CN209140708U - A kind of polishing fluid recyclable device for being mounted on wafer polishing equipment - Google Patents

Abstract

The utility model relates to recyclable device technical fields, in particular a kind of polishing fluid recyclable device for being mounted on wafer polishing equipment, including recyclable device main body, collection bucket and hydrops bucket, workbench is equipped in the recyclable device main body, the workbench bottom is fixedly installed with collection bucket, the collection bucket bottom is fixedly installed with motor, connecting shaft is fixedly installed at the top of the motor, agitating auger is fixedly installed at the top of the connecting shaft, unidirectional guide groove is fixedly installed between the plate of the bench-top periphery, two-way guide groove is fixedly installed between the bench-top center board, the unidirectional guide groove and two-way guide groove intersection are fixedly installed with leak hole, the unidirectional guide groove and two-way guide groove that the utility model passes through setting, fixation opens up between bench-top plate, extra polishing fluid is oriented to leak hole, pass through Leak hole flows into collection bucket, and extra polishing fluid is gathered in collection bucket, and when use can easily collect polishing fluid and assemble well.

Description

A kind of polishing fluid recyclable device for being mounted on wafer polishing equipment

Technical field

The utility model relates to recyclable device technical field, specially a kind of throwing for being mounted on wafer polishing equipment Light liquid recyclable device.

Background technique

It is made since material needs the epitaxial growth in the very big sapphire substrate wafer of hardness, blue precious Homoepitaxial is very high to the quality requirement of sapphire substrate wafer on stone substrate wafer, in addition to there is good crystal quality Outside, to sapphire surface curvature, the requirement of flatness and angularity, and the requirement that reach to these indexs be unable to do without height Quality, high-precision surface grinding polishing.

Existing chip will use polishing fluid and polished, but understand some when use when carrying out polishing Extra, not handling can cause environmental pollution, and directly dispose and have certain waste, cannot carry out to extra polishing fluid Certain recycling and reusing, economizes on resources.

Utility model content

The polishing fluid recyclable device that the purpose of this utility model is to provide a kind of for being mounted on wafer polishing equipment, To solve the problems mentioned in the above background technology.

To achieve the above object, the utility model provides the following technical solutions:

A kind of polishing fluid recyclable device for being mounted on wafer polishing equipment, including recyclable device main body, collection bucket And hydrops bucket, recyclable device main body front are fixedly installed with work light, the recyclable device bottom part body is fixed Support column is installed, the support column bottom is fixedly installed with fixed plate, fixed link, institute are fixedly installed between the support column It states support column side and is fixedly installed with pump machine, be fixedly installed with connecting tube at the top of the pump machine, set in the recyclable device main body There is workbench, the workbench bottom is fixedly installed with collection bucket, and the collection bucket bottom is fixedly installed with motor, the motor Top is fixedly installed with connecting shaft, is fixedly installed with agitating auger at the top of the connecting shaft, the motor two sides are fixedly installed with Filter layer, the filter layer bottom are fixedly installed with hydrops bucket, and hydrops bucket bottom is fixedly installed with biography liquid pipe, the work It is fixed with baffle at the top of platform, plate, fixed peace between the plate of the bench-top periphery are fixedly installed on the inside of the baffle Equipped with unidirectional guide groove, be fixedly installed with two-way guide groove between the bench-top center board, the unidirectional guide groove with it is two-way Guide groove intersection is fixedly installed with leak hole.

Preferably, the unidirectional guide groove is lower close to one end of leak hole, and the other side is higher.

Preferably, higher among the two-way guide groove, and gradually decreased to both ends.

Preferably, the biography liquid pipe both ends are fixedly installed with elbow.

Preferably, the hydrops bucket is fixedly connected with pump machine by passing liquid pipe.

Preferably, the collection bucket inner wall is fixedly installed with multiple groups chute.

Compared with prior art, the utility model has the beneficial effects that

1. solid between bench-top plate by the unidirectional guide groove and two-way guide groove of setting in the utility model Surely it opens up, extra polishing fluid is oriented to leak hole, collection bucket is flowed by leak hole, extra polishing fluid is gathered in collection bucket It is interior, so that equipment is in use, polishing fluid can easily be collected, and assemble well.

2. in the utility model, by the agitating auger and filter layer of setting, polishing fluid flow into after by filter layer into Row filtering, facilitates and is recycled, and drives agitating auger rotation by motor, is stirred, clogging deposits is avoided to filter Layer, influences normal use, so that equipment in use, can effectively be filtered to polishing fluid, can recycle.

3. in the utility model, by the pump machine and hydrops bucket of setting, filtered polishing fluid flows into hydrops bucket, works as product Tire out it is a certain amount of after, taken out by pump machine toward polishing flow container and utilized again, so that equipment in use, fully automated, does not need Manually carry out dress extract operation.

Detailed description of the invention

Fig. 1 is the utility model overall appearance figure；

Fig. 2 is the utility model internal structure chart；

Fig. 3 is the utility model top structure figure；

In figure: 1- recyclable device main body, 2- support column, 3- fixed link, 4- pass liquid pipe, 5- fixed plate, 6- pump machine, 7- connection Pipe, 8- work light, 9- collection bucket, 10- filter layer, 11- hydrops bucket, 12- motor, 13- connecting shaft, 14- workbench, 15- The two-way guide groove of agitating auger, 16-, 17- plate, the unidirectional guide groove of 18-, 19- baffle, 20- leak hole.

Specific embodiment

The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment, based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work Every other embodiment obtained, fall within the protection scope of the utility model.

Fig. 1-3 is please referred to, the utility model provides a kind of technical solution:

A kind of polishing fluid recyclable device for being mounted on wafer polishing equipment, including recyclable device main body 1, collection bucket 9 and hydrops bucket 11,1 front of recyclable device main body is fixedly installed with work light 8, the fixed peace in 1 bottom of recyclable device main body Equipped with support column 2,2 bottom of support column is fixedly installed with fixed plate 5, and fixed link 3, support column 2 are fixedly installed between support column 2 Side is fixedly installed with pump machine 6, and connecting tube 7 is fixedly installed at the top of pump machine 6, is equipped with workbench 14, work in recyclable device main body 1 Make 14 bottom of platform and be fixedly installed with collection bucket 9,9 inner wall of collection bucket is fixedly installed with multiple groups chute, and 9 bottom of collection bucket is fixedly mounted There is motor 12, connecting shaft 13 is fixedly installed at the top of motor 12, agitating auger 15, motor 12 are fixedly installed at the top of connecting shaft 13 Two sides are fixedly installed with filter layer 10, and by the agitating auger 15 and filter layer 10 of setting, polishing fluid passes through filtering after flowing into Layer 10 is filtered, and is facilitated and is recycled, and drives agitating auger 15 to rotate by motor 12, is stirred, avoids precipitating Object blocks filter layer 10, normal use is influenced, so that equipment is in use, can effectively be filtered polishing fluid, Ke Yizai It utilizes, 10 bottom of filter layer is fixedly installed with hydrops bucket 11, and hydrops bucket 11 is fixedly connected with pump machine 6 by passing liquid pipe 4, passes through setting Pump machine 6 and hydrops bucket 11, filtered polishing fluid flows into hydrops bucket 11, after running up to a certain amount of, is taken out by pump machine 6 past Polishing flow container is utilized again, so that equipment in use, fully automated, does not need manually to carry out dress extract operation, hydrops bucket 11 Bottom, which is fixedly installed with, passes liquid pipe 4, passes 4 both ends of liquid pipe and is fixedly installed with elbow, baffle 19, baffle are fixed at the top of workbench 14 19 insides are fixedly installed with plate 17, are fixedly installed with unidirectional guide groove 18 between 14 top periphery plate 17 of workbench, unidirectionally lead Slot 18 is lower close to one end of leak hole 20, and the other side is higher, is fixedly installed between 14 top center plate 17 of workbench double To guide groove 16, unidirectional guide groove 18 and two-way 16 intersection of guide groove are fixedly installed with leak hole 20, higher among two-way guide groove 16, and to Both ends gradually decrease, and by the unidirectional guide groove 18 and two-way guide groove 16 of setting, fixation is opened between 14 head slab of workbench If extra polishing fluid is oriented to leak hole 20, collection bucket 9 is flowed by leak hole 20, extra polishing fluid is gathered in collection bucket 9 It is interior, so that equipment has certain promotional value in use, polishing fluid can easily be collected, and assemble well.

Utility model works process: in use, by the unidirectional guide groove 18 and two-way guide groove 16 of setting, in workbench Fixation opens up between 14 head slabs, and extra polishing fluid is oriented to leak hole 20, flows into collection bucket 9 by leak hole 20, will be extra Polishing fluid be gathered in collection bucket 9 so that equipment is in use, polishing fluid can easily be collected, and assemble well, by setting The agitating auger 15 and filter layer 10 set, polishing fluid are filtered by filter layer 10 after flowing into, facilitate and recycled, and It drives agitating auger 15 to rotate by motor 12, is stirred, avoid clogging deposits filter layer 10, influence normal use, make Equipment is obtained in use, can effectively be filtered to polishing fluid, can recycle, pass through the pump machine 6 and hydrops bucket of setting 11, filtered polishing fluid flows into hydrops bucket 11, after running up to a certain amount of, is taken out by pump machine 6 toward polishing flow container and is carried out again It utilizes, so that equipment in use, fully automated, does not need manually to carry out dress extract operation, there is certain promotional value.

While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art, It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.

Claims (6)

1. a kind of polishing fluid recyclable device for being mounted on wafer polishing equipment, including recyclable device main body (1), collection bucket (9) and hydrops bucket (11), it is characterised in that: recyclable device main body (1) front is fixedly installed with work light (8), Recyclable device main body (1) bottom is fixedly installed with support column (2), and support column (2) bottom is fixedly installed with fixed plate (5), it being fixedly installed with fixed link (3) between the support column (2), support column (2) side is fixedly installed with pump machine (6), It is fixedly installed with connecting tube (7) at the top of the pump machine (6), is equipped with workbench (14) in the recyclable device main body (1), the work Make platform (14) bottom to be fixedly installed with collection bucket (9), collection bucket (9) bottom is fixedly installed with motor (12), the motor (12) top is fixedly installed with connecting shaft (13), is fixedly installed with agitating auger (15), the electricity at the top of the connecting shaft (13) Machine (12) two sides are fixedly installed with filter layer (10), and filter layer (10) bottom is fixedly installed with hydrops bucket (11), the product Liquid bucket (11) bottom, which is fixedly installed with, passes liquid pipe (4), is fixed with baffle (19) at the top of the workbench (14), the baffle (19) Inside is fixedly installed with plate (17), is fixedly installed with unidirectional guide groove between workbench (14) the top periphery plate (17) (18), it is fixedly installed with two-way guide groove (16) between workbench (14) the top center plate (17), the unidirectional guide groove (18) leak hole (20) are fixedly installed with two-way guide groove (16) intersection.

2. a kind of polishing fluid recyclable device for being mounted on wafer polishing equipment according to claim 1, feature Be: the unidirectional guide groove (18) is lower close to the one end of leak hole (20), and the other side is higher.

3. a kind of polishing fluid recyclable device for being mounted on wafer polishing equipment according to claim 1, feature Be: the two-way guide groove (16) is intermediate higher, and gradually decreases to both ends.

4. a kind of polishing fluid recyclable device for being mounted on wafer polishing equipment according to claim 1, feature Be: biography liquid pipe (4) both ends are fixedly installed with elbow.

5. a kind of polishing fluid recyclable device for being mounted on wafer polishing equipment according to claim 1, feature Be: the hydrops bucket (11) is fixedly connected with pump machine (6) by passing liquid pipe (4).

6. a kind of polishing fluid recyclable device for being mounted on wafer polishing equipment according to claim 1, feature Be: collection bucket (9) inner wall is fixedly installed with multiple groups chute.