CN209230700U - A kind of high temperature modification gas mass flow controller sensor - Google Patents
A kind of high temperature modification gas mass flow controller sensor Download PDFInfo
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- CN209230700U CN209230700U CN201920065943.0U CN201920065943U CN209230700U CN 209230700 U CN209230700 U CN 209230700U CN 201920065943 U CN201920065943 U CN 201920065943U CN 209230700 U CN209230700 U CN 209230700U
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Abstract
The utility model discloses a kind of high temperature modification gas mass flow controller sensors, including valve body, the upper surface of valve body is provided with sensor fixation plate and flow control valve fixed plate, sensor is provided on sensor fixation plate, sensor includes upper housing, lower case, first gas connector, second gas connector, the first connection pipe body, the second connection pipe body, capillary, thermistor wire and precision resistance, and lower case is located at the middle-end of the upper surface of sensor fixation plate.The utility model high temperature modification gas mass flow controller sensor, upper housing and lower case are bolted, and are all mechanically fixed using stainless steel bolt resistant to high temperature, and installation is reliable, it is hardly damaged, upper housing, lower case made of stainless steel material and capillary have the characteristics that corrosion-resistant, heat-resisting and weldability, and environment temperature is up to 100 degrees Celsius, 120 degrees Celsius of design maximum temperature, using capillary weld technique, whole high voltage resistant corrosion, stability is strong.
Description
Technical field
The utility model relates to gas mass flow controller technical field, specially a kind of high temperature modification gas mass flow
Control transducer.
Background technique
Gas mass flow controller, i.e. Mass Flow Controller (being abbreviated as MFC), being one can set manually
Gas constant-current stabilizer fixed or that automatic control is connect with computer, quickly can be accurately controlled gas in wider range ability
Flow will not influence its normal work, be not required in principle even if system pressure has fluctuation or environment temperature to have slight change
Want temperature and pressure to compensate, gas mass flow controller (MFC) petrochemical industry, biochemistry, semiconductor and IC industry,
Have emphatically in the research and production of multiple fields such as special material subject, medicine, vegetables and fruits are fresh-keeping, air entrainment beverage, environmental protection and vacuum
The application wanted.
Sensor used by existing gas mass flow controller, high temperature resistance is poor, cannot anti-corruption well
Erosion, causes service life short, stability is poor.
Utility model content
(1) the technical issues of solving
In view of the deficiencies of the prior art, the utility model provides a kind of high temperature modification gas mass flow controller sensing
Device solves sensor used by existing gas mass flow controller, and high temperature resistance is poor, cannot anti-corruption well
Erosion, causes service life short, the problem of stability difference.
(2) technical solution
To achieve the above object, the utility model provides the following technical solutions: a kind of high temperature modification gas mass flow control
Transducer, including valve body, a side end face of the valve body are provided with the first air-path interface, another side end face of the valve body
It is provided with the second air-path interface, the upper surface of the valve body is provided with sensor fixation plate and flow control valve fixed plate, described
Flow control valve fixed plate is located at the side of sensor fixation plate, and the sensor fixation plate and flow control valve fixed plate are logical
It crosses bolt to be mounted on the upper surface of valve body, sensor is provided on the sensor fixation plate, the sensor passes through cable
It is electrically connected with control circuit board, the control circuit board is located at the side of sensor and is fixedly mounted on valve body, the control
The upper end of circuit board is provided with user's jointing, and flow control valve, the stream are provided in the flow control valve fixed plate
Adjustable valve is located at the side of sensor；
The sensor includes upper housing, lower case, first gas connector, second gas connector, the first connection pipe body,
Two connection pipe body, capillary, thermistor wire and precision resistance, the lower case are located in the upper surface of sensor fixation plate
End, the upper surface of the lower case are provided with upper housing, and the side of the lower case is provided with first gas connector, the lower casing
The other side of body is provided with second gas connector, and the first gas connector and second gas connector both pass through sensor fixation plate
It is connect with valve body, the first gas connector is connected by one end of the first connection pipe body and capillary, and the second gas connects
Head is connected by the other end of the second connection pipe body and capillary, and the capillary is located at the inside of upper housing and lower case, institute
It states and is wound with thermistor wire and precision resistance on capillary, the precision resistance is located at the side of thermistor wire.
Preferably, the upper housing and lower case are bolted.
Preferably, the capillary is component made of a kind of stainless steel material.
Preferably, the upper housing and lower case are component made of a kind of stainless steel material.
Preferably, the lower end of the upper housing is offered for the perforative strip through-hole of cable.
Preferably, the both sides of the face of the lower case offer passes through for the first connection pipe body and the second connection pipe body respectively
The arc-shaped through-hole worn.
(3) beneficial effect
The utility model provides a kind of high temperature modification gas mass flow controller sensor.Have following beneficial to effect
Fruit:
The utility model high temperature modification gas mass flow controller sensor, upper housing and lower case are connected by bolt
It connects, is all mechanically fixed using stainless steel bolt resistant to high temperature, installation is reliable, is hardly damaged, made of stainless steel material
Upper housing, lower case and capillary have the characteristics that corrosion-resistant, heat-resisting and weldability, and environment temperature is up to 100 degrees Celsius, most
Big 120 degrees Celsius of design temperature, using capillary weld technique, whole high voltage resistant corrosion, stability is strong, is used for high temperature modification gas
Weight flow controller and high temperature modification gas mass flow meter.
Detailed description of the invention
Fig. 1 is the schematic diagram of the high temperature modification gas mass flow controller sensor of the utility model；
Fig. 2 is the front view of the high temperature modification sensor of the utility model；
Fig. 3 is the side view of the high temperature modification sensor of the utility model；
Fig. 4 is the cross sectional plan view of the high temperature modification sensor of the utility model；
Fig. 5 is that the high temperature modification sensor of the utility model is mounted on the top view on sensor fixation plate；
Fig. 6 is that the high temperature modification sensor of the utility model is mounted on the bottom view on sensor fixation plate.
In figure: 1 valve body, 11 first air-path interfaces, 12 second air-path interfaces, 13 sensor fixation plates, 14 flow control valves
Fixed plate, 141 flow control valves, 2 sensors, 21 upper housings, 211 strip through-holes, 22 lower cases, 221 arc-shaped through-holes, 23
One gas connection, 24 second gas connectors, 25 first connection pipe body, 26 second connection pipe body, 27 capillaries, 28 thermistors
Silk, 29 precision resistances, 3 control circuit boards, 31 user's jointings, 32 cables.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
As shown in figures 1 to 6, the utility model provides a kind of technical solution: a kind of high temperature modification gas mass flow controller use
Sensor, including valve body 1, a side end face of valve body 1 are provided with the first air-path interface 11, and another side end face of valve body 1 is provided with
Second air-path interface 12, the upper surface of valve body 1 are provided with sensor fixation plate 13 and flow control valve fixed plate 14, and flow is adjusted
Valve fixed plate 14 is located at the side of sensor fixation plate 13, and sensor fixation plate 13 and flow control valve fixed plate 14 pass through spiral shell
Bolt is mounted on the upper surface of valve body 1, and sensor 2 is provided on sensor fixation plate 13, and sensor 2 passes through cable 32 and control
Circuit board 3 is electrically connected, and control circuit board 3 is located at the side of sensor 2 and is fixedly mounted on valve body 1, control circuit board 3 it is upper
End is provided with user's jointing 31, and flow control valve 141, flow control valve 141 are provided in flow control valve fixed plate 14
Positioned at the side of sensor 2.
Sensor 2 includes upper housing 21, lower case 22, first gas connector 23, second gas connector 24, the first connecting tube
Body 25, the second connection pipe body 26, capillary 27, thermistor wire 28 and precision resistance 29, using capillary heat transfer temperature difference calorimetric
Method principle measures the mass flow of gas, two groups of thermistor wires 28 of coiling on capillary 27, thermistor wire 28 and precision
Resistance 29 constitutes measuring bridge, and when work gives thermistor wire 28 electrified regulation, when there is no gas flowing in capillary 27, two
The temperature of the hot thermistor wire 28 of group is identical, and the output of bridge balance no signal is zero corresponding to flow value, has when in capillary 27
When gas flows through, different temperature changes can occur for the winding in upstream and the winding in downstream, to make thermistor
The resistance value of silk 28 also generates different changes, and measuring bridge exports a difference signal, the size of this signal and flows through sensor
Mass flow is directly proportional, and the flow signal that sensor 2 measures is amplified, and is then compared with the voltage of setting, uses institute
The difference signal obtained removes drive control flow control valve 141, to realize on-off control and continuous control, completes to gaseous mass
The close control of flow, lower case 22 are located at the middle-end of the upper surface of sensor fixation plate 13, and the both sides of the face of lower case 22 are equal
It offers respectively for the first connection pipe body 25 and the perforative arc-shaped through-hole 221 of the second connection pipe body 26, the first connection pipe body 25
It is connect respectively by arc-shaped through-hole 221 with capillary 27 with the second connection pipe body 26, the upper surface of lower case 22 is provided with
Shell 21, the lower end of upper housing 21 are offered for the perforative strip through-hole 211 of cable 32, and cable 32 is real by strip through-hole 211
Existing sensor 2 is electrically connected with control circuit board 3, and upper housing 21 and lower case 22 are bolted, all using high temperature resistant
Stainless steel bolt be mechanically fixed, installation is reliable, is hardly damaged, whole high voltage resistant corrosion, stability is strong, upper housing 21
It is component made of a kind of stainless steel material, upper housing 21 and lower case 22 made of stainless steel material, tool with lower case 22
There is the characteristics of corrosion-resistant, heat-resisting and weldability, environment temperature is up to 100 degrees Celsius, 120 degrees Celsius of design maximum temperature, all
It is mechanically fixed using stainless steel bolt resistant to high temperature, installation is reliable, is hardly damaged, whole high voltage resistant corrosion, stability
By force, the side of lower case 22 is provided with first gas connector 23, and the other side of lower case 22 is provided with second gas connector 24, the
One gas connection 23 and second gas connector 24 both pass through sensor fixation plate 13 and connect with valve body 1, and first gas connector 23 is logical
It crosses the first connection pipe body 25 to connect with one end of capillary 27, second gas connector 24 passes through the second connection pipe body 26 and capillary
27 other end connection, capillary 27 are located at the inside of upper housing 21 and lower case 22, and capillary 27 is a kind of stainless steel material
Manufactured component, capillary 27 made of stainless steel material, has the characteristics that corrosion-resistant, heat-resisting and weldability, environment temperature can
Up to 100 degrees Celsius, 120 degrees Celsius of design maximum temperature, using capillary weld technique, whole high voltage resistant corrosion, stability
By force, thermistor wire 28 and precision resistance 29 are wound on capillary 27, precision resistance 29 is located at the side of thermistor wire 28.
Working principle: using the mass flow of capillary heat transfer temperature difference calorimetry principle measurement gas, on capillary 27
Two groups of thermistor wires 28 of coiling, thermistor wire 28 and precision resistance 29 constitute measuring bridge, to thermistor wire when work
28 electrified regulations, when not having gas flowing in capillary 27, the temperature of two groups of hot thermistor wires 28 is identical, bridge balance without
Signal output, is zero corresponding to flow value, when thering is gas to flow through in capillary 27, winding in upstream and in downstream
Different temperature changes can occur for winding, so that the resistance value of thermistor wire 28 be made also to generate different changes, measuring bridge output
One difference signal, the size of this signal and the mass flow of flows through sensor are directly proportional, the flow signal that sensor 2 is measured
It amplifies, is then compared with the voltage of setting, remove drive control flow control valve 141 with resulting difference signal, from
And realize on-off control and continuous control, complete the close control to gas mass flow.
It can to sum up obtain, the utility model high temperature modification gas mass flow controller sensor, upper housing 21 and lower case
22 are bolted, and are all mechanically fixed using stainless steel bolt resistant to high temperature, and installation is reliable, is hardly damaged, stainless
Upper housing 21, lower case 22 made of steel material and capillary 27 have the characteristics that corrosion-resistant, heat-resisting and weldability, environment temperature
Degree is up to 100 degrees Celsius, 120 degrees Celsius of design maximum temperature, using capillary weld technique, whole high voltage resistant corrosion, surely
It is qualitative strong, it is used for high temperature modification gas mass flow controller and high temperature modification gas mass flow meter.
It should be noted that, in this document, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to
Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those
Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or equipment
Intrinsic element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that
There is also other identical elements in process, method, article or equipment including the element.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art,
It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired
Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.
Claims (6)
1. a kind of high temperature modification gas mass flow controller sensor, including valve body (1), it is characterised in that: the valve body (1)
A side end face be provided with the first air-path interface (11), another side end face of the valve body (1) is provided with the second air-path interface
(12), the upper surface of the valve body (1) is provided with sensor fixation plate (13) and flow control valve fixed plate (14), the flow
Regulating valve fixed plate (14) is located at the side of sensor fixation plate (13), and the sensor fixation plate (13) and flow control valve are solid
Fixed board (14) is mounted on the upper surface of valve body (1) by bolt, is provided with sensor on the sensor fixation plate (13)
(2), the sensor (2) is electrically connected by cable (32) with control circuit board (3), and the control circuit board (3) is located at sensing
It the side of device (2) and is fixedly mounted on valve body (1), the upper end of the control circuit board (3) is provided with user's jointing
(31), it is provided with flow control valve (141) on the flow control valve fixed plate (14), the flow control valve (141) is located at
The side of sensor (2)；
The sensor (2) include upper housing (21), lower case (22), first gas connector (23), second gas connector (24),
First connection pipe body (25), the second connection pipe body (26), capillary (27), thermistor wire (28) and precision resistance (29), institute
The middle-end that lower case (22) is located at the upper surface of sensor fixation plate (13) is stated, the upper surface of the lower case (22) is provided with
The side of shell (21), the lower case (22) is provided with first gas connector (23), and the other side of the lower case (22) is set
It is equipped with second gas connector (24), the first gas connector (23) and second gas connector (24) both pass through sensor fixation plate
(13) it is connect with valve body (1), the first gas connector (23) passes through one end of the first connection pipe body (25) and capillary (27)
Connection, the second gas connector (24) are connect by the second connection pipe body (26) with the other end of capillary (27), the hair
Tubule (27) is located at the inside of upper housing (21) and lower case (22), is wound with thermistor wire (28) on the capillary (27)
With precision resistance (29), the precision resistance (29) is located at the side of thermistor wire (28).
2. a kind of high temperature modification gas mass flow controller sensor according to claim 1, it is characterised in that: described
Upper housing (21) and lower case (22) are bolted.
3. a kind of high temperature modification gas mass flow controller sensor according to claim 1, it is characterised in that: described
Capillary (27) is component made of a kind of stainless steel material.
4. a kind of high temperature modification gas mass flow controller sensor according to claim 1, it is characterised in that: described
Upper housing (21) and lower case (22) are component made of a kind of stainless steel material.
5. a kind of high temperature modification gas mass flow controller sensor according to claim 1, it is characterised in that: described
The lower end of upper housing (21) is offered for cable (32) perforative strip through-hole (211).
6. a kind of high temperature modification gas mass flow controller sensor according to claim 1, it is characterised in that: described
The both sides of the face of lower case (22) offer respectively for the first connection pipe body (25) and the second connection pipe body (26) perforative circle
Arc-shaped through-hole (221).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920065943.0U CN209230700U (en) | 2019-01-15 | 2019-01-15 | A kind of high temperature modification gas mass flow controller sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920065943.0U CN209230700U (en) | 2019-01-15 | 2019-01-15 | A kind of high temperature modification gas mass flow controller sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209230700U true CN209230700U (en) | 2019-08-09 |
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ID=67510499
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920065943.0U Active CN209230700U (en) | 2019-01-15 | 2019-01-15 | A kind of high temperature modification gas mass flow controller sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209230700U (en) |
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2019
- 2019-01-15 CN CN201920065943.0U patent/CN209230700U/en active Active
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