CN209148570U - A kind of x-ray photoelectron spectroscopy sampling system - Google Patents
A kind of x-ray photoelectron spectroscopy sampling system Download PDFInfo
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- CN209148570U CN209148570U CN201821792971.4U CN201821792971U CN209148570U CN 209148570 U CN209148570 U CN 209148570U CN 201821792971 U CN201821792971 U CN 201821792971U CN 209148570 U CN209148570 U CN 209148570U
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Abstract
The utility model discloses a kind of x-ray photoelectron spectroscopy sampling systems, for sample to be sent to test macro detection after vacuumizing to sample, comprising: the first sampling device, the second sampling device, vacuum pump apparatus and vacuum pipe；First sampling device includes the first Sample Room, second sampling device includes the second Sample Room, the vacuum pump apparatus is between first Sample Room and second Sample Room, first Sample Room is connected with the vacuum pump apparatus by vacuum pipe with second Sample Room, and the vacuum pipe and first Sample Room and second Sample Room junction are provided with valve；The vacuum pump apparatus is for vacuumizing first Sample Room, and the vacuum pump apparatus is for vacuumizing second Sample Room.X-ray photoelectron spectroscopy sampling system described in the utility model can reduce the waiting time during sample test, improve testing efficiency.
Description
Technical field
The utility model relates to machinery field more particularly to a kind of x-ray photoelectron spectroscopy sampling systems.
Background technique
X-ray photoelectron spectroscopic analysis (X-ray photoelectron spectroscopy, XPS) is a kind of surface
Analytical technology is mainly used to carry out elemental analysis to material surface.The basic principle is that using X-ray and sample surfaces phase interaction
With using photoelectric effect, excitation sample surfaces emit photoelectron, using energy analyzer, measure photoelectron kinetic energy, are calculated
Photoelectronic combination energy, obtains material element type, content and chemical state.
Traditional sampling system is single channel sample introduction, test process are as follows:
1) sample is put into sampling system, vacuumized；
2) when vacuum reaches standard value, sample is sent into analysis room from sampling system and is tested；
3) after the completion of testing, sample is returned into sampling system from analysis room；
4) sampling system destroys vacuum, takes out sample；
5) new sample, retest are put into.
By above-mentioned test process as it can be seen that sampling system in sample test can not sample introduction again, have to that sample is waited to survey
Examination is completed, could sample introduction again, the general sampling system pumpdown time is 30 minutes or so, and sample is larger or porous is easy
Water suction/adsorbed gas pumpdown time one hour or a few hours easily, cause integrated testability speed slow.
In traditional sampling system, sampling system is vacuumized can not be parallel with sample test, greatly wastes the testing time,
It is fair in institution of higher learning or research institution, it is insensitive to cost control；But for third party testing agency, especially need into
For the testing agency of row batch testing, efficiency is extremely low, causes cost high.
Therefore, the existing technology needs to be improved and developed.
Utility model content
In view of above-mentioned deficiencies of the prior art, the purpose of this utility model is to provide a kind of x-ray photoelectron spectroscopies
Sampling system, it is intended to which it is low to solve existing x-ray photoelectron spectroscopy testing efficiency, leads to the problem that testing cost is high.
A kind of x-ray photoelectron spectroscopy sampling system, for sample to be sent to test macro inspection after vacuumizing to sample
It surveys, wherein the x-ray photoelectron spectroscopy sampling system includes: the first sampling device, the second sampling device, vacuum pump dress
It sets and vacuum pipe；
First sampling device includes the first Sample Room, and second sampling device includes the second Sample Room, described true
Empty pump installation is between first Sample Room and second Sample Room, first Sample Room and second Sample Room
It is connected with the vacuum pump apparatus by vacuum pipe, the vacuum pipe and first Sample Room and second sample introduction
Room junction is provided with valve；
For vacuumizing to first Sample Room, the vacuum pump apparatus is used for described the vacuum pump apparatus
Second Sample Room is vacuumized.
The x-ray photoelectron spectroscopy sampling system, wherein the x-ray photoelectron spectroscopy sampling system with
The test macro connection is provided with valve in the x-ray photoelectron spectroscopy sampling system and the test macro junction
Door.
The x-ray photoelectron spectroscopy sampling system, wherein first sampling device further include: be arranged in institute
The first specimen holder in the first Sample Room is stated, the second conveyer being connected with first specimen holder, the first transmission dress
It sets for sending first specimen holder into and sending out the test macro.
The x-ray photoelectron spectroscopy sampling system, wherein second sampling device further include: be arranged in institute
The second specimen holder in the second Sample Room is stated, the second conveyer being connected with second specimen holder, the second transmission dress
It sets for sending second specimen holder into and sending out the test macro.
The x-ray photoelectron spectroscopy sampling system, wherein the second conveyer includes: the first sample feeding rod
With the first pushing component, one end of first sample feeding rod is connected with first specimen holder, first sample feeding rod it is another
End is connected with first pushing component.
The x-ray photoelectron spectroscopy sampling system, wherein the second conveyer includes: the second sample feeding rod
With the second pushing component, one end of second sample feeding rod is connected with second specimen holder, second sample feeding rod it is another
End is connected with second pushing component.
The x-ray photoelectron spectroscopy sampling system, wherein first pushing component include: be fixed on it is described
Pushing hands and the outer pushing hands of the first magnetic force being set to outside first Sample Room in the first magnetic force in first sample feeding rod；
The outer pushing hands of first magnetic force is for driving pushing hands in first magnetic force.
The x-ray photoelectron spectroscopy sampling system, wherein second pushing component include: be fixed on it is described
Pushing hands and the outer pushing hands of the second magnetic force being set to outside second Sample Room in the second magnetic force in second sample feeding rod；
The outer pushing hands of second magnetic force is for driving pushing hands in second magnetic force.
The x-ray photoelectron spectroscopy sampling system, wherein the vacuum pipe is T shape vacuum pipe.
The utility model has the advantages that in Sample Room and second sampling device in the first sampling device described in the utility model
Sample Room is connect with the vacuum pump apparatus valve, makes it possible to carry out two sets of sampling devices using a set of vacuum pump apparatus
It vacuumizes, realizes two sets of sampling device batch samplings, significantly reduce the waiting time during sample test, improve
Testing efficiency has preferable promotional value.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of x-ray photoelectron spectroscopy sampling system described in utility model.
Specific embodiment
The utility model provides a kind of x-ray photoelectron spectroscopy sampling system, to make the purpose of this utility model, technology
Scheme and effect are clearer, clear, and the utility model is further described below.It should be appreciated that described herein
Specific embodiment is only used to explain the utility model, is not used to limit the utility model.
Fig. 1 is the structural schematic diagram of x-ray photoelectron spectroscopy sampling system described in the utility model.As shown in Figure 1, institute
X-ray photoelectron spectroscopy sampling system is stated, is detected for sample to be sent to test macro 5 after vacuumizing to sample, the X is penetrated
Photoelectron Spectroscopy sampling system includes: the first sampling device 1, the second sampling device 2, vacuum pump apparatus 3 and vacuum pipe
4；
First sampling device 1 includes the first Sample Room 11, and second sampling device 2 includes the second Sample Room 21,
The vacuum pump apparatus 3 between first Sample Room 11 and second Sample Room 21, first Sample Room 11 with
Second Sample Room 21 is connected with the vacuum pump apparatus 3 by vacuum pipe 4, the vacuum pipe 4 and described first
Sample Room 11 and 21 junction of the second Sample Room are provided with evacuating valve；
The vacuum pump apparatus 3 for being vacuumized to first Sample Room 11, the vacuum pump apparatus 3 for pair
Second Sample Room 21 is vacuumized.
X-ray photoelectron spectroscopy sampling system described in the utility model, including a set of vacuum pump apparatus 3 and two pack into
Sampling device (the first sampling device 1 and the second sampling device 2), two sets of sampling devices share vacuum pump apparatus 3.The utility model exists
The switch for passing through the valve between control vacuum pump apparatus 3 and two sets of sampling devices during sample test, to realize every set
The independent of sampling system is used or is used simultaneously, solves the problems, such as that existing x-ray photoelectron spectroscopy testing efficiency is low.
X-ray photoelectron spectroscopy sampling system described in the utility model is connect with the test macro 5, is penetrated in the X
Photoelectron Spectroscopy sampling system and the test macro junction are provided with valve.Specifically, the test macro 5 and institute
First Sample Room 11 stated in the first sampling device 1 is connected, in the test macro 5 and first Sample Room 11
Junction is provided with the first sample introduction valve 16, realizes that first sampling device 1 is connect with the test macro 5 by valve；
The test macro 5 is connected with second Sample Room 21 in second sampling device 2, the test macro 5 with
The junction of second Sample Room 21 is provided with the second sample introduction valve 26, realizes second sampling device 2 and the test
System 5 is connected by valve.Sample in first feeding device 1 and second feeding device 2 can pass through institute respectively
State the first sample introduction valve 16 and the second sample introduction valve 26 disengaging test macro 5.
Preferably, first sampling device 1 further include: the first specimen holder in first Sample Room 11 is set
12, the second conveyer being connected with first specimen holder 12, the second conveyer is used for first specimen holder
12 are sent into and send out the test macro 5.Second sampling device 2 further include: be arranged in second Sample Room 21
Second specimen holder 22, the second conveyer being connected with second specimen holder 22, the second conveyer is used for will be described
The test macro 5 is sent into and is sent out to second specimen holder 22.
Preferably, the second conveyer further include: the first sample feeding rod 13 and the first pushing component, first sample introduction
One end of bar 13 is connected with first specimen holder 12, the other end of first sample feeding rod 13 and the first pushing component phase
Even；The second conveyer includes: the second sample feeding rod 23 and the second pushing component, one end of second sample feeding rod 23 and institute
It states the second specimen holder 22 to be connected, the other end of second sample feeding rod 23 is connected with second pushing component.The utility model
One sample feeding rod is set between specimen holder and pushing component, convenient for the sample on specimen holder to be sent to the sample into test macro 5
Frame drags at 6.
Preferably, in first sampling device 1, first pushing component includes: to be fixed on first sample introduction
Pushing hands 15 and the first magnetic force being set to first Sample Room 11 outside pushing hands 14 outside in the first magnetic force on bar 13, described the
The outer pushing hands 14 of one magnetic force is for driving pushing hands 15 in first magnetic force.In second sampling device 2, described second is pushed
Component includes: the outer pushing hands 25 of the second magnetic force being fixed in second sample feeding rod 23 and is set to outside second Sample Room 21
The outer pushing hands 24 of second magnetic force in portion, the outer pushing hands 14 of second magnetic force is for driving pushing hands 15 in second magnetic force.This is practical
Pushing hands outside the novel magnetic force being set to outside Sample Room by manipulation, passes through the magnetic force between pushing hands in pushing hands outside magnetic force and magnetic force
Sample is sent into test macro by pushing hands in effect driving magnetic force.
Preferably, the x-ray photoelectron spectroscopy sampling system, first Sample Room 11 and second Sample Room
21 are connected with the vacuum pump apparatus 3 by vacuum pipe 4, the vacuum pipe 4 and first Sample Room 11 and described
Second Sample Room, 21 junction is provided with evacuating valve.The vacuum pipe 4 is used for the vacuum pump apparatus 3 and described the
One Sample Room 11 and the connection of the second Sample Room 21.It is highly preferred that the vacuum pipe 4 is T shape vacuum pipe 4, i.e. the three of T shape pipe
A end is connect with vacuum pump apparatus 3, the first Sample Room 11, the second Sample Room 21 respectively, realizes the vacuum pump apparatus 3 and institute
State the first Sample Room 11 and second Sample Room 21 connection.Specifically, in the vacuum pipe 4 and first Sample Room 11
Junction the first evacuating valve 17 is set, in the junction setting second of the vacuum pipe 4 and second Sample Room 21
Evacuating valve 27, to realize that the vacuum pump apparatus 3 and the valve of the first Sample Room 11 and the second Sample Room 21 are connect.In sample
In product test process, the switch by controlling first evacuating valve 17 and the second evacuating valve 27 is realized to the first Sample Room
11 and second Sample Room 21 the function of individually or simultaneously vacuumizing, and then realize batch sampling, improve testing efficiency.
The utility model is explained below by specific embodiment.
Embodiment 1
Referring to Fig. 1, the x-ray photoelectron spectroscopy sampling system, comprising: the first sampling device 1, the first Sample Room
11, the outer pushing hands 14 of the first specimen holder 12, the first sample feeding rod 13, the first magnetic force, pushing hands 15, the first sample introduction valve in the first magnetic force
16, the first evacuating valve 17, the second sampling device 2, the second Sample Room 21, the second specimen holder 22, the second sample feeding rod 23, the second magnetic
Pushing hands 25, the second sample introduction valve 26, the second evacuating valve 27, vacuum pump apparatus 3, vacuum tube in the outer pushing hands 24 of power, the second magnetic force
Road 4.
Illustrate the specific implementation steps of x-ray photoelectron spectroscopy sampling system described in the utility model below.
(1) the first extraction valve 17 is closed, after 11 vacuum breaker of the first Sample Room, the first Sample Room 11 is opened, sample is put
Set on the first specimen holder 12, close the second extraction valve 27, open the first extraction valve 17, using vacuum pump apparatus 3 to first into
Specimen chamber 11 vacuumizes.
(2) after 11 vacuum degree of the first Sample Room reaches standard value, the first sampling valve 16 is opened, pushes the extrapolation of the first magnetic force
Hand 14 is by the test sample frame torr 6 of the first specimen holder 12 being fixed in the first sample feeding rod 13 push-in test macro 5, by the
The outer pushing hands 14 of one magnetic force pulls out the first sample feeding rod 13, closes sampling valve 16.
(3) start sample test.
Sample test on (4) first specimen holders 12 simultaneously, opens the second Sample Room 21, another sample is placed on second
On specimen holder 22, the first extraction valve 17 is closed, the second extraction valve 27 is opened, second Sample Room 21 is taken out using vacuum pump apparatus 3
Vacuum after reaching certain value, is opened the first extraction valve 17, is vacuumized simultaneously using vacuum pump apparatus 3 to two sets of sampling devices.
(5) it is completed to the sample test in step (3), and after the vacuum degree of two sets sampling devices reaches standard value, opening
First sampling valve 16 is taken out sample using the first sample feeding rod 13, closes the first sampling valve 16.
(6) the second sampling valve 26 is opened, is sent into test sample another on the second specimen holder 22 using the second sample feeding rod 23
Sample frame torr 6 in test macro 5 takes out the second sample feeding rod 23, closes sampling valve 26.
(7) start sample test.
Sample test on (8) second specimen holders 22 simultaneously, closes the first extraction valve 17 and the second extraction valve 27, to first
Sample Room 11 destroys vacuum, takes out the sample tested, and be put into new sample, opens the first extraction valve 17, is filled using vacuum pump
It sets 3 pair of first Sample Room 11 to vacuumize, after reaching certain value, opens the second extraction valve 27, packed into using vacuum pump apparatus 3 to two
Sampling device vacuumizes simultaneously.
(9) it after the sample test in step (7) is completed, and the vacuum degree of two sets of sampling devices reaches standard value, opens
Second sampling valve 26 is taken out sample using the second sample feeding rod 23, closes the second sampling valve 26.
(10) step (1)-(9) are repeated, until terminating.
The Sample Room in Sample Room and second sampling device point in first sampling device described in the utility model
It is not connect with the vacuum pump apparatus by valve, makes it possible to take out two sets of sampling devices by a set of vacuum pump apparatus
Vacuum, and then two sets of sampling system batch samplings are realized, the sample introduction waiting time has greatly been saved, system has been improved and integrally imitates
Rate has preferable promotional value.
It should be understood that the application of the utility model is not limited to above-mentioned citing, those of ordinary skill in the art are come
It says, it can be modified or changed according to the above description, and all these modifications and variations all should belong to the appended power of the utility model
The protection scope that benefit requires.
Claims (9)
1. a kind of x-ray photoelectron spectroscopy sampling system, for sample to be sent to test macro detection after vacuumizing to sample,
It is characterized in that, the x-ray photoelectron spectroscopy sampling system includes: the first sampling device, the second sampling device, vacuum pump
Device and vacuum pipe；
First sampling device includes the first Sample Room, and second sampling device includes the second Sample Room, the vacuum pump
Device between first Sample Room and second Sample Room, first Sample Room and second Sample Room with
The vacuum pump apparatus is connected by vacuum pipe, and the vacuum pipe and first Sample Room and second Sample Room connect
The place of connecing is provided with valve；
For vacuumizing to first Sample Room, the vacuum pump apparatus is used for described second the vacuum pump apparatus
Sample Room is vacuumized.
2. x-ray photoelectron spectroscopy sampling system according to claim 1, which is characterized in that the x-ray photoelectron
Energy disperse spectroscopy sampling system is connect with the test macro, is in the x-ray photoelectron spectroscopy sampling system and the test
System junction is provided with valve.
3. x-ray photoelectron spectroscopy sampling system according to claim 1, which is characterized in that the first sample introduction dress
It sets further include: the first specimen holder in first Sample Room is set, the first transmission dress being connected with first specimen holder
It sets, the second conveyer is used to send first specimen holder into and send out the test macro.
4. x-ray photoelectron spectroscopy sampling system according to claim 1, which is characterized in that the second sample introduction dress
It sets further include: the second specimen holder in second Sample Room is set, the second transmission dress being connected with second specimen holder
It sets, the second conveyer is used to send second specimen holder into and send out the test macro.
5. x-ray photoelectron spectroscopy sampling system according to claim 3, which is characterized in that the first transmission dress
Setting includes: the first sample feeding rod and the first pushing component, and one end of first sample feeding rod is connected with first specimen holder, described
The other end of first sample feeding rod is connected with first pushing component.
6. x-ray photoelectron spectroscopy sampling system according to claim 4, which is characterized in that the second transmission dress
Setting includes: the second sample feeding rod and the second pushing component, and one end of second sample feeding rod is connected with second specimen holder, described
The other end of second sample feeding rod is connected with second pushing component.
7. x-ray photoelectron spectroscopy sampling system according to claim 5, which is characterized in that the first promotion group
Part include: in the first magnetic force being fixed in first sample feeding rod pushing hands and be set to outside first Sample Room first
The outer pushing hands of magnetic force；
The outer pushing hands of first magnetic force is for driving pushing hands in first magnetic force.
8. x-ray photoelectron spectroscopy sampling system according to claim 6, which is characterized in that the second promotion group
Part include: in the second magnetic force being fixed in second sample feeding rod pushing hands and be set to outside second Sample Room second
The outer pushing hands of magnetic force；
The outer pushing hands of second magnetic force is for driving pushing hands in second magnetic force.
9. x-ray photoelectron spectroscopy sampling system according to claim 1, which is characterized in that the vacuum pipe is T
Shape vacuum pipe.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821792971.4U CN209148570U (en) | 2018-11-01 | 2018-11-01 | A kind of x-ray photoelectron spectroscopy sampling system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201821792971.4U CN209148570U (en) | 2018-11-01 | 2018-11-01 | A kind of x-ray photoelectron spectroscopy sampling system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112946002A (en) * | 2021-02-05 | 2021-06-11 | 中国科学院苏州纳米技术与纳米仿生研究所 | In-situ spectroscopy characterization system |
-
2018
- 2018-11-01 CN CN201821792971.4U patent/CN209148570U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112946002A (en) * | 2021-02-05 | 2021-06-11 | 中国科学院苏州纳米技术与纳米仿生研究所 | In-situ spectroscopy characterization system |
| CN112946002B (en) * | 2021-02-05 | 2023-03-03 | 中国科学院苏州纳米技术与纳米仿生研究所 | In-situ spectroscopy characterization system |
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