CN209188338U - A kind of dust cleaning device and the monocrystalline furnace exhaust gas automatic dust comprising the device - Google Patents
A kind of dust cleaning device and the monocrystalline furnace exhaust gas automatic dust comprising the device Download PDFInfo
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- CN209188338U CN209188338U CN201821695207.5U CN201821695207U CN209188338U CN 209188338 U CN209188338 U CN 209188338U CN 201821695207 U CN201821695207 U CN 201821695207U CN 209188338 U CN209188338 U CN 209188338U
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- fixed frame
- tank body
- movable stand
- cloth bag
- filter cloth
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Abstract
The utility model relates to monocrystalline silicon growing equipment technical fields, disclose a kind of dust cleaning device and the monocrystalline furnace exhaust gas automatic dust removing apparatus comprising the device.Monocrystalline furnace exhaust gas automatic dust removing apparatus, including tank body, tank body upper end are equipped with gas outlet, and tank body lower end is equipped with air inlet；The first fixed frame, movable stand, the second fixed frame are successively arranged in tank body from top to bottom, sliding electromagnet is equipped with above the first fixed frame, sliding electromagnet is used to push movable stand to second fixed frame；Tensioning member, the trend that tensioning member is used to that movable stand to be kept to move to the first fixed frame are equipped between first fixed frame and movable stand；Filter cloth bag is equipped between movable stand and the second fixed frame, the second fixed frame is equipped with filtering mouth, and filter cloth bag is connect with movable stand and filtering mouth respectively.By setting sliding electromagnet and tensioning member, filter cloth bag is made to generate shake up and down, so that the filter cloth bag in deduster is not needed tank body is opened manually and is dusted, production efficiency is improved.
Description
Technical field
The utility model relates to monocrystalline silicon growing equipment technical field, more particularly to a kind of dust cleaning device and comprising
The monocrystalline furnace exhaust gas automatic dust removing apparatus of the device.
Background technique
Monocrystalline silicon growing furnace is one kind in vacuum and inert gas (based on argon gas) environment, will be more with graphite heater
The polycrystalline materials such as crystal silicon fusing, with the equipment of Grown by CZ Method dislocation-free monocrystalline.Current monocrystalline silicon growing furnace is in long brilliant process
In, dust and carbon monoxide particle can be generated in furnace.In order to guarantee vacuum in monocrystal growing furnace, it is true to need to access vacuum pumping
Sky is discharged into atmosphere after the tail gas access oil mist separator filtering of generation.In vacuum pump vacuum, in furnace gas
A large amount of dust and carbon monoxide particle can be directly sucked in vacuum pump, and dust is mixed with the lubricating oil in vacuum pump, lead to vacuum
Pump lubrication failure, if oil change not in time, will lead to vacuum pump damage, but oil change is frequent, not only resource wave
Take seriously, and increase crystal pulling cost, influences production efficiency.Current settling mode is between vacuum pump body and single crystal growing furnace
Connect a dust removal and filtration tank.Dust removal and filtration tank includes filter core, and gas can filter a large amount of dust by filter core.But dust meeting simultaneously
It is attached on filter core, filter core can be made to block quickly, monocrystalline furnace pressure is caused sharply to increase, to influence to produce.Therefore, worker
Filtering furnace can be often opened manually, taken out filter core, cleared up the dust being attached on filter core.This process needs manual operation, no
It is only time-consuming to influence working efficiency, and increase many additional effort power.
Utility model content
For overcome the deficiencies in the prior art, one of the purpose of this utility model is to provide a kind of dust cleaning device,
Dust in automatic cleaning filter cloth bag, work efficiency is high.
The two of the purpose of this utility model are to provide a kind of tail gas automatic dust removing apparatus of single crystal growing furnace, can allow vacuum pump
The dust in furnace gas is filtered out during vacuumizing.
One of the purpose of this utility model adopts the following technical scheme that realization: a kind of dust cleaning device, including first solid
Determine frame, the movable stand below first fixed frame, the second fixed frame below the movable stand, the movable stand
Between second fixed frame be equipped with filter cloth bag, the filter cloth bag respectively with the movable stand and second fixed frame
It is fixedly connected；
Sliding electromagnet is equipped with above first fixed frame, the sliding electromagnet is used to push the movable stand to institute
State the second fixed frame；
Tensioning member is equipped between first fixed frame and the movable stand, the tensioning member is for keeping the movable stand
The trend moved to first fixed frame.
Further, the sliding electromagnet includes telescopic end, the telescopic end through first fixed frame and with institute
Movable stand is stated to be fixedly connected；The tensioning member is fixedly connected with first fixed frame and the movable stand respectively.Push and pull electromagnetism
The power that telescopic end transmitting pushes movable stand is crossed by Tie Tong, and tensioning member can have the components of restoring force for tension spring etc..
The two of the purpose of this utility model adopt the following technical scheme that realization:
A kind of monocrystalline furnace exhaust gas automatic dust, comprising:
Tank body, the tank body upper end are equipped with gas outlet, and the tank body lower end is equipped with air inlet；
The first fixed frame, movable stand, the second fixed frame, first fixed frame are successively arranged in the tank body from top to bottom
Top is equipped with sliding electromagnet, and the sliding electromagnet is used to push the movable stand to second fixed frame；
Tensioning member is equipped between first fixed frame and the movable stand, the tensioning member is for keeping the movable stand
The trend moved to first fixed frame；
Filter cloth bag is equipped between the movable stand and second fixed frame, second fixed frame is equipped with filtering
Mouthful, the filter cloth bag is connect with the movable stand and the filtering mouth respectively；
Second fixed frame and the tank body are tightly connected, and the air inlet is set to below second fixed frame.
Further, the sliding electromagnet includes telescopic end, the telescopic end through first fixed frame and with institute
Movable stand is stated to be fixedly connected；The tensioning member is fixedly connected with first fixed frame and the movable stand respectively.
Further, the sliding electromagnet is set to outside the tank body, and the telescopic end runs through the tank body, described to stretch
Contracting end and the tank body junction are equipped with bellows, and the bellows is for sealing the tank body.Bellows has been used, has made to push and pull
When electromagnet is acted, it is ensured that the leakproofness of tank body, it will not there is a situation where unfiltered exhaust gas leaks.
Further, the deduster further includes supporting element, and first fixed frame passes through the supporting element and described the
Two fixed frames are fixedly connected.The replacement to filter cloth bag, the first fixed frame are not fixedly connected with tank body for convenience, are led to
It crosses supporting element to be fixedly connected with the second fixed frame, directly opens top tank body in this way, directly movable stand can be exposed, side
Just it dismantles.
Further, the tank body successively includes top tank body, middle part tank body and the lower part being detachably connected from top to bottom
It is evenly equipped with lifting lug respectively on tank body, the top tank body and the middle part tank body.Tank body is by top tank body, middle part tank body, lower part
Three Duan Zucheng of tank body, when filter cloth bag is replaced, opening connection between top tank body and middle part tank body can be into
Row.The tank body formed compared to two sections, the height in required place reduces when which opens.Tank body and middle part tank on top
Design has and can lift and the lifting lug of jacking in body case, does not need to be completely dependent on that production site is furnished with hangs when opening tank body
Install standby, can carry out jacking type unlatching with jack, replace it is more efficient, it is also more flexible.
Compared with prior art, the utility model has the beneficial effects that:
1. dust cleaning device provided by the utility model filters out the dust in tail gas, filtering effect using filter cloth bag
Fruit is good；By setting sliding electromagnet and tensioning member, filter cloth bag is made to generate shake up and down, and then reaches subsidiary on removal filter core
Dust purpose, automatic dust removing.
2. monocrystalline furnace exhaust gas automatic dust provided by the utility model, the powder in tail gas is filtered out using filter cloth bag
Dirt, filter effect are good；By setting sliding electromagnet and tensioning member, filter cloth bag is set to generate shake up and down, thus in deduster
Filter cloth bag do not need tank body is opened manually and be dusted, production efficiency improves.
The utility model is described in further detail with reference to the accompanying drawings and detailed description.
Detailed description of the invention
Fig. 1 is the overall structure diagram of monocrystalline furnace exhaust gas automatic dust provided by the utility model；
Fig. 2 is the structural schematic diagram of dust cleaning device provided by the utility model.
In figure: 1, tank body；11, top tank body；12, middle part tank body；13, lower part tank body；14, air inlet；15, gas outlet；
2, the first fixed frame；3, movable stand；4, the second fixed frame；5, filter cloth bag；6, sliding electromagnet；61, telescopic end；7, it stretches
Part；8, bellows；9, supporting element；10, lifting lug.
Specific embodiment
In the following, being described further in conjunction with attached drawing and specific embodiment to the utility model, it should be noted that
Under the premise of not colliding, it can be formed in any combination between various embodiments described below or between each technical characteristic new
Embodiment.
As shown in Figure 1 and Figure 2, the utility model provides a kind of dust cleaning device, including the first fixed frame 2, is set to first
Movable stand 3, the second fixed frame 4 set on 3 lower section of movable stand of 2 lower section of fixed frame, set between movable stand 3 and the second fixed frame 4
There is filter cloth bag 5, filter cloth bag 5 is fixedly connected with movable stand 3 and the second fixed frame 4 respectively；It is equipped with and pushes away above first fixed frame 2
Electromagnet 6 is drawn, sliding electromagnet 6 is used to push movable stand 3 to second fixed frame 4；It is set between first fixed frame 2 and movable stand 3
There are tensioning member 7, the trend that tensioning member 7 is used to that movable stand 3 to be kept to move to the first fixed frame 2.Sliding electromagnet 6 includes telescopic end
61, telescopic end 61 is fixedly connected through the first fixed frame 2 and with movable stand 3；Tensioning member 7 respectively with the first fixed frame 2 and mobile
Frame 3 is fixedly connected.Sliding electromagnet 6 pushes the power of movable stand 3 by the transmitting of telescopic end 61, and tensioning member 7 can be the tool such as tension spring
There are the components of restoring force.The lower end of tensioning member 7 can be connected with movable stand 3, can also be stretched out and be moved with 5 upper end of filter cloth bag
The part of moving frame 3 connects, and the upper end of each filter cloth bag 5 is respectively connected with a tensioning member 7, a tensioning member 7 is only drawn in Fig. 2
Work is illustrated.
The utility model provides a kind of monocrystalline furnace exhaust gas automatic dust, including tank body 1, and 1 upper end of tank body is equipped with gas outlet
15,1 lower end of tank body is equipped with air inlet 14；It is fixed that the first fixed frame 2, movable stand 3, second are successively arranged in tank body 1 from top to bottom
Frame 4, sliding electromagnet 6 is equipped with above the first fixed frame 2, and sliding electromagnet 6 is used to push movable stand 3 to second fixed frame 4；The
Tensioning member 7 is equipped between one fixed frame 2 and movable stand 3, tensioning member 7 is for keeping movable stand 3 to become to what the first fixed frame 2 moved
Gesture；Filter cloth bag 5 is equipped between movable stand 3 and the second fixed frame 4, the second fixed frame 4 is equipped with filtering mouth, and filter cloth bag 5 is divided
It is not connect with movable stand 3 and filtering mouth；Second fixed frame 4 is tightly connected with tank body 1, and air inlet 14 is set under the second fixed frame 4
Side.
Sliding electromagnet 6 includes telescopic end 61, and telescopic end 61 is fixedly connected through the first fixed frame 2 and with movable stand 3；It draws
Part 7 is stretched to be fixedly connected with the first fixed frame 2 and movable stand 3 respectively.
Sliding electromagnet 6 is set to outside tank body 1, and telescopic end 61 runs through tank body 1, and telescopic end 61 is equipped with 1 junction of tank body
Bellows 8, bellows 8 are used for sealed shell of tank 1.Bellows 8 is used, when acting sliding electromagnet 6, it is ensured that tank
The leakproofness of body 1, will not there is a situation where unfiltered exhaust gas leaks.
Deduster further includes supporting element 9, and the first fixed frame 2 is fixedly connected by supporting element 9 with the second fixed frame 4.In order to
The convenient replacement to filter cloth bag 5, the first fixed frame 2 are not fixedly connected with tank body 1, solid by supporting element 9 and second
Determine frame 4 to be fixedly connected, directly opens top tank body 11 in this way, directly movable stand 3 can be exposed, it is easy to disassemble.Support
Part 9 is looped around one week of the second fixed frame 4, plays the role of supporting the first fixed frame.
Tank body 1 successively includes top tank body 11, middle part tank body 12 and the lower part tank body 13 being detachably connected from top to bottom, on
It is evenly equipped with lifting lug 10 respectively on portion's tank body 11 and middle part tank body 12.Tank body 1 is by top tank body 11, middle part tank body 12, lower part tank body
13 3 Duan Zucheng open the connection between top tank body 11 and middle part tank body 12 when filter cloth bag 5 is replaced
It carries out.The tank body 1 formed compared to two sections, the height in required place reduces when which opens.11 He of tank body on top
Design has and can lift and the lifting lug 10 of jacking on 12 shell of middle part tank body, does not need to be completely dependent on production when opening tank body 1
The hanging device that place is furnished with can carry out jacking type unlatching with jack, and replacement is more efficient, also more flexible.
Working principle are as follows: the filter cloth bag 5 of regular arrangement in the tank body 1 of sealing hangs the movable stand 3 of filter cloth bag 5
It is hanging on the first fixed frame 2 by several tension springs, the vacuum tail gas for needing to filter, is entered from the air inlet 14 of the tank body 1 of sealing,
It by the filtering of filter cloth bag 5, is discharged from gas outlet 15, completes filtration.It needs to carry out the dust on 5 surface of filter cloth bag
When cleaning, obtain sliding electromagnet 6 electric, telescopic end 61 is so quick that move downward, that is, has pushed movable stand 3 to make under it
It moves, while several tension springs by power stretch；In 6 power loss of sliding electromagnet, several tension springs retract the movable stand 3 moved down,
The cleaning work to 5 surface dust of filter cloth bag can be completed in fast jitter movement.When filter cloth bag 5 is replaced,
The connection opened between adjacent top tank body 11 and middle part tank body 12 can carry out.In order to which view is succinct in Fig. 2, tension spring is only drawn
One as signal.
Above embodiment is only preferred embodiments of the present invention, cannot be protected with this to limit the utility model
Range, the variation of any unsubstantiality that those skilled in the art is done on the basis of the utility model and replacement belong to
In the utility model range claimed.
Claims (7)
1. a kind of dust cleaning device, which is characterized in that including the first fixed frame, the movement below first fixed frame
Frame, the second fixed frame below the movable stand are equipped with filter cloth bag between the movable stand and second fixed frame,
The filter cloth bag is fixedly connected with the movable stand and second fixed frame respectively；
It is equipped with sliding electromagnet above first fixed frame, the sliding electromagnet is used to push to the movable stand described the
Two fixed frames；
Tensioning member is equipped between first fixed frame and the movable stand, the tensioning member is for keeping the movable stand to institute
State the trend of the first fixed frame movement.
2. dust cleaning device as described in claim 1, which is characterized in that the sliding electromagnet includes telescopic end, described
Telescopic end is fixedly connected through first fixed frame and with the movable stand；The tensioning member respectively with first fixed frame
It is fixedly connected with the movable stand.
3. a kind of monocrystalline furnace exhaust gas automatic dust characterized by comprising
Tank body, the tank body upper end are equipped with gas outlet, and the tank body lower end is equipped with air inlet；
The first fixed frame, movable stand, the second fixed frame, the first fixed frame top are successively arranged in the tank body from top to bottom
Equipped with sliding electromagnet, the sliding electromagnet is used to push the movable stand to second fixed frame；
Tensioning member is equipped between first fixed frame and the movable stand, the tensioning member is for keeping the movable stand to institute
State the trend of the first fixed frame movement；
Filter cloth bag is equipped between the movable stand and second fixed frame, second fixed frame is equipped with filtering mouth, institute
Filter cloth bag is stated to connect with the movable stand and the filtering mouth respectively；
Second fixed frame and the tank body are tightly connected, and the air inlet is set to below second fixed frame.
4. monocrystalline furnace exhaust gas automatic dust as claimed in claim 3, which is characterized in that the sliding electromagnet includes flexible
End, the telescopic end are fixedly connected through first fixed frame and with the movable stand；The tensioning member is respectively with described
One fixed frame is fixedly connected with the movable stand.
5. monocrystalline furnace exhaust gas automatic dust as claimed in claim 4, which is characterized in that the sliding electromagnet is set to described
Outside tank body, the telescopic end runs through the tank body, and the telescopic end and the tank body junction are equipped with bellows, the ripple
Pipe is for sealing the tank body.
6. the monocrystalline furnace exhaust gas automatic dust as described in claim 3 or 4 or 5, which is characterized in that the deduster further includes
Supporting element, first fixed frame are fixedly connected by the supporting element with second fixed frame.
7. monocrystalline furnace exhaust gas automatic dust as claimed in claim 6, which is characterized in that the tank body successively wraps from top to bottom
The top tank body, middle part tank body and lower part tank body being detachably connected are included, is distinguished on the top tank body and the middle part tank body equal
It is furnished with lifting lug.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821695207.5U CN209188338U (en) | 2018-10-19 | 2018-10-19 | A kind of dust cleaning device and the monocrystalline furnace exhaust gas automatic dust comprising the device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821695207.5U CN209188338U (en) | 2018-10-19 | 2018-10-19 | A kind of dust cleaning device and the monocrystalline furnace exhaust gas automatic dust comprising the device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209188338U true CN209188338U (en) | 2019-08-02 |
Family
ID=67408367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821695207.5U Active CN209188338U (en) | 2018-10-19 | 2018-10-19 | A kind of dust cleaning device and the monocrystalline furnace exhaust gas automatic dust comprising the device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209188338U (en) |
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2018
- 2018-10-19 CN CN201821695207.5U patent/CN209188338U/en active Active
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