CN209183521U - Blowning installation - Google Patents

Abstract

A kind of blowning installation includes: ontology, multiple filter plates, at least a tube body, switch unit and control module.Ontology has an at least air inlet, and air inlet is arranged through ontology.Multiple filter plates are fixedly installed in ontology, and are formed with enclosure space in the body, and enclosure space can be connected to by air inlet with outer.The both ends connection air inlet and air feed equipment of tube body.Switch unit is connected with tube body, can be controlled to block the connected state of tube body.Control module can receive enabling signal, and control switch unit acts, so that gas provided by air feed equipment, can enter enclosure space by tube body；When the gas pressure of enclosure space is greater than predetermined pressure, the gas in enclosure space will pass through multiple stomatas of each filter plate, and equably be discharged by the side of ontology.

Description

Blowning installation

Technical field

The utility model relates to a kind of blowning installation, especially a kind of blowning installation applied to wafer cassette bogey.

Background technique

In existing semiconductor production workshop, equipment of the setting there are many being used to transmit wafer cassette, and these equipment are most It is that different vendor is produced, therefore, when wafer cassette is transmitted in Liang Ge different vendor equipment produced, it may occur however that have wafer The door-plate of box is turned on, and the inside of wafer cassette directly with the state that is connected to of outside, in this way, dirty outside wafer cassette will be easy It is directly entered in wafer cassette, and then may cause the wafer in wafer cassette and polluted.

Utility model content

The main purpose of the utility model is to provide a kind of blowning installations, and the door-plate to improve wafer cassette is turned on When, the dirty problem being easily accessible inside wafer cassette outside wafer cassette.

To achieve the goals above, the utility model provides a kind of blowning installation, it includes: an ontology has at least One air inlet, the air inlet are arranged through the ontology；Multiple filter plates are fixedly installed in the ontology, Duo Gesuo It states filter plate and is formed with an enclosure space in the ontology, the enclosure space can be connected to by the air inlet with outer；Respectively A filter plate has multiple stomatas；An at least tube body, one end connect the air inlet, the other end connection of the tube body One air feed equipment；One switch unit is connected with the tube body, and the switch unit can be controlled to block the tube body Connected state；One control module is electrically connected the switch unit.

Preferably, the blowning installation is the side for being fixedly installed on a wafer bearing device, the wafer bearing device With a platform, the platform has a door opening module, the enabling mould to carry a wafer cassette, the wafer bearing device Block can open the door-plate for being set to the wafer cassette of the platform, and the blowning installation can blow to a predetermined direction, and An air-flow wall is formed before the door-plate of the wafer cassette, the blowning installation also includes an at least sensing unit, and the sensing is single Member is electrically connected the control module, and the door-plate that the sensing unit is used to sense the wafer cassette for being set to the platform is No to be turned on, to transmit a corresponding sensing signal to the control module, the control module can be believed according to the sensing Number control switch unit.

Preferably, the blowning installation also includes a flow controlling unit, is connected with the tube body, the flow Control unit is electrically connected the control module, and the control module can control the flow controlling unit movement, logical to change Cross the gas flow that the tube body enters the enclosure space.

Preferably, the blowning installation also includes a flow controlling unit, is connected with the tube body, the flow Control unit can be operated, to change the gas flow for entering the enclosure space by the tube body.

Preferably, the blowning installation also includes a flow detecting unit, is connected with the tube body, the flow Detecting unit is capable of measuring the gas flow in the tube body, and the flux detecting unit is electrically connected the control module.

Preferably, the blowning installation also includes a flow module, and the flow module is electrically connected the control mould Block, the flow module connects the tube body, and the flow module includes a flow controlling unit and a flux detecting list Member, the flow controlling unit can be controlled, described to change the gas flow for entering the enclosure space by the tube body Flux detecting unit is capable of measuring the gas flow in the tube body.

Preferably, the blowning installation also includes an air pressure detecting unit, is connected with the tube body, the air pressure Detecting unit is capable of measuring the gas pressure in the tube body, and the air pressure detecting unit is electrically connected the control module.

Preferably, the blowning installation also includes an at least filter element, is connected with the tube body, the filtering Unit can be filtered through the gas that the tube body enters the enclosure space.

Preferably, the ontology has multiple air inlets and multiple tube bodies, and multiple air inlets are corresponding to be connected Multiple tube bodies are connect, multiple tube bodies are connected with the air feed equipment respectively, and each tube body is connected with a filtering Unit, each filter element can be filtered through the gas of corresponding tube body and the entrance enclosure space.

The beneficial effects of the utility model can be: the blowning installation of the utility model can be mounted on wafer cassette carrying dress The side set, and control module can be the signal transmitted for receiving wafer cassette bogey, accordingly control switch unit Movement, can be in wafer so as to make blowning installation when the door-plate for the wafer cassette being set on wafer cassette bogey is turned on It is formed with air-flow wall in front of box, the dirty probability being directly entered inside wafer cassette outside wafer cassette can be greatly reduced accordingly.

Detailed description of the invention

Fig. 1 is the schematic diagram of the ontology of the blowning installation of the utility model.

Fig. 2 is the block schematic diagram of the first embodiment of the blowning installation of the utility model.

Fig. 3 is that the blowning installation of the utility model is applied to the schematic diagram of wafer cassette carrier equipment.

Fig. 4 is the block schematic diagram of the second embodiment of the blowning installation of the utility model.

Fig. 5 is the block schematic diagram of the 3rd embodiment of the blowning installation of the utility model.

Fig. 6 is the block schematic diagram of the fourth embodiment of the blowning installation of the utility model.

Fig. 7 is the block schematic diagram of the 5th embodiment of the blowning installation of the utility model.

Specific embodiment

In the following description, if any pointing out to please refer to particular drawings or be only to emphasize as shown in particular drawings In subsequent instruction, related related content largely comes across in the particular drawings, but does not limit in the subsequent explanation only It can refer to the particular drawings.

It is the schematic diagram of the blowning installation of the utility model also referring to Fig. 1 to Fig. 3.Blowning installation 100 includes: One filter plate 12, three of ontology 10, two tube body 20, a switch unit 30 and a control module 40.Ontology 10 can be presentation It can be for the side of hollow form, and ontology 10 and be hermetically fixedly installed a lid 11.About the outer of ontology 10 and lid 11 Type can be according to changes in demand, and as shown in the figure is only a wherein demonstration aspect.In practical applications, lid 11, which can be, matches Multiple screws and relevant containment member are closed, to be hermetically fixedly installed on the side of ontology 10；Alternatively, lid 11 can be and match Close the side that viscose bonding is set to ontology 10.In different applications, ontology 10 is set in which can be integrated molding with lid 11 It sets.

Two filter plates 12 are hermetically fixedly installed on ontology 10 in contrast to the side for being provided with lid 11, and two are filtered The inner sidewall of plate 12, lid 11 and ontology 10 will be formed with an enclosure space SP in the inside of ontology 10 jointly.Each filter plate 12 can be and are hermetically fixedly installed in ontology 10 using viscose, alternatively, the periphery of two filter plates 12 can be set setting There is a sealing ring, and two filter plates 12 can hermetically be fixedly installed on the side of ontology 10 through sealing ring.

The one side wall of ontology 10 is formed there are two air inlet 101, and enclosure space SP can be by two air inlets 101 and outer Connection.It in the present embodiment, is by the tool of ontology 10 there are two for air inlet 101, but the quantity of air inlet 101, external form etc. are several What is designed, can be according to changes in demand not to be limited as shown in the figure.In addition, therefore two air inlets in the present embodiment figure 101 are set to for one of long side wall of ontology 10, but two air inlets 101 are also possible to be respectively arranged at ontology 10 One long side wall, one short side wall, or can be and be respectively arranged at different short side walls, presses down or is same short side wall.

One end of two tube bodies 20 is correspondingly connected with two air inlets 101, and the other end of each tube body 20 then connects a confession Gas equipment A.In specific application, each tube body 20 can be the auxiliary parts such as the relevant gas-tpe fitting of cooperation, quick union, And hermetically it is connected with air inlet 101.Air feed equipment A can be controlled and be generated scheduled gas into tube body 20, and citing comes It saying, air feed equipment A can be to provide various clean gas (such as XCDA, CDA) or inert gas (such as nitrogen) etc., in This is without restriction.

Switch unit 30 is connected with two tube bodies 20, and switch unit 30 can be controlled to block the connected state of tube body 20 State；Specifically, switch unit 30 can be electric-air valve.The electric connection switch unit 30 of control module 40, and control module 40 can receive the signal that external electronic (e.g. industrial computer, microprocessor etc.) is transmitted, to correspond to control switch Unit 30 acts, and changes the connected state of tube body 20 accordingly.

Specifically, control module 40 can receive the enabling signal S1 that external electronic is transmitted, with control switch Unit 30 acts, and gas provided by air feed equipment A is enable to enter in enclosure space SP by tube body 20.In other words, it switchs Unit 30 can be to maintain the state often closed in the case where not controlled molding block 40 controls, and tube body 20 will correspond to not connect Logical state, and when control module 40 receives enabling signal S1, switch unit 30 can just be controlled and make tube body 20 by not The state of connection is converted to the state of connection, so that gas provided by air feed equipment A is entered by tube body 20 accordingly and closes Space S P.

Relatively, when control module 40 is received from the shutdown signal S2 that external electronic is transmitted, control Module 40 acts controllable switch unit 30, so that tube body 20 changes into non-interconnected logical state by the state being connected to, thus Make gas provided by air feed equipment A, enclosure space SP can not be entered back into.

In practical applications, it can also correspond to control air feed equipment A's while 40 control switch unit 30 of control module Movement, for example, the movement of 40 control switch unit 30 of control module, when so that tube body 20 being rendered as disconnected state, control Molding block 40 can control air feed equipment A stopping simultaneously and provide gas in tube body 20.

It should be noted that being with air feed equipment A through single a 20 connection switch unit of tube body in the present embodiment schema 30, and for switch unit 30 connects ontologies 10 through two tube bodies 20, but the quantity of tube body 20 is to be limited as shown in the figure, For example, switch unit 30 can be with air feed equipment A and be connect by two tube bodies 20, and is connected to switch unit 30 and supplies Two tube bodies 20 of gas equipment A then can be and connect ontology 10 and be connected with two tube bodies 20 of switch unit 30.

When 40 control switch unit 30 of control module acts, when so that tube body 20 being rendered as connected state, air feed equipment A institute The gas of offer will be continued into enclosure space SP by tube body 20, and the gas pressure in enclosure space SP is greater than When one predetermined pressure, gas in enclosure space SP is by by multiple stomata (not shown) of each filter plate 12, and equably It is discharged by ontology 10 in contrast to the side for being provided with lid 11.

As shown in figure 3, the blowning installation 100 of the utility model is particularly suitable for suitable for semiconductor production workshop One wafer cassette bogey B.Specifically, wafer cassette bogey B can be include platform a B1, the platform B1 to Carry a wafer cassette F, there is the wafer cassette bogey B door opening module B2, the door opening module B2 can be controlled, will The door-plate F1 for being set to the wafer cassette F on platform B1 is opened, and door-plate F1 is taken away wafer cassette F, thus make inside wafer cassette F with Wafer can be set in wafer cassette F or will be brilliant by outer connection, whereby, external mechanical arm or personnel according to demand Circle in wafer cassette F by taking out.

The blowning installation 100 of the utility model can be the side for being fixedly installed on wafer cassette bogey B, and dress of blowing The ontology 10 for setting 100 can be the corresponding top for being located at door opening module B2.When 40 control switch unit 30 of control module act, And when air feed equipment A being made persistently to convey predetermined gas to enclosure space SP by tube body 20, blowning installation 100 will be to a predetermined party To (such as can be direction) to door opening module B2, predetermined gas provided by air feed equipment A is continuously and evenly discharged, borrows This, during the inner space of wafer cassette F is with outer be connected to, blowning installation 100 is provided with door in wafer cassette F for corresponding originally Around the position of plate F1 (e.g. front), it is formed with one of air-flow wall, outside is dirty to be directly entered crystalline substance so as to be greatly reduced Probability inside circle box F.

In specific application, control module 40 can be with door opening module B2 communication connection, and door opening module B2 is being opened Before opening the door-plate F1 of wafer cassette F, after opening wafer cassette F door-plate F1, or during opening the door-plate F1 of wafer cassette F, The enabling signal S1 is transmitted to control module 40.In another practical application, control module 40 is also possible to open the door with control Associated processing device (such as industrial computer, microprocessor etc.) communication connection of module B2, and associated processing device control is opened Door module B2 movement, when so that door opening module B2 opening the door-plate F1 of wafer cassette F, associated processing device can be while transmit institute Enabling signal S1 is stated to control module 40.Or in another different application, it is related that control module 40 can be cooperation Electronic component, whether have the relevant action signal of transmitting to door opening module B2 to capture or detect associated processing device, when Relevant electronic component, which captures or detect associated processing device, has the relevant action signal of transmitting to door opening module B2, then phase Pass electronic component then can be correspondence and send a signal to control module 40, and control module 40 can then be passed associated electrical component The signal passed is considered as aforementioned enabling signal.

The mode that enabling signal S1 is received about above-mentioned control module 40, can be received in wireless or wired mode, It is without restriction in this.The electric connection mode of control module 40 and switch unit 30 can also be with wired or wireless Mode connects.Similarly, the connection of the relative control apparatus of control module 40 and door opening module B2 or control door opening module B2 Mode can also be connected through wireless or wired mode.It is noted that two tube bodies 20 can be connected to it is same A switch unit 30, alternatively, each tube body 20, which can be, is connected with single a switch unit 30 (that is, the quantity of switch unit 30 It is identical as the quantity of tube body 20), it is without restriction in this.

About the quantity of switch unit 30, it is not limited with single in scheming, in different applications, can be each pipe Body 20 is connected with a switch unit 30, and control module 40 can individually control each switch unit 30 and act.In other words, exist Blowning installation 100 has in the embodiment of multiple switch unit 30, it is understood that there may be has the switch list of 40 control section of control module Member 30 is opened, and gas provided by air feed equipment A is made to be only capable of entering enclosure space SP by the tube body 20 of part.

The gaseous species provided by air feed equipment A and quantity can be to be become according to demand, for example, air feed equipment A can be to provide single kind of predetermined gas, and can then select between air feed equipment A and switch unit 30 according to demand with single Tube body 20 or a plurality of tube body 20 are connected；Air feed equipment A provide two kinds of predetermined gas embodiment in, air feed equipment A with It then can be to correspond between switch unit 30 and be connected through two tube bodies 20 independent of each other with switch unit 30, ontology 10.

In the embodiment that air feed equipment A provides two kinds of predetermined gas to enclosure space SP through two tube bodies 20, blow Device 100, which then can be, to be correspondingly arranged there are two switch unit 30, and control module 40 then can be according to scheduled design (example The editable program being such as built into control module 40), receiving enabling signal S1, shutdown signal S2 or other predetermined letters Number when, control at least one switch unit 30 movement so that at least one gas provided by air feed equipment A can enter closing Space S P.

Also referring to shown in Fig. 1, Fig. 3 and Fig. 4, Fig. 4 is shown as the second reality of the blowning installation 100 of the utility model Apply the block schematic diagram of example.As shown, the present embodiment and previous embodiment it is maximum the difference is that: blowning installation 100 is also Can be includes a sensing unit 50, and sensing unit 50, which can be, is electrically connected blowning installation in wireless or wired mode 100.Whether the door-plate F1 that sensing unit 50 can be used to sense the wafer cassette F for being set to platform B1 is turned on, corresponding to transmit A sensing signal to control module 40, control module 40 then can be according to sensing signal, corresponding control switch unit 30.It is specific next It says, control module 40 can be according to sensing signal, and when the door-plate F1 of wafer cassette F is turned on, control switch unit 30 is dynamic Make, so that tube body 20 is rendered as connected state.Wherein, sensing unit 50 can be the door-plate for sensing wafer cassette F in any way Whether F1 has been turned on.

In practical applications, sensing unit 50 can be after receiving the control signal that is issued of control module 40, just into Row sensing operation, and different sensing signals is returned to control module 40 according to sensing result；Alternatively, sensing unit 50 can be When the position for sensing wafer cassette F and being provided with door-plate F1 changes (the e.g. door-plate F1 of wafer cassette F be turned on or by Close), corresponding sensing signal occurs to control module 40.

It about the quantity of sensing unit 50 and its position of sensing, can be according to changes in demand, for example, dress of blowing Setting 100 can be sensing unit 50 there are two tools, and one of sensing unit 50, which can be, is positioned adjacent to be set to platform B1 Wafer cassette F setting door-plate F1 position, be used to sense whether wafer cassette F is provided with door-plate F1；Another sensing unit 50 It then can be and be arranged adjacent to door opening module B2, and whether the position or door opening module B2 that are used to sense door opening module B2 are moved Make；Two sensing units 50 can be simultaneously operation, and control module 40 can be and receive any one sensing unit 50 transmitted sensing signal when, all control switch unit 30 act.Through the design of two sensing units 50, list can be reduced In the state that one sensing unit 50 breaks down, blowning installation 100 may be when the door-plate F1 of wafer cassette F be turned on, not just The Probability of air-flow wall really is formed in the front of wafer cassette F.

The side of the 3rd embodiment of the blowning installation of the utility model is shown as also referring to Fig. 1, Fig. 3 and Fig. 5, Fig. 5 Block schematic diagram.As shown, the present embodiment and previous embodiment it is maximum the difference is that: blowning installation 100 can also include There are a flow controlling unit 60, a flow detecting unit 70 and an air pressure detecting unit 80.In specific application, blowning installation 100 to can be only include at least one of flow controlling unit 60, flux detecting unit 70 and air pressure detecting unit 80, And being not limited to need to include three simultaneously.

Flow controlling unit 60 is connected with tube body 20, and flow controlling unit 60 is electrically connected control module 40, and controls Molding block 40 can control the movement of flow controlling unit 60, to change the gas flow for entering enclosure space SP by tube body 20.? In specific application, control module 40 can for example be electrically connected to the electronic equipment with display screen and input equipment, And related personnel can be through the electronic equipment is operated, to adjust flow controlling unit 60 through control module 40, to change Become the gas flow that can pass through flow controlling unit 60.In practical applications, air feed equipment A can also be with preliminary flow control Making mechanism, and signified flow controlling unit 60 then can be the flow control mechanism of cooperation air feed equipment A herein, subtleer, It is accurately controlled the gas flow by its tube body 20 connected.

In different applications, the flow controlling unit 60 is also possible to be operated, and changes and entered by tube body 20 The gas flow of enclosure space SP.For example, flow controlling unit 60 can be is operated by related personnel, and corresponds to change energy Pass through the gas flow of flow controlling unit 60.In other words, flow controlling unit 60 signified in the present embodiment can be according to The powered version that control module 40 controls or the manual form that can be operated manually can be passed through by selecting according to demand.

Flux detecting unit 70 is connected with tube body 20, and flux detecting unit 70 is capable of measuring the gas stream in tube body 20 Amount, and flux detecting unit 70 is electrically connected control module 40, and flux detecting unit 70 can transmit relevant measurement result letter Number to control module 40.Control module 40 then can control air feed equipment A as a result, corresponding to according to measured by flux detecting unit 70 Movement or flow controlling unit 60, to ensure that air feed equipment A is transferred to gas flow in enclosure space SP by tube body 20. In practical applications, according to the length of tube body 20, single a tube body 20, which can be, is provided with multiple flux detecting units 70, such as It can be and the position of air feed equipment A is provided with a flux detecting unit 70, and in addition adjacent to the position of ontology 10 It is provided with a flux detecting unit 70, thereby ensures that the gas flow of each section of tube body 20.In addition, in multiple 20 phases of tube body It connects, to be commonly connected in the embodiment of air feed equipment A, multiple tube bodies 20, which can be, is connected with single a flux detecting list Member 70.In different applications, flux detecting unit 70 and flow controlling unit 60 above-mentioned, which can be, is integrated into a flow mould Block P.

Air pressure detecting unit 80 is connected with tube body 20, and air pressure detecting unit 80 can be to measure the gas in tube body 20 Pressure.In specific application, air pressure detecting unit 80, which can be, is electrically connected control module 40, and air pressure detecting unit 80 Relevant measurement signals can be transmitted to control module 40.In another embodiment, air pressure detecting unit 80 also can have One display unit (e.g. display, pointer gauge), and the gas pressure for the tube body 20 that it is connected can be displayed in real time.Foundation The demand of actual state, air pressure detecting unit 80, which can be, only has the display unit, without being electrically connected control module 40. In the embodiment that air pressure detecting unit 80 is electrically connected control module 40, control module 40 be can be according to air pressure detecting unit Measured by 80 as a result, with corresponding control air feed equipment A, switch unit 30, flow controlling unit 60 etc., so that the one of ontology 10 The gas of set rate can be discharged in side.In practical applications, air pressure detecting unit 80 is set to the position of tube body 20, can be according to According to changes in demand, for example, air pressure detecting unit 80 can be the tube body being set between switch unit 30 and air feed equipment A 20.It is connected through a branch pipe 21 with tube body 20 in addition, air pressure detecting unit 80 can be, in this way, working as air pressure detecting unit 80 When breaking down, air pressure detecting unit 80 will not stop the circulation of the gas in tube body 20.

According to actual demand, multiple air pressure detecting units 80 have also been can be set in single a tube body 20, alternatively, multiple One end of tube body 20 is interconnected, and to be commonly connected in the embodiment of air feed equipment A, multiple tube bodies 20 are also possible to connect simultaneously It is connected to single a air pressure detecting unit 80.In different applications, air pressure detecting unit 80 and flux detecting unit 70 can be It is integrated into a detecting module (not shown).

Also referring to Fig. 1, Fig. 3 and Fig. 6, Fig. 6 is that the square of the fourth embodiment of the blowning installation of the utility model shows It is intended to.The present embodiment and previous embodiment it is maximum the difference is that: blowning installation 100 can also be to include a filtering list Member 90, filter element 90 connect two tube bodies 20.Filter element 90 enters in enclosure space SP to be filtered through tube body 20 Gas, and the filter effect of filter element 90 is better than the filter plate 12 in ontology 10；It is sealed that is, being entered by tube body 20 The gas in space S P is closed, before not entering enclosure space SP, has passed through filter element 90 and has fully filtered.

In the embodiment that tube body 20 is not provided with filter element 90, envelope can be piled up in by the impurity that filter plate 12 is obstructed It closes in space S P, and blowning installation 100 is after prolonged use, the impurity being piled up in enclosure space SP will likely block The stomata of filter plate 12, and then cause the filter effect of filter plate 12 to decline, and the lateral outlet by ontology 10 may also be influenced The uniformity of gas out.Relatively, be set to the filter element 90 of tube body 20, after prolonged use, can be convenient into Row replacement, and be not easy to influence the running of the filter plate 12 of ontology 10.

Also referring to Fig. 1, Fig. 3 and Fig. 7, Fig. 7 is that the square of the 5th embodiment of the blowning installation of the utility model shows It is intended to.The present embodiment and previous embodiment it is maximum the difference is that: blowning installation 100 can also be comprising that there are two filterings is single Member 90, two correspondences of filter element 90 are connected with two tube bodies 20.That is, blowning installation 100 can be according to tube body 20 quantity, and there is corresponding number of filter element 90, whereby, it will can ensure that and closing sky entered by any one tube body 20 Between SP gas, all passed through filtering, and also can extend replacement filter element 90 time.

It is noted that above-mentioned control module 40 is in practical applications, can be according to demand is that various computer is set Standby (such as personal computer, industrial computer, tablet computer, smartphone etc.)；Alternatively, control module 40 is also possible to Integration is set in large-scale computer equipment, for example, control module 40 can be through relevant electric connection line, with The associated host of mass computing machine equipment is electrically connected, and control module 40 can be and be correspondingly arranged in mass computing machine equipment In shell, signified mass computing machine equipment for example can be control device or the factory of wafer cassette bogey B itself herein It is used to control the control device etc. of wafer cassette bogey B in room, it is without restriction herein.

It should be noted that in Fig. 5, Fig. 6 and Fig. 7, ontology 10, switch unit 30, flow controlling unit 60, flux detecting Between unit 70, air pressure detecting unit 80 and filter element 90, it can be and demand is provided with an at least tube body 20.

In conclusion the blowning installation 100 of the utility model, which can be applicable in, is installed on wafer cassette bogey B, and control Module 40 can be reception and can be cooperation from the wafer cassette bogey B enabling signal transmitted or control module 40 Sensing unit 50, to sense whether the door-plate F1 of wafer cassette F is turned on, and blowning installation 100 can be in the door-plate F1 quilt of wafer cassette F When unlatching, wafer cassette F is provided with formation air-flow wall around door-plate F1, whereby, is greatly reduced external dirty into wafer cassette Probability in F.

Claims (9)

1. a kind of blowning installation, which is characterized in that the blowning installation includes:

One ontology, has an at least air inlet, and the air inlet is arranged through the ontology；

Multiple filter plates are fixedly installed in the ontology, and multiple filter plates are formed with a closing in the ontology Space, the enclosure space can be connected to by the air inlet with outer；Each filter plate has multiple stomatas；

An at least tube body, one end connect the air inlet, and the other end of the tube body connects an air feed equipment；

One switch unit is connected with the tube body, and the switch unit can be controlled to block the connected state of the tube body State；

One control module is electrically connected the switch unit.

2. blowning installation according to claim 1, which is characterized in that the blowning installation is fixedly installed on a wafer carrying The side of device, the wafer bearing device have a platform, and the platform is to carry a wafer cassette, the wafer carrying dress Setting has a door opening module, and the door opening module can open the door-plate for being set to the wafer cassette of the platform, the air blowing Device can blow to a predetermined direction, and an air-flow wall is formed before the door-plate of the wafer cassette, and the blowning installation also includes There is an at least sensing unit, the sensing unit is electrically connected the control module, and the sensing unit is used to sense to be set to Whether the door-plate of the wafer cassette of the platform is turned on, to transmit a corresponding sensing signal to the control module, The control module can control the switch unit according to the sensing signal.

3. blowning installation according to claim 1, which is characterized in that the blowning installation also includes a flow control list Member is connected with the tube body, and the flow controlling unit is electrically connected the control module, and the control module can control The flow controlling unit movement, to change the gas flow for entering the enclosure space by the tube body.

4. blowning installation according to claim 1, which is characterized in that the blowning installation also includes a flow control list Member is connected with the tube body, and the flow controlling unit can be operated, and enters the closing by the tube body to change The gas flow in space.

5. blowning installation according to claim 1, which is characterized in that the blowning installation also includes a flux detecting list Member is connected with the tube body, and the flux detecting unit is capable of measuring the gas flow in the tube body, the flux detecting Unit is electrically connected the control module.

6. blowning installation according to claim 1, which is characterized in that the blowning installation also includes a flow module, The flow module is electrically connected the control module, and the flow module connects the tube body, and the flow module includes There are a flow controlling unit and a flow detecting unit, the flow controlling unit can be controlled, and pass through the tube body to change Into the gas flow of the enclosure space, the flux detecting unit is capable of measuring the gas flow in the tube body.

7. blowning installation according to claim 1, which is characterized in that the blowning installation also includes that air pressure detecting is single Member is connected with the tube body, and the air pressure detecting unit is capable of measuring the gas pressure in the tube body, the air pressure detecting Unit is electrically connected the control module.

8. blowning installation according to claim 1, which is characterized in that the blowning installation also includes that at least one filtering is single Member is connected with the tube body, and the filter element can be filtered through the gas that the tube body enters the enclosure space.

9. blowning installation according to claim 1, which is characterized in that the ontology has multiple air inlets and multiple The tube body, multiple air inlets are correspondingly connected with multiple tube bodies, multiple tube bodies respectively with the air feed equipment phase Connection, each tube body are connected with a filter element, each filter element can be filtered through corresponding tube body and into Enter the gas of the enclosure space.