CN209327364U - A kind of nozzle structure and chip detecting equipment - Google Patents

A kind of nozzle structure and chip detecting equipment Download PDF

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Publication number
CN209327364U
CN209327364U CN201821967206.1U CN201821967206U CN209327364U CN 209327364 U CN209327364 U CN 209327364U CN 201821967206 U CN201821967206 U CN 201821967206U CN 209327364 U CN209327364 U CN 209327364U
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China
Prior art keywords
suction nozzle
rotary shaft
nozzle
fixed part
nozzle structure
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CN201821967206.1U
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Chinese (zh)
Inventor
冯利民
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Suzhou Huaxing Source Polytron Technologies Inc
Suzhou HYC Technology Co Ltd
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Suzhou Huaxing Source Polytron Technologies Inc
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Priority to CN201821967206.1U priority Critical patent/CN209327364U/en
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Abstract

The utility model discloses a kind of nozzle structure and including the chip detecting equipment of nozzle structure, belong to chip detection technique field.The nozzle structure, comprising: fixed part, inner hollow and inside are provided with the airflow channel of annular, and the airflow channel is connected to external vacuum;Rotary shaft, inner hollow and is rotatablely arranged inside the fixed part, and the side wall of the rotary shaft circumferentially offers several ventholes, and the inside of the rotary shaft is connected to by the venthole with the airflow channel;And suction nozzle, one end is protruded into inside the fixed part with the rotation axis connection to follow the rotary shaft to rotate synchronously, the other end is suspended in outside the fixed part to adsorb workpiece, and the absorption air flue of the inside of the suction nozzle is connected to by the inside of the rotary shaft with the venthole.The problems such as its rotation that can be realized 360 ° of any positions is adjusted, and avoids the occurrence of route winding, and it is compact-sized, it is small in size.

Description

A kind of nozzle structure and chip detecting equipment
Technical field
The utility model relates to chip detection technique field more particularly to a kind of nozzle structures and chip detecting equipment.
Background technique
When chip manufactures completion fastly, need to carry out electrical characteristics detection to chip by chip detecting equipment.Before detection, Generally require and chip be delivered to by upper discharge position by feed mechanism, then by the suction nozzle of detection device by chip from upper discharge position It is moved to detection position, after sensing, then chip is picked up from detection position by suction nozzle and is moved to discharge station.Actually answering In, chip inevitably occurs misplacing or the case where placement direction is unsatisfactory for use demand, this is just needed when different location is converted Suction nozzle is wanted to be adjusted in chip placement to it.
The carrying of current chip mostly uses greatly the mode of vacuum suction, suction nozzle by piping connection to vacuum generating device, When carrying out the adjustment of chip placement direction, suction nozzle integrally needs to carry out rotation adjusting, the shape of conventional suction nozzle when low-angle is adjusted Formula can satisfy requirement, but when carrying out wide-angle adjusting even 360 degree of adjustings of complete cycle, is easy to appear pipeline and is wound in Problem on suction nozzle, and if rotating mechanism failure, suction nozzle multiple rotations certainly will will lead to piping connection and fall off or disconnect, safety And reliability is low.
Therefore, in view of problem above, it is necessary to propose a kind of novel nozzle structure, be easy to implement any angle of suction nozzle Rotation, avoids that other structures component is impacted and damaged, realizes the purpose of safe and reliable detection.
Utility model content
The purpose of this utility model is that propose a kind of nozzle structure and chip detecting equipment, can be realized 360 ° it is any The problems such as rotation of position is adjusted, and avoids the occurrence of route winding, structure is simple.
For this purpose, the utility model uses following technical scheme:
A kind of nozzle structure, comprising:
Fixed part, inner hollow and inside are provided with the airflow channel of annular, the airflow channel and external vacuum Connection;
Rotary shaft, inner hollow and is rotatablely arranged inside the fixed part, and the side wall of the rotary shaft is circumferentially Several ventholes are offered, the inside of the rotary shaft is connected to by the venthole with the airflow channel;And
Suction nozzle, one end are protruded into inside the fixed part with the rotation axis connection to follow the rotary shaft to rotate synchronously, The other end is suspended in outside the fixed part to adsorb workpiece, and the absorption air flue of the inside of the suction nozzle passes through the rotary shaft It is internal to be connected to the venthole.
Wherein, the suction nozzle can relative to the rotary shaft axially movable, the suction nozzle axially movable when, institute It states venthole not blocked by the suction nozzle at least partly, to keep being connected to the absorption air flue of the suction nozzle.
Wherein, the side of the rotary shaft offers limiting slot along the axial direction of the suction nozzle;
The nozzle structure further includes spacer pin, and the spacer pin is connected to the suction nozzle, and slides axially and be set to institute It states in limiting slot.
Wherein, the limiting slot is two be oppositely arranged, and the spacer pin is slideably positioned in institute after crossing the suction nozzle It states in limiting slot.
Wherein, be provided with elastic component between the suction nozzle and the rotary shaft, the both ends of the elastic component respectively with it is described Rotary shaft and the suction nozzle are fixed or offset, the suction nozzle by external force vertically the relatively described rotary shaft moves up when, it is described Elastic component, which is pressurized, to be shunk, and when external force disappears, the suction nozzle resets under the restoring force of the elastic component.
Wherein, the airflow channel is the annular groove taken shape on the fixed part inner sidewall, the height of the venthole Not less than the width of the annular groove.
Wherein, the fixed part includes the end cap for being sheathed on the sleeve of the rotary shaft and being fixed on the sleeve ends, The airflow channel is set to the inside of the sleeve, and the end that the rotary shaft is connect with the suction nozzle passes through the sleeve simultaneously Press on the end cap.
Wherein, the fixed part further include along axially through installation axle, the sleeve is fixed on inside the installation axle, The installation axle is connected with driving device, and the driving device connects end of the rotary shaft far from the suction nozzle and for driving Move the rotary shaft rotation.
Wherein, the installation axle is provided with mounting plate far from the end of the suction nozzle, and the driving device is set to described On mounting plate.
A kind of chip detecting equipment, including the nozzle structure.
The utility model has the following beneficial effects:
The nozzle structure of the utility model and chip detecting equipment including nozzle structure, by the way that air-flow is arranged in fixed part The venthole of channel and rotary shaft setting is interconnected, and airflow channel is connected to external vacuum, venthole and rotary shaft Inside connection, the inside of rotary shaft is connected to the absorption air flue of suction nozzle, and when needing to adsorb workpiece, vacuum plant is logical by air-flow Road, venthole, interior of rotating shaft and suction nozzle sorption channel vacuumized so that suction nozzle can adsorb workpiece, and When needing rotational workpieces after absorption workpiece to adjust placement direction, by making rotary shaft that suction nozzle be driven to rotate together, revolving During turning, venthole be connected to airflow channel holding always, and then guarantee evacuation passageway is unobstructed, and two action process are mutually not The problems such as influencing, and then can be realized 360 ° of rotations and adjust, avoid the occurrence of route winding.
Further, make since suction nozzle protrudes into interior of rotating shaft and rotation axis connection to simplify external structural characteristics Both connection structure be hidden within rotary shaft, and then reduce and occupy volume, be conducive to small space and use, it is more flexible just Benefit.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of nozzle structure provided by the utility model;
Fig. 2 is the schematic diagram of the section structure of nozzle structure provided by the utility model.
In figure: 1- driving device;11- drive shaft;2- mounting plate;3- fixed part;31- installation axle;The first hole 311-;32- Sleeve;The second hole 321-;322- annular groove;33- end cap;4- vacuum adapter;5- suction nozzle;51- connecting shaft;52- fitting;53- inhales Disk;6- rotary shaft;61- venthole;62- rotates connecting shaft;63- limiting slot;64- spacer pin;7- elastic component;8- bearing;9- connection Axis device.
Specific embodiment
Further illustrate the technical solution of the utility model below with reference to the accompanying drawings and specific embodiments.
A kind of chip detecting equipment, including nozzle structure are provided in the utility model embodiment, for adsorbing workpiece, at this In embodiment, workpiece is chip.The detection device further includes mobile device, mobile device be able to drive nozzle structure vertically or Horizontal direction is mobile, so that nozzle structure is drawing position and placement location reciprocating motion.Specifically, mobile device includes level Driving device and vertical drive, horizontal drive apparatus are connected to vertical drive, and vertical drive connects suction nozzle knot Structure.
As shown in Figure 1 and Figure 2, the nozzle structure provided in the utility model embodiment, specifically for chip detecting equipment, Since chip detecting equipment is frequently necessary to install multiple nozzle structures, for working asynchronously, thus the space of each nozzle structure Smaller, for the application in smaller space, which includes driving device 1, mounting plate 2, fixed part 3, vacuum adapter 4, inhales Mouth 5, rotary shaft 6, elastic component 7 are below further described above-mentioned component.
As shown in Figure 1 and Figure 2, fixed part 3 include along axially through installation axle 31, the set that is fixed on inside installation axle 31 Cylinder 32 and be fixed on sleeve 32 one end end cap 33.
Wherein, one end convex of installation axle 31 is equipped with the first connection ring, which has been bolted peace Loading board 2 places driving device 1 on mounting plate 2, and driving device 1 is preferably motor, and drive shaft 11 passes through mounting plate 2 and protrudes into peace It fills inside axis 31.
The inside of installation axle 31 is convexly equipped with inner ring, and sleeve 32 is sheathed on 31 inside of installation axle and the one end of sleeve 32 supports It is pressed on anchor ring of the inner ring far from drive shaft 11, the other end convex of sleeve 32 is equipped with the second connection ring, the second connection ring position In installation axle 31 the other end and be connected by screw to the end of installation axle 31.End cap 33 is then connected to the second connection ring.From And realize being fixedly connected for end cap 33, sleeve 32 and installation axle 31.
As shown in Fig. 2, rotary shaft 6 is set to inside installation axle 31 through sleeve 32.One end of rotary shaft 6 is provided with rotation Connecting shaft 62, rotation connecting shaft 62 are connect with drive shaft 11 by shaft coupling 9.The other end of rotary shaft 6 presses on end cap 33.Cause This, rotary shaft 6 is defined along axial direction.
Further, rotary shaft 6 can be rotated relative to installation axle 31 and sleeve 32.Specifically, the periphery of rotary shaft 6 with Bearing 8 is provided between the inside of installation axle 31, more specifically, the periphery of rotary shaft 6 is provided with the shaft shoulder, the shaft shoulder is located at inner ring Towards on the anchor ring of drive shaft 11, bearing 8 is set between the shaft shoulder and inner ring.
As shown in Fig. 2, one end that rotary shaft 6 presses on end cap 33 offers stepped hole, stepped hole include step aperture and Step macropore, step macropore are arranged and are located at the end of rotary shaft 6 by proximal cover 33.The side wall of step aperture circumferentially offers Several ventholes 61, accordingly, the inner wall of sleeve 32 offer the airflow channel of annular, and airflow channel and external vacuum connect Logical, the stepped hole of rotary shaft 6 is connected to by venthole 61 with airflow channel.Preferably, airflow channel is to take shape in fixed part 3 Annular groove 322 on side wall, when rotary shaft 6 carries out any angle or any direction rotates, venthole 61 can be kept constantly It is connected to annular groove 322, which solves winding in the prior art because of the route occurred when wide-angle adjustment, guarantees peace Quan Xing.
Further, the height of venthole 61 is not less than the width of annular groove 322, to guarantee that venthole 61 remains It is connected to annular groove 322.
Further, the side wall of installation axle 31, which has, offers the first hole 311 at one, the side wall of sleeve 32 has to be offered at one Second hole 321, the second hole 321 are connected to annular groove 322, and the first hole 311 is corresponding with the second hole 321 and is connected to setting, wherein first Hole 311 is connected with external vacuum adapter 4, and vacuum adapter 4 connects external vacuum.Vacuum plant is connect by vacuum as a result, First 4, first hole 311, the second hole 321, annular groove 322, venthole 61 are connected to stepped hole.
As shown in Fig. 2, 5 one end of suction nozzle enters inside fixed part 3 after passing through end cap 33, and protrude into 6 inside of rotary shaft and rotation Shaft 6 forms connection, and so as to follow rotary shaft 6 to rotate synchronously, the other end is suspended in outside fixed part 3 to adsorb workpiece, Absorption air flue inside suction nozzle 5 is connected to by the inside of rotary shaft 6 with venthole 61.Specifically, platform of the suction nozzle 5 from rotary shaft 6 Rank macropore, which stretches in step aperture, to be arranged, and to guarantee not blocking venthole 61 after suction nozzle 5 rises, venthole 61 is located at suction nozzle 5 On.When suction nozzle 5 adsorbs workpiece, external vacuum work, by vacuum adapter 4 successively to the first hole 311, the second hole 321, the absorption air flue of annular groove 322, venthole 61, stepped hole and suction nozzle 5 vacuumizes, so that the adsorption site of suction nozzle 5 Negative pressure is formed, realizes absorption.
However, since what suction nozzle 5 was contacted with workpiece will cause in a flash mutual collision, being easy in above-mentioned adsorption process Workpiece is caused to be lost, for this purpose, avoiding hard contact workpiece, the suction nozzle to make suction nozzle 5 that there is buffer capacity when adsorbing workpiece 5 can be relative to rotary shaft 6 axially movable.Thus in 5 contact workpiece of suction nozzle, moved by suction nozzle 5 along axial, it can To realize buffering, the purpose of protection workpiece is played.
To realize above-mentioned buffering, be provided with elastic component 7 between suction nozzle 5 and rotary shaft 6, the both ends of elastic component 7 respectively with rotation Shaft 6 and suction nozzle 5 are fixed or offset.Specifically, the middle part of suction nozzle 5 is provided with baffle ring, and elastic component 7 is set to baffle ring and stepped hole Step surface between, and elastic component 7 is sheathed on suction nozzle 5.When suction nozzle 5 in a free state, the top of suction nozzle 5 is maintained at In aperture, it can realize and seal with aperture, when suction nozzle 5 adsorbs workpiece, the moment of 5 contact workpiece of suction nozzle, because by moment Impact force, when vertically relative rotation axi 6 moves up, elastic component 7, which is pressurized, to be shunk, and after the completion of absorption, external impact force disappears It loses, suction nozzle 5 resets under the restoring force of elastic component 7.Wherein, elastic component 7 is preferably spring.
Particularly, suction nozzle 5 axially movable when, venthole 61 is not blocked at least partly by suction nozzle 5, with keep and suction nozzle 5 absorption air flue connection.Therefore, in the present embodiment suction nozzle 5 be arranged at a distance from venthole 61 it is closer so that structure is tight It gathers.
To realize suction nozzle 5 axially movable, the side of rotary shaft 6 offers limiting slot 63 along the axial direction of suction nozzle 5;The suction nozzle Structure further includes spacer pin 64, and spacer pin 64 is connected to suction nozzle 5, and slides axially and be set in limiting slot 63.Pass through limit The cooperation of pin 64 and limiting slot 63, one is avoided that suction nozzle 5 is rotated relative to rotary shaft 6, and two are able to achieve suction nozzle 5 relative to rotation Axis 6 is moved along axial, and structure is simple, and on the basis of not increasing additional connecting member, and spacer pin 64 is set to rotation The inside of axis 6 greatly simplifies external structure, reduces overall volume well, is conducive to small space and uses, it is more flexible just Benefit.
Preferably, limiting slot 63 is two be oppositely arranged, and the step that two limiting slots 63 are set to rotary shaft 6 is big The two opposing lateral sides in hole, the baffle ring of suction nozzle 5 are stuck in step macropore, and spacer pin 64 is slideably positioned in after crossing the baffle ring of suction nozzle 5 In limiting slot 63, the stationarity of axial movement is promoted.
As shown in Fig. 2, suction nozzle 5 include connecting shaft 51, fitting 52 and sucker 53, wherein connecting shaft 51 pass through end cap 33 with Connecting shaft 6 forms above-mentioned connection, and one end of fitting 52 penetrates in connecting shaft 51 and formed threaded connection, and sucker 53 is set to fitting 52 other end.The inside of connecting shaft 51, fitting 52 and sucker 53 is formed with absorption air flue, and absorption air flue is used for and rotary shaft 6 Step bore portion connection, to guarantee the adsorption capacity of sucker 53.
The nozzle structure of the utility model is moved to absorption work by the mobile device of chip detecting equipment at work The position of part simultaneously drops to contact workpiece, and in the moment of contact workpiece, suction nozzle 5 is whole to be moved up in the stepped hole of rotary shaft 6, moves Dynamic process is oriented to by spacer pin 64, and venthole 61 will not be blocked when being moved to highest position, in uphill process, elasticity Part 7 is compressed.
Meanwhile external vacuum plant passes through vacuum adapter 4, the first hole 311, the second hole 321, annular groove 322, venthole 61, stepped hole, the absorption air flue inside suction nozzle 5 enable sucker 53 to adsorb workpiece.
It after adsorbing workpiece, can continue that nozzle structure is risen to and is moved to specified placement position by mobile device It sets, for discharging workpiece.In nozzle structure uphill process, suction nozzle 5 resets.
Before discharging workpiece, it usually needs rotate to adjust the placement direction of workpiece, at this moment, driving device 1 passes through drive Moving axis 11, shaft coupling 9, rotation connecting shaft 62 drive rotary shaft 6 to rotate, and rotary shaft 6 can drive suction nozzle 5 by spacer pin 64 And workpiece rotates together, and in rotary course, is connected to since several ventholes 61 are remained with annular groove 322, thus it is whole A gas circuit is unimpeded, still is able to that the holding of sucker 53 is made to adsorb workpiece, this can be realized as 360 ° of rotations at any angle and adjusts, The problems such as avoiding the occurrence of route winding.
Technical principle of the utility model has been described above with reference to specific embodiments.These descriptions are intended merely to explain this reality With novel principle, and it cannot be construed to the limitation to scope of protection of the utility model in any way.Based on the explanation herein, Those skilled in the art, which does not need to pay for creative labor, can associate with other specific implementation modes of this utility model, These modes are fallen within the protection scope of the utility model.

Claims (10)

1. a kind of nozzle structure characterized by comprising
Fixed part (3), inner hollow and inside are provided with the airflow channel of annular, and the airflow channel and external vacuum connect It is logical;
Rotary shaft (6), inner hollow and internal, the side wall edge of the rotary shaft (6) that is rotatablely arranged at the fixed part (3) Circumferential direction offers several ventholes (61), and the inside of the rotary shaft (6) passes through the venthole (61) and the airflow channel Connection;And
Suction nozzle (5), one end, which is protruded into inside the fixed part (3), to be connect to follow the rotary shaft (6) same with the rotary shaft (6) Step rotation, the other end are suspended in the fixed part (3) outside to adsorb workpiece, and the absorption air flue of the inside of the suction nozzle (5) is logical The inside for crossing the rotary shaft (6) is connected to the venthole (61).
2. nozzle structure according to claim 1, which is characterized in that the suction nozzle (5) can be relative to the rotary shaft (6) axially movable, the suction nozzle (5) axially movable when, the venthole (61) is not at least partly by the suction nozzle (5) It blocks, to keep being connected to the absorption air flue of the suction nozzle (5).
3. nozzle structure according to claim 2, which is characterized in that the side of the rotary shaft (6) is along the suction nozzle (5) Axial direction offer limiting slot (63);
The nozzle structure further includes spacer pin (64), and the spacer pin (64) is connected to the suction nozzle (5), and slides axially and set It is placed in the limiting slot (63).
4. nozzle structure according to claim 3, which is characterized in that the limiting slot (63) is two be oppositely arranged, The spacer pin (64) is slideably positioned in the limiting slot (63) after crossing the suction nozzle (5).
5. nozzle structure according to claim 1, which is characterized in that set between the suction nozzle (5) and the rotary shaft (6) It being equipped with elastic component (7), the both ends of the elastic component (7) are fixed or offset with the rotary shaft (6) and the suction nozzle (5) respectively, The suction nozzle (5) by external force vertically the relatively described rotary shaft (6) moves up when, the elastic component (7), which is pressurized, shrinks, external force When disappearance, the suction nozzle (5) resets under the restoring force of the elastic component (7).
6. nozzle structure according to claim 1, which is characterized in that the airflow channel is to take shape in the fixed part (3) annular groove on inner sidewall (322), the height of the venthole (61) are not less than the width of the annular groove (322).
7. nozzle structure according to claim 1, which is characterized in that the fixed part (3) includes being sheathed on the rotation The sleeve (32) of axis (6) and the end cap (33) for being fixed on the sleeve (32) end, the airflow channel are set to the sleeve (32) inside, the end that the rotary shaft (6) connect with the suction nozzle (5) pass through the sleeve (32) and press on the end It covers (33).
8. nozzle structure according to claim 7, which is characterized in that the fixed part (3) further include along axially through Installation axle (31), the sleeve (32) are fixed on the installation axle (31) inside, and the installation axle (31) is connected with driving device (1), the driving device (1) connects end of the rotary shaft (6) far from the suction nozzle (5) and for driving the rotary shaft (6) it rotates.
9. nozzle structure according to claim 8, which is characterized in that the installation axle (31) is far from the suction nozzle (5) End is provided with mounting plate (2), and the driving device (1) is set on the mounting plate (2).
10. a kind of chip detecting equipment, which is characterized in that including the described in any item nozzle structures of claim 1-9.
CN201821967206.1U 2018-11-27 2018-11-27 A kind of nozzle structure and chip detecting equipment Active CN209327364U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821967206.1U CN209327364U (en) 2018-11-27 2018-11-27 A kind of nozzle structure and chip detecting equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821967206.1U CN209327364U (en) 2018-11-27 2018-11-27 A kind of nozzle structure and chip detecting equipment

Publications (1)

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CN209327364U true CN209327364U (en) 2019-08-30

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114173489A (en) * 2021-11-08 2022-03-11 西北电子装备技术研究所(中国电子科技集团公司第二研究所) High-pick-up-rate flexible chip mounting mechanism for adsorbing thin and crisp chips
CN114408565A (en) * 2022-01-24 2022-04-29 广州诺顶智能科技有限公司 Suction nozzle device and suction nozzle fixing structure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114173489A (en) * 2021-11-08 2022-03-11 西北电子装备技术研究所(中国电子科技集团公司第二研究所) High-pick-up-rate flexible chip mounting mechanism for adsorbing thin and crisp chips
CN114408565A (en) * 2022-01-24 2022-04-29 广州诺顶智能科技有限公司 Suction nozzle device and suction nozzle fixing structure

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