CN209216929U - Transmit the guide card machine of different pollution level silicon wafers - Google Patents
Transmit the guide card machine of different pollution level silicon wafers Download PDFInfo
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- CN209216929U CN209216929U CN201821832634.3U CN201821832634U CN209216929U CN 209216929 U CN209216929 U CN 209216929U CN 201821832634 U CN201821832634 U CN 201821832634U CN 209216929 U CN209216929 U CN 209216929U
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- silicon wafer
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- transferring arm
- guide card
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Abstract
The utility model discloses a kind of guide card machines for transmitting different pollution level silicon wafers, the silicon wafer of different pollution levels is in corresponding wafer cassette, each wafer cassette has an id information, the id information includes the pollution type of wafer cassette, the guide card machine includes control unit, wafer cassette recognition unit, multiple silicon wafer transferring arms, wherein wafer cassette recognition unit and silicon wafer transferring arm are electrically connected with control unit, wafer cassette recognition unit is judged the pollution level of wafer cassette and is transmitted in control unit by the id information of wafer cassette, each silicon wafer transferring arm is slidably mounted on a transmission arm guide rail.The utility model can call the silicon wafer transferring arm of corresponding pollution level according to the wafer cassette pollution type for passing piece task and automatic identification, realize that a machine completes the silicon wafer transfer operation of different pollution levels, improve the utilization rate of guide card machine, maloperation is avoided, and pass piece every time to carry out automatically cleaning to the silicon wafer transferring arm of movement after the completion.
Description
Technical field
The utility model belongs to the equipment and technique of semiconductor integrated circuit, and in particular to a kind of to transmit different pollution levels
The guide card machine of silicon wafer (being loaded using front end open-type silicon wafer feeder FOUP).
Background technique
In entire semiconductor manufacturing facility (FAB), lead between different silicon wafer handling implements or the load port of equipment
Multiple silicon wafers are often transmitted and stored in batches by silicon chip carrier, it can be common that front end open-type silicon wafer feeder (FOUP).
This tool usually executes technique of a variety of uses in IC chip manufacture, as photoetching, etching, material/film deposit, solidify, move back
Fire, inspection or other techniques.
At present in FAB, usually using the silicon wafer in guide card machine transmission front end open-type silicon wafer feeder, and industry is used
Guide card owner to transmit a kind of specific pollution level silicon wafer or by the silicon wafer of certain low pollution degree be sent to certain height
In pollution level silicon wafer.Silicon wafer is loaded in the FOUP of the corresponding class of pollution according to different pollution levels, therefore existing FOUP
The class of pollution be divided into FE, BE, NI, CU and HK, the wherein pollution level highest of CU, the pollution level of FE is minimum, BE, NI and HK
Pollution level it is identical and between CU and FE.Guide card machine is according to the angle FOUP class of pollution different set board PIN, by PIN
FOUP is divided the FOUP of the FOUP and CU for non-CU by angle, and FE, BE, NI of non-CU correspond to the angle PIN with the FOUP of HK and be set as consistent.By
It is consistent with the angle PIN of HK in FE, BE, NI, therefore can not be distinguished from physical angle, it be easy to cause personnel misoperation, example
Happen occasionally maloperation if using the silicon wafer of the guide card machine transmission pollution level BE of FE at present.
The process of routine use FOUP transmission silicon wafer because class of pollution type is on the high side as shown in Figure 1, it can be found that cause to need
The silicon wafer transmission for wanting more guide card machines to be just able to satisfy FAB requires.However, the silicon wafer of the different classes of pollution transmits demand in FAB
Different, this results in the utilization rate of board, and there are bigger differences, and some board utilization rates are higher, some board utilization rates compared with
Low, the more difficult to govern control of board influences board utilization rate.Also, the setting pollution level of guide card machine is different, in operation easily
It makes a fault operation.
Utility model content
It, can be with the technical problem to be solved by the present invention is to provide a kind of guide card machine for transmitting different pollution level silicon wafers
Solve the problems, such as that existing guide card machine multiple computer desk utilization rate difference is big and maloperation easily occurs for transmit process.
In order to solve the above technical problems, the guide card machine provided by the utility model for transmitting different pollution level silicon wafers, described
For the silicon wafer of different pollution levels in corresponding wafer cassette, each wafer cassette has an id information, the id information packet
The pollution type of wafer cassette is included, the guide card machine includes control unit, wafer cassette recognition unit, multiple silicon wafer transferring arms, institute
It states wafer cassette recognition unit and silicon wafer transferring arm to be electrically connected with control unit, the wafer cassette recognition unit passes through wafer
The id information of box judges the pollution level of wafer cassette and is transmitted in control unit that each silicon wafer transferring arm is slidingly disposed at
On one transmission arm guide rail.
Preferably, the id information of the wafer cassette is bar code or two dimensional code, the wafer cassette recognition unit is code reader.
Preferably, the guide card machine is additionally provided with cleaning unit, including cleaning unit main body, alcohol nozzle and nitrogen nozzle,
The cleaning unit main body is equipped with feed liquid pipeline and steam line, and the alcohol nozzle passes through feed liquid pipeline and liquid feed device phase
Even, the nitrogen nozzle is connected by steam line with feeder.Further, on the feed liquid pipeline and steam line
Equipped with gate valve, the gate valve is controlled by control unit.
In said structure, the silicon wafer transferring arm includes FE silicon wafer transferring arm, HK silicon wafer transferring arm, BE silicon wafer
Transmit arm and CU silicon wafer transferring arm.
Preferably, the FE silicon wafer transferring arm, HK silicon wafer transferring arm, BE silicon wafer transferring arm and CU silicon wafer transmit hand
The corresponding each transmission arm guide rail laid out in parallel of arm.
Further, the FE silicon wafer transferring arm, HK silicon wafer transferring arm, BE silicon wafer transferring arm and the transmission of CU silicon wafer
Arm is located at identical height.
Further, every side of each silicon wafer transferring arm is designed with alcohol nozzle and nitrogen nozzle.
In said structure, the FE silicon wafer transferring arm, HK silicon wafer transferring arm, BE silicon wafer transferring arm and CU silicon wafer
Transmit the corresponding each transmission arm guide rail nesting arrangement of arm.
Preferably, the FE silicon wafer transferring arm, HK silicon wafer transferring arm, BE silicon wafer transferring arm and CU silicon wafer transmit hand
Arm is located at identical height.Further, every side of each silicon wafer transferring arm is designed with alcohol nozzle and nitrogen nozzle.
Preferably, the FE silicon wafer transferring arm, HK silicon wafer transferring arm, BE silicon wafer transferring arm and CU silicon wafer transmit hand
Arm is distributed along the vertical direction.Further, the alcohol nozzle and nitrogen nozzle are set to the every of the silicon wafer transferring arm of the top
Side.
Preferably, each silicon wafer transferring arm includes arm part, sliding part and driving device, the driving device and control
Unit processed is electrically connected and connect with sliding part, and the upper end of the sliding part is connect with arm part, the lower end of sliding part and transmission
Arm guide rail is slidably connected, and the sliding part is driven by the driving device to be moved back and forth along transmission arm guide rail.Alternatively, described
One in silicon wafer transferring arm and transmission arm guide rail is equipped with electromagnet, another is equipped with the electromagnetism with electromagnet cooperation
Iron or coil, the electromagnet and coil are electrically connected with control unit.
Compared with prior art, the utility model has the beneficial effect that
1) the guide card machine of the utility model no longer limit can guide card wafer cassette pollution type, and be provided with multiple silicon wafers
Arm is transmitted, the silicon wafer transferring arm of corresponding pollution level can be called to complete different pollution levels according to the transmission demand of silicon wafer
Silicon wafer transfer operation, solve existing guide card machine can only transmit a kind of specific pollution level silicon wafer or can only be by low dirt
Dye degree silicon wafer is sent to the problems in wafer cassette of high pollution degree and more guide card machines are made because of silicon wafer conveying capacity difference
At board leave unused the low problem of utilization rate, improve the utilization rate of guide card machine；
2) the guide card machine of the utility model can no longer pass through the letter of the angle board PIN with the pollution type of automatic identification wafer cassette
Single type for dividing wafer cassette, avoid pollution type FE, BE, NI it is consistent with the angle PIN of HK caused by maloperation；
3) the guide card machine of the utility model has self-cleaning function, can be after completing silicon wafer transmission task every time to execution
The silicon wafer transferring arm of movement is cleaned.
Detailed description of the invention
Fig. 1 is the schematic diagram of existing FOUP transmission；
Fig. 2 is the main view of the utility model；
Fig. 3 is the top view of the utility model.
Wherein the reference numerals are as follows:
1 is transmission arm guide rail；2 be silicon wafer transferring arm；3 be cleaning unit main body；4 be alcohol nozzle；5 spray for nitrogen
Mouth.
Specific embodiment
The utility model is described in further detail with specific embodiment with reference to the accompanying drawing.
The guide card machine of different pollution level silicon wafers is transmitted in the utility model, the silicon wafer of the difference pollution level is mounted in phase
In corresponding wafer cassette, each wafer cassette has an id information, and the id information includes pollution type (the pollution class of wafer cassette
Type is divided into FE, BE, NI, CU, HK), the silicon wafer of corresponding pollution level is contained in the wafer cassette of every kind of pollution type.
The guide card machine includes control unit, wafer cassette recognition unit, multiple silicon wafer transferring arms 2, and the wafer cassette is known
Other unit and silicon wafer transferring arm 2 are electrically connected with control unit, and the wafer cassette recognition unit is believed by the ID of wafer cassette
Breath judges the pollution level of wafer cassette and is transmitted in control unit that each silicon wafer transferring arm 2 is slidably mounted in one
It transmits on arm guide rail 1.
Wherein, the id information of the wafer cassette is bar code or two dimensional code, and the wafer cassette recognition unit is code reader, should
Code reader and control unit are electrically connected.Certainly, those skilled in the art can also take other form, as the ID of wafer cassette believes
Breath uses picture or photo, and wafer cassette recognition unit includes camera and image processing unit, and camera is connect with image processing unit,
Image processing unit is connect with control unit, and camera takes pictures to wafer cassette to acquire id information, then by collected figure
As information is transmitted in image processing unit, processing result is transmitted in control unit by image processing unit.
Further, the guide card machine is additionally provided with cleaning unit, including cleaning unit main body 3, alcohol nozzle 4 and nitrogen spray
Mouth 5, the cleaning unit main body 3 are equipped with feed liquid pipeline and steam line, and the alcohol nozzle 4 is filled by feed liquid pipeline and feed flow
Set connected, the nitrogen nozzle 5 is connected by steam line with feeder.
Preferably, it is equipped with gate valve on feed liquid pipeline and steam line, the gate valve is controlled by control unit.
In the present invention, silicon wafer transferring arm includes FE silicon wafer transferring arm, HK silicon wafer transferring arm, BE silicon wafer biography
Arm and CU silicon wafer transferring arm are sent, each silicon wafer transferring arm sliding is inlaid in a transmission arm guide rail.
Wherein, each silicon wafer transferring arm includes arm part, sliding part and driving device, the driving device and control
Unit is electrically connected and connect with sliding part, and the upper end of the sliding part is connect with arm part, the lower end of sliding part and transmission hand
Arm guide rail is slidably connected, and the sliding part is driven by the driving device to be moved back and forth along transmission arm guide rail.Wherein, driving dress
Setting can may be cylinder for motor.
Certainly, silicon wafer transferring arm and transmission arm guide rail can also use magnetic suspension structure, such as silicon wafer transferring arm
Electromagnet is installed with one in transmission arm guide rail, another is equipped with electromagnet or coil with electromagnet cooperation, institute
Electromagnet and coil is stated to be electrically connected with control unit.
First embodiment
In the present embodiment, FE silicon wafer transferring arm, HK silicon wafer transferring arm, BE silicon wafer transferring arm and the transmission of CU silicon wafer
The corresponding each transmission arm guide rail laid out in parallel of arm, that is to say, that four transmission arm guide rails are set side by side.
Preferably, FE silicon wafer transferring arm, HK silicon wafer transferring arm, BE silicon wafer transferring arm and CU silicon wafer transferring arm position
In identical height.Preferably, every side of each silicon wafer transferring arm is designed with alcohol nozzle and nitrogen nozzle, so as to execution
The correspondence silicon wafer transferring arm of movement is cleaned and is dried up.
Second embodiment
In the present embodiment, FE silicon wafer transferring arm, HK silicon wafer transferring arm, BE silicon wafer transferring arm and the transmission of CU silicon wafer
The corresponding each transmission arm guide rail nesting arrangement of arm, that is to say, that four are transmitted the of different size of arm guide rail, corresponding
The span on ground, the sliding part lower end of silicon wafer transferring arm is different.
Wherein, FE silicon wafer transferring arm, HK silicon wafer transferring arm, BE silicon wafer transferring arm and CU silicon wafer transferring arm are located at
Identical height.
Further, every side of each silicon wafer transferring arm is designed with alcohol nozzle and nitrogen nozzle.
3rd embodiment
In the present embodiment, FE silicon wafer transferring arm, HK silicon wafer transferring arm, BE silicon wafer transferring arm and the transmission of CU silicon wafer
The also nested arrangement of the corresponding each transmission arm guide rail of arm, unlike second embodiment, the FE silicon wafer of the present embodiment is transmitted
Arm, HK silicon wafer transferring arm, BE silicon wafer transferring arm and CU silicon wafer transferring arm are distributed along the vertical direction, that is, are distributed in difference
At height, as shown in Figure 2.Further, the alcohol nozzle 4 and nitrogen nozzle 5 are set to the silicon wafer transferring arm of the top
Every side, as shown in Figure 3.
In the present invention, when certain FOUP is placed on guide card machine, guide card machine is logical first with wafer cassette recognition unit
The pollution type of id information automatic identification FOUP is crossed, then again by control unit according to the FOUP pollution type and need recognized
The biography piece task choosing silicon wafer transferring arm to be completed.
If passing piece task is that silicon wafer identical with aforementioned FOUP pollution type is sent in the FOUP, guide card machine
Control unit can call the silicon wafer transferring arm of corresponding pollution level, if passing piece task is by the silicon of certain low pollution degree
Piece is sent in the aforementioned FOUP of high pollution degree, and control unit then calls low pollution corresponding with wafer contamination degree at this time
The silicon wafer transferring arm of degree, such as the silicon wafer by pollution type FE is needed to be sent in the FOUP of pollution type BE, it adjusts at this time
It is the silicon wafer transferring arm of pollution level FE.
It should be noted that since the pollution level of NI and the pollution level of BE are identical, therefore not set NI in this application
Silicon wafer transferring arm, certainly, those skilled in the art also can according to need setting.When need to transmit pollution level be NI silicon
When piece, it can be needed according to transmission using BE silicon wafer transferring arm or FE silicon wafer transferring arm.For example, it is desired to which NI silicon wafer is transmitted
When FOUP identical to pollution type, using BE silicon wafer transferring arm, and while completely passing NI Wafer Cleaning back FE FOUP, is then adopted
With FE silicon wafer transferring arm.
When control unit calls corresponding silicon wafer transferring arm, which is controlled in transmission hand by control unit
It is moved forward on arm guide rail, completes to pass piece task, then control unit control silicon wafer transferring arm resets.
After passing piece, the gate valve in guide card machine on feed liquid pipeline is opened under the driving of control unit, alcohol nozzle
The silicon wafer transferring arm for completing to pass piece task to be cleaned, after cleaning, control unit closes the gate valve of feed liquid pipeline, and
The gate valve of steam line is opened, nitrogen nozzle is opened, and is dried with nitrogen cleaned silicon wafer transferring arm by big flow, centainly
After time, control unit closes the gate valve of steam line, waits transformation task next time later.
It should be noted that the structure and shape of silicon wafer transferring arm are as shown in figure 3, the utility model uses Y type, ability
Field technique personnel can select as needed on this basis, therefore be not limited thereto.
The guide card machine of the utility model no longer limit can guide card wafer cassette pollution type, and be provided with multiple silicon wafers and pass
Arm is sent, the silicon wafer transferring arm of corresponding pollution level can be called to complete different pollution levels according to the transmission demand of silicon wafer
Silicon wafer transfer operation, solve existing guide card machine can only transmit a kind of specific pollution level silicon wafer or can only be by low pollution
Degree silicon wafer is sent to the problems in wafer cassette of high pollution degree and more guide card machines are caused because of silicon wafer conveying capacity difference
Board leave unused the low problem of utilization rate, improve the utilization rate of guide card machine.Moreover, guide card machine can be with automatic identification wafer cassette
Pollution type is no longer simply divided the type of wafer cassette by the angle board PIN, avoids pollution type FE, BE, NI and HK
Maloperation caused by the angle PIN is consistent.
In addition, the guide card machine of the utility model has self-cleaning function, it can be right after completing silicon wafer transmission task every time
The silicon wafer transferring arm of execution movement is cleaned.
The utility model is described in detail above by specific embodiment, which is only that this is practical new
The preferred embodiment of type, the utility model are not limited to above embodiment.The case where not departing from the utility model principle
Under, shape, structure and distribution form and silicon wafer transferring arm and biography of the those skilled in the art to silicon wafer transferring arm
The equivalent replacement for sending the type of attachment etc. between arm guide rail to make and improvement, are regarded as the skill protected in the utility model
In art scope.
Claims (13)
1. the silicon wafer of a kind of guide card machine for transmitting different pollution level silicon wafers, the difference pollution level is mounted in corresponding wafer
In box, each wafer cassette has an id information, and the id information includes the pollution type of wafer cassette, which is characterized in that described
Guide card machine includes control unit, wafer cassette recognition unit, multiple silicon wafer transferring arms, and the wafer cassette recognition unit and silicon wafer pass
Arm is sent to be electrically connected with control unit, the wafer cassette recognition unit judges the dirt of wafer cassette by the id information of wafer cassette
Dye degree is simultaneously transmitted in control unit, and each silicon wafer transferring arm is slidingly disposed on a transmission arm guide rail.
2. the guide card machine according to claim 1 for transmitting different pollution level silicon wafers, which is characterized in that the guide card machine is also
Equipped with cleaning unit, including cleaning unit main body, alcohol nozzle and nitrogen nozzle, the cleaning unit main body is equipped with feed liquid pipeline
And steam line, the alcohol nozzle are connected by feed liquid pipeline with liquid feed device, the nitrogen nozzle pass through steam line and
Feeder is connected.
3. the guide card machine according to claim 1 or 2 for transmitting different pollution level silicon wafers, which is characterized in that the silicon wafer
Transmitting arm includes FE silicon wafer transferring arm, HK silicon wafer transferring arm, BE silicon wafer transferring arm and CU silicon wafer transferring arm.
4. the guide card machine according to claim 3 for transmitting different pollution level silicon wafers, which is characterized in that the FE silicon wafer passes
Send arm, HK silicon wafer transferring arm, BE silicon wafer transferring arm and the corresponding each transmission arm guide rail of CU silicon wafer transferring arm arranged side by side
Arrangement.
5. the guide card machine according to claim 4 for transmitting different pollution level silicon wafers, which is characterized in that the FE silicon wafer passes
Arm, HK silicon wafer transferring arm, BE silicon wafer transferring arm and CU silicon wafer transferring arm is sent to be located at identical height；Each silicon wafer transmission
Every side of arm is designed with alcohol nozzle and nitrogen nozzle.
6. the guide card machine according to claim 3 for transmitting different pollution level silicon wafers, which is characterized in that the FE silicon wafer passes
Send arm, HK silicon wafer transferring arm, BE silicon wafer transferring arm each transmission arm guide rail corresponding with CU silicon wafer transferring arm nested
Arrangement.
7. the guide card machine according to claim 6 for transmitting different pollution level silicon wafers, which is characterized in that the FE silicon wafer passes
Arm, HK silicon wafer transferring arm, BE silicon wafer transferring arm and CU silicon wafer transferring arm is sent to be located at identical height；Each silicon wafer transmission
Every side of arm is designed with alcohol nozzle and nitrogen nozzle.
8. the guide card machine according to claim 6 for transmitting different pollution level silicon wafers, which is characterized in that the FE silicon wafer passes
Arm, HK silicon wafer transferring arm, BE silicon wafer transferring arm and CU silicon wafer transferring arm is sent to be distributed along the vertical direction；Alcohol nozzle and
Nitrogen nozzle is set to every side of the silicon wafer transferring arm of the top.
9. the guide card machine according to claim 3 for transmitting different pollution level silicon wafers, which is characterized in that each silicon wafer transmission
Arm all includes arm part, sliding part and driving device, and the driving device and control unit are electrically connected and connect with sliding part
It connects, the upper end of the sliding part is connect with arm part, and lower end and the transmission arm guide rail of sliding part are slidably connected, the sliding part
It is driven by the driving device to be moved back and forth along transmission arm guide rail.
10. the guide card machine according to claim 9 for transmitting different pollution level silicon wafers, which is characterized in that the driving dress
It is set to motor or cylinder.
11. the guide card machine according to claim 3 for transmitting different pollution level silicon wafers, which is characterized in that the silicon wafer passes
One for sending arm and transmitting in arm guide rail is equipped with electromagnet, another is equipped with electromagnet or line with electromagnet cooperation
Circle, the electromagnet and coil are electrically connected with control unit.
12. the guide card machine according to claim 1 for transmitting different pollution level silicon wafers, which is characterized in that the wafer cassette
Id information be bar code or two dimensional code, the wafer cassette recognition unit be code reader.
13. the guide card machine according to claim 2 for transmitting different pollution level silicon wafers, which is characterized in that the liquid supply pipe
Gate valve is equipped on road and steam line, the gate valve is controlled by control unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821832634.3U CN209216929U (en) | 2018-11-08 | 2018-11-08 | Transmit the guide card machine of different pollution level silicon wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821832634.3U CN209216929U (en) | 2018-11-08 | 2018-11-08 | Transmit the guide card machine of different pollution level silicon wafers |
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| Publication Number | Publication Date |
|---|---|
| CN209216929U true CN209216929U (en) | 2019-08-06 |
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|---|---|---|---|
| CN201821832634.3U Active CN209216929U (en) | 2018-11-08 | 2018-11-08 | Transmit the guide card machine of different pollution level silicon wafers |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114548708A (en) * | 2022-01-30 | 2022-05-27 | 弥费实业(上海)有限公司 | Empty wafer box management method and device, computer equipment and storage medium |
-
2018
- 2018-11-08 CN CN201821832634.3U patent/CN209216929U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114548708A (en) * | 2022-01-30 | 2022-05-27 | 弥费实业(上海)有限公司 | Empty wafer box management method and device, computer equipment and storage medium |
| CN114548708B (en) * | 2022-01-30 | 2022-08-26 | 弥费实业(上海)有限公司 | Empty wafer box management method and device, computer equipment and storage medium |
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