CN209230556U - The online compensation measuring device of 3D topography measurement error - Google Patents
The online compensation measuring device of 3D topography measurement error Download PDFInfo
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- CN209230556U CN209230556U CN201920238210.2U CN201920238210U CN209230556U CN 209230556 U CN209230556 U CN 209230556U CN 201920238210 U CN201920238210 U CN 201920238210U CN 209230556 U CN209230556 U CN 209230556U
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Abstract
The utility model embodiment discloses a kind of online compensation measuring device of 3D topography measurement error, belong to product measuring device field, its drip irrigation device includes benchmark gasket, stationary fixture, product measurement sensor and measurement sensor of making up the difference, the benchmark gasket is horizontally set on the slide unit of 3D topography measurement instrument, the stationary fixture is fixed on above reference pads piece, product to be measured is placed on the upside of the stationary fixture, the product measurement sensor is set to above stationary fixture, the measurement sensor of making up the difference is set to below the slide unit of 3D topography measurement instrument, reached elimination as slide unit flatness it is not high caused by measurement error, reduce the effect of slide unit production cost.
Description
Technical field
The present invention relates to product measuring device fields, and in particular to a kind of online compensation measurement dress of 3D topography measurement error
It sets.
Background technique
During carrying out product wafer measuring three-dimensional morphology, the measurement of three-dimensional appearance is improved by using high-precision slide unit
Precision makes product to be measured slide the actual (real) thickness value of measurement product each point on high-precision slide unit, to model as three-dimensional appearance
Height coordinate.High-precision slide unit size production cost is higher, and larger movement breadth slide unit can not be accomplished relatively high
Movement flatness will lead to product thickness measurement when the movement flatness deficiency of slide unit and error occur.
Summary of the invention
The online compensation measuring device for being designed to provide a kind of 3D topography measurement error of the embodiment of the present invention, to solve
High-precision slide unit size production cost is higher during certainly existing measuring three-dimensional morphology, and for larger movement breadth slide unit without
Method accomplishes relatively high movement flatness and then product thickness measurement is caused the problem of error occur.
To achieve the above object, the technical solution of the embodiment of the present invention is that a kind of online compensation of 3D topography measurement error is surveyed
Device, including benchmark gasket, stationary fixture, product measurement sensor and measurement sensor of making up the difference are measured, the benchmark gasket is horizontal
It is arranged on the slide unit of 3D topography measurement instrument, the stationary fixture is fixed on above reference pads piece, is put on the upside of the stationary fixture
Product to be measured is set, the product measurement sensor is set to above stationary fixture, and the measurement sensor of making up the difference is set to 3D shape
Below the slide unit of looks measuring instrument.
As advanced optimizing, the center line of the product measurement sensor and measurement sensor of making up the difference is vertical and conllinear.
As advanced optimizing, the benchmark gasket with a thickness of 700 μm~1200 μm.
As advanced optimizing, the benchmark gasket with a thickness of 800 μm.
As advanced optimizing, the stationary fixture includes pedestal and stabilizer blade, and the stabilizer blade is fixedly installed on above pedestal,
Plane and pedestal lower end there are three stabilizer blade is circumferentially uniformly arranged centered on pedestal vertical centerline, where three stabilizer blade tops
Face is parallel.
As advanced optimizing, the benchmark gasket is circular gasket, benchmark washer diameter and product wafer diameter to be measured
It is identical.
The embodiment of the invention also provides a kind of online compensation measurement methods of 3D topography measurement error, including following step
It is rapid:
S1. it is connected and fixed benchmark gasket and stationary fixture, fixed reference gasket and stationary fixture are placed on slide unit, it will
Product to be measured is placed on above stationary fixture；
S2. the product upper level value immediately below product measurement sensor is measured by product measurement sensor, passed through
Measurement sensor of making up the difference measurement is made up the difference the lower surface height value of benchmark gasket right above measurement sensor, and record measurement point level is sat
Mark；
S3. the reference pads product upper level value that product measurement sensor measures measured with measurement sensor of making up the difference
The lower surface height value of piece asks difference to obtain product upper surface actual height value；
S4. product upper surface actual height value and stationary fixture height value, fixed reference spacer height value are asked into poor acquisition
Product actual (real) thickness；
S5. the horizontal coordinate and product actual (real) thickness for taking measurement point obtain measurement point rectangular space coordinate；
It slides benchmark gasket on slide unit, and repeats the rectangular space coordinate that step S1-S6 obtains product multiple spot,
The rectangular space coordinate of integrated product multiple spot obtains 3D pattern.
As advanced optimizing, the lower surface height of product upper level value described in step S2 and the benchmark gasket
It is all made of repeatedly measurement and is averaged acquisition.
The embodiment of the present invention has the advantages that
Product is supported by benchmark gasket and stationary fixture, since benchmark shim size is smaller, processing forms high
The cost of precision part is told somebody what one's real intentions are, by product measurement sensor and make up the difference measurement sensor measure respectively product upper level value and
The lower surface height value of benchmark gasket obtains product actual height by way of seeking difference, can avoid moving due to slide unit smooth
Measurement error caused by degree is insufficient, while the required precision to slide unit can be also reduced, to play the effect for reducing cost.
Detailed description of the invention
It, below will be to embodiment party in order to illustrate more clearly of embodiments of the present invention or technical solution in the prior art
Formula or attached drawing needed to be used in the description of the prior art are briefly described.It should be evident that the accompanying drawings in the following description is only
It is merely exemplary, it for those of ordinary skill in the art, without creative efforts, can also basis
The attached drawing of offer, which is extended, obtains other implementation attached drawings.
Structure depicted in this specification, ratio, size etc., only to cooperate the revealed content of specification, for
Those skilled in the art understands and reads, and is not intended to limit the invention enforceable qualifications, therefore does not have technical
Essential meaning, the modification of any structure, the change of proportionate relationship or the adjustment of size are not influencing the function of the invention that can be generated
Under effect and the purpose that can reach, should all still it fall in the range of disclosed technology contents obtain and can cover.
Fig. 1 is embodiment of the present invention overall structure diagram.
Appended drawing reference
1, benchmark gasket；2, stationary fixture；21, stabilizer blade；22 pedestals；3, product measurement sensor；4, measurement of making up the difference senses
Device；5, slide unit.
Specific embodiment
Embodiments of the present invention are illustrated by particular specific embodiment below, those skilled in the art can be by this explanation
Content disclosed by book is understood other advantages and efficacy of the present invention easily, it is clear that described embodiment is the present invention one
Section Example, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art are not doing
Every other embodiment obtained under the premise of creative work out, shall fall within the protection scope of the present invention.
Embodiment one
A kind of online compensation measuring device of 3D topography measurement error, as shown in Figure 1, including benchmark gasket 1, stationary fixture
2, product measurement sensor 3 and measurement sensor 4 of making up the difference, benchmark gasket 1 are high precision cylindrical thin slice, and 1 level of benchmark gasket is put
It sets on the slide unit 5 of 3D measuring instrument, stationary fixture 2 is arranged above benchmark gasket 1, for the fixation of product to be measured, production to be measured
Product are placed on 2 top of stationary fixture.
Product measurement sensor 3 and measurement sensor 4 of making up the difference are all made of range sensor, and product measurement sensor 3 is arranged
Above stationary fixture 2, for measuring the height of product upper surface, measurement sensor of making up the difference 4 is set to 3D topography measurement instrument
5 lower section of slide unit, the height for 1 lower surface of measuring basis gasket.
In use, the height measured by product measurement sensor 3 and measurement sensor 4 of making up the difference ask difference that can eliminate 3D pattern
Measurement error caused by 5 flatness of slide unit of measuring instrument is insufficient.
Preferably, the center line of product measurement sensor 3 and measurement sensor 4 of making up the difference is vertical and conllinear, to guarantee to produce
Product measurement sensor 3 and 4 measurement position of measurement sensor is made up the difference in same vertical straight line.
Benchmark gasket 1 with a thickness of 700 μm~1200 μm, by the thickness control of benchmark gasket 1 700 μm~1200 μm it
Between, benchmark gasket 1 can be kept easy to process, conveniently reach required precision while guaranteeing the use function of benchmark gasket 1.
Preferably, benchmark gasket 1 with a thickness of 800 μm, when setting 800 μm for the thickness of benchmark gasket 1, benchmark gasket
1 production is more convenient, it is easier to reach service precision requirement.
Stationary fixture 2 includes pedestal 22 and stabilizer blade 21, wherein pedestal 22 is cylinder, and stabilizer blade 21 is set on pedestal 22
Just, there are three stabilizer blade 21 is circumferentially uniformly arranged centered on 22 vertical centerline of pedestal, the plane where three 21 tops of stabilizer blade
Parallel with 22 lower end surface of pedestal, when product wafer is placed on 2 top of stationary fixture, product wafer is common three stabilizer blades 21
Support is lower to keep horizontality.
1 diameter of benchmark gasket is identical as the diameter of product wafer to be measured, and benchmark gasket 1 is made to meet horizontal support effect
Under the premise of have lesser size, be convenient for processing, carry out high-precision process when lower production costs.
Since product is supported by benchmark gasket 1 and stationary fixture 2, measurement error when measurement is smaller, reference pads
Piece 1 slides in measurement process on slide unit 5, passes through product measurement sensor 3 and the measurement sensor 4 while measure can of making up the difference
Error caused by 5 flatness of 3D topography measurement instrument slide unit deficiency is eliminated, therefore, carrying out can when 3D topography measurement instrument slide unit 5 is processed
The processing request for reducing slide unit 5, is conducive to save the cost.
Embodiment two
Present embodiments provide a kind of online compensation measurement method of 3D topography measurement error, comprising the following steps:
Step S1. is connected and fixed benchmark gasket 1 and stationary fixture 2, makes the upper surface of benchmark gasket 1 and stationary fixture 2
Lower surface fitting, fixed reference gasket 1 and stationary fixture 2 is placed on 3D measuring instrument slide unit 5, and product to be measured is placed on
2 top of stationary fixture, product to be measured are supported by the stabilizer blade 21 of stationary fixture 2.
Step S2. measures the product upper level value immediately below product measurement sensor 3 by product measurement sensor 3
H1, the lower surface height value H for 4 surface benchmark gasket 1 of measurement sensor of making up the difference is measured by measurement sensor 4 of making up the difference2, record
Measurement point horizontal coordinate (x, y)；
The product upper level value H that step S3. measures product measurement sensor 31Measurement sensor 4 measures with making up the difference
Benchmark gasket 1 lower surface height value H2Difference is asked to obtain product upper surface actual height value H, calculation formula H=H1-H2；
Step S4. is by product upper surface actual height value H and 2 height value H of stationary fixture3, 1 height value of fixed reference gasket
H4Difference is asked to obtain product actual (real) thickness Z, its calculation formula is Z=H-H3-H4；
Step S5. takes the horizontal coordinate (x, y) of measurement point and product actual (real) thickness Z to obtain measurement point rectangular space coordinate
(X, Y, Z)；
Step S6. slides benchmark gasket 1 on slide unit 5, and repeats the space right-angle that step S1-S6 obtains product multiple spot
Coordinate (Xn, Yn, Zn), the rectangular space coordinate of integrated product multiple spot obtains 3D pattern.
For the accuracy of measurement for improving product thickness Z value, measurement error is avoided the occurrence of, product upper level in step S2
Value H1With the lower surface height value H of benchmark gasket 12Acquisition is averaged using multiple measurement.
This method is measured by way of making up the difference can avoid being caused by the 5 flatness deficiency of slide unit of 3D topography measurement instrument
Measurement error, when production can reduce the processing request to 3D topography measurement instrument slide unit 5, be conducive to save the cost.
Although above having used general explanation and specific embodiment, the present invention is described in detail, at this
On the basis of invention, it can be made some modifications or improvements, this will be apparent to those skilled in the art.Therefore,
These modifications or improvements without departing from theon the basis of the spirit of the present invention are fallen within the scope of the claimed invention.
Claims (6)
1. a kind of online compensation measuring device of 3D topography measurement error, which is characterized in that including benchmark gasket (1), fixing clamp
Have (2), product measurement sensor (3) and measurement sensor of making up the difference (4), the benchmark gasket (1) is horizontally set on the survey of 3D pattern
On the slide unit (5) for measuring instrument, the stationary fixture (2) is fixed on above benchmark gasket (1), is placed on the upside of the stationary fixture (2)
Product to be measured, the product measurement sensor (3) are set to above stationary fixture (2), measurement sensor of making up the difference (4) setting
Below the slide unit (5) of 3D topography measurement instrument.
2. the online compensation measuring device of 3D topography measurement error according to claim 1, which is characterized in that the product
The center line of measurement sensor (3) and measurement sensor of making up the difference (4) is vertical and conllinear.
3. the online compensation measuring device of 3D topography measurement error according to claim 1, which is characterized in that the benchmark
Gasket (1) with a thickness of 700 μm~1200 μm.
4. the online compensation measuring device of 3D topography measurement error according to claim 3, which is characterized in that the benchmark
Gasket (1) with a thickness of 800 μm.
5. the online compensation measuring device of 3D topography measurement error according to claim 1, which is characterized in that the fixation
Fixture (2) includes pedestal (22) and stabilizer blade (21), and the stabilizer blade (21) is fixedly installed on above pedestal (22), and stabilizer blade (21) is the bottom of with
Plane and pedestal (22) there are three being circumferentially uniformly arranged centered on seat (22) vertical centerline, where three stabilizer blade (21) tops
Lower end surface is parallel.
6. the online compensation measuring device of 3D topography measurement error according to claim 1, which is characterized in that the benchmark
Gasket (1) is circular gasket, and benchmark gasket (1) diameter is identical as product wafer diameter to be measured.
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| CN201920238210.2U CN209230556U (en) | 2019-02-25 | 2019-02-25 | The online compensation measuring device of 3D topography measurement error |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109668522A (en) * | 2019-02-25 | 2019-04-23 | 上海谦视智能科技有限公司 | The online compensation measuring device and measuring method of 3D topography measurement error |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109668522A (en) * | 2019-02-25 | 2019-04-23 | 上海谦视智能科技有限公司 | The online compensation measuring device and measuring method of 3D topography measurement error |
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Effective date of registration: 20220302 Address after: 315400 No. 28, Yunshan Middle Road, Sanqi Town, Yuyao City, Ningbo City, Zhejiang Province (in the thousand person plan Industrial Park) (self declaration) Patentee after: Fabos (Ningbo) semiconductor equipment Co.,Ltd. Address before: 201100 room 402, 4th floor, building 1, No. 115, Xinjun Ring Road, Minhang District, Shanghai Patentee before: SHANGHAI QIANSHI INTELLIGENT TECHNOLOGY Co.,Ltd. |