CN209231163U - A kind of adaptive device for liquid particles test - Google Patents

Abstract

The utility model discloses a kind of adaptive devices for liquid particles test, including pedestal, chassis, bottom plate and fixed cover, the pedestal is provided centrally with telescopic rod, and telescopic rod on be supported by chassis, bottom plate is provided in the chassis, and the upper surface of bottom plate is fixed with turntable, the turntable is provided centrally with round bar, round bar is equipped on the fixed cover, it is placed with the first liquid container respectively on six group of second groove, second liquid container, third liquid container, 4th liquid container, 5th liquid container and the 6th liquid container, and first is provided with conduit on liquid container side.This is used for the adaptive device of liquid particles test, overall structure setting is more reasonable, the turntable for facilitating and being rotated is set, it is tested convenient for constantly replacing different liquids container, unnecessary complex process is avoided, the burden of staff is mitigated, saves the test job time, improve working efficiency, accelerated test.

Description

A kind of adaptive device for liquid particles test

Technical field

It is specially a kind of for the suitable of liquid particles test the utility model relates to liquid particles test equipment technical field With device.

Background technique

In the production process of semiconductor devices, particle influences product yield great, wherein particle in chemicals by In the manufacture for directly participating in device, the influence to product is even more the most important thing, however, chemicals used in semicon industry is big Majority belongs to strong acid liquid or highly basic liquid, has the characteristics that high viscosity and high volatile, this makes in these chemicals The measurement of grain becomes especially difficult, and for the monitoring of particle in chemicals, existing test method mainly includes two kinds: the first It is that field sampling is carried out to different chemicals, then sample is taken at liquid particle counter and is measured；It is for second Liquid particle counter is fully connected chemical systems to be tested, on-line monitoring is realized, however, being which kind of method, requires Liquid container is packed into one by one, and is brought laboratory into and tested one by one, after intermediate liquid field sampling, it is also necessary to one The molten device of a liquid is taken carries out liquid particle counter measurement in the past, wastes time very much, also troublesome, is easy confusion.

In order to solve defect and deficiency present in liquid particles test equipment set forth above, it is badly in need of improving liquid The technology of grain test equipment, setting, which facilitates, once tests different liquids, avoids unnecessary working procedure, mitigates work The burden of personnel saves the working time, improves test job efficiency, to provide a kind of adaptation dress for liquid particles test It sets.

Utility model content

The technical issues of the utility model solves is to overcome the liquid particles test equipment of the prior art either live Sampling test or liquid particle counter is fully connected chemical systems to be tested, realizes on-line monitoring, requires Liquid container is packed into one by one, and is brought laboratory into and tested one by one, after intermediate liquid field sampling, it is also necessary to one The molten device of a liquid is taken carries out liquid particle counter measurement in the past, wastes time very much, also troublesome, causes to be easy confusion Defect provides a kind of adaptive device for liquid particles test.A kind of adaptive device tool for liquid particles test Have to facilitate and once test different liquids, avoid unnecessary working procedure, mitigate the burden of staff, saves work The features such as time, raising test job efficiency.

To achieve the above object, the utility model provides the following technical solutions: a kind of adaptation for liquid particles test Device, including pedestal, chassis, bottom plate and fixed cover, the pedestal are provided centrally with telescopic rod, and telescopic rod on be supported by Chassis, in the chassis on be provided with bottom plate, and the upper surface of bottom plate is fixed with turntable, and the turntable is provided centrally with circle Bar, and shield is provided on the ring side of turntable, is equipped with round bar on the fixed cover, and the outer ring of round bar is equipped with six groups the Two grooves are placed with the first liquid container, second liquid container, third liquid container, on six group of second groove respectively Four liquid containers, the 5th liquid container and the 6th liquid container, and conduit is provided on the first liquid container side, described first The upper end of liquid container offers vessel port, and outer cover is equipped in vessel port.

Preferably, the pedestal uses bucking ladder frame structure, and the telescopic rod of base center is scalable knot on Z axis Structure mainly by pedestal is supported turntable when telescopic rod is not stretched, when needing to carry out height adjustment, using stretching Contracting bar is conveniently adjusted the height of turntable.

Preferably, the first groove is offered in the chassis, and the lower end surface of bottom plate is equipped with a circle ball, while ball It is just in contact with the first groove, rotating table is achieved the purpose that by rotation ball, hold convenient for liquid on rotating table The position of device facilitates different liquids while being detected, and accelerates detection speed, improves efficiency.

Preferably, the bottom plate constitutes turntable by ball, and the rotational angle of bottom plate is any, and direction arbitrarily turns Dynamic, the work of more convenient worker personnel carries out.

Preferably, the turntable uses circular platform structure, and turntable and shield are all made of Pyrex material, with boron The container of silica glass material is as liquid container, with chemical stability is good, thermal stability is high, electrical insulating property is good.

Preferably, the conical flask of the first liquid container selection Pyrex material, and the first liquid container upper end The outer cover being nested in vessel port selects rubber material, while the conduit connected in the first liquid container selects polytetrafluoroethylene (PTFE) material The pipe of matter selects corrosion-resistant, stable chemical performance material, facilitates stable testing progress, avoids due to test utensil not It is qualified and influence test result, ensure the quality of test.

Preferably, the second liquid container, third liquid container, the 4th liquid container, the 5th liquid container and the 6th Size, material and the structure of liquid container are consistent with the setting of the first liquid container, and the first liquid container, second liquid hold Angularly ring is located at the upper end of turntable for device, third liquid container, the 4th liquid container, the 5th liquid container and the 6th liquid container Face, while six cover structure in a center of symmetry about the fixed of center, are angularly arranged, it is convenient to be converted in the rotation Position is tested simultaneously convenient for different liquids, avoids unnecessary operation sequence, saves test time, improves test Working efficiency.

Compared with prior art, the utility model has the beneficial effects that this is used for the adaptive device of liquid particles test, it is whole Body structure setting is more reasonable, and setting facilitates the turntable rotated, is tested, is kept away convenient for constantly replacing different liquids container Exempt from unnecessary complex process, mitigate the burden of staff, save the test job time, improves working efficiency, accelerated test.

Detailed description of the invention

Fig. 1 is the schematic elevation view of the utility model structure；

Fig. 2 faces expanded schematic diagram for the utility model structure；

Fig. 3 is relation schematic diagram between the first groove and ball of the utility model structure；

Fig. 4 is the schematic top plan view of the utility model structure；

Fig. 5 is the turntable schematic top plan view of the utility model structure.

Figure label: 1, pedestal, 2, telescopic rod, 3, chassis, the 30, first groove, 4, bottom plate, 40, ball, 5, turntable, 6, Shield, the 7, first liquid container, 8, conduit, 9, vessel port, 10, outer cover, 11, fixed cover, 12, round bar, the 13, second groove, 14, second liquid container, 15, third liquid container, the 16, the 4th liquid container, the 17, the 5th liquid container, the 18, the 6th liquid hold Device.

Specific embodiment

The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work Every other embodiment obtained, fall within the protection scope of the utility model.

Fig. 1-5 is please referred to, the utility model provides a kind of technical solution: a kind of adaptation dress for liquid particles test It sets, including pedestal 1, telescopic rod 2, chassis 3, the first groove 30, bottom plate 4, ball 40, turntable 5, shield 6, the first liquid container 7, conduit 8, vessel port 9, outer cover 10, fixed cover 11, round bar 12, the second groove 13, second liquid container 14, third liquid container 15, the 4th liquid container 16, the 5th liquid container 17 and the 6th liquid container 18, pedestal 1 are provided centrally with telescopic rod 2, and Be supported by chassis 3 on telescopic rod 2, in chassis 3 on be provided with bottom plate 4, and the upper surface of bottom plate 4 is fixed with turntable 5, turntable 5 Be provided centrally with round bar 12, and be provided with shield 6 on the ring side of turntable 5, being equipped with round bar 12, and round bar on fixed cover 11 12 outer ring is equipped with six group of second groove 13, is placed with the first liquid container 7, second liquid on six group of second groove 13 respectively Container 14, third liquid container 15, the 4th liquid container 16, the 5th liquid container 17 and the 6th liquid container 18, and the first liquid Conduit 8 is provided on 7 side of body container, the upper end of the first liquid container 7 offers vessel port 9, and is equipped in vessel port 9 outer Cover 10.

Such as Fig. 1-2, pedestal 1 uses bucking ladder frame structure, and the telescopic rod 2 at 1 center of pedestal is scalable on Z axis Structure is mainly supported turntable by pedestal when telescopic rod is not stretched, when needing to carry out height to adjust, utilizes Telescopic rod is conveniently adjusted the height of turntable.

Such as Fig. 3, the first groove 30 is offered in chassis 3, and the lower end surface of bottom plate 4 is equipped with a circle ball 40, rolls simultaneously Pearl 40 is just in contact with the first groove 30, and the lower end of bottom plate is placed exactly in the first groove, the ball that bottom plate lower end surface one is enclosed It just rolls in the first groove, rotating table is achieved the purpose that by rotation ball, convenient for liquid container on rotating table Position, facilitate different liquids while being detected, accelerate detection speed, improve efficiency, bottom plate 4 by ball 40 composition can turn Dynamic structure, and the rotational angle of bottom plate 4 is any, direction arbitrarily rotates, and the work of more convenient worker personnel carries out.

Such as Fig. 4, turntable 5 uses circular platform structure, and turntable 5 and shield 6 are all made of Pyrex material, with borosilicate The container of glass material has that chemical stability is good, thermal stability is high, electrical insulating property is good as liquid container, and the first liquid holds The outer cover 10 that device 7 is selected the conical flask of Pyrex material, and is nested in the vessel port 9 of 7 upper end of the first liquid container selects rubber Glue material matter, while the conduit 8 connected in the first liquid container 7 selects the pipe of polytetrafluoroethylene (PTFE) material, selects corrosion-resistant, change The stable material of performance is learned, stable testing progress is facilitated, avoids influencing test result since test utensil is unqualified, protect Hinder the quality of test.

Second liquid container 14, third liquid container 15, the 4th liquid container 16, the 5th liquid container 17 and the 6th liquid Size, material and the structure of container 18 are arranged unanimously with the first liquid container 7, and the first liquid container 7, second liquid container 14, third liquid container 15, the 4th liquid container 16, the 5th liquid container 17 and the 6th liquid container 18 angularly ring be located at turn The upper surface of platform 5, while six 11 structures in a center of symmetry of fixed cover about center, are angularly arranged, convenient in rotation When shift one's position, tested simultaneously convenient for different liquids, avoid unnecessary operation sequence, when saving test and preparing Between, improve test job efficiency

Working principle: when using the adaptive device for liquid particles test, respectively from the first liquid container 7, the Two liquid containers 14, third liquid container 15, the 4th liquid container 16, the 5th liquid container 17 and the 6th liquid container 18 are each Different liquid to be tested is imported in the conduit 8 casees container on a container, turntable is being placed on test machine platform, will be turned Wherein any one liquid container alignment test sampling head on platform 5, later according to liquid particle counter measuring head to liquid The spacing of container finish is adjusted the height of telescopic rod 2, adjusts the suitable rear start liquid particle collector that starts and is surveyed Trial work is made, after testing the liquid in a liquid container, rotating table 5, so that next liquid container on turntable 5 is aligned Sampling head starts to test again, according to the first liquid container 7, second liquid container 14, third liquid container 15, the 4th liquid container 16, the rotation sequence of the 5th liquid container 17 and the 6th liquid container 18 is successively rotated and is tested, can be six kinds with disposable test Different liquids particle does not need that a liquid container is taken to go to test, goes to sample other liquid and import container again later to take again Come over to be tested, pilot process constantly repeats, and avoids the waste testing time, improves test job efficiency, accelerated test, this is just It is the working principle of the adaptive device tested for liquid particles.

While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art, It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.

Claims (7)

1. a kind of adaptive device for liquid particles test, including pedestal (1), chassis (3), bottom plate (4) and fixed cover (11), It is characterized by: the pedestal (1) is provided centrally with telescopic rod (2), and telescopic rod (2) on be supported by chassis (3), it is described It is provided with bottom plate (4) in chassis (3), and the upper surface of bottom plate (4) is fixed with turntable (5), the center setting of the turntable (5) Have round bar (12), and be provided with shield (6) on the ring side of turntable (5), is equipped with round bar (12) on the fixed cover (11), and The outer ring of round bar (12) is equipped with six group of second groove (13), is placed with the first liquid container respectively on second groove (13) (7), second liquid container (14), third liquid container (15), the 4th liquid container (16), the 5th liquid container (17) and the 6th Liquid container (18), and be provided with conduit (8) on the first liquid container (7) side, the upper end of first liquid container (7) is opened Equipped with vessel port (9), and outer cover (10) are equipped in vessel port (9).

2. a kind of adaptive device for liquid particles test according to claim 1, it is characterised in that: the pedestal (1) bucking ladder frame structure is used, and the telescopic rod (2) at pedestal (1) center is retractable structure on Z axis.

3. a kind of adaptive device for liquid particles test according to claim 1, it is characterised in that: the chassis (3) it is offered the first groove (30) in, and the lower end surface of bottom plate (4) is equipped with a circle ball (40), while ball (40) and the One groove (30) is just in contact.

4. a kind of adaptive device for liquid particles test according to claim 1, it is characterised in that: the bottom plate (4) turntable is constituted by ball (40), and the rotational angle of bottom plate (4) is any.

5. a kind of adaptive device for liquid particles test according to claim 1, it is characterised in that: the turntable (5) circular platform structure is used, and turntable (5) and shield (6) are all made of Pyrex material.

6. a kind of adaptive device for liquid particles test according to claim 1, it is characterised in that: first liquid Body container (7) selects the conical flask of Pyrex material, and is nested in the vessel port (9) of the first liquid container (7) upper end outer It covers (10) and selects rubber material, while the conduit (8) connected in the first liquid container (7) selects the pipe of polytetrafluoroethylene (PTFE) material Son.

7. a kind of adaptive device for liquid particles test according to claim 1, it is characterised in that: second liquid Body container (14), third liquid container (15), the 4th liquid container (16), the 5th liquid container (17) and the 6th liquid container (18) size, material and structure is consistent with the first liquid container (7) setting, and the first liquid container (7), second liquid hold Device (14), third liquid container (15), the 4th liquid container (16), the 5th liquid container (17) and the 6th liquid container (18) etc. Angle ring is located at the upper surface of turntable (5), while six fixed cover (11) structures in a center of symmetry about center.