CN209138360U - A kind of waste nitric acid recovery and processing system - Google Patents
A kind of waste nitric acid recovery and processing system Download PDFInfo
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- CN209138360U CN209138360U CN201821425267.5U CN201821425267U CN209138360U CN 209138360 U CN209138360 U CN 209138360U CN 201821425267 U CN201821425267 U CN 201821425267U CN 209138360 U CN209138360 U CN 209138360U
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- nitric acid
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Abstract
The utility model embodiment discloses a kind of waste nitric acid recovery and processing system, including reserve tank, the nitric acid filter being connected to the reserve tank, the accumulator tank being connected to the nitric acid filter；In this way, waste acid liquor is stored by the reserve tank, then waste acid liquor is oriented to the nitric acid filter, it is filtered by the nitric acid filter, then silicon powder, the metal ion in waste acid liquor are filtered, and filtered waste acid liquor is directed into the accumulator tank, it is reused.
Description
Technical field
The utility model relates to a kind of recovery and processing system more particularly to waste nitric acid recovery and processing systems.
Background technique
It uses 68% concentration nitric acid in polycrystalline silicon material cleaning process, adds pure water to be diluted in 68% concentration nitric acid when use
25% concentration nitric acid.After cleaning a certain amount of silicon material, concentration of nitric acid is reduced, and silicon powder content, metal ion content increase in acid solution,
Polycrystalline silicon material cleaning quality is influenced whether when continuing to use cleaning, therefore, nitric acid solution at this time just becomes waste acid liquor, can not
It continues to use.
Currently, waste acid liquor is generally emitted into three wastes hydrogen to the processing method of waste acid liquor by production of polysilicon industry
Calcium oxide is neutralized, but when underway and processing, reaches every to calcium hydroxide amount consumed by waste acid liquor processing
Ton polycrystal just needs 36Kg calcium hydroxide, and treated that waste acid liquor tends not to be recycled, therefore makes
At the production cost increases, the big problem of environmental pressure.
Utility model content
In order to solve the above technical problems, the utility model embodiment provides a kind of waste nitric acid recovery and processing system, Ke Yitong
It crosses and silicon powder, the metal ion in waste nitric acid is filtered, reuse filtered nitric acid, improve to nitric acid solution
Utilization rate.
In order to achieve the above object, the technical solution of the utility model embodiment is achieved in that
The utility model embodiment provides a kind of waste nitric acid recovery and processing system, including reserve tank, connects with the reserve tank
Logical nitric acid filter, the accumulator tank being connected to the nitric acid filter.
In the above-described embodiments, the nitric acid filter is there are two more than, and more than two nitric acid filters are simultaneously
Connection setting.
In the above-described embodiments, the nitric acid filter is also connected to Pneumatic actuator and waste water storage tank respectively.
In the above-described embodiments, the inside of the nitric acid filter is divided into the first cavity and the second chamber by ceramic filter membrane
Body；Wherein,
First cavity is connected to the reserve tank and the waste water storage tank respectively, second cavity respectively with it is described
Accumulator tank is connected to the Pneumatic actuator.
In the above-described embodiments, the ceramic filter membrane is in open column shape, and a bottom surface of the ceramic filter membrane is set
The filtering mouth for filtering is set, another bottom surface of the ceramic filter membrane with the waste water storage tank for being connected to, the ceramics mistake
Opening of the setting for reserve tank connection on the side of filter membrane；
Wherein, in the inside of the ceramic filter membrane, the opening upper hinge connects removable cover, the removable cover
Hinged end is arranged close to the filtering mouth, and when the removable cover is opened from the opening, the removable cover and institute
Stating ceramic filter membrane medial surface, there are angles.
In the above-described embodiments, the lower section setting of the opening is used to support the supporting block of the removable cover.
In the above-described embodiments, the nitric acid filter further includes for detecting first cavity and second cavity
Between pressure difference detector；Wherein,
The detector is electrically connected by control device with the Pneumatic actuator.
In the above-described embodiments, the nitric acid filter respectively with the reserve tank, the waste water storage tank, the accumulator tank
Control valve is set between the Pneumatic actuator；
The control valve is electrically connected with the control device.
The utility model embodiment provides a kind of waste nitric acid recovery and processing system, which includes reserve tank, and described
The nitric acid filter of reserve tank connection, the accumulator tank being connected to the nitric acid filter；It will in this way, passing through the reserve tank
Waste acid liquor stores, and waste acid liquor is then oriented to the nitric acid filter, is filtered by the nitric acid filter,
Then silicon powder, the metal ion in waste acid liquor are filtered, and filtered waste acid liquor is directed into the accumulator tank
In, it is reused.
Detailed description of the invention
Fig. 1 is the schematic diagram of waste nitric acid recovery and processing system provided by the embodiment of the utility model.
Fig. 2 is the structural schematic diagram of nitric acid filter provided by the embodiment of the utility model；
Fig. 3 is the module map provided by the embodiment of the utility model by detector adjusting control valve door.
Appended drawing reference: 1, reserve tank；2, nitric acid filter；22, ceramic filter membrane；23, the first cavity；24, the second cavity；
25, mouth is filtered；26, it is open；27, removable cover；28, supporting block；3, accumulator tank；4, Pneumatic actuator；5, waste water storage tank；6,
Detector；7, control device；8, control valve.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe.
The utility model embodiment discloses a kind of waste nitric acid recovery and processing system, as shown in Figure 1, include reserve tank 1,
The nitric acid filter 2 being connected to reserve tank 1, the accumulator tank 3 being connected to the nitric acid filter 2.
Here, the reserve tank 1 is used to store the waste acid liquor after cleaning polysilicon films, and the outlet of the reserve tank 1 is logical
Piping is connect with the entrance of the nitric acid filter 2, and the nitric acid filter 2 is separation of solid and liquid purpose ceramic-film filter, and
The filter can be bought in the market, can be filtered silicon powder, the metal ion in waste acid liquor, be worked as waste acid liquor
After filtering, filtered waste acid liquor is transferred to described by filtered waste acid liquor by the outlet of the nitric acid filter 2
Accumulator tank 3；And the accumulator tank 3 be used for to need the device that polysilicon films are cleaned provide nitric acid.
Further, in the utility model embodiment, as shown in Figure 1, more than there are two the nitric acid filters 2, and
More than two nitric acid filters 2 are arranged in parallel.
Here, by being arranged in parallel more than two nitric acid filters 2, i.e., as illustrated in FIG. 1, the reserve tank
1 and the accumulator tank 3 connect with two nitric acid filters 2, in this way in work process, two nitre can be passed through
Sour filter 2 uses simultaneously, to increase the filtration yield to waste water nitric acid；It can also be used according to a nitric acid filter 2,
Another described nitric acid filter 2 deactivates, thus convenient to carrying out clearly to the deactivated nitric acid filter 2 during the work time
Reason maintenance.
Further, in the utility model embodiment, as illustrated in fig. 1 and 2, the nitric acid filter 2 also respectively with gas
Dynamic executive device 4 is connected to waste water storage tank 5.
The inside of the nitric acid filter 2 is divided by ceramic filter membrane 22 for the first cavity 23 and the second cavity 24；Wherein,
First cavity 23 is connected to the reserve tank 1 and the waste water storage tank 5 respectively, second cavity 24 respectively with it is described
Accumulator tank 3 is connected to the Pneumatic actuator 4.
The ceramic filter membrane 22 is in open column shape, and the bottom surface setting of the ceramic filter membrane 22 is for filtering
Mouth 25 is filtered, described another bottom surface of ceramic filter membrane 22 is used to be connected to the waste water storage tank 5, the ceramic filter membrane 22
Opening 26 of the setting for the reserve tank 1 connection on side；Wherein, in the inside of the ceramic filter membrane 22, the opening
26 upper hinges connect removable cover 27, and the hinged end of the removable cover 27 is arranged close to the filtering mouth 25, and work as the work
When dynamic cover board 27 is opened from the opening 26, there are angles with 22 medial surface of ceramic filter membrane for the removable cover 27.
The lower section setting of the opening 26 is used to support the supporting block 28 of the removable cover 27.
Here, the ceramic filter membrane 22 is used to be filtered processing, and the inside of the ceramic filter membrane 22 is the first chamber
Body 23 is second cavity 24 between the ceramic filter membrane 22 and the shell of the nitric acid filter 2.
Due to the nitric acid filter 2 be by the ceramic filter membrane 22 by waste acid liquor silicon powder, metal from
Son is filtered, and after prolonged use, accumulation has excessive impurity on the ceramic filter membrane 22, to influence the nitre
The use of sour filter 2, therefore the Pneumatic actuator 4 and the waste water storage tank 5 are set, make the Pneumatic actuator 4,
The nitric acid filter 2 and the waste water storage tank 5 constitute the device for cleaning the nitric acid filter 2.Wherein, the gas
Dynamic executive device 4 can be the device for compressed air, in this way, in use, by into the nitric acid filter 2
It is inflated, so that filtered liquid is reversed flushing in the nitric acid filter 2, thus by impurity from the nitre
It rinses in sour filter 2 to the waste water storage tank 5.
While in order to avoid having part that can remain to the opening liquid with residue when carrying out back flush
(since the opening 26 is connect by pipeline with the reserve tank 1, and valve is arranged in the pipeline interposition on pipeline in 26
Set, therefore be easy to rush in residue by liquid at the pipeline at the opening 26), therefore the removable cover 27 is set,
In, there are two working positions for the tool of removable cover 27, and when whole system is filtered, the removable cover 27 is molten by spent acid
The impact of liquid is opened from the opening 26；When whole system carries out being reversed flushing, due to the removable cover 27
There are angles with 22 medial surface of ceramic filter membrane, therefore by the impact for flowing out waste water solution from the filtering mouth 25
When, the removable cover 27 can be moved in the opening 26, to close the opening 26, residue be avoided to enter.
And when in order to keep the removable cover 27 to open from the opening 26, the removable cover 27 and the ceramics
There are angles for 22 medial surface of filter membrane, therefore supporting block 28 is arranged, to be supported to the removable cover 27.
Further, as shown in figs. 1 and 3, the nitric acid filter 2 further includes for detecting 23 He of the first cavity
The detector 6 of pressure difference between second cavity 24；Wherein, the detector 6 is pneumatically held by control device 7 with described
Luggage sets 4 electrical connections.
The nitric acid filter 2 respectively with the reserve tank 1, the waste water storage tank 5, the accumulator tank 3 and described pneumatic
Control valve 8 is set between executive device 4；The control valve 8 is electrically connected with the control device 7.
Here, the use process of this system are as follows: described when accumulation has excessive impurity on the ceramic filter membrane
There is pressure difference between first cavity and second cavity, detect first cavity and institute by the detector 6 in this way
The pressure difference between the second cavity is stated, to judge whether there is excessive impurity on the ceramic filter membrane.When impurity mistake
When more, the information after the detector 6 will test passes to the control device 7, then by the control device 7 to control
Control valve 8 is stated, to adjust the unlatching of each control valve 8, to confirm that the nitric acid filter 2 distinguishes the storage
Connection between slot 1, the waste water storage tank 5, the accumulator tank 3 and the Pneumatic actuator 4.Wherein, the detector 6 is
Pressure difference detector, and the device for that can buy on the market；The control device 7 can be PLC (Programmable Logic
It Controller), can be with control valve 8 described in Collaborative Control when installing and using.
Detector 6 it is specifically used when, when the detector 6 detects first cavity and second cavity
Pressure difference is excessive (reach impurity on the ceramic filter membrane and cross the fixed pressure difference of Multi-time Scale), and signal is passed to institute by the detector 6
State control device 7, controlled between the nitric acid filter 2 and the Pneumatic actuator 4 by the control device 7 described in
Control valve 8 is opened, and the control valve 8 between the nitric acid filter 2 and the waste water storage tank 5 is opened, the nitric acid
The control valve 8 between filter 2 and the reserve tank 1 is closed, between the nitric acid filter 2 and the accumulator tank 3
The control valve 8 close, thus realize using the liquid filtered in the nitric acid filter 2 carry out recycling flushing effect
Fruit；When the detector 6 detects that the pressure difference of first cavity and second cavity is constant or pressure difference is smaller (not up to
Impurity crosses the fixed pressure difference of Multi-time Scale on the ceramic filter membrane), signal is passed to the control device 7 by the detector 6, is led to
The control valve 8 that the control device 7 controls between the nitric acid filter 2 and the Pneumatic actuator 4 is crossed to close,
The control valve 8 between the nitric acid filter 2 and the waste water storage tank 5 is closed, the nitric acid filter 2 and the storage
The control valve 8 deposited between slot 1 is opened, the control valve 8 between the nitric acid filter 2 and the accumulator tank 3
It opens, to realize the use being filtered by the nitric acid filter 2 to waste acid liquor.
Above are merely preferred embodiments of the utility model, it is noted that above-mentioned preferred embodiment should not regard
For limitations of the present invention, the protection scope of the utility model should be defined by the scope defined by the claims..For
For those skilled in the art, without departing from the spirit and scope of the utility model, it can also make several
Improvements and modifications, these improvements and modifications also should be regarded as the protection scope of the utility model.
Claims (7)
1. a kind of waste nitric acid recovery and processing system, which is characterized in that including reserve tank (1), the nitre being connected to the reserve tank (1)
Sour filter (2), the accumulator tank (3) being connected to the nitric acid filter (2)；The nitric acid filter (2) is also respectively and pneumatically
Executive device (4) is connected to waste water storage tank (5)；The outlet of the Pneumatic actuator (4) and the nitric acid filter (2) connects
It connects, the waste water storage tank (5) connect with the entrance of the nitric acid filter (2).
2. waste nitric acid recovery and processing system according to claim 1, it is characterised in that: the nitric acid filter (2) has two
More than a, and more than two nitric acid filters (2) are arranged in parallel.
3. waste nitric acid recovery and processing system according to claim 1, it is characterised in that: the nitric acid filter (2) it is interior
Portion is divided into the first cavity (23) and the second cavity (24) by ceramic filter membrane (22)；Wherein,
First cavity (23) is connected to the reserve tank (1) and the waste water storage tank (5) respectively, second cavity (24)
It is connected to respectively with the accumulator tank (3) and the Pneumatic actuator (4).
4. waste nitric acid recovery and processing system according to claim 3, it is characterised in that: the ceramic filter membrane (22) is in sky
Stem shape, and filtering mouth (25) of the bottom surface setting of the ceramic filter membrane (22) for filtering, the ceramic filter membrane
(22) another bottom surface with the waste water storage tank (5) for being connected to, and setting is used for institute on the side of the ceramic filter membrane (22)
State the opening (26) of reserve tank (1) connection；
Wherein, in the inside of the ceramic filter membrane (22), opening (26) upper hinge connects removable cover (27), the work
The hinged end of dynamic cover board (27) is arranged close to the filtering mouth (25), and when the removable cover (27) are from the opening (26)
When opening, there are angles with the ceramic filter membrane (22) medial surface for the removable cover (27).
5. waste nitric acid recovery and processing system according to claim 4, it is characterised in that: the lower section setting of the opening (26)
It is used to support the supporting block (28) of the removable cover (27).
6. waste nitric acid recovery and processing system according to claim 3, it is characterised in that: the nitric acid filter (2) is also wrapped
Include the detector (6) for detecting pressure difference between first cavity (23) and second cavity (24)；Wherein,
The detector (6) is electrically connected by control device (7) with the Pneumatic actuator (4).
7. waste nitric acid recovery and processing system according to claim 6, it is characterised in that: the nitric acid filter (2) is respectively
Control is set between the reserve tank (1), the waste water storage tank (5), the accumulator tank (3) and the Pneumatic actuator (4)
Valve (8) processed；
The control valve (8) is electrically connected with the control device (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821425267.5U CN209138360U (en) | 2018-08-31 | 2018-08-31 | A kind of waste nitric acid recovery and processing system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821425267.5U CN209138360U (en) | 2018-08-31 | 2018-08-31 | A kind of waste nitric acid recovery and processing system |
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| Publication Number | Publication Date |
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| CN209138360U true CN209138360U (en) | 2019-07-23 |
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| CN201821425267.5U Active CN209138360U (en) | 2018-08-31 | 2018-08-31 | A kind of waste nitric acid recovery and processing system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108905631A (en) * | 2018-08-31 | 2018-11-30 | 内蒙古通威高纯晶硅有限公司 | A kind of waste nitric acid recovery and processing system |
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2018
- 2018-08-31 CN CN201821425267.5U patent/CN209138360U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108905631A (en) * | 2018-08-31 | 2018-11-30 | 内蒙古通威高纯晶硅有限公司 | A kind of waste nitric acid recovery and processing system |
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