CN209246102U - Exhaust gas processing device - Google Patents
Exhaust gas processing device Download PDFInfo
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- CN209246102U CN209246102U CN201822071020.4U CN201822071020U CN209246102U CN 209246102 U CN209246102 U CN 209246102U CN 201822071020 U CN201822071020 U CN 201822071020U CN 209246102 U CN209246102 U CN 209246102U
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- combustion furnace
- processing device
- exhaust gas
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Abstract
A kind of exhaust gas processing device, it include: combustion furnace, the combustion furnace includes top, bottom and the annular side portions between top and bottom, several nozzles are provided on the inner wall at the top of the combustion furnace and on the inner wall of annular side portions, several nozzles, which jet out flames, carries out full encirclement burning to the tail gas being passed through in combustion furnace from top.The exhaust gas processing device of the utility model improves the efficiency of vent gas treatment.
Description
Technical field
The utility model relates to field of semiconductor devices more particularly to a kind of exhaust gas processing devices.
Background technique
Vent gas treatment is an indispensable environmentally friendly link in semiconductor manufacture industry, as it is extensive, represents elder generation
Into the industry of manufacturing technology, semiconductor manufacture industry should be noted that exhaust emissions by pollution on the environment, to advanced half
Therefore influence caused by conductor processing procedure will actively carry out the processing and control work of exhaust emissions.
Processing for tail gas, existing exhaust gas processing device generally use the methods of washing, oxidation/burning.
But existing exhaust gas processing device is lower for the treatment effeciency of tail gas.
Utility model content
Technical problem to be solved in the utility model is how to prevent leakage in butterfly valve.
To solve the above-mentioned problems, the utility model provides a kind of exhaust gas processing device, comprising: combustion furnace, the combustion
Burning furnace includes top, bottom and the annular side portions between top and bottom, on the inner wall at the top of the combustion furnace and
Several nozzles are provided on the inner wall of annular side portions, several nozzles, which jet out flames, carries out the tail gas being passed through in combustion furnace from top
It is complete to surround burning.
Optionally, the material of the nozzle is ceramics, and the material of the inner wall of the combustion furnace is ceramics.
Optionally, several nozzles are evenly distributed on the top of combustion furnace and the inner wall of side wall.
Optionally, several entrances are provided on the top of the combustion furnace, several entrances are separately connected the tail of distinct device
Gas discharge tube is provided with outlet on the bottom, and the gas after burning passes through outlet discharge.
Optionally, be additionally provided with powder collecting box below the combustion furnace, the powder collecting box by a connecting tube with
The outlet to burn on furnace bottom, the powder collecting box is for collecting the powder generated in combustion process.
It optionally, further include water washing device, the water washing device is connected to by an air shooter with connecting tube, the water
Cleaning device is for washing the gas after burning.
Optionally, the water washing device includes washing chamber, water tank, spray head, and the washing chamber is connected to air shooter,
Gas after burning enters washing chamber by connecting tube and air shooter, and the spray head is located in washing chamber, the spray
Head spray water washes the gas entered in washing chamber, and the water tank is located at below washing chamber to be connected to washing chamber, described
Water tank collects the water after being washed.
Optionally, the water washing device further includes water delivery device, for the water in water tank to be transported to spray head.
Optionally, the washing chamber is also connect with the exhaust end of factory service.
Optionally, cooling water pipeline is additionally provided in the side wall of the combustion furnace, the powder collecting box and gas convey
Isolating valve is additionally provided in connecting tube between pipe.
Compared with prior art, technical solutions of the utility model have the advantage that
The exhaust gas processing device of the utility model, comprising: combustion furnace, on the inner wall at the top of the combustion furnace and annular side
Several nozzles are provided on the inner wall in portion, thus several nozzles can form encirclement to combustion furnace inner exhaust gas is passed through, so that several sprays
The flame that mouth sprays can be carried out the burning surrounded entirely to the tail gas being passed through in combustion furnace, thus is passed through the tail gas in combustion furnace and can fill
Divide complete burning, to improve efficiency of combustion.Organic principle, toxic component in tail gas can be removed by burning, from
And prevent pollution of the tail gas to environment.
Further, several nozzles be evenly distributed on the inner wall at the top of combustion furnace and the inner wall of annular side portions on, with
Further increase the efficiency of burning.
Further, several entrance (not shown)s are provided on the top of the combustion furnace, several entrances are separately connected
The exhaust emission pipeline of distinct device, the tail gas that exhaust gas processing device discharges multiple equipment while being handled,
The cost for having saved vent gas treatment improves vent gas treatment efficiency.
Further, be additionally provided with powder collecting box below the combustion furnace, the powder collecting box by a connecting tube with
The outlet to burn on furnace bottom, the powder collecting box, on the one hand can be with for collecting the powder generated in combustion process
It prevents powder from blocking subsequent pipeline, extends the maintenance period of pipeline, on the other hand, powder can be prevented to subsequent carry out water
The pollution of water when washing extends the maintenance period of water tank so that the water quality in water tank is improved.
Further, isolating valve can also be set in the connecting tube between the powder collecting box and air shooter, it is described
Isolating valve opening in the powder that powder collecting box generates in collecting combustion process, the isolating valve pass through clear in maintenance personnel
Manage closing when mouth removes the powder accumulated in powder collecting box 208.
Further, the exhaust gas processing device further includes water washing device, the water washing device by an air shooter with
Connecting tube connection, the water washing device is for washing the gas after burning, to cool down to the gas after burning, just
Gas discharge after burning.
Water washing device described further further includes water delivery device, for the water in water tank to be transported to spray head, to realize
Recycling to the water in water tank.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model embodiment exhaust gas processing device；
Fig. 2 is the schematic diagram of the section structure of the utility model embodiment combustion furnace.
Specific embodiment
As described in the background art, existing exhaust gas processing device is lower for the treatment effeciency of tail gas.
For this purpose, the utility model provides a kind of exhaust gas processing device, comprising: combustion furnace, the top of the combustion furnace
On inner wall and several nozzles are provided on the inner wall of annular side portions, several nozzles jet out flames to be passed through in combustion furnace to from top
Tail gas carries out complete surround and burns, so that the efficiency of combustion of the combustion furnace of the application greatly improves.
To keep the above objects, features, and advantages of the utility model more obvious and easy to understand, with reference to the accompanying drawing to this
The specific embodiment of utility model is described in detail.When the utility model embodiment is described in detail, for purposes of illustration only, schematic diagram
General proportion can be disobeyed and make partial enlargement, and the schematic diagram is example, should not limit the guarantor of the utility model herein
Protect range.In addition, the three-dimensional space of length, width and depth should be included in actual fabrication.
Fig. 1 is the structural schematic diagram of the utility model embodiment exhaust gas processing device；Fig. 2 is the utility model embodiment combustion
Burn the schematic diagram of the section structure of furnace.
With reference to Fig. 1, the exhaust gas processing device of the present embodiment, comprising: combustion furnace 201, the combustion furnace 201 include top
201a, bottom 201c and the annular side portions 201b between top 201a and bottom 201c, the top of the combustion furnace 201
Several nozzles 202 are provided on the inner wall of 201a and on the inner wall of annular side portions 201b, and several nozzles 202 jet out flames to from top
Portion 201a is passed through the tail gas 21 in combustion furnace and carries out surrounding burning entirely.
The space that top 201a, bottom 201c and the annular side portions 201b of the combustion furnace 201 are surrounded is combustion chamber, burning
Chamber burns tail gas 21 for accommodating the tail gas 21 being passed through in combustion chamber.
The material of the inner wall of the combustion furnace 201 is ceramics, and the material of the nozzle 202 is ceramics, so that combustion furnace
201 and nozzle 202 adapt to hot environment.
In the present embodiment, several nozzles 202 are distributed on the inner wall of the top 201a of combustion furnace 201 and annular side portions 201b
Inner wall on, thus several nozzles can be passed through 201 inner exhaust gas 21 of combustion furnace formed surround so that several nozzles 202 spray
Flame can be carried out the burning surrounded entirely to the tail gas being passed through in combustion furnace 201, thus the tail gas being passed through in combustion furnace 201 can be sufficiently
Complete burning, to improve efficiency of combustion.By organic principle, the toxic component that can be removed in tail gas that burn, thus
Prevent pollution of the tail gas to environment.
In the present embodiment, it is not provided with nozzle on the inner wall of the bottom 201c of the combustion furnace 201, to prevent bottom 201c's
The flame that the nozzle being arranged on inner wall sprays has an impact the process of tail gas inlet and outlet combustion furnace 201.
In one embodiment, several nozzles 202 be evenly distributed on the inner wall of the top 201a of combustion furnace 201 and annular
On the inner wall of side 201b, to further increase the efficiency of burning.
In one embodiment, the exhaust gas processing device further includes natural gas supply pipeline (not shown) and igniting dress
(not shown) is set, for natural gas supply pipeline for supplying natural gas into several nozzles 202, the igniter is used for will
Natural gas igniting in nozzle 202 burns to the tail gas being passed through in combustion furnace 201 so that flame is sprayed from nozzle 202.
Several entrance (not shown)s are provided on the top 201a of the combustion furnace 201, several entrances are separately connected
The exhaust emission pipeline (204/205) of distinct device is provided with outlet 203 on the bottom 201c, and the gas after burning passes through
Outlet 203 is discharged in connecting tube 206.
The exhaust emission pipeline 204 and exhaust emission pipeline 205 are the exhaust emission pipeline of distinct device, such as tail gas
Discharge tube 204 is the exhaust emission pipeline of gas-phase deposition equipment A, and exhaust emission pipeline 205 sets for gas-phase deposition
The exhaust emission pipeline of standby B.The tail gas that thus exhaust gas processing device of the present embodiment can discharge multiple equipment carries out simultaneously
Processing, has saved the cost of vent gas treatment, has improved vent gas treatment efficiency.
With continued reference to FIG. 1, powder collecting box 208 is additionally provided with below the combustion furnace 201, the powder collecting box
208 are connected to by a connecting tube 206 with the outlet 203 on 201 bottom 201c of combustion furnace, and the powder collecting box 208 is for receiving
The powder generated in collection combustion process.
Tail gas 21 can generate powder in combustion or tail gas 21 is passed through in combustion furnace 201 can carry powder, described
The powder collecting box 208 that powder can be located at 201 lower section of combustion furnace is collected, and on the one hand can prevent powder from blocking subsequent pipe
Road extends the maintenance period of pipeline, on the other hand, can prevent the pollution of water of the powder to subsequent wash when, so that
Water quality in water tank is improved, and the maintenance period of water tank is extended.
It is also equipped with clean-up port 209 on the powder collecting box 208, by clean-up port 209, maintenance personnel can be by powder
The powder accumulated in collecting box 208 removes.
In one embodiment, the connection between the powder collecting box 208 and air shooter 210 (subsequent to be introduced)
Isolating valve 207 is also provided on pipe 206, the isolating valve 207 generates in collecting combustion process in powder collecting box 208
Powder when open, the isolating valve 207 passes through the powder that will accumulate in powder collecting box 208 of clean-up port 209 in maintenance personnel
It is closed when removal.
The isolating valve 207 can be motor-operated control valve (electric signal control opens and closes) or isolation hand valve
(maintenance personnel opens and closes manually).In the present embodiment, the isolating valve 207 can be isolation hand valve.
In one embodiment, the exhaust gas processing device further includes water washing device 214, and the water washing device 214 passes through one
Air shooter 210 is connected to connecting tube 206, and the water washing device 214 is for washing the gas after burning.
The effect of water washing device 214 is washed to the gas after burning, to cool down to the gas after burning,
Convenient for the gas discharge after burning.
In one embodiment, the water washing device 214 includes washing chamber 212, water tank 211, spray head 213, the washing
Chamber 212 is connected to air shooter 210, and the gas after burning in combustion furnace 201 passes through connecting tube 206 and air shooter 210
Into washing chamber 212, the spray head 213 be located at washing chamber 212 in, 213 spray water of spray head to enter wash chamber 212
In gas washed, the water tank 211 is located at washing chamber 212 lower section and is connected to washing chamber 212, the collection of water tank 211
Water after being washed.
The water washing device further includes water delivery device 217, for the water in water tank 212 to be transported to spray head 213, with reality
Now to the recycling of the water in water tank 211.
In one embodiment, the water delivery device 217 may include water pump 215 and the aqueduct that connect with water pump 215
216, the outlet end of aqueduct 216 is connected to spray head 213.
The quantity of the spray head 213 can be one or more (being more than or equal to 2).The quantity of spray head 213 is more
When a, the outlet end of aqueduct 216 can be connected to corresponding spray head 213 respectively by multiple.
In one embodiment, the washing chamber 212 is also connect with the exhaust end of factory service 218, and the gas after washing is led to
The exhaust end 218 for crossing factory service is discharged.
In one embodiment, referring to FIG. 2, being additionally provided with cooling water pipeline 219 in the side wall of the combustion furnace 201, institute
It states in cooling water pipeline 219 and has been passed through recirculated cooling water, to cool down to combustion furnace 201, prevent combustion furnace 201 from overheating.
The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art
Art personnel can also make several improvements and modifications without departing from the principle of this utility model, these improvements and modifications
Also it should be regarded as the protection scope of the utility model.
Claims (10)
1. a kind of exhaust gas processing device characterized by comprising combustion furnace, the combustion furnace include top, bottom and be located at
Annular side portions between top and bottom are provided with several on the inner wall at the top of the combustion furnace and on the inner wall of annular side portions
Nozzle, several nozzles, which jet out flames, carries out full encirclement burning to the tail gas being passed through in combustion furnace from top.
2. exhaust gas processing device as described in claim 1, which is characterized in that the material of the nozzle is ceramics, the combustion furnace
Inner wall material be ceramics.
3. exhaust gas processing device as described in claim 1, which is characterized in that several nozzles are evenly distributed in the top of combustion furnace
On the inner wall of side wall.
4. exhaust gas processing device as described in claim 1, which is characterized in that be provided on the top of the combustion furnace it is several enter
Mouthful, several entrances are separately connected the exhaust emission pipeline of distinct device, outlet are provided on the bottom, and the gas after burning is logical
Cross outlet discharge.
5. exhaust gas processing device as claimed in claim 4, which is characterized in that be additionally provided with powder collection below the combustion furnace
Case, the powder collecting box is by a connecting tube and the outlet to burn on furnace bottom, and the powder collecting box is for collecting
The powder generated in combustion process.
6. exhaust gas processing device as claimed in claim 5, which is characterized in that further include water washing device, the water washing device passes through
One air shooter is connected to connecting tube, and the water washing device is for washing the gas after burning.
7. exhaust gas processing device as claimed in claim 6, which is characterized in that the water washing device includes washing chamber, water tank, spray
Head, the washing chamber are connected to air shooter, and the gas after burning in combustion furnace is entered by connecting tube and air shooter
Chamber is washed, the spray head is located in washing chamber, and the spray head spray water washes the gas entered in washing chamber, institute
It states water tank to be connected to below washing chamber with washing chamber, the water tank collects the water after being washed.
8. exhaust gas processing device as claimed in claim 7, which is characterized in that the water washing device further includes water delivery device, is used for
Water in water tank is transported to spray head.
9. exhaust gas processing device as claimed in claim 7, which is characterized in that the washing chamber is also connect with the exhaust end of factory service.
10. exhaust gas processing device as claimed in claim 6, which is characterized in that be additionally provided with cooling in the side wall of the combustion furnace
Water lines are additionally provided with isolating valve in the connecting tube between the powder collecting box and air shooter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822071020.4U CN209246102U (en) | 2018-12-11 | 2018-12-11 | Exhaust gas processing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822071020.4U CN209246102U (en) | 2018-12-11 | 2018-12-11 | Exhaust gas processing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209246102U true CN209246102U (en) | 2019-08-13 |
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ID=67532344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822071020.4U Active CN209246102U (en) | 2018-12-11 | 2018-12-11 | Exhaust gas processing device |
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| Country | Link |
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| CN (1) | CN209246102U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111298595A (en) * | 2020-02-29 | 2020-06-19 | 广州绿邦环境技术有限公司 | Organic odor treatment equipment |
| CN114526494A (en) * | 2022-02-17 | 2022-05-24 | 茂名市广地化工有限公司 | Novel incinerator device for producing sodium hydrosulfite |
| CN115025594A (en) * | 2022-06-13 | 2022-09-09 | 中环领先半导体材料有限公司 | Epitaxial tail gas treatment equipment |
-
2018
- 2018-12-11 CN CN201822071020.4U patent/CN209246102U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111298595A (en) * | 2020-02-29 | 2020-06-19 | 广州绿邦环境技术有限公司 | Organic odor treatment equipment |
| CN111298595B (en) * | 2020-02-29 | 2022-02-15 | 广州绿邦环境技术有限公司 | Organic odor treatment equipment |
| CN114526494A (en) * | 2022-02-17 | 2022-05-24 | 茂名市广地化工有限公司 | Novel incinerator device for producing sodium hydrosulfite |
| CN115025594A (en) * | 2022-06-13 | 2022-09-09 | 中环领先半导体材料有限公司 | Epitaxial tail gas treatment equipment |
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