CN209210914U - A kind of rotatable substrate frame of squirrel-cage for sputter coating machine - Google Patents
A kind of rotatable substrate frame of squirrel-cage for sputter coating machine Download PDFInfo
- Publication number
- CN209210914U CN209210914U CN201821795156.3U CN201821795156U CN209210914U CN 209210914 U CN209210914 U CN 209210914U CN 201821795156 U CN201821795156 U CN 201821795156U CN 209210914 U CN209210914 U CN 209210914U
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- China
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- squirrel
- cage
- coating machine
- lower wall
- sputter coating
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Abstract
The utility model discloses a kind of rotatable substrate frames of the squirrel-cage for sputter coating machine, including upper disk, lower wall and connecting rod, the end face of the upper disk and lower wall offers hanging groove and threaded hole, the both ends of the connecting rod are respectively arranged in the hanging groove of the upper disk and lower wall, motor contact is additionally provided on the upper disk, connecting hole is offered on the motor contact, substrate frame is bolted with substrate by lower wall.The rotatable substrate frame of a kind of squirrel-cage for sputter coating machine provided by the utility model, stabilized structure is reliable, and it is also very convenient quick that substrate grillage, which is installed and unloaded,.
Description
Technical field
The utility model relates to a kind of substrate frame, the rotatable substrate of especially a kind of squirrel-cage for sputter coating machine
Frame.
Background technique
At present in the apparatus field of sputter coating machine, the plated film in rotation is may be implemented in substrate, however substrate is rotating through
Firm installation and convenient and fast installation and removal in journey are still a big problem.
Utility model content
In order to solve the above technical problems, the utility model provides a kind of rotatable base of the squirrel-cage for sputter coating machine
Horse.
The technical solution of the utility model are as follows: a kind of rotatable substrate frame of squirrel-cage for sputter coating machine, including it is upper
The end face of disk, lower wall and connecting rod, the upper disk and lower wall offers hanging groove and threaded hole, and the both ends of the connecting rod are respectively set
In the hanging groove of the upper disk and lower wall, it is additionally provided with motor contact on the upper disk, is offered on the motor contact
Connecting hole, the substrate frame are bolted with substrate by lower wall.
Preferably, the cross section of the upper disk and the lower wall is circle.
Preferably, the connecting rod is 4.
Preferably, 4 connecting rods are evenly distributed in the hanging groove of the upper disk and lower wall, present the center of disk or lower wall
Axisymmetrical distribution.
Preferably, the threaded hole is 4.
Preferably, the position of the threaded hole is corresponding with the position of the connecting rod.
Preferably, the motor contact is flange connector.
Preferably, the connecting hole is flange connecting hole.
Compared with prior art, the utility model has the following beneficial effects: it is provided by the utility model a kind of for splashing
The rotatable substrate frame of squirrel-cage of coating machine is penetrated, stabilized structure is reliable, and substrate grillage is mounted in this substrate frame, completely dispenses with load
The heart can be fallen；This design is easy for installation, unpicks and washes conveniently；It is also very convenient quick that substrate grillage, which is installed and unloaded,.
Detailed description of the invention
Fig. 1 is the substrate frame structural schematic diagram of the utility model.
Fig. 2 is the schematic diagram of substrate structure of the utility model.
Specific embodiment
With reference to the accompanying drawing and specific embodiment, the utility model is described further.
As shown in Figure 1 to Figure 2, the rotatable substrate frame of a kind of squirrel-cage for sputter coating machine, including upper disk 1, lower wall 2
With connecting rod 3, the cross section of disk 1 and lower wall 2 is circle in sheet, and upper disk 1 is connect with lower wall 2 by connecting rod 3.
The end face of upper disk 1 and lower wall 2 offers hanging groove 11 (21) and threaded hole 12 (22), and the both ends of connecting rod 3 are set respectively
It is placed in the hanging groove of disk 1 and lower wall 2, connecting rod 3 is preferably 4, and 4 connecting rods 3 are evenly distributed on the hanging groove of disk 1 Yu lower wall 2
Interior, the central axis for presenting disk 1 or lower wall 2 is symmetrical；And threaded hole 12 (22) is preferably 4, the position of threaded hole 12 (22)
It sets corresponding with the position of connecting rod 3.
Motor contact 4 is additionally provided in sheet on disk 1, motor contact 4 is preferably flange connector, flange connector 4
On offer flange connecting hole 5.
2 bottom end of this lower wall is bolted with substrate 6, has extension portion edge 61 on substrate 6, and extension portion offers threaded hole on edge,
When substrate 6 is connect with substrate frame, the insertion of extension portion edge 61 is set in the hanging groove 21 of lower wall 2, the screw thread on substrate 6 and lower wall
Screw can be worn in hole realizes connection.
The working principle of the utility model are as follows: entire substrate frame is connected by the rotating electric machine on flange connecting hole and equipment
It connects, substrate grillage then passes through stop screw and is fixed in the groove of disk and lower wall, is fused together with reaching with substrate frame, base
Piece is arranged on substrate grillage, and different rotation speeds is obtained by motor.
The above embodiments are only the preferred embodiment of the utility model, and the right of the utility model cannot be limited with this
Range, therefore, modification made according to the patent scope of the utility model, equivalent variations, improvement etc. still belong to the utility model institute
The range covered.
Claims (8)
1. a kind of rotatable substrate frame of squirrel-cage for sputter coating machine, it is characterised in that: including upper disk, lower wall and connecting rod,
The end face of the upper disk and lower wall offers hanging groove and threaded hole, and the both ends of the connecting rod are respectively arranged at the upper disk under
In the hanging groove of disk, it is additionally provided with motor contact on the upper disk, connecting hole, the substrate are offered on the motor contact
Frame is bolted with substrate by lower wall.
2. the rotatable substrate frame of a kind of squirrel-cage for sputter coating machine according to claim 1, it is characterised in that: institute
The cross section for stating disk and the lower wall is circle.
3. the rotatable substrate frame of a kind of squirrel-cage for sputter coating machine according to claim 1, it is characterised in that: institute
Stating connecting rod is 4.
4. the rotatable substrate frame of a kind of squirrel-cage for sputter coating machine according to claim 3, it is characterised in that: 4
Connecting rod described in root is evenly distributed in the hanging groove of the upper disk and lower wall, and the central axis for presenting disk or lower wall is symmetrical.
5. the rotatable substrate frame of a kind of squirrel-cage for sputter coating machine according to claim 1 or 4, feature exist
In: the threaded hole is 4.
6. the rotatable substrate frame of a kind of squirrel-cage for sputter coating machine according to claim 5, it is characterised in that: institute
The position for stating threaded hole is corresponding with the position of the connecting rod.
7. the rotatable substrate frame of a kind of squirrel-cage for sputter coating machine according to claim 1, it is characterised in that: institute
Stating motor contact is flange connector.
8. the rotatable substrate frame of a kind of squirrel-cage for sputter coating machine according to claim 1, it is characterised in that: institute
Stating connecting hole is flange connecting hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821795156.3U CN209210914U (en) | 2018-11-02 | 2018-11-02 | A kind of rotatable substrate frame of squirrel-cage for sputter coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821795156.3U CN209210914U (en) | 2018-11-02 | 2018-11-02 | A kind of rotatable substrate frame of squirrel-cage for sputter coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209210914U true CN209210914U (en) | 2019-08-06 |
Family
ID=67457984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821795156.3U Active CN209210914U (en) | 2018-11-02 | 2018-11-02 | A kind of rotatable substrate frame of squirrel-cage for sputter coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209210914U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113242646A (en) * | 2021-03-16 | 2021-08-10 | 光驰科技(上海)有限公司 | Mounting structure of substrate frame and mounting and dismounting method thereof |
-
2018
- 2018-11-02 CN CN201821795156.3U patent/CN209210914U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113242646A (en) * | 2021-03-16 | 2021-08-10 | 光驰科技(上海)有限公司 | Mounting structure of substrate frame and mounting and dismounting method thereof |
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