CN209162179U - Heating device and filming equipment - Google Patents
Heating device and filming equipment Download PDFInfo
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- CN209162179U CN209162179U CN201821183744.1U CN201821183744U CN209162179U CN 209162179 U CN209162179 U CN 209162179U CN 201821183744 U CN201821183744 U CN 201821183744U CN 209162179 U CN209162179 U CN 209162179U
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- heating
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Abstract
The utility model relates to a kind of heating devices, including heating plate, have multiple mutually independent heating zones；Heating component is set to the heating plate, for carrying out temperature control respectively to the multiple mutually independent heating zone；And removable temperature measurement component, it can be moved relative to the heating plate, for monitoring the temperature of the heating plate different location.The utility model further relates to a kind of filming equipment including the heating device.The heating device can be uniformly heated up substrate.
Description
Technical field
The utility model relates to technical field of heat treatment, more particularly to a kind of heating device and filming equipment.
Background technique
During manufacture of solar cells, need to add substrate (such as stainless steel lining bottom) using heating device
Heat, so that battery material can preferably be deposited on substrate surface.The uniform performance that battery material deposits on substrate is to the sun
The production of energy battery is extremely important, but due to structure etc., the edge of heating device radiates faster compared to central area,
Cause the temperature in edge region lower than central area, is deposited so as to cause the central area of substrate and marginal portion
Battery material performance has bigger difference.
Utility model content
Based on this, it is necessary to provide a kind of heating device and filming equipment that can be evenly heated substrate.
A kind of heating device, comprising:
Heating plate has multiple mutually independent heating zones；
Heating component is set to the heating plate, for carrying out temperature respectively to the multiple mutually independent heating zone
Degree control；And
Removable temperature measurement component, can be moved relative to the heating plate, for monitoring heating plate difference position
The temperature set.
The removable temperature measurement component includes: in one of the embodiments,
The probe of multiple temperature sensors, the multiple temperature sensor is alternatively arranged along first direction X；And
Mobile mechanism connect with the multiple temperature sensor, for driving the multiple temperature sensor along second party
It is mobile to Y.
The first direction X is perpendicular to the second direction Y in one of the embodiments,.
The multiple heating zone is along the first direction X and/or second direction Y in one of the embodiments,
It is arranged successively.
The multiple heating zone includes center heating zone and multiple edge heatings point in one of the embodiments,
Area, the heating component include:
First heating element, while being set in the center heating zone and the multiple edge heating subregion, it is used for
The center heating zone and the multiple edge heating subregion are heated simultaneously；And
Multiple second heating elements are respectively arranged in the multiple edge heating subregion, for respectively to the multiple
Edge heating subregion carries out independent heating.
The multiple edge heating subregion is evenly provided on center heating zone edge in one of the embodiments,
The both ends that the second direction Y is oppositely arranged.
In one of the embodiments, each edge heating subregion include be arranged successively along first direction X it is more
A edge heating child partition is provided with second heating element of independent control in each edge heating child partition.
First heating element is resistance heating wire in one of the embodiments, and second heating element is red
Additional thermolamp.
A kind of filming equipment, including the heating device and substrate.
The filming equipment further includes plating membrane carrier in one of the embodiments, and the plating membrane carrier can be relative to
The heating device is moved along the first direction X.
Heating device provided by the utility model, by the way that multiple heating zones are arranged in the heating plate, and to described
Multiple heating zones carry out independently computer heating control, the temperature of each position of the heating plate can be made uniform, so as to right
Substrate is uniformly heated up；By the way that moveable temperature measurement component is arranged, temperature measurement component can pass through mobile mode real-time monitoring
The temperature of each position of heating plate, such as the temperature field of the heating plate can be obtained by the removable temperature measurement component
Distribution, so as to more precisely control the temperature of each position of the heating plate, enables the heating device more equal
The substrate is heated evenly.
Detailed description of the invention
Fig. 1 is the overlooking structure diagram for the heating device that an embodiment of the present invention provides；
Fig. 2 is the side structure schematic view for the filming equipment that an embodiment of the present invention provides.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, by the following examples, it and ties
Attached drawing is closed, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only to solve
The utility model is released, is not used to limit the utility model.
Referring to Fig. 1, the utility model provides a kind of heating device 100, including heating plate 110, heating component 120 and can
Mobile temperature measurement component 130.The heating plate 110 has multiple mutually independent heating zones 140.The heating component 120 is set
It is placed in the heating plate 110, for carrying out temperature control respectively to the multiple mutually independent heating zone 140.It is described can
Mobile temperature measurement component 130 can be moved relative to the heating plate 110, for measuring 110 different location of heating plate
Temperature.
Heating device 100 provided by the utility model heats the heating plate 110 by the heating component 120, described
Heating plate 110 carries out the mode of heat radiation, to heat to substrate 200.By the way that multiple add is arranged in the heating plate 110
Hot subregion 140, and independently computer heating control is carried out to the multiple heating zone 140, each position of the heating plate 110 can be made
The temperature set is uniform, so as to be uniformly heated up to the substrate 200.By the way that moveable temperature measurement component 130 is arranged,
Temperature measurement component 130 can be by the temperature of each position of heating plate 110 described in mobile mode real-time monitoring, such as can pass through institute
The thermo parameters method that removable temperature measurement component 130 obtains the heating plate 110 is stated, so as to more precisely control described add
The temperature of each position of hot plate 110, enables the heating device 100 more uniformly to heat the substrate 200.
The heat that the heating plate 110 can be heated by the heating component 120, and the heating component 120 is generated with
The mode of heat radiation is discharged.The heating plate 110 can be made of such as graphite of the material with superior heat radiation performance, a side
Face, the heat that the heating component 120 generates can rapidly be spread in the heating plate 110, to be conducive to described add
Temperature is uniformly distributed on hot plate 110, and on the other hand, the heat in the heating plate 110 can rapidly diffuse to the substrate
200, so as to rapidly and uniformly heat the substrate 200.
The heating zone of the heating plate 110 can specifically be carried out there are many division mode according to actual process demand
Setting.In one embodiment, the multiple heating zone 140 may include center heating zone 142 and multiple edge heatings point
Area 144.By controlling the heating of heating plate 110 central area and fringe region respectively, the heating plate 110 can be made
Central area and fringe region temperature it is more uniform.In one embodiment, the multiple heating zone 140 can be along first party
It is arranged successively to X and/or second direction Y, to more easily control the temperature of the multiple heating zone.
The heating component 120 may include multiple heating elements, for carrying out independence to the multiple heating zone 140
Ground heating.The multiple heating element can be separately stratie, infrared heating element, dielectric heating member
One of part, beam heating element, laser heating element etc..The heating component 120 may be disposed at the heating plate 110
Side, such as may be disposed on the surface of the heating plate 110.
In one embodiment, the multiple heating element can be respectively arranged in the multiple heating zone 140.It is described more
A heating element can individually control the heating power in each heating zone, to realize that the independence to each heating zone is controlled
System.
In another embodiment, referring to Fig. 1, the multiple heating element may include the first heating element 122 and multiple
Second heating element 124.First heating element 122 can be set to the center heating zone 142 and the multiple simultaneously
In edge heating subregion 144, for heating the center heating zone 142 and the multiple edge heating subregion 144 simultaneously
Heating plate 110.I.e. described first heating element 122 can carry out whole heating to the heating plate 110.The multiple second heating
Element 124 can be respectively arranged in the multiple edge heating subregion 144, for the multiple edge heating subregion 144 into
Row independently heats.By the way that first heating element 122 and the multiple second heating element 124 is arranged, can make described
The temperature control of heating plate 110 is more flexible.When the removable temperature measurement component 130 detects the heating plate 110 everywhere
When temperature is more uniform, the whole of the heating plate 110 only can be carried out by first heating element 122 and heated.Work as detection
When the temperature difference of temperature and the center heating zone 142 to a certain edge heating subregion 144 exceeds preset value, it can control
The second heating element 124 in the edge heating subregion 144 compensates heating to the edge heating subregion 144, described to make
The temperature holding of heating plate 110 is uniformly distributed.
In one embodiment, first heating element 122 can be stratie, e.g. resistance wire.It is described
Second heating element 124 can be infrared heating element, such as infrared heating fluorescent tube.The service life of the stratie
It is longer, it can be used for carrying out the heating plate 110 prolonged whole heating.The heating speed of the infrared heating element compared with
Fastly, the temperature that can rapidly promote edge heating subregion 144, rapidly make the heating plate 110 edge area temperature and
Central area temperature is consistent.
The removable temperature measurement component 130 may include temperature sensor 132 and mobile mechanism 134.The mobile mechanism 134
It can be connect with the temperature sensor 132, for driving the temperature sensor 132 to be moved relative to the heating plate 110
It is dynamic.The temperature sensor 132 can be contact type temperature sensor or non-contact temperature sensor.In an embodiment
In, the temperature sensor 132 can be thermocouple.The mobile mechanism 134 can be cylinder, motor, link mechanism, cam
One of mechanism etc. or a variety of combinations.
In one embodiment, the mobile mechanism 134 can drive the temperature sensor 132 along the first direction X
And/or the second direction Y motion, it is supervised in real time with the temperature of central area and fringe region to the heating plate 110
It surveys.The moving direction of the temperature sensor 132 can be consistent with the orientation of the multiple heating zone, so as to described more
The temperature of a heating zone carries out real-time monitoring.For example, when the multiple heating zone is arranged successively along the second direction Y
When, then the mobile mechanism 134 can drive the temperature sensor 134 to be moved along the second direction.
In one embodiment, the quantity of the temperature sensor 132 can be multiple.The multiple temperature sensor 132
It can be connect simultaneously with the mobile mechanism 132.The mobile mechanism 132 can drive the multiple temperature sensor 132 simultaneously
It is mobile.In one embodiment, the probe 1322 of the multiple temperature sensor 132 can be along the first direction X successively row of interval
Column.The mobile mechanism 134 can only drive the multiple temperature sensor 132 to move along the second direction Y, can be real simultaneously
Now to the temperature real-time monitoring of different location in the heating plate 110 in a first direction X and second direction Y.In one embodiment,
The first direction X can be real so as to carry out to positions more in the heating plate 110 perpendicular to the second direction Y
When monitor.
In one embodiment, the probe 1322 of the multiple temperature sensor 132 can be uniformly distributed in the heating plate
On central area and fringe region.In one embodiment, the orientation of the probe 1322 of the multiple temperature sensor 132
And/or the moving direction of the multiple temperature sensor 132 can be corresponding with the orientation of the multiple subregion, so as to described
The temperature realization of multiple subregions preferably detects.
In one embodiment, the heating device 100 is used to carry out phase along the first direction X with the substrate 200
The substrate 200 is heated during to movement.Since substrate 200 is along the second direction Y perpendicular to the first direction X
Two lip temperatures and central area temperature difference it is bigger, can make the multiple heating zone along the second direction Y according to
Secondary arrangement, for so that the temperature at two edges and the temperature of central area along the second direction Y are consistent.It can make institute
Stating multiple edge heating subregions 144, X is uniformly arranged on the both ends of the center heating zone 101 in a second direction.
In one embodiment, each edge heating subregion 144 may include multiple edge child partitions 1442, Mei Yisuo
Settable individual second heating element 124 of edge child partition 1442 is stated, is carried out so as to the lip temperature to heating plate 110
More critically control.When the movable temperature measurement device detects the whole temperature of the edge heating subregion 142 of the heating plate
When spending lower, the second heating element 124 that can be controlled simultaneously in most multiple edge child partitions 1442 is heated.When described
Movable temperature measurement device detects the temperature of the edge child partition 1442 in a certain corner of the edge heating subregion 142 of the heating plate
When spending lower, the second heating element 124 that can control in the edge child partition 1442 is heated.
In one embodiment, the multiple subregion may include center heating zone 142 and multiple edge heating subregions
144.The multiple edge heating subregion 144 can be distributed evenly in the center heating zone 142, and X is set relatively in a second direction
The both ends set.The second heating element 124 of multiple independent controls is provided in each edge heating subregion 144.It is described more
A second heating element 124 can arrange along the first direction X uniform intervals.The movable temperature measurement device 130 may include one
A mobile mechanism 134 and multiple temperature sensors 132.The mobile mechanism 134 can connect with the multiple temperature sensor 132
It connects, for driving the multiple temperature sensor 132 to move along the second direction X.The spy of the multiple temperature sensor 132
First 1322 can correspond to along the spaced multiple settings of second heating elements 124 of the first direction X.
It is appreciated that the moving direction of the multiple heating zone, the multiple temperature sensor and the mobile mechanism
It can be reasonably arranged according to actual needs, and be not limited to the above embodiment cited set-up mode.
The heating device can further comprise controller (not shown), the controller can respectively with the multiple heating
Element connection, such as can be connect respectively with first heating element 132 and the multiple second heating element 134, so as to
Individually control opening and closing and the heating power of each heating element.
Referring to Fig. 2, the utility model also provides a kind of filming equipment 10, including the heating device 100 and plated film carry
Body 300.The plated film carrier 30 as one kind 0 is for carrying the substrate 200.In one embodiment, the plated film carrier 30 as one kind 0 can be relative to
The heating device 200 is moved along the first direction X, to drive the substrate 200 relative to 200 edge of heating device
The first direction X movement.
In one embodiment, the heating device 200 may be disposed at the top of the chamber of the filming equipment 10.The plating
The loading end of membrane carrier 300 can be oppositely arranged during the motion with the heating plate 110.The heat that the heating plate 110 distributes
Amount can be heated the substrate 200 on the plated film carrier 30 as one kind 0 in the form of heat radiation.
The filming equipment 10 may also include second mobile mechanism's (not shown) connecting with the plated film carrier 30 as one kind 0, use
It is mobile relative to the heating plate 110 in the drive plated film carrier 30 as one kind 0.
It is appreciated that the filming equipment 10 can not also include the plated film carrier 30 as one kind 0 or the plating membrane carrier
300 can also be fixedly installed relative to the heating device 200.The substrate 200 can also be fixedly installed in the heating plate 110
It is heated by the heating plate 110.It is heated for example, the substrate 200 can be directly placed in the heating plate 110.
The filming equipment can be vacuum coating equipment, such as physical vacuum physical vapour deposition (PVD) (PVD) equipment and change
Learn vapor deposition (CVD) equipment.The heating device 100 may be disposed at any one in the vacuum coating equipment and need to lining
In the vacuum chamber that bottom 200 is heated, such as pre-add hot cell, process chamber etc..
Heating device and filming equipment provided by the utility model, structure is simple, easy to operate, can be to underlayer temperature
Accurate control, so that substrate is uniformly heated.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, all should be considered as described in this specification.
Above-described embodiments merely represent several embodiments of the utility model, the description thereof is more specific and detailed,
But it cannot be understood as the limitations to utility model patent range.It should be pointed out that for the common skill of this field
For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to
The protection scope of the utility model.Therefore, the scope of protection shall be subject to the appended claims for the utility model patent.
Claims (10)
1. a kind of heating device characterized by comprising
Heating plate (110) has multiple mutually independent heating zones (140)；
Heating component (120) is set to the heating plate (110), for the multiple mutually independent heating zone (140)
Temperature control is carried out respectively；And
Removable temperature measurement component (130), can be moved relative to the heating plate (110), for monitoring the heating plate
(110) temperature of different location.
2. heating device according to claim 1, which is characterized in that the removable temperature measurement component (130) includes:
The probe (1322) of multiple temperature sensors (132), the multiple temperature sensor (132) is arranged along the interval first direction X
Column；
Mobile mechanism (134) connect, for driving the multiple temperature sensor with the multiple temperature sensor (132)
(132) Y is mobile in a second direction.
3. heating device according to claim 2, which is characterized in that the first direction X is perpendicular to the second direction
Y。
4. heating device according to claim 2, which is characterized in that the multiple heating zone (140) is along described first
Direction X and/or the second direction Y are arranged successively.
5. heating device according to claim 2, which is characterized in that the multiple heating zone (140) includes that center adds
Hot subregion (142) and multiple edge heating subregions (144), the heating component (120) include:
First heating element (122), while being set to the center heating zone (142) and the multiple edge heating subregion
(144) in, for being heated simultaneously to the center heating zone (142) and the multiple edge heating subregion (144)；With
And
Multiple second heating elements (124) are respectively arranged in the multiple edge heating subregion (144), for respectively to institute
It states multiple edge heating subregions (144) and carries out independent heating.
6. heating device according to claim 5, which is characterized in that the multiple edge heating subregion (144) is equably
It is arranged in the center heating zone (142) along the both ends that the second direction Y is oppositely arranged.
7. heating device according to claim 6, which is characterized in that each edge heating subregion (144) includes
The multiple edge heating child partitions (1442) being arranged successively along first direction X, in each edge heating child partition (1442)
It is provided with second heating element (124) of independent control.
8. according to the described in any item heating devices of claim 5~7, which is characterized in that first heating element (122) is
Resistance heating wire, second heating element (124) are infrared heat lamp.
9. a kind of filming equipment, which is characterized in that including heating device as claimed in any one of claims 1 to 8.
10. filming equipment according to claim 9, which is characterized in that it further include plating membrane carrier (300), the heating dress
The removable temperature measurement component (130) set includes multiple temperature sensors (132), the probe of the multiple temperature sensor (132)
(1322) it is alternatively arranged along first direction X；
The plating membrane carrier (300) can move relative to the heating device along the first direction X.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821183744.1U CN209162179U (en) | 2018-07-25 | 2018-07-25 | Heating device and filming equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821183744.1U CN209162179U (en) | 2018-07-25 | 2018-07-25 | Heating device and filming equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209162179U true CN209162179U (en) | 2019-07-26 |
Family
ID=67327643
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821183744.1U Active CN209162179U (en) | 2018-07-25 | 2018-07-25 | Heating device and filming equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209162179U (en) |
-
2018
- 2018-07-25 CN CN201821183744.1U patent/CN209162179U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 3001, room 6, building No. 7, Rongchang East Street, Beijing economic and Technological Development Zone, Beijing, Daxing District 100176, China Patentee after: Beijing Dingrong Photovoltaic Technology Co.,Ltd. Address before: 3001, room 6, building No. 7, Rongchang East Street, Beijing economic and Technological Development Zone, Beijing, Daxing District 100176, China Patentee before: BEIJING APOLLO DING RONG SOLAR TECHNOLOGY Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210426 Address after: 201, room 518057, building A, No. 1, front Bay Road, Qianhai, Shenzhen Guangdong cooperation zone (Shenzhen Qianhai business secretary Co., Ltd.) Patentee after: Hongyi Technology Co.,Ltd. Address before: 3001, room 6, building No. 7, Rongchang East Street, Beijing economic and Technological Development Zone, Beijing, Daxing District 100176, China Patentee before: Beijing Dingrong Photovoltaic Technology Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20221206 Address after: Room 229, Annex Building, No. 111, Kexue Avenue, Huangpu District, Guangzhou, Guangdong Province, 510663 (office only) Patentee after: Hanwa Technology Co.,Ltd. Address before: 518057 Room 201, building a, No.1 Qianwan 1st Road, Qianhai Shenzhen Hong Kong cooperation zone, Shenzhen City, Guangdong Province Patentee before: Hongyi Technology Co.,Ltd. |
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| TR01 | Transfer of patent right |