CN209289014U - A kind of driving mechanism of annular polishing machine - Google Patents
A kind of driving mechanism of annular polishing machine Download PDFInfo
- Publication number
- CN209289014U CN209289014U CN201822260077.9U CN201822260077U CN209289014U CN 209289014 U CN209289014 U CN 209289014U CN 201822260077 U CN201822260077 U CN 201822260077U CN 209289014 U CN209289014 U CN 209289014U
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- Prior art keywords
- main shaft
- double flute
- mill
- load bearing
- rack
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- 230000007246 mechanism Effects 0.000 title claims abstract description 15
- 238000005498 polishing Methods 0.000 title claims abstract description 15
- 239000003638 chemical reducing agent Substances 0.000 claims abstract description 12
- 230000035939 shock Effects 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 description 5
- 230000006872 improvement Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 241000237858 Gastropoda Species 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005482 strain hardening Methods 0.000 description 1
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- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
The utility model discloses a kind of driving mechanisms of annular polishing machine, including worm-gear speed reducer (41), belt pulley (42), double flute drive sprocket (43), main shaft (51), main shaft off-load bearing weight (52), double flute driven sprocket (53), bearing (54), rack (6), wherein, the main shaft off-load bearing weight (52), rack (6) is fixedly mounted on cabinet body (12), one end of the main shaft (51) is mounted on main shaft off-load bearing weight (52), the main shaft (51) is rotatablely connected by bearing (54) and rack (6) simultaneously;The other end of the main shaft (51) is connect with mill (3), main shaft is fixedly mounted on bottom of cabinet bulk by main shaft off-load bearing by the utility model again, it is being connect by bearing with gantry rotation, the shock conditions during main axis thus can be effectively prevented, the stability of mill rotation is improved.
Description
Technical field
The utility model relates to the annular polishing machines of the high precision plane of a kind of pair of workpiece processing, belong to the optics of ultraprecise
And field is cold worked in electronic semi-conductor.
Background technique
Annular polishing machine is by bore using the principle of face shape duplication much larger than optics and the mill of electrical semiconductor component
High-precision surface shape copy on optics and semiconductor element, be mainly used for various plane components high-precision super-smooth surface throw
Light.
Currently, annular polishing machine is as high precision plane optics and the main manufacturing process of semiconductor element, increasingly by
The attention of optics and electronic semi-conductor's cold working industry, the improvement of annular polishing machine also increasingly progresses greatly, especially for component requirements
Under higher and higher background, improving equipment precision stability and retentivity is particularly important, and is also become and is improved element processing essence
The necessary means of degree.
Utility model content
Purpose of utility model: in order to overcome the deficiencies in the prior art, the utility model provides a kind of high stability
Annular polishing machine driving mechanism.
Technical solution: to achieve the above object, the technical solution adopted in the utility model are as follows:
A kind of driving mechanism of annular polishing machine, including worm-gear speed reducer, belt pulley, double flute drive sprocket, main shaft,
Main shaft off-load bearing weight, double flute driven sprocket, bearing, rack, wherein the worm-gear speed reducer is fixedly mounted on cabinet body bottom
The one end in portion, the worm-gear speed reducer is connect with pulley drive, and the other end and double flute drive sprocket are sequentially connected;Belt
Wheel is sequentially connected with driving wheel by belt, and the driving wheel and driving motor are sequentially connected, and the main shaft off-load bearing is again solid
Dingan County is mounted in bottom of cabinet bulk, and the rack is fixedly mounted in cabinet body, and one end of the main shaft is mounted on main shaft off-load bearing weight
On, while the main shaft is connect by bearing with gantry rotation;The other end of the main shaft is connect with mill;The double flute is driven
Sprocket wheel is fixedly mounted on main shaft, and is rotated coaxially with main shaft, and the double flute driven sprocket and double flute drive sprocket are sequentially connected.
It is preferred: support plate to be provided on the other end of the main shaft, the mill is mounted in support plate.
Preferred: the support plate is provided with precision and adjusts bolt, and the precision adjusts bolt and passes through support plate and mill
Connection.
The utility model compared with prior art, has the advantages that
Main shaft is fixedly mounted on bottom of cabinet bulk by main shaft off-load bearing by the utility model again, is passing through bearing and rack
Rotation connection, it is thus possible to effectively prevent the shock conditions during main axis, improve the stability of mill rotation.
Detailed description of the invention
Fig. 1 is the front view of annular polishing machine in embodiment
Fig. 2 is sectional view along A-A in Fig. 1
Fig. 3 is the top view of annular polishing machine in embodiment
Specific embodiment
In the following with reference to the drawings and specific embodiments, the utility model is furtherd elucidate, it should be understood that these examples are only used for
Bright the utility model rather than limitation the scope of the utility model, after having read the utility model, those skilled in the art
Member falls within the application range as defined in the appended claims to the modification of the various equivalent forms of the utility model.
A kind of annular polishing machine, as shown in Figure 1-3, include PLC central control system 11, cabinet body 12, holding mechanism, driving mechanism
And mill 3, wherein the PLC central control system 11, holding mechanism are mounted on cabinet body 12, are provided with sight on the cabinet body 12
Window 13 is examined, the driving mechanism is set in cabinet body 12, and the mill 3 is set on cabinet body 12, and the driving mechanism and mill
Disk 3 is sequentially connected;The cabinet body 12 is provided with observation window 13.
The holding mechanism includes three holding units, and another in the utility model is holding unit in embodiment
Number be 4, the number of holding unit is more, and the retentivity being applied on workpiece is more uniform, keep effect it is better, the guarantor
It holds unit to be circumferentially uniformly distributed along mill 3, the holding unit includes keeping pillar 21, retainer 22, active motor 23, master
Adjusting cylinder described in driving wheel 24, driven wheel 25 and adjusting cylinder is fixedly mounted on cabinet body 12, and the holding pillar 21 is fixed
It is mounted on and adjusts on cylinder, the fixing end of the retainer 22, which is fixedly mounted on, to be kept on pillar 21, and the retainer 22 is consolidated
Fixed end is provided with regulating tank 221, passes through regulating tank 221 for the fixing end of retainer 22 and holding 21 phase of pillar by adjusting bolt
It is fixed;The adjusting bolt is three, and another in the utility model is in embodiment, and adjusting bolt is four, passes through adjusting
The setting of slot 221, adjustable retainer 22 is deep into the length in mill 3, and then can be suitable for the workpiece of various sizes;
And the driving wheel 24 is mounted on the free end of retainer 22, the free end of the retainer 22 is curved head 222, using arc
The free end of forming head, it should effective to reduce at work, frictional force suffered by free end, the free end of the retainer 22
On offer arc groove 223, the driven wheel 25 is mutually fixed by arc groove 223 and the free end of retainer 22, passes through arc
The setting of slot 223, corresponding to different operating conditions, can pass through driven wheel so that driven wheel 25 can arcuately slot 223 be configured
25 arcuately slot 223 be configured and adapted to;The active motor 23 is fixedly mounted on retainer 22, and the driving wheel
24 are sequentially connected with active motor 23;The driving wheel 24, driven wheel 25 are located at the top of mill 3;
The driving mechanism includes worm-gear speed reducer 41, belt pulley 42, double flute drive sprocket 43, main shaft 51, main shaft
Off-load bearing weighs 52, double flute driven sprocket 53, bearing 54, rack 6, wherein the worm-gear speed reducer 41 is fixedly mounted on
12 bottom of cabinet body, one end of the worm-gear speed reducer 41 and belt pulley 42 are sequentially connected, and belt pulley 42 passes through with driving wheel
Belt transmission connection, the driving wheel and driving motor are sequentially connected, the other end and double flute of the worm-gear speed reducer 41
Drive sprocket 43 is sequentially connected;The main shaft off-load bearing weighs 52 and is fixedly mounted on 12 bottom of cabinet body, and the rack 6 is fixedly mounted
In cabinet body 12, one end of the main shaft 51 is mounted on main shaft off-load bearing and weighs on 52, while the main shaft 51 passes through bearing 54
It is rotatablely connected with rack 6;Support plate 31 is provided on the other end of the main shaft 51, the mill 3 is mounted in support plate 31;
The support plate 31 is provided with precision and adjusts bolt 32, and the precision adjusts bolt 32 and connect across support plate 31 with mill 3, leads to
The adjusting that precision adjusts bolt 32, i.e., the position of adjustable mill 3 are crossed, and then adjusts the precision of mill 3, PLC central control system point
It is not connect with adjusting cylinder, active motor 23, driving motor, exchanges displacements of cylinders, active motor 23, driving motor respectively and controlled
System.
When use, workpiece is placed on mill 3, starting adjusts cylinder, and driving wheel 24,25 downlink of driven wheel are pressed in
On workpiece, start active motor 23, driving motor, driving motor drives driving wheel rotation, drives belt pulley 42 to rotate, by snail
After worm and gear speed reducer 41 slows down, driving double flute drive sprocket 43 is rotated, and drives double flute driven sprocket 53 to rotate, and then drive master
Axis 51 rotates, and then rotates with movable grinding disc 3, and on the other hand, driving wheel 24 is rotated by active motor 23, in mill 3
Rotary action under, driven wheel 25 is followed by rotation.When workpiece is polished, closing active motor 23, driving motor, mill 3 are led
Driving wheel 24, driven wheel 25 stop operating, and adjust cylinder uplink, driving wheel 24, driven wheel 25 leave workpiece, take out the work processed
Part.
The above is only the preferred embodiment of the utility model, it should be pointed out that: for the common skill of the art
For art personnel, without departing from the principle of this utility model, several improvements and modifications can also be made, these improve and
Retouching also should be regarded as the protection scope of the utility model.
Claims (3)
1. a kind of driving mechanism of annular polishing machine, it is characterised in that: including worm-gear speed reducer (41), belt pulley (42),
Double flute drive sprocket (43), main shaft (51), main shaft off-load bearing weight (52), double flute driven sprocket (53), bearing (54), rack
(6), wherein the worm-gear speed reducer (41) is fixedly mounted on cabinet body (12) bottom, the worm-gear speed reducer (41)
One end and belt pulley (42) be sequentially connected, the other end and double flute drive sprocket (43) are sequentially connected;Belt pulley (42) and driving
Wheel is sequentially connected by belt, and the driving wheel and driving motor are sequentially connected, the fixed peace of main shaft off-load bearing weight (52)
Mounted in cabinet body (12) bottom, the rack (6) is fixedly mounted in cabinet body (12), and one end of the main shaft (51) is mounted on main shaft
On off-load bearing weight (52), while the main shaft (51) is rotatablely connected by bearing (54) and rack (6);The main shaft (51)
The other end is connect with mill (3);The double flute driven sprocket (53) is fixedly mounted on main shaft (51), and coaxial with main shaft (51)
Rotation, the double flute driven sprocket (53) and double flute drive sprocket (43) are sequentially connected.
2. the driving mechanism of annular polishing machine according to claim 1, it is characterised in that: on the other end of the main shaft (51)
It is provided with support plate (31), the mill (3) is mounted on support plate (31).
3. the driving mechanism of annular polishing machine according to claim 2, it is characterised in that: the support plate (31) is provided with essence
Degree adjusts bolt (32), and the precision adjusts bolt (32) and connect across support plate (31) with mill (3).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201822260077.9U CN209289014U (en) | 2018-12-30 | 2018-12-30 | A kind of driving mechanism of annular polishing machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201822260077.9U CN209289014U (en) | 2018-12-30 | 2018-12-30 | A kind of driving mechanism of annular polishing machine |
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Publication Number | Publication Date |
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CN209289014U true CN209289014U (en) | 2019-08-23 |
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CN201822260077.9U Expired - Fee Related CN209289014U (en) | 2018-12-30 | 2018-12-30 | A kind of driving mechanism of annular polishing machine |
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CN (1) | CN209289014U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112676947A (en) * | 2020-12-28 | 2021-04-20 | 王兆举 | Automatic workpiece shaft butt-joint positioning mechanism for intelligent plane refiner |
-
2018
- 2018-12-30 CN CN201822260077.9U patent/CN209289014U/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112676947A (en) * | 2020-12-28 | 2021-04-20 | 王兆举 | Automatic workpiece shaft butt-joint positioning mechanism for intelligent plane refiner |
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Date | Code | Title | Description |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190823 |