CN209303407U - A kind of chip glass degumming device - Google Patents

A kind of chip glass degumming device Download PDF

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Publication number
CN209303407U
CN209303407U CN201822124020.6U CN201822124020U CN209303407U CN 209303407 U CN209303407 U CN 209303407U CN 201822124020 U CN201822124020 U CN 201822124020U CN 209303407 U CN209303407 U CN 209303407U
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Prior art keywords
rinse bath
degumming
sulfuric acid
chip glass
concentrated sulfuric
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CN201822124020.6U
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Inventor
刘鸣
刘利娟
孙宇亮
潘玉慧
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SUZHOU JINGXIE HIGH-NEW ELECTRONIC MATERIAL Co Ltd
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SUZHOU JINGXIE HIGH-NEW ELECTRONIC MATERIAL Co Ltd
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Abstract

The utility model discloses a kind of chip glass degumming devices, including degumming tank, dehydration package, concentrated sulfuric acid tank, dioxygen water pot and microprocessor;The degumming tank includes the rinse bath and potcher being disposed adjacent, and concentrated hydrochloric acid and hydrogen peroxide are injected in the rinse bath, and rinse bath internal upper part is equipped with cleaning basket;The potcher internal upper part is equipped with rinsing basket;The concentrated sulfuric acid tank is connected to by concentrated sulfuric acid pipe with rinse bath;The dioxygen water pot is connected to by dioxygen water pipe with rinse bath;Slot cover is equipped at the upper side of the rinse bath, the other side is then used to be arranged dehydration package, and the dehydration package includes electric boiling plate, absorbing cabin, temperature sensor, circulation pipe and dry packet and blower.The device of the utility model can effectively remove the uv-curable glue on chip glass, and the device can make stripping process continue to carry out, and do not need often to replace and remove glue, improve working efficiency, economize on resources, protect environment.

Description

A kind of chip glass degumming device
Technical field
The utility model relates to a kind of washing degumming fields, and in particular to chip glass degumming device.
Background technique
With the development of electronic semi-conductor's industry, the requirement to chip glass is higher, and wherein to chip glass size Different demands result in the need for glass-cutting chip.Common cutting method is that first pass through bond properties preferable currently on the market Uv-curable glue bonds chip glass, then cuts again to it, and the chip after cutting dissolves it with suitable solvent In solidification glue, the chip glass of required size can be obtained.However, ultra-violet curing glue bond obtains stronger, chip ensure that The quality of cutting, but but also new problem: the removal of uv-curable glue is brought to us.
Currently, most effective uv-curable glue minimizing technology is the concentrated sulfuric acid and peroxide passivation, this method elder generation enriching sulfuric acid is dense Sulfuric acid carbonizes glue, then again reacts it with hydrogen peroxide, ultimately generates carbon dioxide and water;This method removal effect compared with It is good, but since the water that reaction generates can make diluting concentrated sulfuric acid, and the charred effect of the concentrated sulfuric acid after diluting reduces, can not again into The carbonization of row next round, therefore can only be disposable, waste is very big, in addition, the discarded concentrated sulfuric acid is also required to after being handled It could discharge, cause the waste of manpower financial capacity.
Utility model content
One of the purpose of this utility model is to provide for a kind of chip glass degumming device, which can effectively remove glass Uv-curable glue on glass chip, and the device can make stripping process continue to carry out, and do not need often to replace and remove glue, improve Working efficiency economizes on resources, and protects environment.
To achieve the above object, the technical solution adopted in the utility model is as follows:
A kind of chip glass degumming device, including degumming tank further include dehydration package, concentrated sulfuric acid tank, dioxygen water pot and micro- Processor;The degumming tank includes the rinse bath and potcher being disposed adjacent, and is injected in the rinse bath for treating degumming Chip glass carries out the concentrated hydrochloric acid and hydrogen peroxide of degumming, and rinse bath internal upper part is equipped with for placing the cleaning to degumming chip glass Basket;The potcher internal upper part is equipped with the rinsing basket for placing the chip glass after degumming, is equipped in potcher and micro process The connected ultrasonic unit of device;The concentrated sulfuric acid tank is connected to, to provide the concentrated sulfuric acid for rinse bath by concentrated sulfuric acid pipe with rinse bath, The concentrated sulfuric acid pipe is equipped with the first flow control valve being connected with microprocessor;The dioxygen water pot is by dioxygen water pipe and clearly Washing trough is connected to, to provide hydrogen peroxide for rinse bath, and the dioxygen water pipe is equipped with the second flow control being connected with microprocessor Valve;Slot cover is equipped at the upper side of the rinse bath, the other side is then used to be arranged dehydration package, and the dehydration package includes that setting exists The electric boiling plate being connected on rinse bath and with microprocessor is located at the absorption being connected above electric boiling plate and with rinse bath upper end The temperature sensor in absorbing cabin is arranged in storehouse, and both ends are connected to constitute the circulation pipe of inner air circulation with absorbing cabin, and are set The dry packet and blower, the blower and temperature sensor set on circulation pipe are connected with microprocessor.
It specifically, further include dryer, the dryer is disposed adjacent with potcher, for brilliant to the glass after rinsing Piece is dried.
Specifically, the acid concentration detector and use for detecting liquid acidity in rinse bath are additionally provided in the rinse bath In the liquidometer of detection liquid level, the liquidometer is equipped at least the first given threshold and the second given threshold the two threshold values;Institute It states acid concentration detector and liquidometer is connected with microprocessor.
More specifically, the absorbing cabin is wet gas current source, the circulation pipe with absorbing cabin and dry packet be boundary, be divided into it is dry Pathogenic dryness stream section and wet gas current section, the blower are arranged in dry gas stream section;The dry gas stream section is equipped with and microprocessor phase Gas Temperature Humidity Sensor even.
As a preferred embodiment, the concentrated sulfuric acid mass concentration in the rinse bath is within the scope of 90-96%.
As a preferred embodiment, the hydrogen peroxide mass concentration in the rinse bath is within the scope of 29%-31%.
As a preferred embodiment, the dioxygen water pipe connects with the side bottom of rinse bath, and its connector is located at far In cleaning groove sidewall from dehydration package.
As a preferred embodiment, the heating temperature of the electric boiling plate is 170 ~ 180 DEG C.
Further, particulate dried material is filled in the dry packet.
Compared with prior art, the utility model has the following beneficial effects:
(1) the utility model selects the concentrated sulfuric acid-peroxide passivation to remove the solidification glue on chip glass, relative to existing For organic solvent degumming, the utility model chip glass cleans more convenient after removing photoresist, ultraviolet cured adhesive removal effect is more It is good;Also, the utility model is to carbonize glue using the concentrated sulfuric acid, then react with hydrogen peroxide, ultimately generates carbon dioxide and water, makes It is cleaned with deionized water, nontoxic and pollution-free in entire removal process, solidification glue removal effect is also very good.
(2) the utility model is carried out dehydrating the cleaning solution in rinse bath using dehydration package, can be effectively and lasting Removal scouring processes in the water that generates, be maintained at the concentrated sulfuric acid in certain concentration range, the charcoal for not influencing the concentrated sulfuric acid is turned into With so that concentrated sulfuric acid continuous and effective, the lasting progress so that chip glass removes photoresist, do not need often to replace and remove glue, improve Working efficiency economizes on resources, and protects environment.
(3) the utility model by electric boiling plate be arranged above rinse bath, using electric boiling plate heat radiation act on so that Moisture is vaporized into vapor, gets into the air, due to the setting of slot cover and absorbing cabin, so that wet air is pooled to absorbing cabin On, then with the draft effect of blower, make humid air by dry packet, eliminate aqueous vapor therein, dry air enters Circulation pipe circulation.And gradually decreasing with solution surface moisture, the sulfuric acid of surface layer high concentration move downward, and bottom low concentration Sulfuric acid up moves, and forms naturally circulation.On the one hand the setting makes to water is vaporized into vapor, constantly remove the water in solution Point, on the other hand with the water for being intermittently added with generating in reaction process of hydrogen peroxide, constantly there is water increase again in solution, when whole It is so that the concentration of sulfuric acid is maintained at 95% or so in solution, i.e., sustainable to play the role of charing and remove photoresist after a process tends to balance.
(4) when the electric boiling plate temperature of the utility model is greater than 185 DEG C, the evaporation of liquid surface moisture is very fast in rinse bath, Evaporation rate is not easy to control, in addition, at such a temperature, it is excessively high to will lead to average temperature of liquid, and then hydrogen peroxide is promoted voluntarily to divide Solution reduces the effect of its oxidation charing impurity;And work as electric boiling plate temperature and be lower than 170 DEG C, then it can slow down liquid in rinse bath again Body surface face water evaporation rate makes its evaporation rate that can not catch up with the speed that reaction generates moisture, reduces the concentration of the concentrated sulfuric acid, make Its carbonization reaction is not in time.Therefore, after test of many times is verified, the utility model sets 178 DEG C or so for electric boiling plate and is Most preferably, at such a temperature, liquid-covered moisture can gradually evaporate reduction in rinse bath, and average temperature of liquid is at 60 DEG C or so, Temperature is higher, and the charing of the concentrated sulfuric acid, the reaction rate of hydrogen peroxide are very fast, can accelerate Ash Rate, and shortening is removed photoresist the time.
(5) the utility model removes photoresist easy to operate, high degree of automation, rapid reaction, and cleaning basket is arranged on rinse bath Portion, and upper liquid temperature is higher just, is conducive to the charing of the concentrated sulfuric acid, the oxidation reaction of hydrogen peroxide, wherein dioxygen water inlet Setting and the mode added thereafter, can avoid hydrogen peroxide and contacted with high temperature moisture once entering rinse bath, and is fast at high temperature Speed reaction, causes to waste.Degumming is carried out to chip glass using the present apparatus, may make stripping process persistently to carry out, be a kind of money Save environmental-friendly method in source.
Detailed description of the invention
FIG. 1 is a schematic structural view of the utility model.
Wherein, the corresponding title of appended drawing reference are as follows:
1- dryer, 2- degumming tank, 3- potcher, 4- rinsing basket, 5- acid concentration detector, 6- cleaning basket, 7- rinse bath, 8- concentrated sulfuric acid tank, 9- dioxygen water pot, 10- first flow control valve, 11- second flow control valve, 12- concentrated sulfuric acid pipe, 13- dioxygen Water pipe, 14- circulation pipe, 15- electric boiling plate, 16- blower, the dry packet of 17-.
Specific embodiment
The utility model is described in further detail with embodiment for explanation with reference to the accompanying drawing, and the mode of the utility model includes But it is not limited only to following embodiment.
A kind of chip glass degumming device is present embodiments provided, the device is using the concentrated sulfuric acid and peroxide passivation come to glass Chip carry out ultraviolet cured adhesive removal, and can overcome in the prior art stripping process generate water cause sulfuric acid concentration to drop The problem of low, influence sulfuric acid carbonizes solidification glue.
Specifically, as shown in Figure 1, the device includes degumming tank 2, dehydration package, the concentrated sulfuric acid 8, dioxygen water pot 9, drying Machine 1 and microprocessor;Wherein, microprocessor can directly select the conventional devices such as 51 single-chip microcontrollers, can reach the application purpose Subject to.
A degumming tank generally rectangular groove body, centre are equipped with partition, and degumming tank is isolated into rinse bath 7 and rinsing Slot 3, is injected with the concentrated hydrochloric acid and hydrogen peroxide that degumming is carried out for treating degumming chip glass in the rinse bath, in rinse bath on Portion is equipped with for placing the cleaning basket 6 to degumming chip glass, is additionally provided in the rinse bath 7 for detecting cleaning tank liquid The acid concentration detector 5 of acidity and liquidometer for detecting liquid level, the liquidometer are equipped at least the first given threshold and the The two threshold values of two given thresholds, the acid concentration detector and liquidometer are connected with microprocessor;When detecting rinse bath When interior acidity is unsatisfactory for demand, the dehydration of dehydration package can be accelerated, and then make its concentration meet demand, and the two of its liquidometer A threshold design is then for the ease of by the amount than adding the concentrated sulfuric acid and hydrogen peroxide automatically, in addition, liquidometer can also assist detecting Dehydration efficiency, when liquid level decline it is very fast when, show that rate of water loss is higher, and liquid level decline it is slower when, show be dehydrated express delivery it is lower, At this point, dehydration package can all be adjusted as required.Wherein, to reach best effect of removing photoresist, in the present embodiment, rinse bath 7 Interior concentrated sulfuric acid mass concentration is within the scope of 90-96%, and the hydrogen peroxide mass concentration in the rinse bath 7 is in 29%-31% range It is interior.3 internal upper part of potcher is equipped with the rinsing basket 4 for placing the chip glass after degumming, is equipped in potcher and micro- place The connected ultrasonic unit of reason device can be rinsed directly when chip glass is cleaned, and also can star ultrasonic wave dress It sets and carries out concussion cleaning, cleaning speed can be accelerated.
The concentrated sulfuric acid tank 8 is connected to, to provide the concentrated sulfuric acid for rinse bath by concentrated sulfuric acid pipe 12 with rinse bath 7, described dense Sulfuric acid pipe is equipped with the first flow control valve 10 being connected with microprocessor;The dioxygen water pot 9 is by dioxygen water pipe 13 and clearly Washing trough 7 is connected to, to provide hydrogen peroxide for rinse bath, and the dioxygen water pipe is equipped with the second flow control being connected with microprocessor Valve 11;The auto feed of the concentrated sulfuric acid and hydrogen peroxide can be achieved in the setting.In view of hydrogen peroxide can decompose at relatively high temperatures, because This, dioxygen water pipe 13 described in the present embodiment connects with the side bottom of rinse bath 7, and its connector is located remotely from dehydration package It cleans in groove sidewall, enters it from the lower part of rinse bath cleaning liquid inside, temperature is lower, then floats and with the concentrated sulfuric acid to solidification Glue carbonizes complete substance and reacts, to reach the effect of removing photoresist.
Slot cover is equipped at the upper side of the rinse bath 7, to avoid heat leakage, 7 other side of rinse bath is then used to that dehydration to be arranged Component, the dehydration package include the electric boiling plate 15 for being arranged on rinse bath and being connected with microprocessor, are located at electric heating The absorbing cabin being connected above plate and with rinse bath upper end, is arranged in the temperature sensor in absorbing cabin, and both ends connect with absorbing cabin The circulation pipe 14 for constituting inner air circulation is passed to, and the dry packet 17 and blower 16, the blower and the temperature that are arranged on circulation pipe Degree sensor is connected with microprocessor, automatically controls in order to realize.Water, the hot spoke of heating plate are generated in stripping process The effect of penetrating gets into the air to form moisture so that moisture is vaporized into vapor, and i.e. collect moisture is formed as wet to the absorbing cabin Air flow source, the circulation pipe 14 are wrapped as boundary with absorbing cabin and drying, are divided into dry gas stream section and wet gas current section, and the blower 16 is It is arranged in dry gas stream section;The dry gas stream section is equipped with the gas Temperature Humidity Sensor being connected with microprocessor.By multiple Experiment shows that the temperature setting of heating plate is 178 DEG C appropriate, at such a temperature, can either guarantee the heat radiation of electric boiling plate Effect can make the moisture of liquid surface in rinse bath be vaporized into vapor, get into the air, and can ensure that temperature in rinse bath Interior temperature is not too high, so that hydrogen peroxide heat be made to decompose.Wet air is wrapped with the effect of exhausting system by dry, Aqueous vapor therein is eliminated, dry air enters the circulatory system.With gradually decreasing for solution surface moisture, surface layer high concentration Sulfuric acid move downward, and bottom low-concentration sulfuric acid up moves, and forms naturally circulation.On the one hand it water is vaporized into vapor, The moisture in solution is constantly removed, on the other hand with the water for being intermittently added with generating in reaction process of hydrogen peroxide, in solution Constantly there is water increase again, after whole process tends to balance, so that the concentration of sulfuric acid is maintained at 95% or so in solution, can continue Play the role of charing to remove photoresist.
The dryer 1 is disposed adjacent with potcher 3, for drying to the chip glass after rinsing.
Wherein, particulate dried material is filled in dry packet 17 described in the present apparatus.
The utility model persistently removes the water of generation in stripping process, so that the concentration of the concentrated sulfuric acid is maintained at effective range Interior, the process of carbonization of the concentrated sulfuric acid is unaffected, realizes that stripping process is carried out continuously.It improves work efficiency, has saved the concentrated sulfuric acid Dosage, reduce the discharge of the discarded concentrated sulfuric acid.
Above-described embodiment is only one of preferred embodiments of the present invention, should not be taken to limit the utility model Protection scope, as long as the utility model body design thought and mentally make have no the change of essential meaning or profit Color, it is solved the technical issues of it is still consistent with the utility model, the protection scope of the utility model should all be included in Within.

Claims (7)

1. a kind of chip glass degumming device, including degumming tank (2), which is characterized in that further include dehydration package, concentrated sulfuric acid tank (8), dioxygen water pot (9) and microprocessor;The degumming tank (2) includes the rinse bath (7) and potcher (3) being disposed adjacent, institute State the concentrated hydrochloric acid and hydrogen peroxide for being injected in rinse bath (7) and carrying out degumming for treating degumming chip glass, in rinse bath (7) on Portion is equipped with for placing the cleaning basket (6) to degumming chip glass;After potcher (3) internal upper part is equipped with for placing degumming Chip glass rinsing basket (4), the ultrasonic unit being connected with microprocessor is equipped in potcher (3);The concentrated sulfuric acid tank (8) it is connected to by concentrated sulfuric acid pipe (12) with rinse bath (7), provides the concentrated sulfuric acid for rinse bath (7), set on the concentrated sulfuric acid pipe (12) There is the first flow control valve (10) being connected with microprocessor;The dioxygen water pot (9) passes through dioxygen water pipe (13) and rinse bath (7) it is connected to, provides hydrogen peroxide for rinse bath (7), the dioxygen water pipe (13) is equipped with the second flow being connected with microprocessor Control valve (11);Slot cover is equipped at the upper side of the rinse bath (7), the other side is then used to be arranged dehydration package, the dehydration group Part includes the electric boiling plate (15) for being arranged on rinse bath (7) and being connected with microprocessor, is located above electric boiling plate (15) And the absorbing cabin being connected with rinse bath (7) upper end, the temperature sensor in absorbing cabin is set, both ends be connected to absorbing cabin with The circulation pipe (14) of inner air circulation is constituted, and the dry packet (17) being arranged on circulation pipe (14) and blower (16), the wind Machine (16) and temperature sensor are connected with microprocessor.
2. a kind of chip glass degumming device according to claim 1, which is characterized in that it further include dryer (1), it is described Dryer (1) is disposed adjacent with potcher (3), for drying to the chip glass after rinsing.
3. a kind of chip glass degumming device according to claim 1 or 2, which is characterized in that in the rinse bath (7) also Equipped with the acid concentration detector (5) for detecting the interior liquid acidity of rinse bath (7) and the liquidometer for detecting liquid level, the liquid Position meter is equipped at least the first given threshold and the second given threshold the two threshold values;The acid concentration detector and liquidometer with Microprocessor is connected.
4. a kind of chip glass degumming device according to claim 3, which is characterized in that the absorbing cabin is wet gas current Source, the circulation pipe (14), for boundary, are divided into dry gas stream section and wet gas current section, the blower (16) is i.e. with absorbing cabin and dry packet It is arranged in dry gas stream section;The dry gas stream section is equipped with the gas Temperature Humidity Sensor being connected with microprocessor.
5. a kind of chip glass degumming device according to claim 4, which is characterized in that the dioxygen water pipe (13) and clear The side bottom of washing trough (7) connects, and its connector is located remotely from rinse bath (7) side wall of dehydration package.
6. a kind of chip glass degumming device according to claim 1, which is characterized in that the electric boiling plate (15) adds Hot temperature is 170 ~ 180 DEG C.
7. a kind of chip glass degumming device according to claim 1, which is characterized in that filling in the dry packet (17) There is particulate dried material.
CN201822124020.6U 2018-12-18 2018-12-18 A kind of chip glass degumming device Active CN209303407U (en)

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Application Number Priority Date Filing Date Title
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110610852A (en) * 2019-09-27 2019-12-24 扬州扬杰电子科技股份有限公司 Method for removing residual glue on metal surface
CN112058793A (en) * 2020-08-07 2020-12-11 万津实业(赤壁)有限公司 Optical glass cleaning equipment and cleaning method
CN113920118A (en) * 2021-12-14 2022-01-11 武汉卓久玻璃制品有限公司 Hollow glass spacer glue-shortage detection method based on image processing

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110610852A (en) * 2019-09-27 2019-12-24 扬州扬杰电子科技股份有限公司 Method for removing residual glue on metal surface
CN112058793A (en) * 2020-08-07 2020-12-11 万津实业(赤壁)有限公司 Optical glass cleaning equipment and cleaning method
CN113920118A (en) * 2021-12-14 2022-01-11 武汉卓久玻璃制品有限公司 Hollow glass spacer glue-shortage detection method based on image processing

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