CN209197970U - The multi-parameter pressure sensor of built-in dual sensor - Google Patents
The multi-parameter pressure sensor of built-in dual sensor Download PDFInfo
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- CN209197970U CN209197970U CN201920185094.2U CN201920185094U CN209197970U CN 209197970 U CN209197970 U CN 209197970U CN 201920185094 U CN201920185094 U CN 201920185094U CN 209197970 U CN209197970 U CN 209197970U
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Abstract
The utility model discloses a kind of multi-parameter pressure sensors of built-in dual sensor, including a pressure sensitive film seat and bellows connector, bellows connector is fixedly mounted on pressure sensitive film seat, and a differential pressure pick-up is fixedly installed in pressure sensitive film seat, and a pressure sensor is fixedly installed in bellows connector；It respectively corresponds in the positive pressure side and suction side of pressure sensitive film seat equipped with a positive pressure diaphragm and a negative pressure diaphragm, a low pressure oil passage that wherein one end connects close to negative pressure diaphragm, the other end with the low-pressure end of differential pressure pick-up, the high pressure oil passage that the one end He Yigen connects close to positive pressure diaphragm, the other end with the high-voltage end of differential pressure pick-up are equipped in pressure sensitive film seat；On pressure sensor, a pressure-sensitive capillary being connected with the low-pressure end or high-voltage end of differential pressure pick-up is equipped between pressure sensor and differential pressure pick-up.The multi-parameter pressure sensor for the built-in dual sensor that the utility model obtains can measure differential pressure and gauge pressure simultaneously, and small in size, low cost, facilitate operation.
Description
Technical field
The utility model relates to a kind of flow measurement devices of compressible gas, and in particular to dual sensor built in a kind of
Multi-parameter pressure sensor.
Background technique
When measurement using throttling set to carry out flow, differential pressure transmitter need to be generally configured.If medium is compressible
, it also needs to be equipped with gage pressure transmitter.Currently, being all one difference of separate configuration to the throttling set of the flow measurement of compressible medium
Pressure transmitter and a gage pressure transmitter measure.This throttling set there are volumes larger, not easy to operate problem.
In view of the above-mentioned problems, external big instrument brand quotient develops a sensor, which can measure simultaneously
Differential pressure and gauge pressure are more than the simple superposition of two instrument in price, but double, since price is too high, allow flow measurement
Producer cannot bear, and dosage is few at present.Based on the problem, apply for that human desires designs a kind of low cost, and difference can be measured simultaneously
Pressure and gauge pressure, and it is small in size, facilitate the multi-parameter pressure sensor of operation.
Summary of the invention
In view of the above shortcomings of the prior art, the technical problem to be solved by the utility model is to how to provide a kind of energy
It is enough while measuring differential pressure and gauge pressure, and small in size, low cost, facilitate operation built-in dual sensor multi-parameter pressure sensing
Device.
In order to solve the above-mentioned technical problem, the utility model uses the following technical solution:
A kind of multi-parameter pressure sensor of built-in dual sensor, which is characterized in that connect including a pressure sensitive film seat and bellows
Head, the bellows connector are fixedly mounted on pressure sensitive film seat, a differential pressure pick-up are fixedly installed in pressure sensitive film seat, in bellows
A pressure sensor is fixedly installed in connector；The positive pressure side and suction side of pressure sensitive film seat respectively correspond equipped with a positive pressure every
Film and a negative pressure diaphragm, in pressure sensitive film seat be equipped with one wherein one end close to negative pressure diaphragm, the other end and differential pressure pick-up
The low pressure oil passage that connects of low-pressure end, high-voltage end of the one end He Yigen close to positive pressure diaphragm, the other end and differential pressure pick-up
The high pressure oil passage to connect；One is equipped on pressure sensor, between pressure sensor and differential pressure pick-up to pass with differential pressure
The pressure-sensitive capillary that the low-pressure end or high-voltage end of sensor are connected.In this way, pressure sensor and differential pressure pick-up are respectively arranged on
In bellows connector and pressure sensitive film seat, entire sensor it is small in size, it is compact-sized, easily facilitate operator use.In addition, by poor
After the low-pressure end or high-voltage end and pressure-sensitive capillary of pressure sensor are connected, neither influence differential pressure pick-up carries out differential pressure measurement,
It can be realized pressure sensor again and carry out gauge pressure detection.
Further, the differential pressure pick-up is cylindrical, and an one end is additionally provided on differential pressure pick-up and differential pressure passes
The low-pressure end of sensor is connected, the low pressure capillary and an one end and differential pressure pick-up outside other end stretching differential pressure pick-up
High-voltage end is connected, and the other end stretches out the high pressure capillary outside differential pressure pick-up.In this way, setting high pressure capillary and low pressure capillary
Guan Hou can be connected convenient for the high pressure capillary or low pressure capillary of pressure-sensitive capillary and differential pressure pick-up, and then and differential pressure
The high-voltage end or low-pressure end of sensor are connected.Meanwhile after being arranged in this way, when installation, the capillary of wherein side need to only be sealed
Two kinds of facilities are just able to satisfy after stifled, so that differential pressure capillary has versatility.
Further, be equipped on differential pressure pick-up toroidal cavity being connected with the low-pressure end of differential pressure pick-up with
An and oil-through-hole for being connected with toroidal cavity and being radially arranged.In this way, the filling liquid at differential pressure pick-up low-pressure end is just
Oil-through-hole can be flowed to through toroidal cavity, experience external pressure suffered by low-pressure end through the filling liquid at oil-through-hole.
Further, one is all had between the positive pressure diaphragm and pressure sensitive film seat and between negative pressure diaphragm and pressure sensitive film seat
A fluid injection chamber, one end and the fluid injection chamber under negative pressure diaphragm of the low pressure oil passage are connected, and the other end is successively empty with annular
Chamber, oil-through-hole, low pressure capillary and pressure-sensitive capillary are connected, one end of the high pressure oil passage and the note under positive pressure diaphragm
Sap cavity is connected, and the other end is successively connected with the high-voltage end of differential pressure pick-up and high pressure capillary, sets on high pressure capillary
There is the plugging device blocked；One is equipped in pressure sensitive film seat for positive pressure side filling liquid and suction side filling to be isolated
The sealing ring of liquid.In this way, pushing fluid injection below intracavitary after the negative pressure diaphragm on pressure sensitive film seat is deformed by extraneous side pressure
Filling level is to flowing on the inside of low pressure oil passage, and the low-pressure end through differential pressure pick-up, toroidal cavity, oil-through-hole flow directly into
In the pressure-sensitive capillary of pressure sensor, above-mentioned pressure is passed into power transmission sensor, the inspection as pressure sensor to gauge pressure
It surveys.Certainly, while pressure sensor detects gauge pressure, since pressure sensitive film seat positive and negative pressure diaphragm can be in the promotion of external pressure
Lower deformation, and filling liquid is transmitted to the high-voltage end and low-pressure end of differential pressure pick-up respectively, and then synchronous realize differential pressure pick-up
Detection to differential pressure.In addition, the sealing ring in pressure sensitive film seat can be by the filling liquid in pressure sensitive film seat positive pressure side and suction side point
It separates and, influence the two by the external world.
Further, one is all had between the positive pressure diaphragm and pressure sensitive film seat and between negative pressure diaphragm and pressure sensitive film seat
A fluid injection chamber, one end and the fluid injection chamber under positive pressure diaphragm of the high pressure oil passage are connected, and the other end is successively passed with differential pressure
High-voltage end, high pressure capillary and the pressure-sensitive capillary of sensor are connected, under one end of the low pressure oil passage and negative pressure diaphragm
Fluid injection chamber be connected, the other end is successively connected with the low-pressure end of differential pressure pick-up, toroidal cavity, oil-through-hole and low pressure capillary
It is logical, a plugging device blocked is equipped on low pressure capillary；One is equipped in pressure sensitive film seat for positive pressure to be isolated
The sealing ring of side filling liquid and suction side filling liquid.In this way, after the positive pressure diaphragm on pressure sensitive film seat is deformed by extraneous side pressure,
The filling level for pushing fluid injection below intracavitary is to flowing on the inside of high pressure oil passage, and the high-voltage end through differential pressure pick-up is direct
It flows in the pressure-sensitive capillary of pressure sensor, above-mentioned pressure is passed into power transmission sensor, be used as pressure sensor to gauge pressure
Detection.Certainly, while pressure sensor detects gauge pressure, since pressure sensitive film seat positive and negative pressure diaphragm can be in external pressure
Lower deformation is pushed, and filling liquid is transmitted to the high-voltage end and low-pressure end of differential pressure pick-up respectively, and then synchronous realization differential pressure passes
Detection of the sensor to differential pressure.
Further, it is used in the upper end of pressure sensitive film seat with the cavity and one for assembling differential pressure pick-up embedding
If the groove of bellows connector.In this way, set cavity can by differential pressure pick-up all it is embedding inside it, the setting of groove
So that the area connected between pressure sensitive film seat and bellows connector is big, and is partially embedded in pressure sensitive film seat, pressure-sensitive can be effectively improved
Bonding strength between film seat and bellows connector, meanwhile, it is further reduced the volume of entire sensor, so that entire connection structure
It is more compact.
Further, differential pressure pick-up and bellows connector are with pressure sensitive film seat by being welded and fixed.In this way, passing through welding
Bellows connector, differential pressure pick-up and pressure sensitive film seat are fixed together by mode, firm with mounting structure, equipment integration it is excellent
Point.
Further, in pressure sensitive film seat, the lower end of pressure sensitive film seat be equipped at intervals with a positive pressure oil filled port and negative pressure oil filled port,
The positive pressure oil filled port is connected with high pressure oil passage, and negative pressure oil filled port is connected with low pressure oil passage.In this way, using
Before, filling liquid can be poured to low pressure oil passage by negative pressure oil filled port, be poured by positive pressure oil filled port to high pressure oil passage
Filling liquid.And after pouring filling liquid, negative pressure oil filled port and positive pressure oil filled port are blocked with plugging device.
Compared with prior art, the multi-parameter pressure sensor for the built-in dual sensor that the utility model obtains has as follows
Advantage:
1, pressure sensor and differential pressure pick-up are respectively arranged in bellows connector and pressure sensitive film seat, meanwhile, differential pressure is passed
Low-pressure end or high-voltage end in sensor are connected with the pressure-sensitive capillary on pressure sensor, so that the body of entire sensor
Product is small, compact-sized, operator's use, and its low cost is easily facilitated, convenient for promoting.
2, after the low-pressure end of differential pressure pick-up or high-voltage end and pressure-sensitive capillary being connected, differential pressure pick-up is neither influenced
Differential pressure measurement is carried out, and can be realized pressure sensor and carry out gauge pressure detection.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of multi-parameter pressure sensor in embodiment 1；
Fig. 2 is the structural schematic diagram of multi-parameter pressure sensor in embodiment 2.
In figure: bellows connector 1, pressure sensor 2, pressure-sensitive capillary 3, pressure sensitive film seat 4, negative pressure oil filled port 41, positive pressure are filled
Hydraulic fluid port 42, negative pressure diaphragm 5, low pressure oil passage 6, positive pressure diaphragm 7, high pressure oil passage 8, differential pressure pick-up 9, toroidal cavity
91, oil-through-hole 92, low pressure capillary 93, high pressure capillary 94, sealing ring 10.
Specific embodiment
The present invention will be further described with reference to the accompanying drawings and examples.
Embodiment 1:
As shown in Figure 1, the multi-parameter pressure sensor of built-in dual sensor provided in this embodiment, including a pressure sensitive film seat
4 and bellows connector 1, the bellows connector 1 be fixedly mounted on pressure sensitive film seat 4, a differential pressure is fixedly installed in pressure sensitive film seat 4
Sensor 9 is fixedly installed with a pressure sensor 2 in bellows connector 1；Distinguish in the positive pressure side and suction side of pressure sensitive film seat 4
Be correspondingly provided with a positive pressure diaphragm 7 and a negative pressure diaphragm 5, in pressure sensitive film seat 4 be equipped with one wherein one end close to negative pressure every
The low pressure oil passage 6 that film 5, the other end connect with the low-pressure end of differential pressure pick-up 9, the one end He Yigen is close to positive pressure diaphragm 7, another
The high pressure oil passage 8 that one end connects with the high-voltage end of differential pressure pick-up 9；The differential pressure pick-up 9 is cylindrical, passes in differential pressure
It is additionally provided with an one end on sensor 9 and the low-pressure end of differential pressure pick-up 9 is connected, the other end stretches out low outside differential pressure pick-up 9
Dabbing tubule 93 and an one end and the high-voltage end of differential pressure pick-up 9 are connected, and the other end stretches out the high pressure outside differential pressure pick-up 9
Capillary 94；On pressure sensor 2, one and differential pressure pick-up 9 are equipped between pressure sensor 2 and differential pressure pick-up 9
The pressure-sensitive capillary 3 that low pressure capillary 93 is connected is equipped with a plugging device blocked on high pressure capillary 94.
As shown in Figure 1, the differential pressure pick-up 9 is cylindrical, an one end and differential pressure are additionally provided on differential pressure pick-up 9
The low-pressure end of sensor 9 is connected, and the low pressure capillary 93 and an one end and differential pressure that the other end stretches out outside differential pressure pick-up 9 pass
The high-voltage end of sensor 9 is connected, and the other end stretches out the high pressure capillary 94 outside differential pressure pick-up 9；It is equipped on differential pressure pick-up 9
One toroidal cavity 91 being connected with the low-pressure end of differential pressure pick-up 9 and one are connected and radially with toroidal cavity 91
The oil-through-hole 92 of setting.
Specifically, the low-pressure end connection structure of above-mentioned pressure-sensitive capillary 3 and differential pressure pick-up 9 is accomplished in that
A fluid injection chamber is all had between the positive pressure diaphragm 7 and pressure sensitive film seat 4 and between negative pressure diaphragm 5 and pressure sensitive film seat 4, it is described
One end of low pressure oil passage 6 is connected with the fluid injection chamber under negative pressure diaphragm 5, the other end successively with toroidal cavity 91, oil-through-hole
92, low pressure capillary 93 and pressure-sensitive capillary 3 are connected, one end of the high pressure oil passage 8 and the fluid injection under positive pressure diaphragm 7
Chamber is connected, and the other end is successively connected with the high-voltage end of differential pressure pick-up 9 and high pressure capillary 94, on high pressure capillary 94
The plugging device blocked equipped with one；One is equipped in pressure sensitive film seat 4 for positive pressure side filling liquid and suction side to be isolated
The sealing ring 10 of filling liquid.
In order to be further reduced the volume of sensor, have one to be used to assemble differential pressure pick-up 9 in the upper end of pressure sensitive film seat 4
Cavity and one for being embedded the groove of bellows connector 1, the groove and cavity are connected, and in step-like.Differential pressure passes
Pass through between sensor 9 and lower cavity and between bellows connector 1 and upper cavity and is welded and fixed.
In addition, in pressure sensitive film seat 4, the lower end of pressure sensitive film seat 4 be equipped at intervals with a positive pressure oil filled port 42 and negative pressure oil filled port
41, the positive pressure oil filled port 42 is connected with high pressure oil passage 8, and negative pressure oil filled port 41 is connected with low pressure oil passage 6.
Differential pressure pick-up 9 during installation, is first welded in pressure sensitive film seat 4 by the sensor in the present embodiment, then by pressure
Pressure-sensitive capillary 3 in sensor 2 connects with low pressure capillary 93, and high pressure capillary 94 is blocked, finally again connects bellows
First 1 is welded on pressure sensitive film seat 4.After being installed, before use, into positive pressure oil filled port 42 and negative pressure oil filled port 41 rush oil,
And after the completion of rushing oil, positive pressure oil filled port 42 and negative pressure oil filled port 41 are blocked.In doing so, then made
With.
Embodiment 2:
As shown in Fig. 2, the multi-parameter pressure sensor of built-in dual sensor provided in this embodiment, including a pressure sensitive film seat
4 and bellows connector 1, the bellows connector 1 be fixedly mounted on pressure sensitive film seat 4, a differential pressure is fixedly installed in pressure sensitive film seat 4
Sensor 9 is fixedly installed with a pressure sensor 2 in bellows connector 1；Distinguish in the positive pressure side and suction side of pressure sensitive film seat 4
Be correspondingly provided with a positive pressure diaphragm 7 and a negative pressure diaphragm 5, in pressure sensitive film seat 4 be equipped with one wherein one end close to negative pressure every
The low pressure oil passage 6 that film 5, the other end connect with the low-pressure end of differential pressure pick-up 9, the one end He Yigen is close to positive pressure diaphragm 7, another
The high pressure oil passage 8 that one end connects with the high-voltage end of differential pressure pick-up 9；The differential pressure pick-up 9 is cylindrical, passes in differential pressure
It is additionally provided with an one end on sensor 9 and the low-pressure end of differential pressure pick-up 9 is connected, the other end stretches out low outside differential pressure pick-up 9
Dabbing tubule 93 and an one end and the high-voltage end of differential pressure pick-up 9 are connected, and the other end stretches out the high pressure outside differential pressure pick-up 9
Capillary 94；On pressure sensor 2, one and differential pressure pick-up 9 are equipped between pressure sensor 2 and differential pressure pick-up 9
The pressure-sensitive capillary 3 that high pressure capillary 94 is connected is equipped with a plugging device blocked on low pressure capillary 93.
As shown in Fig. 2, the differential pressure pick-up 9 is cylindrical, an one end and differential pressure are additionally provided on differential pressure pick-up 9
The low-pressure end of sensor 9 is connected, and the low pressure capillary 93 and an one end and differential pressure that the other end stretches out outside differential pressure pick-up 9 pass
The high-voltage end of sensor 9 is connected, and the other end stretches out the high pressure capillary 94 outside differential pressure pick-up 9；It is equipped on differential pressure pick-up 9
One toroidal cavity 91 being connected with the low-pressure end of differential pressure pick-up 9 and one are connected and radially with toroidal cavity 91
The oil-through-hole 92 of setting.
Specifically, the high-voltage end connection structure of above-mentioned pressure-sensitive capillary 3 and differential pressure pick-up 9 is accomplished in that
A fluid injection chamber is all had between the positive pressure diaphragm 7 and pressure sensitive film seat 4 and between negative pressure diaphragm and pressure sensitive film seat 4, it is described
One end of high pressure oil passage 8 is connected with the fluid injection chamber under positive pressure diaphragm 7, the other end successively high pressure with differential pressure pick-up 9
End, high pressure capillary 94 and pressure-sensitive capillary 3 are connected, one end of the low pressure oil passage 6 and the fluid injection under negative pressure diaphragm 5
Chamber is connected, the other end successively with the low-pressure end of differential pressure pick-up 9,93 phase of toroidal cavity 91, oil-through-hole 92 and low pressure capillary
Connection is equipped with a plugging device blocked on low pressure capillary 93；One is equipped in pressure sensitive film seat 4 for being isolated
The sealing ring 10 of positive pressure side filling liquid and suction side filling liquid.
In order to be further reduced the volume of sensor, have one to be used to assemble differential pressure pick-up 9 in the upper end of pressure sensitive film seat 4
Cavity and one for being embedded the groove of bellows connector 1, the groove and cavity are connected, and in step-like.Differential pressure passes
Pass through between sensor 9 and lower cavity and between bellows connector 1 and upper cavity and is welded and fixed.
In addition, in pressure sensitive film seat 4, the lower end of pressure sensitive film seat 4 be equipped at intervals with a positive pressure oil filled port 42 and negative pressure oil filled port
41, the positive pressure oil filled port 42 is connected with high pressure oil passage 8, and negative pressure oil filled port 41 is connected with low pressure oil passage 6.
Differential pressure pick-up 9 during installation, is first welded in pressure sensitive film seat 4 by the sensor in the present embodiment, then by pressure
Pressure-sensitive capillary 3 in sensor 2 connects with high pressure capillary 94, and low pressure capillary 93 is blocked, finally again connects bellows
First 1 is welded on pressure sensitive film seat 4.After being installed, before use, into positive pressure oil filled port 42 and negative pressure oil filled port 41 rush oil,
And after the completion of rushing oil, positive pressure oil filled port 42 and negative pressure oil filled port 41 are blocked.In doing so, then made
With.
It should be noted that above two embodiment can realize that pressure sensor 2 carries out gauge pressure detection, and can be real
Existing detection of the differential pressure pick-up 9 to differential pressure.In the specific implementation process, if by the high pressure capillary 94 in differential pressure pick-up 9
It is connected with the pressure-sensitive capillary 3 in pressure sensor 2.Then 9 other side of differential pressure pick-up can not have to setting toroidal cavity 91, lead to
Oilhole 92 and low pressure capillary 93.Only the low-pressure end in low pressure oil passage 6 and differential pressure pick-up 9 is connected.Instead
It can only need to will be in high pressure oil passage 6 and differential pressure pick-up 9 after low pressure capillary 93 and pressure-sensitive capillary 3 are connected
High-voltage end connection does not have to setting high pressure capillary 94.Certainly, after according to above two structure, differential pressure pick-up 9 leads to
I.e. can be weaker with property, but have no effect on the use function of sensor.
Finally, it should be noted that above embodiments are merely intended for describing the technical solutions of the present application, but not for limiting the present application technology
Scheme, although applicant is described in detail the utility model referring to preferred embodiment, those skilled in the art
Should be appreciated that those, the technical solution of the present invention is modified or equivalently replaced, without departing from the technical program
Objective and range should all cover in the scope of the claims of the utility model.
Claims (8)
1. a kind of multi-parameter pressure sensor of built-in dual sensor, which is characterized in that connect including a pressure sensitive film seat (4) and bellows
Head (1), the bellows connector (1) are fixedly mounted on pressure sensitive film seat (4), are fixedly installed with a differential pressure in pressure sensitive film seat (4)
Sensor (9) is fixedly installed with a pressure sensor (2) in bellows connector (1)；In the positive pressure side of pressure sensitive film seat (4) and negative
Pressure side is respectively corresponded equipped with a positive pressure diaphragm (7) and a negative pressure diaphragm (5), and one is equipped in pressure sensitive film seat (4) wherein
The low pressure oil passage (6) that one end connects close to negative pressure diaphragm (5), the other end with the low-pressure end of differential pressure pick-up (9), He Yigen
The high pressure oil passage (8) that one end connects close to positive pressure diaphragm (7), the other end with the high-voltage end of differential pressure pick-up (9)；In pressure
Be equipped on sensor (2), between pressure sensor (2) and differential pressure pick-up (9) one with the low-pressure end of differential pressure pick-up (9) or
The pressure-sensitive capillary (3) that high-voltage end is connected.
2. the multi-parameter pressure sensor of built-in dual sensor according to claim 1, which is characterized in that the differential pressure passes
Sensor (9) is cylindrical, and an one end is additionally provided on differential pressure pick-up (9) and the low-pressure end of differential pressure pick-up (9) is connected,
The other end stretches out differential pressure pick-up (9) outer low pressure capillary (93) one end He Yigen and the high-voltage end phase of differential pressure pick-up (9)
Connection, the other end stretch out the high pressure capillary (94) of differential pressure pick-up (9) outside.
3. the multi-parameter pressure sensor of built-in dual sensor according to claim 2, which is characterized in that sensed in differential pressure
Device (9) is equipped with a toroidal cavity (91) being connected with the low-pressure end of differential pressure pick-up (9) and an one end and annular
The oil-through-hole (92) that cavity (91) is connected, the other end and low pressure capillary (93) are connected and are radially arranged.
4. the multi-parameter pressure sensor of built-in dual sensor according to claim 3, which is characterized in that the positive pressure every
A fluid injection chamber is all had between film (7) and pressure sensitive film seat (4) and between negative pressure diaphragm (5) and pressure sensitive film seat (4), it is described low
Pressure oil passage (6) one end be connected with the fluid injection chamber under negative pressure diaphragm (5), the other end successively with toroidal cavity (91), lead to
Oilhole (92), low pressure capillary (93) and pressure-sensitive capillary (3) are connected, one end of the high pressure oil passage (8) and positive pressure
Fluid injection chamber under diaphragm (7) is connected, and the other end is successively connected with the high-voltage end of differential pressure pick-up (9) and high pressure capillary (94)
It is logical, a plugging device blocked is equipped on high pressure capillary (94)；Be equipped in the pressure sensitive film seat (4) one for every
Sealing ring (10) from positive pressure side filling liquid and suction side filling liquid.
5. the multi-parameter pressure sensor of built-in dual sensor according to claim 3, which is characterized in that the positive pressure every
A fluid injection chamber, the height are all had between film (7) and pressure sensitive film seat (4) and between negative pressure diaphragm (5) and pressure sensitive film seat (4)
Pressure oil passage (8) one end be connected with the fluid injection chamber under positive pressure diaphragm (7), the other end successively with differential pressure pick-up (9)
High-voltage end, high pressure capillary (94) and pressure-sensitive capillary (3) are connected, one end of the low pressure oil passage (6) and negative pressure every
Fluid injection chamber under film (5) is connected, the other end successively with the low-pressure end of differential pressure pick-up (9), toroidal cavity (91), oil-through-hole
(92) it is connected with low pressure capillary (93), a plugging device blocked is equipped on low pressure capillary (93)；Feeling
One is equipped in press mold seat (4) for the sealing ring (10) of positive pressure side filling liquid and suction side filling liquid to be isolated.
6. the multi-parameter pressure sensor of built-in dual sensor according to claim 1, which is characterized in that in pressure sensitive film seat
(4) groove that there is the cavity and one for assembling differential pressure pick-up (9) to be used to be embedded bellows connector (1) for upper end.
7. the multi-parameter pressure sensor of built-in dual sensor according to claim 6, which is characterized in that the differential pressure passes
Sensor (9) and bellows connector (1) are with pressure sensitive film seat (4) by being welded and fixed.
8. the multi-parameter pressure sensor of built-in dual sensor according to claim 4 or 5, which is characterized in that in pressure-sensitive
In film seat (4), the lower end of pressure sensitive film seat (4) be equipped at intervals with a positive pressure oil filled port (42) and negative pressure oil filled port (41), the positive pressure
Oil filled port (42) is connected with high pressure oil passage (8), and negative pressure oil filled port (41) is connected with low pressure oil passage (6).
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| CN201920185094.2U CN209197970U (en) | 2019-02-02 | 2019-02-02 | The multi-parameter pressure sensor of built-in dual sensor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114746734A (en) * | 2019-12-03 | 2022-07-12 | 恩德莱斯和豪瑟尔欧洲两合公司 | Method for producing a differential pressure sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114746734A (en) * | 2019-12-03 | 2022-07-12 | 恩德莱斯和豪瑟尔欧洲两合公司 | Method for producing a differential pressure sensor |
| US12061127B2 (en) | 2019-12-03 | 2024-08-13 | Endress+Hauser SE+Co. KG | Method for producing a differential pressure sensor |
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