temperature-control device to be tested, that is, needs to guarantee the side of input plug The quantity of sub- plug is identical as the quantity of On-off signal sub-interface in switch value input interface, and to semiconductor temperature control device When being tested, input plug be may be mounted in switch value input interface.Each On-off signal in switch value input interface Sub-interface is correspondingly connected with a functional unit in semiconductor temperature-control device, to transmit signal to functional unit.
Toggle switch includes multiple positions, and each position includes both ends, i.e. two pins, every height of the other side of input plug Plug is connect with one of toggle switch one end respectively, and one other end of toggle switch is connect with DC power supply.Dial-up Each of switch all has two shelves, i.e. on and off.When testing semiconductor temperature control device, DC power supply is input Every sub- plug of the other side of plug provides voltage signal, when a certain position of toggle switch is in the state opened, direct current The voltage signal that source provides is the voltage rating of DC power supply, corresponding open state, when a certain position of toggle switch is in pass When state, the voltage signal that DC power supply provides is 0, corresponding closed state.
The test equipment of the semiconductor temperature-control device provided in the utility model embodiment, by setting toggle switch and Input plug may be implemented each On-off signal sub-interface in switch value input interface and independently test, also may be implemented Multiple switch amount input sub-interface is tested simultaneously, high-efficient and more intuitive, easy to operate, it is easy to accomplish.
On the basis of the above embodiments, the test of the semiconductor temperature-control device provided in the utility model embodiment is set Standby, the side of the input plug includes the sub- plug of the first preset quantity, and the other side of the input plug includes described the The sub- plug of one preset quantity, the sub- plug one of the other side of the sub- plug and input plug of the side of the input plug One is corresponding.
Specifically, as shown in Figure 1, only being connect in the utility model embodiment with the On-off signal of semiconductor temperature-control device 2 Including being illustrated for 15 On-off signal sub-interfaces in mouthful, correspondingly, the first preset quantity is 15, i.e. input plug 3 Side have 15 sub- plugs, matched with On-off signal sub-interface.Also there are 15 sons to insert for the other side of input plug 3 The sub- plug of head, the other side of the sub- plug and input plug 3 of the side of input plug 3 corresponds.
Each sub- plug of the other side of input plug 3 is connect with one of toggle switch 1 one end respectively, toggle switch 1 one other end is connect with DC power supply 4.
On the basis of the above embodiments, the test of the semiconductor temperature-control device provided in the utility model embodiment is set Standby, the quantity of toggle switch is one or more.
Specifically, as shown in Figure 1, using two toggle switch in Fig. 1, each toggle switch has 8, due to input The other side of plug only has 15 sub- plugs, thus one of toggle switch have a position one end it is idle.This is practical new One can also be used in type embodiment to realize with 16 toggle switch, or directly adopt one and opened with 15 dial-ups It closes and realizes.
On the basis of the above embodiments, the test of the semiconductor temperature-control device provided in the utility model embodiment is set It is standby, further includes: the output plug of the output switch parameter Interface Matching on side and the semiconductor temperature-control device and the output The identical resistance of sub- plug quantity and light emitting diode identical with the sub- plug quantity in the output plug in plug;
Sub- plug, the resistance and the light emitting diode of the other side of the output plug connect one to one.
Specifically, since the communication test of switch amount output interface in the prior art is that starting semiconductor temperature-control device makes Its is in operating status, tests the voltage in output switch parameter interface at each output switch parameter sub-interface respectively by multimeter Value, judges whether each output switch parameter sub-interface has output, this test process is complicated for operation, inefficiency.Therefore this reality With a kind of test equipment of semiconductor temperature-control device is provided in new embodiment, mainly to opening in semiconductor temperature control device The communication state of pass amount output interface is tested, that is, judges the switching signal that Main industry equipment provides for semiconductor temperature-control device After success is received by semiconductor temperature-control device and semiconductor temperature-control device is made to generate corresponding actions, can semiconductor temperature-control device By the status information output after corresponding actions.It is opened for example, Main industry equipment sends control heat exchanger to semiconductor temperature-control device The switching signal of off status is worked normally and is connect in the On-off signal sub-interface that semiconductor temperature-control device corresponds to heat exchanger In the correct situation of line, heat exchanger receives switching signal and changes respective switch state, then corresponding in semiconductor temperature-control device Under the output switch parameter sub-interface normal work and the correct situation of wiring of heat exchanger, corresponded to by semiconductor temperature-control device The respective switch status information of the output switch parameter sub-interface output heat exchanger of heat exchanger.
In the utility model embodiment, output plug includes two sides, and every side includes multiple sub- plugs, output plug Output switch parameter Interface Matching on side and semiconductor temperature-control device to be tested, that is, need to guarantee the side of output plug The quantity of sub- plug is identical as the quantity of On-off signal sub-interface in output switch parameter interface, and to semiconductor temperature control device When being tested, output plug be may be mounted on output switch parameter interface.Each output switch parameter in output switch parameter interface Sub-interface is correspondingly connected with a functional unit in semiconductor temperature-control device, to the corresponding status information of output function unit.
Every sub- plug in output plug is sequentially connected with a resistance, a light emitting diode, and wherein resistance plays guarantor The effect of hair care optical diode, to prevent light emitting diode from damaging because the voltage flowed through is excessive.During the test, if it is a certain Output switch parameter sub-interface works normally and wiring is correct, then corresponding lumination of light emitting diode, otherwise corresponding light-emitting diodes Pipe does not shine.Therefore can by intuitively observe a certain light emitting diode whether shine judge semiconductor temperature-control device certain Whether one output switch parameter sub-interface works normally and whether wiring is correct.
The test equipment of the semiconductor temperature-control device provided in the utility model embodiment, by the way that output plug, electricity is arranged Resistance, light emitting diode, may be implemented to test each output switch parameter sub-interface, high-efficient and more intuitive, easy to operate, It is easily achieved.Meanwhile switch amount input sub-interface is tested simultaneously with output switch parameter sub-interface, it can quickly half-and-half The whole process of conductor temperature control device switching value transmission is tested, and whether just to quickly detect the work of semiconductor temperature-control device Often.
On the basis of the above embodiments, the test of the semiconductor temperature-control device provided in the utility model embodiment is set Standby, the side of the output plug includes the sub- plug of the second preset quantity, and the other side of the output plug includes second pre- If the sub- plug one of the sub- plug of quantity, the other side of the sub- plug and output plug of the side of the output plug is a pair of It answers.
Specifically, as shown in Fig. 2, only being connect in the utility model embodiment with the output switch parameter of semiconductor temperature-control device 2 Including being illustrated for 15 output switch parameter sub-interfaces in mouthful, correspondingly, the second preset quantity is 15, i.e. output plug 5 Side have 15 sub- plugs, matched with output switch parameter sub-interface.Also there are 15 sons to insert for the other side of output plug 5 The sub- plug of head, the other side of the sub- plug and output plug 5 of the side of output plug 5 corresponds.Output plug 5 it is another Each sub- plug of side is connect with a resistance 6 respectively, and resistance 6 is connect with a light emitting diode 7.
On the basis of the above embodiments, the test of the semiconductor temperature-control device provided in the utility model embodiment is set Standby, output plug is specially the plug of model DB15.
On the basis of the above embodiments, the test of the semiconductor temperature-control device provided in the utility model embodiment is set Standby, DC power supply is specially 24V DC power supply.
On the basis of the above embodiments, the test of the semiconductor temperature-control device provided in the utility model embodiment is set Standby, input plug is specially the plug of model DB15.
The apparatus embodiments described above are merely exemplary, wherein described, unit can as illustrated by the separation member It is physically separated with being or may not be, component shown as a unit may or may not be physics list Member, it can it is in one place, or may be distributed over multiple network units.It can be selected according to the actual needs In some or all of the modules achieve the purpose of the solution of this embodiment.Those of ordinary skill in the art are not paying creativeness Labour in the case where, it can understand and implement.
Through the above description of the embodiments, those skilled in the art can be understood that each embodiment can It realizes by means of software and necessary general hardware platform, naturally it is also possible to pass through hardware.Based on this understanding, on Stating technical solution, substantially the part that contributes to existing technology can be embodied in the form of software products in other words, should Computer software product may be stored in a computer readable storage medium, such as ROM/RAM, magnetic disk, CD, including several fingers It enables and using so that a computer equipment (can be personal computer, server or the network equipment etc.) executes each implementation Method described in certain parts of example or embodiment.
Finally, it should be noted that above embodiments are only to illustrate the technical solution of the utility model, rather than its limitations; Although the utility model is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: It is still possible to modify the technical solutions described in the foregoing embodiments, or part of technical characteristic is carried out etc. With replacement;And these are modified or replaceed, various embodiments of the utility model technology that it does not separate the essence of the corresponding technical solution The spirit and scope of scheme.

Claims (8)

1. a kind of test equipment of semiconductor temperature-control device characterized by comprising toggle switch and side and semiconductor The matched input plug of switch value input interface on temperature control device;
Each sub- plug of the other side of the input plug is connect with one of toggle switch one end respectively, and described group One other end of code switch is connect with DC power supply.
2. the test equipment of semiconductor temperature-control device according to claim 1, which is characterized in that the one of the input plug Side includes the sub- plug of the first preset quantity, and the other side of the input plug includes the sub- plug of first preset quantity, The sub- plug of the other side of the sub- plug and input plug of the side of the input plug corresponds.
3. the test equipment of semiconductor temperature-control device according to claim 2, which is characterized in that the number of the toggle switch Amount is one or more.
4. the test equipment of semiconductor temperature-control device according to claim 1, which is characterized in that further include: side and institute State the sub- plug quantity in the output plug and the output plug of the output switch parameter Interface Matching on semiconductor temperature-control device Identical resistance and light emitting diode identical with the sub- plug quantity in the output plug;
Sub- plug, the resistance and the light emitting diode of the other side of the output plug connect one to one.
5. the test equipment of semiconductor temperature-control device according to claim 4, which is characterized in that the one of the output plug Side includes the sub- plug of the second preset quantity, and the other side of the output plug includes the sub- plug of the second preset quantity, described The sub- plug of the other side of the sub- plug and output plug of the side of output plug corresponds.
6. the test equipment of semiconductor temperature-control device according to claim 4, which is characterized in that the output plug is specific For the plug of model DB15.
7. the test equipment of semiconductor temperature-control device according to claim 1 to 6, which is characterized in that described straight Galvanic electricity source is specially 24V DC power supply.
8. the test equipment of semiconductor temperature-control device according to claim 1 to 6, which is characterized in that described defeated Enter the plug that plug is specially model DB15.
CN201821638561.4U 2018-10-09 2018-10-09 The test equipment of semiconductor temperature-control device Active CN209356628U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114070765A (en) * 2021-11-02 2022-02-18 广东利扬芯片测试股份有限公司 Communication interface test circuit and method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114070765A (en) * 2021-11-02 2022-02-18 广东利扬芯片测试股份有限公司 Communication interface test circuit and method

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Address after: 100176 block a, 14th floor, yard 8, Liangshuihe 2nd Street, Beijing Economic and Technological Development Zone, Daxing District, Beijing

Patentee after: Beijing Jingyi automation equipment Technology Co.,Ltd.

Address before: 100176 block a, 14 / F, courtyard 8, Liangshuihe 2nd Street, Daxing Economic and Technological Development Zone, Beijing

Patentee before: BEIJING JINGYI AUTOMATION EQUIPMENT Co.,Ltd.

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