CN209297102U - A kind of exposure machine - Google Patents
A kind of exposure machine Download PDFInfo
- Publication number
- CN209297102U CN209297102U CN201822185128.6U CN201822185128U CN209297102U CN 209297102 U CN209297102 U CN 209297102U CN 201822185128 U CN201822185128 U CN 201822185128U CN 209297102 U CN209297102 U CN 209297102U
- Authority
- CN
- China
- Prior art keywords
- cabinet
- exposure
- cavity
- sliding rail
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The utility model discloses a kind of exposure machines, including cabinet, the box house forms cavity, and the cavity top is equipped with sliding rail, is connected with several Exposing Lamps on the sliding rail, the cavity lower part is equipped with cassette, the cavity inner wall is additionally provided with photosensitive sensor, and the cabinet front is equipped with switch gate, and the switch gate is equipped with control panel, it is further fixed on digital dock and controller on the outside of the cabinet, the digital dock and photosensitive sensor are connect with the controller.The utility model has the beneficial effects that can freely adjust the position of Exposing Lamp by setting sliding rail and multiple Exposing Lamps to reach better exposure effect, by the way that the time of independent digital dock record exposure is arranged, timely early warning is able to carry out when exposure system breaks down.
Description
Technical field
The utility model relates to semiconductor technology, in particular to a kind of exposure machine.
Background technique
Exposure machine is mainly used for micro-photographing process as machine for producing platform important in manufacture of semiconductor.In general, its
It is used in conjunction with coating developing machine, completes the image forming step in micro-photographing process.
Influence of the time for exposure to exposure effect is very big, existing exposure machine, when system failure causes exposure
Between inaccuracy when, cannot timely early warning.
Utility model content
For above-mentioned technical problem in the related technology, the utility model proposes a kind of exposure machine, have it is high in machining efficiency,
Produce safer advantage.
To realize the above-mentioned technical purpose, the technical solution of the utility model is achieved in that
A kind of exposure machine, including cabinet, the box house form cavity, and the cavity top is equipped with sliding rail, the cunning
Several Exposing Lamps are connected on rail, the cavity lower part is equipped with cassette, and the cavity inner wall is additionally provided with photosensitive sensor,
The cabinet front is equipped with switch gate, and the switch gate is equipped with control panel, is further fixed on digital dock on the outside of the cabinet
And controller, the digital dock and photosensitive sensor are connect with the controller.
Further, the lower box is equipped with bracket.
Further, the quantity of the Exposing Lamp is two.
Further, the digital dock and controller are arranged in integrally formed Adam's box, and Adam's box is fixed
On the cabinet.
Further, the Exposing Lamp is electrically connected with the control panel.
The utility model has the beneficial effects that by setting sliding rail and multiple Exposing Lamps can freely adjust Exposing Lamp position with
Reach better exposure effect, by the way that the time of independent digital dock record exposure is arranged, when exposure system breaks down
It is able to carry out timely early warning.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Needed in attached drawing be briefly described, it should be apparent that, the accompanying drawings in the following description is only the utility model
Some embodiments for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other attached drawings.
Fig. 1 is a kind of exposure machine structure schematic diagram according to the utility model embodiment；
In figure: 1, cabinet；2, bracket；3, Exposing Lamp；4, control panel；5, cassette；6, photosensitive sensor；7, Adam's box；
8, sliding rail.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art's every other embodiment obtained, all belongs to
In the range of the utility model protection.
As shown in Figure 1, according to a kind of exposure machine of the utility model embodiment, including cabinet 1, the 1 inside shape of cabinet
At cavity, the cavity top is equipped with sliding rail 8, is connected with several Exposing Lamps 3, the cavity lower part on the sliding rail 8
Equipped with cassette 5, wafer can be accommodated in cassette 5, the cavity inner wall is additionally provided with photosensitive sensor 6, and 1 front of cabinet, which is equipped with, opens
It closes the door, the switch gate is equipped with control panel 4, is further fixed on digital dock and controller, the number on the outside of the cabinet 1
Clock and photosensitive sensor 6 are connect with the controller.
In a kind of embodiment of the utility model, 1 lower part of cabinet is equipped with bracket 2, is used to support cabinet 1.
In a kind of embodiment of the utility model, the quantity of the Exposing Lamp 3 is two, when an Exposing Lamp breaks down
When, another Exposing Lamp can also continue to support work, better reliability, while adjustable phase of two Exposing Lamps on sliding rail 8
To position, better exposure effect is realized.
In a kind of embodiment of the utility model, the digital dock and controller are arranged in integrally formed Adam's box 7,
Adam's box 7 is fixed on 1 outer wall of cabinet.
In a kind of embodiment of the utility model, the Exposing Lamp is electrically connected with the control panel, can by control panel 4
To control the opening and closing of Exposing Lamp, setting is timed to the time for exposure.
The utility model can freely adjust the position of Exposing Lamp by setting sliding rail 8 and multiple Exposing Lamps 3 to reach more preferable
Exposure effect be able to carry out by the way that the time of independent digital dock record exposure is arranged when exposure system breaks down
Timely early warning.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on should be included in the utility model
Protection scope within.
Claims (5)
1. a kind of exposure machine, which is characterized in that including cabinet (1), form cavity, the cavity top inside the cabinet (1)
Equipped with sliding rail (8), several Exposing Lamps (3) are connected on the sliding rail (8), the cavity lower part is equipped with cassette (5), institute
It states cavity inner wall to be additionally provided with photosensitive sensor (6), cabinet (1) front is equipped with switch gate, and the switch gate is equipped with control
Panel (4), cabinet (1) outside are further fixed on digital dock and controller, and the digital dock and photosensitive sensor are equal
It is connect with the controller.
2. a kind of exposure machine according to claim 1, which is characterized in that cabinet (1) lower part is equipped with bracket (2).
3. a kind of exposure machine according to claim 1, which is characterized in that the quantity of the Exposing Lamp (3) is two.
4. a kind of exposure machine according to claim 1, which is characterized in that the digital dock and controller are arranged in one
In molding Adam's box (7), Adam's box (7) is fixed on the cabinet.
5. a kind of exposure machine according to claim 1, which is characterized in that the Exposing Lamp (3) and the control panel (4)
Electrical connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822185128.6U CN209297102U (en) | 2018-12-25 | 2018-12-25 | A kind of exposure machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822185128.6U CN209297102U (en) | 2018-12-25 | 2018-12-25 | A kind of exposure machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209297102U true CN209297102U (en) | 2019-08-23 |
Family
ID=67648391
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822185128.6U Expired - Fee Related CN209297102U (en) | 2018-12-25 | 2018-12-25 | A kind of exposure machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209297102U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114162450A (en) * | 2020-09-11 | 2022-03-11 | 长鑫存储技术有限公司 | Door plate sealing monitoring system, method, device, medium and equipment of exposure machine platform |
-
2018
- 2018-12-25 CN CN201822185128.6U patent/CN209297102U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114162450A (en) * | 2020-09-11 | 2022-03-11 | 长鑫存储技术有限公司 | Door plate sealing monitoring system, method, device, medium and equipment of exposure machine platform |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190823 Termination date: 20201225 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |