CN209190790U - A kind of manipulator - Google Patents
A kind of manipulator Download PDFInfo
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- CN209190790U CN209190790U CN201822254452.9U CN201822254452U CN209190790U CN 209190790 U CN209190790 U CN 209190790U CN 201822254452 U CN201822254452 U CN 201822254452U CN 209190790 U CN209190790 U CN 209190790U
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- manipulator
- gravity
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- mechanical
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Abstract
The utility model discloses a kind of manipulator, and for conveying chip, the manipulator includes guide rail, mechanical finger, mechanical arm and sliding block, and guide rail is fixedly installed in rack；Mechanical finger is for capturing the chip, mechanical arm is slidably disposed on the guide rail, the mechanical arm includes center of gravity plot structure, the center of gravity plot structure has head end and tail end, the head end is fixedly installed the cantilever beam for connecting with the mechanical finger, and the tail end is provided with counterweight；Sliding block and the guide rail cooperate, and the sliding block is set to the center of gravity plot structure, and the robot manipulator structure is simple, low in cost.
Description
Technical field
The utility model relates to a kind of chip transmission technique fields, in particular to a kind of machine for being used for transmission chip
Tool hand.
Background technique
It is developed rapidly in science and technology, semicon industry day by day protrudes important today, and the automation and requirement of semiconductor are also got over
Come it is higher, in semicon industry many equipment all used manipulator transmission chip, however transmit chip manipulator there are many
Multiplicity, the shape moulding of manipulator and design structure are also multifarious, mostly have a single function complicated manipulator, sub- knot
Structure is mostly processing part with high costs.
The finger of Traditional Transportation wafer generally also can only carrying one or two standard specification size chip.For user
For, at high cost and application range is small, brings inconvenience.
Utility model content
One main purpose of the utility model is to overcome at least one defect of the above-mentioned prior art, provides a kind of machine
Tool hand.
To realize above-mentioned purpose of utility model, the utility model adopts the following technical solution:
A specific embodiment according to the present utility model, provides a kind of manipulator, for conveying chip, the manipulator
Including guide rail, mechanical finger, mechanical arm and sliding block, guide rail is fixedly installed in rack；Mechanical finger is described for capturing
Chip, mechanical arm are slidably disposed on the guide rail, and the mechanical arm includes center of gravity plot structure, the center of gravity area knot
Structure has head end and tail end, and the head end is fixedly installed the cantilever beam for connecting with the mechanical finger, and the tail end is set
It is equipped with counterweight；Sliding block and the guide rail cooperate, and the sliding block is set to the center of gravity plot structure.
A specific embodiment according to the present utility model, wherein the center of gravity of the manipulator is in the center of gravity plot structure
On the center line of width direction, and the distance of the center line apart from cephalocaudal direction is e, and gravity suffered by the manipulator is G, G*
∣ e ∣ < R, 20kg.mm≤R≤100kg.mm.
A specific embodiment according to the present utility model, wherein the manipulator further includes being set to the mechanical finger
On pallet, be not put into the case of the pallet, the center of gravity of the manipulator is located at the side of the center line of the cephalocaudal direction,
And close to the tail end of the center of gravity plot structure, in the case where being put into the pallet, the center of gravity of the manipulator transfers to institute
Stating the other side of the center line of cephalocaudal direction, gravity G+g, and the distance of the center line apart from cephalocaudal direction is e2, wherein
G*∣e∣≈(G+g)*∣e2∣。
A specific embodiment according to the present utility model, wherein the head end of the mechanical arm is with described for connecting
The mounting portion of mechanical finger, the mechanical finger are set to the mounting portion, and the top surface of the mechanical finger does not protrude from described
The top surface of mechanical arm；Or the bottom surface of the mechanical finger does not protrude from the bottom surface of the mechanical arm.
A specific embodiment according to the present utility model, wherein top of the top surface of the mounting portion by the mechanical arm
Inward-facing recess formation, so that the head end of the mechanical arm is stepped.
A specific embodiment according to the present utility model, wherein the manipulator further includes drive block and briquetting, it is described
Briquetting is fixed on the mechanical arm, and slot is provided between the briquetting and the mechanical arm, the drive block setting
In in the slot.
A specific embodiment according to the present utility model, wherein the mechanical finger includes finger ontology and positioning column,
Wherein the finger ontology has multiple limit holes, and limit hole described at least three is located at the boundary position of the chip；It is described fixed
Position column is removable installed in the limit hole, so that the chip card is set on the positioning column.
A specific embodiment according to the present utility model, wherein in the mechanical finger or described mechanical arm the two
One of it is upper fixation hole is set, the other of both described mechanical finger or the mechanical arm are fixed column, described solid
Fixed column and the fixation hole cooperate so that the mechanical finger to be fixed on the mechanical arm.
A specific embodiment according to the present utility model, wherein the fixation hole is long hole and/or the fixation
Column is that cross section is circular cylinder.
A specific embodiment according to the present utility model, wherein also having lightening hole on the mechanical finger；And/or
Also there is lightening hole on mechanical arm described in person.
As shown from the above technical solution, the advantages of the manipulator of the utility model and the utility model is had the active effect that
The robot manipulator structure of offer is simple, low in cost.
Detailed description of the invention
Fig. 1 is the structure chart for the manipulator that a specific embodiment of the utility model provides.
Fig. 2 is the gravity centre distribution figure in off working state of the manipulator in Fig. 1.
Fig. 3 is that the manipulator in Fig. 1 is placed with the gravity centre distribution figure after pallet.
Fig. 4 is the structure chart of the mechanical arm in Fig. 1.
Fig. 5 is the structure chart of the manipulator in Fig. 1, especially shows drive block and briquetting.
Fig. 6 is the mechanical finger explosive view in Fig. 1.
Fig. 7 is the main view of the mechanical finger in Fig. 6.
Fig. 8 is another structure chart that manipulator in Fig. 1 is in use state.
Description of symbols
100, mechanical finger；101, positioning column；
102, limit hole；103, fixation hole；
104, spare post holes；105, lightening hole；
106, chip；107, fixed column；
108, finger ontology；200, mechanical arm；
201, center of gravity plot structure；202, cantilever beam；
203, mounting portion；204, sliding block mounting hole；
205, drive block mounting hole；206, counterweight plot structure；
300, sliding block；400, counterweight；
500, guide rail；600, pallet；
700, drive block；800, briquetting.
Specific embodiment
Example embodiment is described more fully with reference to the drawings.However, example embodiment can be with a variety of shapes
Formula is implemented, and is not understood as limited to embodiment set forth herein；On the contrary, thesing embodiments are provided so that this is practical new
Type will be full and complete, and the design of example embodiment is comprehensively communicated to those skilled in the art.It is identical in figure
Appended drawing reference indicates same or similar structure, thus the detailed description that will omit them.
Referring to figs. 1 to Fig. 8, a specific embodiment according to the present utility model, one of manipulator, for conveying crystalline substance
Piece 106, manipulator may include guide rail 500, mechanical finger 100, mechanical arm 200 and sliding block 300, and wherein guide rail 500 can
To be fixedly installed in rack；Mechanical finger 100 can be used for capturing chip 106；Mechanical arm 200, which is slidably disposed in, leads
On rail 500, mechanical arm 200 may include center of gravity plot structure 201, and center of gravity plot structure 201 can have head end and tail end, head end
It can be fixedly installed the cantilever beam 202 for connecting with mechanical finger 100, counterweight 400 has can be set in tail end；Sliding block 300
It can cooperate with guide rail 500, sliding block 300 can be set in center of gravity plot structure 201.Robot manipulator structure letter provided by the utility model
It is single, it is low in cost.
Referring to Fig. 2, a specific embodiment according to the present utility model, wherein the center of gravity of manipulator is in center of gravity plot structure
On the center line of 201 width direction, and the distance of the center line apart from cephalocaudal direction is e, and gravity suffered by manipulator is G,
G* ∣ e ∣ < R, R can be a certain value in 20~100kg.mm, i.e. 20kg.mm≤R≤100kg.mm can be according to actual test
It obtains.The mechanical arm 200 for being fixed with sliding block 300 can be slided with mechanical finger 100 along guide rail 500, therefore mechanical arm
200, mechanical finger 100, sliding block 300 are properly termed as movable body.
The position of centre of gravity of movable body can depend on the common work of counterweight 400, mechanical finger 100 and mechanical arm 200
With.The ideal position of center of gravity can be the center line Y's of the center line X and cephalocaudal direction of the width direction of center of gravity plot structure 201
The physical location of point of intersection, center of gravity can be fallen on the center line X of width direction, can be the two of the center line Y of cephalocaudal direction
Side, the distance for taking the physical location of center of gravity to the center line Y of cephalocaudal direction is e, meets G* ∣ e ∣ < R, sliding block 300 can led
Even running back and forth on rail 500, can so extend the service life of sliding block 300.
Referring to Fig. 3, a specific embodiment according to the present utility model, wherein manipulator can also include being set to machinery
Pallet 600 on finger 100, in the case where not being put into pallet 600, the position of centre of gravity of manipulator is referred to Fig. 2, wherein center of gravity
Position can in the side of the center line Y of cephalocaudal direction, and close to center of gravity plot structure 201 tail end, as shown in Fig. 2, can position
In the left side of the center line Y of cephalocaudal direction.In the case where being put into pallet 600, the center of gravity of manipulator can be transferred to head and the tail side
To center line Y the other side, it can positioned at the right side of the center line Y of cephalocaudal direction, the gravity of pallet 600 can be g,
After pallet 600 is placed on mechanical arm 200, the gravity of manipulator is can be with G+g, and the center line Y apart from cephalocaudal direction
Distance be can be with e2, wherein G* ∣ e ∣ ≈ (G+g) * ∣ e2 ∣.A specific embodiment according to the present utility model, wherein pallet
600 can be made of ceramic structure, and but not limited to this, can select the material of pallet 600 according to actual needs.
Referring to Fig. 4, a specific embodiment according to the present utility model, wherein the head end of mechanical arm 200 be can have
For connecting the mounting portion 203 of mechanical finger 100, mechanical finger 100 be can be set in mounting portion 203, and after being installed,
The top surface of mechanical finger 100 does not protrude from the top surface of mechanical arm 200；Or the bottom surface of mechanical finger 100 does not protrude from machinery
The bottom surface of arm 200.A specific embodiment according to the present utility model, wherein the top surface of mounting portion 203 can be by manipulator
The top surface of arm 200 is recessed inwardly to be formed, and the bottom surface of mounting portion 203 can be coplanar with the bottom surface of mechanical arm 200, so that mechanical
The head end of arm 200 is stepped.A specific embodiment according to the present utility model, wherein mounting portion 203 can have use
In the loading end for accepting mechanical finger 100, and the loading end can be plane.A specific embodiment party according to the present utility model
Formula, wherein the sum of thickness of the thickness t1 of mounting portion 203 and mechanical finger 100 can be equal to the thickness t of mechanical arm 200.This
Utility model limit thickness can be mechanical arm 200 the distance between top and bottom, the top surface of mechanical finger 100 and
The distance between bottom surface, the distance between the top and bottom of mounting portion 203.
With continued reference to Fig. 4, a specific embodiment according to the present utility model, wherein the tail end of center of gravity plot structure 201 can
With with counterweight plot structure 206, for counterweight 400 to be arranged.Cephalocaudal direction of the counterweight plot structure 206 in mechanical arm 200
Length dimension can be c, which can increase the torque of counterweight, about the length of the counterweight, can depend on use space
Limitation.
With continued reference to Fig. 4, it can be respectively fixed with sliding block 300 in the two sides of the width direction of center of gravity plot structure 201, such as schemed
Shown in 4, sliding block mounting hole 204 is provided on center of gravity plot structure 201, for fixing sliding block 300.According to the present utility model one
Specific embodiment, wherein sliding block mounting hole 204 can be positive circular hole, long lumbar hole etc., all in the protection scope of the utility model
It is interior.A specific embodiment according to the present utility model, wherein the size of center of gravity plot structure 201 can be according to the ruler of sliding block 300
Very little determination, such as, but not limited to, center of gravity plot structure 201 are related with the size of sliding block 300 in the length dimension of cephalocaudal direction.According to
One specific embodiment of the utility model, wherein the physical length of cantilever beam 202, can be chosen according to actual needs,
It is all within the protection scope of the present utility model to meet the needs of distinct device.A specific embodiment party according to the present utility model
Formula, wherein the actual (real) thickness t of cantilever beam 202 can be according to actual selection, to meet the rigidity requirement of cantilever beam 202, Ke Yiyou
The parameters such as material, the length of cantilever beam 202 determine.
A specific embodiment according to the present utility model, wherein mechanical finger 100 can directly contact chip 106, because
This needs to enter the adverse circumstances such as intracavitary receiving high temperature, electric field radiation, and needs to constitute using the material of low-density and high-strength.Machine
Tool arm 200 can be made of rigid material, to guarantee that rigidity is strong, furthermore it is also possible to which low density material is selected to constitute.
Referring to Fig. 5, a specific embodiment according to the present utility model, wherein manipulator can also include drive block 700
With briquetting 800, briquetting 800 can be fixed on mechanical arm 200.Specifically, a specific embodiment party according to the present utility model
Formula, wherein drive block mounting hole 205 has can be set in the medium position of mechanical arm 200, and drive block 700 can pass through fastener
It is fixed at 205 position of drive block mounting hole, but not limited to this.A specific embodiment according to the present utility model, wherein
Drive block 700 can be of an L-shaped structure, can be set on one of side with the matched through-hole of drive block mounting hole 205, for
Fastener passes through.A specific embodiment according to the present utility model, the through-hole being wherein arranged on drive block 700 can be positive round
Hole, or slotted hole, it is all within the protection scope of the present utility model.Another side of drive block 700 can be used for connecting
Driving source, the driving source can be steel band or rope, and but not limited to this.The working principle of drive block 700 can be described as:
Drive block 700 can be L-shaped, is can connect on one side to steel band or rope, and another side can connect to 200 bottom of mechanical arm,
It is pushed down, but is designed here as by briquetting 800, drive block 700 can still have certain activity after being held down, in this way, steel band
Or rope can drive drive block 700 to move, drive block 700 can drive mechanical arm 200 to move again, due to steel band or rope
Softness, inevitably have lesser fluctuation in the process of running, influence whether that drive block 700 is opposite with mechanical arm 200
This fluctuation bring can then be influenced to eliminate or reduced by position since drive block 700 has some activities.Assuming that drive block 700
Without small-scale activity, the fluctuation of steel band or rope can be by drive block 700 by Wave transmission to entire mechanical arm
It on 200, then is transmitted on sliding block 300, it will influence the Impact direction on guide rail 500 of sliding block 300, influence smooth sliding.With this,
Drive block 700 can have the function that smooth drive mechanical arm 200.
With continued reference to Fig. 5, a specific embodiment according to the present utility model, wherein briquetting 800 can be fixedly installed on
On mechanical arm 200, and slot can be set between briquetting 800 and mechanical arm 200, drive block 700 can be set in
In slot, which can make drive block 700 have certain activity in slot.A specific embodiment party according to the present utility model
Formula, wherein briquetting 800 can be set in the bottom surface side of mechanical arm 200, and the another side of drive block 700 can face away from machinery
The direction of the bottom surface of arm 200 extends, and specifically, one side of drive block 700 can be fixed on manipulator by two fasteners
On arm 200.So set, the Impact direction of the adjustable driving source of drive block 700, preferably to make movable body in guide rail 500
Upper even running.
Referring to Fig. 6 to Fig. 8, a specific embodiment according to the present utility model, wherein mechanical finger 100 may include hand
Refer to ontology 108 and positioning column 101, wherein finger ontology 108 can have multiple limit holes 102, and at least three limit hole 102 can
To be located at the boundary position of chip 106；Positioning column 101 is removable installed in limit hole 102, so that chip 106 is arranged in
On positioning column 101.It, can chip 106 to different size by the cooperation of the limit hole 102 of different location and positioning column 101
It is limited, so as to improve the versatility of mechanical finger.
With continued reference to Fig. 6 to Fig. 8, according to an embodiment of the present invention, wherein positioning column 101 can be with limit hole 102
Formation is threadedly engaged, and positioning column 101 is set in limit hole 102.Specifically, limit hole 102 can be threaded hole, positioning
The external screw thread with threaded hole cooperation can be set in the periphery of column 101.A specific embodiment according to the present invention, wherein limiting
Hole 102 may be set to be cooperates unthreaded hole or positioning column 101 to may be set to be outer peripheral surface with the external screw thread of positioning column 101
Smooth ladder cylinder is realized and being set in unthreaded hole and is positioned to chip 106, all within the scope of the present invention.
According to an embodiment of the present invention, spare post holes 104, spare post holes are wherein additionally provided on finger ontology 108
104 are provided with and the matched internal screw thread of positioning column 101, that is to say, that the spare post holes 104 can have and 102 phase of limit hole
Same structural parameters, to be used for stationary positioned column 101.In the case where mechanical finger is in unused state, positioning column 101 usually can be with
It is fixed in spare post holes 104, after chip 106 is placed in suitable position, then the positioning column in spare post holes 104 will be located at
101 remove, and are fixed in the limit hole 102 of 106 boundary of chip, to limit to chip 106.
Spare post holes 104 can be used for placing spare positioning column 101, since positioning column 101 is small in size, reuse process
It is middle to switch different positions according to the wafer variety difference used, it can inevitably be dropped and lost in this way, and stand-by column at this time
The positioning column 101 placed on hole 104, can use.The quantity of spare positioning column 101 can be generally 4-10,
It is such as, but not limited to 6 in the present embodiment.
Finger ontology 108 and positioning column 101 can be processed using suitable material according to actual needs, such as, but not limited to,
It needs to fetch and deliver piece under high temperature environment, then can choose lower using density and good rigidity titanium, titanium alloy material.General non-height
Warm use environment can choose using aluminium, aluminum alloy materials, and price is lower, and slimmer and more graceful.Manipulator provided by the invention can be with
Applied to 200mm plasma etching equipment.Aluminum and the titanium alloy material production of use have.Manipulator provided by the invention can
To be applied to high temperature up to by 106 freight department of chip, being made of titanium alloy material in 400 DEG C of cavity.It is provided by the invention
Manipulator batch application in plated film and etching apparatus, also pass through before this 10 Wan Duoci special project fetch and deliver built-in testing after, card
This real scheme is practical and reliable.
With continued reference to Fig. 6 to Fig. 8, a specific embodiment according to the present utility model, wherein mechanical finger 100 or machine
One of both tool arms 200 are upper to be arranged the other of fixation hole 103, both mechanical finger 100 or mechanical arm 200
For fixed column 107, fixed column 107 and fixation hole 103 cooperate so that mechanical finger 100 to be fixed on mechanical arm 200.According to this
One specific embodiment of utility model, wherein fixation hole 103 can be long hole and/or fixed column be cross section is round
The cylinder of shape.
With continued reference to Fig. 1 to Fig. 8, a specific embodiment according to the present utility model wherein also has on mechanical finger 100
There is lightening hole 105；And/or also there is lightening hole 105 on mechanical arm 200.The shape of lightening hole 105 and position, can be with
It does not limit specifically, such as, but not limited to, lightening hole 105 can be round hole, tri-angle-holed, long hole etc., these lightening holes 105 can
Any position for the structural strength for not influencing finger ontology 108 is arranged in.A specific embodiment according to the present invention, wherein
Finger ontology 108 can be axially symmetric structure.A specific embodiment according to the present invention, wherein limit hole 102 can be set
Between adjacent lightening hole 105.
Manipulator provided by the utility model, not only practical, processing buying is simple, and can realize multiple standards size
The carrying of chip, and the use of compatible all kinds of pallets of ceramics.So that application range expands significantly.Mechanical arm 200 and manipulator
Refer to that 100 are respectively formed, and the two is formed into dismountable connection, be convenient for changing, reduces maintenance cost.
Batch application also passes through 10 Wan Duoci's in plated film and etching apparatus to manipulator provided by the utility model
After fetching and delivering built-in testing, it was demonstrated that this scheme is practical and reliable.The manipulator of the utility model can be implemented applied to 200mm plasma
Etching apparatus.Aluminum and the titanium alloy material production that mechanical finger 100 uses.The utility model has been applied to high temperature
By at wafer handling in up to 400 DEG C of cavitys, made of titanium alloy material.
Above description is only a specific implementation of the present invention, but the protection scope of the utility model is not limited to
In this, anyone skilled in the art within the technical scope disclosed by the utility model, the change that can be readily occurred in
Change or replace, should be covered within the scope of the utility model.
Claims (10)
1. a kind of manipulator, for conveying chip (106) characterized by comprising
Guide rail (500), is fixedly installed in rack；
Mechanical finger (100)；
Mechanical arm (200) is slidably disposed on the guide rail (500), and the mechanical arm (200) includes center of gravity area knot
Structure (201), the center of gravity plot structure (201) have head end and tail end, the head end be fixedly installed for the manipulator
Refer to that the cantilever beam (202) of (100) connection, the tail end are provided with counterweight (400)；And
Sliding block (300), cooperates with the guide rail (500), and the sliding block (300) is set to the center of gravity plot structure (201).
2. manipulator as described in claim 1, which is characterized in that
The center of gravity of the manipulator is on the center line of the width direction of the center of gravity plot structure (201), and apart from head and the tail side
To the distance of center line be e, gravity suffered by the manipulator is G, G* ∣ e ∣ < R, 20kg.mm≤R≤100kg.mm.
3. manipulator as claimed in claim 2, which is characterized in that
The manipulator further includes the pallet (600) being set on the mechanical finger (100), is not put into the pallet (600)
In the case of, the center of gravity of the manipulator is located at the side of the center line of the cephalocaudal direction, and close to the center of gravity plot structure
(201) tail end, in the case where being put into the pallet (600), the center of gravity of the manipulator transfers to the cephalocaudal direction
Center line the other side, gravity G+g, and the distance of the center line apart from cephalocaudal direction is e2, wherein G* ∣ e ∣ ≈ (G+
g)*∣e2∣。
4. manipulator as described in claim 1, which is characterized in that
The head end of the mechanical arm (200) has the mounting portion (203) for connecting the mechanical finger (100), the machine
Tool finger (100) is set to the mounting portion (203), and the top surface of the mechanical finger (100) does not protrude from the mechanical arm
(200) top surface；Or the bottom surface of the mechanical finger (100) does not protrude from the bottom surface of the mechanical arm (200).
5. the manipulator as described in claim 4, which is characterized in that
The top surface of the mounting portion (203) is recessed inwardly by the top surface of the mechanical arm (200) to be formed, so that the machinery
The head end of arm (200) is stepped.
6. the manipulator as described in any one of claims 1 to 5, which is characterized in that
The manipulator further includes drive block (700) and briquetting (800), and the briquetting (800) is fixed on the mechanical arm
(200) on, and slot is provided between the briquetting (800) and the mechanical arm (200), the drive block (700) is set to
In the slot.
7. manipulator as claimed in claim 6, which is characterized in that
The mechanical finger (100) includes finger ontology (108) and positioning column (101), wherein the finger ontology (108) has
Multiple limit holes (102), limit hole (102) described at least three are located at the boundary position of the chip (106)；The positioning column
(101) it is removable installed in the limit hole (102), so that the chip (106) is arranged in the positioning column (101)
On.
8. manipulator as claimed in claim 6, which is characterized in that
One of both described mechanical finger (100) or the mechanical arm (200) are upper to be arranged fixation hole (103), described
The other of both mechanical finger (100) or the mechanical arm (200) are fixed column (107), the fixed column and institute
Fixation hole (103) cooperation is stated so that the mechanical finger (100) to be fixed on the mechanical arm (200).
9. manipulator as claimed in claim 8, which is characterized in that
The fixation hole (103) is long hole and/or the fixed column be cross section is circular cylinder.
10. the manipulator as described in any one of claims 1 to 5, which is characterized in that
Also there are lightening hole (105) on the mechanical finger (100)；And/or also has on the mechanical arm (200) and subtract
Repeated hole (105).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822254452.9U CN209190790U (en) | 2018-12-29 | 2018-12-29 | A kind of manipulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822254452.9U CN209190790U (en) | 2018-12-29 | 2018-12-29 | A kind of manipulator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209190790U true CN209190790U (en) | 2019-08-02 |
Family
ID=67430815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822254452.9U Active CN209190790U (en) | 2018-12-29 | 2018-12-29 | A kind of manipulator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209190790U (en) |
-
2018
- 2018-12-29 CN CN201822254452.9U patent/CN209190790U/en active Active
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| CP03 | Change of name, title or address |
Address after: 221300 No.8, Liaohe West Road, Pizhou Economic Development Zone, Xuzhou City, Jiangsu Province Patentee after: Jiangsu Luwen Instrument Co.,Ltd. Address before: 221300 No. 8, Liaohe West Road, Pizhou Economic Development Zone, Pizhou City, Xuzhou City, Jiangsu Province Patentee before: JIANGSU LEUVEN INSTRUMMENTS Co.,Ltd. |