CN209334351U - A kind of liquid crystal spare part cleaning product line - Google Patents
A kind of liquid crystal spare part cleaning product line Download PDFInfo
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- CN209334351U CN209334351U CN201822009978.0U CN201822009978U CN209334351U CN 209334351 U CN209334351 U CN 209334351U CN 201822009978 U CN201822009978 U CN 201822009978U CN 209334351 U CN209334351 U CN 209334351U
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Abstract
The utility model discloses a kind of liquid crystal spare part cleaning product lines, including ultrasonic cleaning line and ultrapure water supply line；Being cleaned by ultrasonic line includes water wash zone, organic oil-removing area, ultrasonic oil-removing area and ultrapure water cleaning area, organic oil-removing area, ultrasonic oil-removing area and ultrapure water cleaning area are set gradually along production mode reform, water wash zone setting is between organic oil-removing area and ultrasonic oil-removing area and ultrasonic oil-removing area and ultrapure water cleaning area, ultrapure water supply line is disposed with by-pass filtration group, secondary filtration group and CEDI filtering group, the output end of CEDI filtering group is connected to ultrapure water cleaning area, water wash zone between by-pass filtration group and organic oil-removing area and ultrasonic oil-removing area is connected to, secondary filtration group is connected to ultrasonic oil-removing area with the water wash zone between ultrapure water cleaning area.The different quality that ultrasonic cleaning knot in this cleaning product line closes the purified place of ultrapure water supply line difference degree of purification is made full use of, reduce the cost of production, while the guarantee water quality of the differentiation cleaning quality cleaned.
Description
Technical field
The utility model relates to liquid crystal semiconductor processing technology field more particularly to a kind of liquid crystal spare part cleaning product lines.
Background technique
In current liquid crystal semiconductor field, a lot of components or preparation part require surface after being surface-treated
Cleaning, removing surface contaminant can be assembled, and otherwise directly affect the quality of later period liquid crystal product.In general table is carried out
Surface treatment needs a large amount of water to be cleaned, and the Property requirements of water used by the different disposal stage are also different, therefore entire confession
Water system be for whole cleaning product line it is particularly significant, otherwise directly affect the quality of product and the efficiency of production.
Utility model content
In order to overcome the above-mentioned deficiencies of the prior art, it is good to provide a kind of production efficiency for the utility model, improves product matter
The liquid crystal spare part cleaning product line of amount.
The utility model solves technical solution used by its technical problem are as follows:
A kind of liquid crystal spare part cleaning product line, including ultrasonic cleaning line and ultrapure water supply line；The ultrasonic cleaning line packet
Include water wash zone, organic oil-removing area, ultrasonic oil-removing area and ultrapure water cleaning area, organic oil-removing area, ultrasonic oil-removing area and
Ultrapure water cleaning area is set gradually along production mode reform, and the water wash zone setting is in organic oil-removing area and ultrasonic oil-removing area and ultrasound
Between oil-removing area and ultrapure water cleaning area, the ultrapure water supply line be disposed with by-pass filtration group, secondary filtration group and
The output end of CEDI filtering group, the CEDI filtering group is connected to ultrapure water cleaning area, the output end of the by-pass filtration group with
Water wash zone connection between organic oil-removing area and ultrasonic oil-removing area, the output end of the secondary filtration group and ultrasonic oil-removing area and super
Water wash zone connection between pure water cleaning area.
As an improvement of the above technical solution, the by-pass filtration group include the raw water box being sequentially communicated, filter element and
Level-one RO film group, the input terminal of the raw water box are connect with external water source, and level-one RO film group high concentration side is removed with organic
Water wash zone connection between oily area and ultrasonic oil-removing area, level-one RO film group low concentration side and secondary filtration group connection.
As an improvement of the above technical solution, the filter element includes sequentially connected more medium filter, active carbon
Filter and cartridge filter, the cartridge filter are connect by one-level booster pump with level-one RO film group high concentration side.
As an improvement of the above technical solution, the secondary filtration group includes the intermediate water tank being sequentially communicated, two-stage supercharging
Pump, second level RO film group and pure water tank, the input terminal of the intermediate water tank are connect with by-pass filtration group output end, two-stage supercharging pump
Output end is connected to second level RO film group high concentration side, and second level RO film group high concentration side is connected by return pipe and intermediate water tank
Logical, the second level RO film group low concentration side be connected to pure water tank, the delivery outlet of the pure water tank pumped by two-stage supercharging and
The input terminal of CEDI filtering group connects.
As an improvement of the above technical solution, the CEDI filtering group includes three-level booster pump, accurate filter and CEDI
Membrane stack, the accurate filter are arranged between CEDI membrane stack and three-level booster pump 233, the input terminal and pure water of three-level booster pump
The low concentration side of case connection, the CEDI membrane stack is connected to ultrapure water cleaning area, the high concentration side of the CEDI membrane stack with
Pure water tank connection, and be connected to by efferent duct with ultrasonic oil-removing area with the water wash zone between ultrapure water cleaning area.
As an improvement of the above technical solution, the front end of organic oil-removing area connects shot blasting equipment, the shot blasting equipment
The water wash zone is equipped between organic oil-removing area.
As an improvement of the above technical solution, fog remover is provided in organic oil-removing area.
As an improvement of the above technical solution, the ultrasonic cleaning line is located at water wash zone, organic oil-removing area, ultrasonic oil-removing area
And sliding rail is additionally provided with above ultrapure water cleaning area, and the clamping hand for clamping spare part is provided on the sliding rail, it is described
Clamping hand can clamp spare part and carry out surface clean in ultrasonic cleaning line.
The beneficial effects of the utility model have:
This cleaning product line is between organic oil-removing area and ultrasonic oil-removing area and ultrasonic oil-removing area and ultrapure water cleaning area
Be provided with water wash zone, the water wash zone of different location requirement to water quality it is different, therefore combine ultrapure water supply line different net
The different quality at the purified place of change degree is made full use of, and the cost of production, while the guarantee water quality of differentiation are reduced
It is cleaned by ultrasonic cleaning quality of the line when cleaning product.This liquid crystal spare part cleaning product line structure is simple, high production efficiency, cleaning
Effect is good.
Detailed description of the invention
With reference to the accompanying drawing and specific embodiment the utility model is described in further detail, in which:
Fig. 1 is the main view for being cleaned by ultrasonic line in the utility model embodiment；
Fig. 2 is the left view for being cleaned by ultrasonic line in the utility model embodiment；
Fig. 3 is the flow diagram of ultrapure water supply line in the utility model embodiment.
Specific embodiment
Referring to Fig. 1 to Fig. 3, a kind of liquid crystal spare part cleaning product line of the utility model, including ultrasonic cleaning line 1 and ultrapure
Water supply line 2；The ultrasonic cleaning line 1 includes water wash zone 11, organic oil-removing area 12, ultrasonic oil-removing area 13 and ultrapure water cleaning
Area 14；Organic oil-removing area 12, ultrasonic oil-removing area 13 and ultrapure water cleaning area 14 are set gradually along production mode reform.In this Shen
Please in, the ultrasonic cleaning line 1 is located at water wash zone 11, organic oil-removing area 12, ultrasonic oil-removing area 13 and ultrapure water cleaning area 14
Top be additionally provided with sliding rail 15, the clamping hand 16 for clamping spare part is provided on the sliding rail 15, the clamping hand 16 can
Clamping spare part carries out surface clean in ultrasonic cleaning line 1.Automatic transporting spare part, which is carried out, using clamping hand 16 carries out different processes
Cleaning, high degree of automation.
Wherein, it is provided with fog remover in organic oil-removing area 12, in this application, this cleaning product line is cleaning shot-peening
Product.The front end of organic oil-removing area 12 connects shot blasting equipment, is equipped between the shot blasting equipment and organic oil-removing area 12
The water wash zone 11.The setting of water wash zone 11 is in organic oil-removing area 12 and ultrasonic oil-removing area 13 and ultrasonic oil-removing area 13 and surpasses
Between pure water cleaning area 14, the ultrapure water supply line 2 is disposed with by-pass filtration group 21, secondary filtration group 22 and CEDI mistake
The output end of filter group 23, the CEDI filtering group 23 is connected to ultrapure water cleaning area 14, the output end of the by-pass filtration group 21
Water wash zone 11 between organic oil-removing area 12 and ultrasonic oil-removing area 13 is connected to, the output end and ultrasound of the secondary filtration group 22
Water wash zone 11 between oil-removing area 13 and ultrapure water cleaning area 14 is connected to.Wherein by-pass filtration group 21,22 and of secondary filtration group
CEDI filtering group 23 is product of the ultrapure water supply line 2 in purified treatment water under in various degree respectively, and light water passes through level-one
It has been obtained after the processing of filtering group 21 with high concentration ion water and low concentration ionized water with a certain concentration ion, wherein high
Concentration ionized water is used directly for cleaning ultrasonic oil-removing area 13 or just carries out the spare part being surface-treated, and avoids wasting,
And low concentration ionized water enter in secondary filtration group 22 carry out next step filtration, purification, obtain it is secondary purify water, this
When double purification water quality can carry out the purification of next step and obtain higher water quality, can also carry out directly using being cleaned
Through the spare part by tentatively cleaning.In the present embodiment, between ultrasonic oil-removing area 13 and ultrapure water cleaning area 14 there are two settings
The quality of cleaning is improved in continuous washing area 11.
Referring to Fig. 3, the by-pass filtration group 21 includes raw water box 211, filter element and the level-one RO film group being sequentially communicated
212, the input terminal of the raw water box 211 is connect with external water source, the 212 high concentration side of level-one RO film group and organic oil removing
11 connection of water wash zone between area 12 and ultrasonic oil-removing area 13,212 low concentration side of level-one RO film group and secondary filtration group 22
It is logical.Wherein, the filter element includes sequentially connected more medium filter 213, active carbon filter 214 and security personnel's filtering
Device 215, the cartridge filter 215 are connect by one-level booster pump 216 with 212 high concentration side of level-one RO film group.Through excessive
After a different filter is filtered, can effectively by raw water impurity and heavy ion carry out absorption elimination, it is less this
A little pollutants are adhered to when cleaning spare part or are reacted with spare part surface.It is carried out in the present embodiment using RO film anti-
Permeation filtration water quality reduces the dissociated ion in water.
Further, the secondary filtration group 22 includes the intermediate water tank 221 being sequentially communicated, two-stage supercharging pump 222, second level RO
The input terminal of film group 223 and pure water tank 224, the intermediate water tank 221 is connect with 21 output end of by-pass filtration group, two-stage supercharging
222 output ends are pumped to be connected to 223 high concentration side of second level RO film group, 223 high concentration side of second level RO film group by return pipe with
Intermediate water tank 221 is connected to, and the 223 low concentration side of second level RO film group is connected to pure water tank 224, the pure water tank 224 it is defeated
Outlet is connect by two-stage supercharging pump 222 with the input terminal of CEDI filtering group 23.In secondary filter, second level RO film group is utilized
223 are further reduced the ion in water.
The CEDI filtering group 23 includes three-level booster pump 233, accurate filter 231 and CEDI membrane stack 232, the precision
Filter 231 is arranged between CEDI membrane stack 232 and three-level booster pump 233, the input terminal and pure water tank of three-level booster pump 233
224 connection.The low concentration side of the CEDI membrane stack 232 is connected to ultrapure water cleaning area 14, the CEDI membrane stack 232 it is highly concentrated
Degree side is connected to pure water tank 224, and passes through the water wash zone between efferent duct and ultrasonic oil-removing area 13 and ultrapure water cleaning area 14
11 connections.Continuously ionize using CEDI membrane stack 232 and make ultrapure water by the water of secondary filter, is carried out most using ultrapure water
Cleaning treatment afterwards.
This cleaning product line is cleaned in organic oil-removing area 12 and ultrasonic oil-removing area 13 and ultrasonic oil-removing area 13 with ultrapure water
Be provided with water wash zone 11 between area 14, the water wash zone 11 of different location requirement to water quality it is different, therefore combine ultrapure water
The different quality at the purified place of the different degree of purifications of supply line 2 is made full use of, and the cost of production, while differentiation are reduced
Cleaning quality of the guarantee water quality ultrasonic cleaning line 1 when cleaning product.This liquid crystal spare part cleaning product line structure is simple, raw
Produce high-efficient, cleaning effect is good.
The above, the only better embodiment of the utility model, but the utility model is not limited to above-mentioned reality
Example is applied, as long as its technical effect for reaching the utility model with any same or similar means, all should belong to the utility model
Protection scope.
Claims (8)
1. a kind of liquid crystal spare part cleaning product line, it is characterised in that: including ultrasonic cleaning line and ultrapure water supply line；The ultrasound
Cleaning line includes that water wash zone, organic oil-removing area, ultrasonic oil-removing area and ultrapure water cleaning area, organic oil-removing area, ultrasound are removed
Oily area and ultrapure water cleaning area are set gradually along production mode reform, and the water wash zone setting is in organic oil-removing area and ultrasonic oil-removing area
And between ultrasonic oil-removing area and ultrapure water cleaning area, the ultrapure water supply line is disposed with by-pass filtration group, second level mistake
Filter group and CEDI filtering group, the output end of the CEDI filtering group are connected to ultrapure water cleaning area, the by-pass filtration group it is defeated
Water wash zone between outlet and organic oil-removing area and ultrasonic oil-removing area is connected to, the output end of the secondary filtration group and ultrasonic oil removing
Water wash zone between area and ultrapure water cleaning area is connected to.
2. a kind of liquid crystal spare part cleaning product line according to claim 1, it is characterised in that: the by-pass filtration group includes
Raw water box, filter element and level-one RO film group, the input terminal of the raw water box being sequentially communicated are connect with external water source, and described one
Water wash zone connection between grade RO film group high concentration side and organic oil-removing area and ultrasonic oil-removing area, level-one RO film group low concentration one
Side and secondary filtration group connection.
3. a kind of liquid crystal spare part cleaning product line according to claim 2, it is characterised in that: the filter element include according to
More medium filter, active carbon filter and the cartridge filter of secondary connection, the cartridge filter pass through one-level booster pump
It is connect with level-one RO film group high concentration side.
4. a kind of liquid crystal spare part cleaning product line according to claim 2, it is characterised in that: the secondary filtration group includes
Intermediate water tank, two-stage supercharging pump, second level RO film group and the pure water tank being sequentially communicated, the input terminal and level-one of the intermediate water tank
The connection of filtering group output end, two-stage supercharging pump output terminal are connected to second level RO film group high concentration side, second level RO film group high concentration
Side is connected to by return pipe with intermediate water tank, and the second level RO film group low concentration side is connected to pure water tank, the pure water tank
Delivery outlet pumped by two-stage supercharging and connect with the input terminal of CEDI filtering group.
5. a kind of liquid crystal spare part cleaning product line according to claim 4, it is characterised in that: the CEDI filtering group includes
Three-level booster pump, accurate filter and CEDI membrane stack, the accurate filter are arranged between CEDI membrane stack and three-level booster pump,
The input terminal and pure water tank connection of three-level booster pump, the low concentration side of the CEDI membrane stack are connected to ultrapure water cleaning area, institute
The high concentration side for stating CEDI membrane stack is connected to pure water tank, and by between efferent duct and ultrasonic oil-removing area and ultrapure water cleaning area
Water wash zone connection.
6. described in any item a kind of liquid crystal spare part cleaning product lines according to claim 1~5, it is characterised in that: described organic
The front end of oil-removing area connects shot blasting equipment, and the water wash zone is equipped between the shot blasting equipment and organic oil-removing area.
7. a kind of liquid crystal spare part cleaning product line according to claim 6, it is characterised in that: set in organic oil-removing area
It is equipped with fog remover.
8. described in any item a kind of liquid crystal spare part cleaning product lines according to claim 1~5, it is characterised in that: the ultrasound
Cleaning line, which is located above water wash zone, organic oil-removing area, ultrasonic oil-removing area and ultrapure water cleaning area, is additionally provided with sliding rail, described
The clamping hand for clamping spare part is provided on sliding rail, it is clear that the clamping hand can clamp spare part progress surface in ultrasonic cleaning line
It washes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822009978.0U CN209334351U (en) | 2018-11-30 | 2018-11-30 | A kind of liquid crystal spare part cleaning product line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822009978.0U CN209334351U (en) | 2018-11-30 | 2018-11-30 | A kind of liquid crystal spare part cleaning product line |
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| Publication Number | Publication Date |
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| CN209334351U true CN209334351U (en) | 2019-09-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201822009978.0U Active CN209334351U (en) | 2018-11-30 | 2018-11-30 | A kind of liquid crystal spare part cleaning product line |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111847605A (en) * | 2020-08-21 | 2020-10-30 | 华能国际电力股份有限公司上海石洞口第二电厂 | Backwashing system and method for CEDI |
-
2018
- 2018-11-30 CN CN201822009978.0U patent/CN209334351U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111847605A (en) * | 2020-08-21 | 2020-10-30 | 华能国际电力股份有限公司上海石洞口第二电厂 | Backwashing system and method for CEDI |
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