CN209113980U - Evaporation coating device - Google Patents
Evaporation coating device Download PDFInfo
- Publication number
- CN209113980U CN209113980U CN201821649501.2U CN201821649501U CN209113980U CN 209113980 U CN209113980 U CN 209113980U CN 201821649501 U CN201821649501 U CN 201821649501U CN 209113980 U CN209113980 U CN 209113980U
- Authority
- CN
- China
- Prior art keywords
- protective layer
- crucible
- coating device
- evaporation
- evaporation coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The application provides a kind of evaporation coating device.The evaporation coating device includes crucible and the protective layer for covering the crucible.The crucible has medial surface, lateral surface and the wall surface along the crucible thickness direction medial surface and lateral surface intersection.The protective layer includes the first protective layer, the second protective layer and third protective layer.First protective layer covers the medial surface, first protective layer with a thickness of 1 μm -150 μm, for preventing evaporant from corroding the medial surface.Second protective layer covers the lateral surface, for preventing evaporation material from overflowing lateral surface described in post-etching.The third protective layer covers the wall surface, for preventing evaporation material from overflowing wall surface described in post-etching.The crucible integrally covers the protective layer can protect the crucible well, and being corroded property material corrosion is avoided to damage.
Description
Technical field
This application involves evaporation coating device technical fields, more particularly to a kind of evaporation coating device.
Background technique
Photovoltaic art is frequently necessary to use evaporation coating device evaporated film on solar base plate, and evaporation coating device is mostly earthenware
Crucible.But evaporation material has corrosivity mostly, and when evaporating material when crucible high temperature heats, evaporation material may be with crucible sheet
Body reacts.Over time, it may cause crucible surface corrosion and damage.
In existing crucible, crucible is placed under oxygen-enriched environment, crucible oxidation is made to generate thin film.But this oxide layer
Thickness is minimum, and is easy to fall off, and is difficult to play a protective role.
Utility model content
Based on this, it is necessary to existing crucible be easily corroded damage aiming at the problem that, a kind of evaporation coating device is provided.
A kind of evaporation coating device.The evaporation coating device includes:
Crucible, surrounds the accommodating chamber for being formed and having opening, and the crucible has medial surface, lateral surface and along first direction
The wall surface of medial surface and lateral surface intersection；
First protective layer covers the medial surface, first protective layer with a thickness of 0.6 μm -150 μm, steamed for preventing
Send out medial surface described in material corrosion；
Second protective layer covers the lateral surface；And
Third protective layer covers the wall surface.
In one of the embodiments, second protective layer with a thickness of 0.6 μm -150 μm, for prevent evaporation material
Overflow lateral surface described in post-etching；
The third protective layer with a thickness of 0.6 μm -150 μm, for prevent evaporation material overflow post-etching described in wall surface.
First protective layer includes at least one step in one of the embodiments, at least one described step edge
First direction arrangement, for prevent evaporation material overflow.
At least one described step is successively increased along the width of second direction in one of the embodiments, and described the
One direction and the second direction are vertical.
Second protective layer includes at least one sawtooth in one of the embodiments, at least one described sawtooth edge
First direction arrangement, an end face of at least one sawtooth is vertical with the lateral surface, for preventing the evaporant
After material overflows, corrode the entire lateral surface.
At least one described sawtooth is successively increased along the width of second direction in one of the embodiments, and described the
Two directions are vertical with the first direction.
The third protective layer includes at least one groove in one of the embodiments, at least one described groove is used
In the evaporation material for containing a part spilling.
In one of the embodiments, further include:
Lid is closed with the crucible enclosing cover, offers through-hole on the lid.
In one of the embodiments, further include:
4th protective layer, seals the lid, the 4th protective layer with a thickness of 0.6 μm -150 μm, overflow for preventing
Lid described in evaporation material corrosion out.
In one of the embodiments, further include:
Drainage tube passes through the through-hole, is deep into the inside of the accommodating chamber, for leading the evaporation material after evaporation
Out.
The application provides a kind of evaporation coating device.The evaporation coating device includes crucible and the protective layer for covering the crucible.Institute
Crucible is stated with medial surface, lateral surface and the wall surface along the crucible thickness direction medial surface and lateral surface intersection.It is described
Protective layer includes the first protective layer, the second protective layer and third protective layer.First protective layer covers the medial surface, described
First protective layer with a thickness of 0.6 μm -150 μm, for prevent evaporation material corrosion described in medial surface.Second protective layer covers
The lateral surface is covered, for preventing evaporation material from overflowing lateral surface described in post-etching.The third protective layer covers the wall surface,
For preventing evaporation material from overflowing wall surface described in post-etching.The crucible integrally cover the protective layer can protect well it is described
Crucible avoids being corroded property from evaporating material corrosion and damage.
Detailed description of the invention
Fig. 1 is the evaporation coating device oxide layer preparation flow figure provided in the application one embodiment；
Fig. 2 is the evaporation coating device structure chart provided in the application one embodiment；
Fig. 3 is the evaporation coating device structure chart provided in another embodiment of the application.
Main element drawing reference numeral explanation
Evaporation coating device 100
Crucible 10
Accommodating chamber 11
Medial surface 12
Lateral surface 13
Wall surface 14
Protective layer 20
First protective layer 21
At least one step 211
Second protective layer 22
At least one sawtooth 221
Third protective layer 23
At least one groove 231
4th protective layer 24
Lid 30
Through-hole 31
Drainage tube 40
Specific embodiment
In order to which the objects, technical solutions and advantages of the application are more clearly understood, by the following examples, and combine attached
Figure, is further elaborated a kind of evaporation coating device of the application.It should be appreciated that specific embodiment described herein is only
To explain the application, it is not used to limit the application.
Referring to Figure 1, a kind of preparation method of evaporation coating device oxide layer is provided in the application one embodiment.The preparation
Method includes:
S100 provides the first alkaline electrolyte of default proportion and device is immersed in first alkaline electrolyte,
The electric current that predetermined current density value is passed in first alkaline electrolyte, the level-one differential arc oxidation through the first preset time.
In step S100, micro-arc oxidation electrolyte is the key problem in technology for receiving qualified protective layer.Different alkaline electrolytes
The property of the matching parameter of ingredient and different electrolytes, the protective layer of acquisition is also different.Differential arc oxidation alkaline electrolyte is more
Using the alkaline salt solution containing certain metal or nonmetal oxide.For example, alkaline salt solution can for aqueous silicate solution,
One of phosphate aqueous solution and aqueous borate solution.In one embodiment, first alkaline electrolyte can be
K2OnSiO2 (potassium water glass) aqueous solution of 200g/L.Second alkaline electrolyte can be the Na of 70g/L3P2O7It is water-soluble
Liquid.The control of differential arc oxidation voltage and current density is equally most important to qualified film layer is obtained.The material of described device is different
Or when oxidation electrolyte difference, the micro-arc discharge breakdown voltage needed is also different.The breakdown voltage is that described device surface is rigid
The decomposition voltage of micro-arc discharge is just generated.Differential arc oxidation voltage general control is in the condition for being greater than the supreme hectovolt of breakdown voltage tens
It carries out.Oxidation voltage is different, is formed by ceramic film properties, surface state and film thickness difference.According to the protective layer performance
Requirement and different process conditions, differential arc oxidation voltage can change within the scope of 200V-600V.Control can be used in differential arc oxidation
Voltage method or control current method carry out.Using more convenient, control electric current on control current method relatively control voltage method technological operation
The current density of method is generally 2A/dm2~8A/dm2.When controlling CURRENT OXIDATION, oxidation voltage is begun to ramp up comparatively fast, reaches the differential of the arc,
When electric discharge, voltage rises slowly, and with the formation of the protective layer, oxidation voltage is again very fast to be risen, and it is higher to be ultimately maintained at one
Decomposition voltage under.The differential arc oxidation time is longer, and the compactness of the protective layer is better, but its roughness also increases.Therefore it wants
Set a suitable differential arc oxidation time.In one embodiment, first preset time is 0min-10min.Certain institute
It states predetermined current density value and first preset time can also be according to any setting of needs of those skilled in the art.
S200 provides the second alkaline electrolyte and the described device after washing level-one differential arc oxidation is immersed in described second
In alkaline electrolyte, the electric current of predetermined current density value is passed in second alkaline electrolyte, two through the second preset time
Protective layer is generated after grade differential arc oxidation.
In step S200, second alkaline electrolyte can be the Na of 70g/L3P2O7Aqueous solution.Through the first preset time
Level-one differential arc oxidation after, described device surface has the protective layer and generates.It, will in order to reduce the roughness of the protective layer
Described device after washing is immersed in the protective layer generated after further differential arc oxidation in second alkaline electrolyte
Thickness can be 1 μm -150 μm.Second preset time can be 10min-30min.Certain second preset time
It can be according to any setting of needs of those skilled in the art.
2A/dm is provided using power supply unit2-8A/dm2The predetermined current density value.The power supply unit is a kind of high
The particular power source equipment of High-current output is pressed, output voltage range is generally 0~600V；The capacity of electric current is exported according to the dress
The surface area setting set, generally requires 1A/dm2~10A/dm2.Constant voltage and constant current controlling device, output wave will be arranged in power supply
Shape, which regards process conditions, to be the waveforms such as direct current, square wave, sawtooth wave.
The oxidation voltage with higher of the apparatus surface as described in micro-arc oxidation process simultaneously passes through biggish Faradaic current,
So that the heat generated is largely focused on the protective layer interface, and influences the quality of the protective layer generated.Therefore micro-
Arc oxidation must use outfit mechanical device or compressed air to be stirred electrolyte, cool down alkaline electrolyte in time.
In the present embodiment, described device is put into the alkaline electrolyte of default matching parameter by the preparation method.It is described
Power supply unit provides predetermined current density value, within a preset time, is powered to the alkaline electrolyte, makes described device surface shape
At the protective layer with a thickness of 0.6 μm -150 μm.Protective layer made of such mode is more fine and close anticorrosive, and is not easy to take off
It falls, the crucible can be protected well, being corroded property is avoided to evaporate material corrosion and damage.
Fig. 2 is referred to, a kind of evaporation coating device 100 is provided in the application one embodiment.The evaporation coating device 100 includes earthenware
Crucible 10, the first protective layer 21, the second protective layer 22 and third protective layer 23.
The crucible 10 surrounds the accommodating chamber 11 for being formed and having opening.The crucible 10 has medial surface 12, lateral surface 13
And the wall surface 14 along the crucible 10 thickness direction medial surface and lateral surface intersection.The metal for manufacturing the crucible 10 can be with
It is the metal alloy that pure titanium metal either can be that any main component is titanium.Such as the titanium alloy containing aluminium.It is described
Crucible 10 can manufacture in any suitable method.For example, the crucible 10 can use the operation of rolling, it is that sheet metal passes through
Hot rolling or cold rolling after can be formed as the crucible 10.Alternatively, by casting molten metal or machinery can be passed through
It processes metalwork and obtains the crucible 10 all or in part.The shape of the crucible 10 with no restrictions, as long as can accommodating chamber contain
Put evaporation material.For example, the shape of the crucible 10 can be rectangular parallelepiped structure, cylindrical structure or V-structure.
First protective layer 21 covers the medial surface 12.The thickness of first protective layer 21 can for 0.6 μm-
150μm.In one embodiment, first protective layer 21 with a thickness of 130 μm.If the crucible 10 is completely by made of metal
At then when heating is contained in the evaporation material in the crucible 10, the evaporation material is likely to and the crucible 10
It reacts.The evaporation material reacts with the crucible 10 will cause 10 inner surface of crucible and is corroded.The application
Described first with a thickness of 0.6 μm -150 μm is generated in 10 inner surface of crucible using the preparation method of evaporation coating device oxide layer
Protective layer.Relative to protective layer 20 described in nanoscale, the micron-sized protective layer 20 is more not easy to fall off.It is micron-sized
The protective layer 20 can more prevent the evaporation material from reacting with the crucible 10.The micron-sized protective layer 20 can be with
Avoid crucible 10 described in the evaporation material corrosion.
Second protective layer 22 covers the lateral surface 13.The third protective layer 23 covers the wall surface 14.It is anti-
It is only overflowed in the evaporation material evaporation process, can use the evaporation coating device oxide layer preparation method respectively in the outside
Face 13 generates second protective layer 22 and generates the third protective layer 23 on the wall surface 14.Second protective layer 22
With the thickness of the third protective layer 23 can the thickness appropriate than first protective layer it is small.Second protective layer 22
Thickness can be 0.6 μm -150 μm.In one embodiment, second protective layer 22 with a thickness of 80 μm.The third is protected
The thickness of sheath 23 can be 0.6 μm -150 μm.In one embodiment, the third protective layer 23 with a thickness of 100 μm.
In the present embodiment, the evaporation coating device 100 includes crucible 10 and the protective layer 20 for covering the crucible.The crucible
10 have medial surface 12, lateral surface 13 and the wall surface along crucible 10 the thickness direction medial surface 12 and 13 intersection of lateral surface
14.The protective layer includes the first protective layer 21, the second protective layer 22 and third protective layer 23.First protective layer 11 covers
The medial surface 12, first protective layer 21 with a thickness of 0.6 μm -150 μm, for prevent evaporation material corrosion described in inside
Face 12.Second protective layer 22 covers the lateral surface 13, for preventing evaporation material from overflowing lateral surface 13 described in post-etching.
The third protective layer 23 covers the wall surface 14, for preventing evaporation material from overflowing wall surface 14 described in post-etching.The crucible
The 10 whole covering protective layers 20 can protect the crucible well, and being corroded property is avoided to evaporate material corrosion and damage.
Fig. 3 is referred to, first protective layer 21 is equipped at least one step 211 in one of the embodiments,.It is described
At least one step 211 arranges that at least one described step 211 successively increases along the width of second direction along a first direction
Add, for preventing evaporation material from overflowing.Certainly, at least one described step 211 can also along second direction width successively
It reduces, or at least one described step 211 is arranged along the width of second direction in interval.The first direction and described second
Direction is vertical.
Second protective layer 22 is equipped at least one sawtooth 221.At least one described sawtooth 221 cloth along a first direction
It sets.One end face of at least one sawtooth 221 is vertical with the lateral surface 13.At least one described sawtooth 221 is for preventing
After only the evaporation material overflows, corrode the entire lateral surface 13.At least one described sawtooth 221 along second direction width
Degree successively increases.Certainly at least one described sawtooth 221 can also be sequentially reduced along the width of second direction, or interval is set
At least one described sawtooth 221 is set along the width of second direction.The first direction and the second direction are vertical.Described
Three protective layers 23 are equipped at least one groove 231, at least one described groove 231 is used to contain the evaporant of a part spilling
Material.
It is overflowed in the evaporation material evaporation process in order to prevent and corrodes the crucible 10.The protective layer 20 includes described
First protective layer 21, second protective layer 22 and the third protective layer.The protective layer 20 be not limited to be designed to step,
Sawtooth or groove.It can also be designed to the other shapes that can prevent the evaporation material from overflowing.The protection can generated
The different shape of the protective layer 20 is realized after layer 20 by a series of post-processing.The post-processing can be etching or polishing
Etc. techniques.
In the present embodiment, the evaporation coating device 100 includes the protective layer 20 with different shape or structure.The guarantor
Sheath 20, which can be effectively prevented the evaporation material and burst in evaporation process, causes the evaporation material to flash or evaporant
Material is overflowed when evaporation forms steam corrodes the crucible 10.
The evaporation coating device further includes lid 30 in one of the embodiments,.The lid 30 and the crucible 10 are tight
Mi Gai is closed.Through-hole 31 is offered on the lid 30.The evaporation coating device oxide layer preparation method be can use in the lid
The 4th protective layer 24 is generated on 30.The thickness of 4th protective layer 24 can be 0.6 μm -150 μm.Such as 50 μm, 100 μm,
150μm.For preventing lid 30 described in evaporation material corrosion.The production material of the lid 30 can be pure titanium metal either
It can be the metal alloy that any main component is titanium.Such as the titanium alloy containing aluminium.
In the present embodiment, the evaporation coating device 100 includes lid 30.The lid 30 can prevent the evaporation material from steaming
Hair overflows the crucible 10 when forming steam.The 4th protective layer 24 is generated on the lid 30, can be effectively prevented described
Evaporation material reacts in evaporation heating process with the lid 30, corrodes the lid 30.
The evaporation coating device 100 further includes drainage tube 40 in one of the embodiments,.The drainage tube 40 passes through described
Through-hole 31 is deep into the inside of the accommodating chamber 11, for the evaporation material export after evaporating.
The drainage tube 40 is used to that film will to be manufactured too after the evaporation material transportation to the surface of solar cell substrate
Positive energy battery, preferably copper indium gallium selenium solar cell.It can be described using the preparation method of the evaporation coating device oxide layer
The 5th protective layer is generated on the medial surface of drainage tube 40 or the entire drainage tube 40.For preventing the evaporation material from transporting
Corrode the drainage tube 40 during defeated.The production material of the drainage tube 40 can be pure titanium metal or can be any
Main component is the metal alloy of titanium.Such as the titanium alloy containing aluminium.
In the present embodiment, the evaporation coating device 100 further includes drainage tube 40.The drainage tube 40 can be by the evaporant
Material transports the surface of solar cell substrate, to manufacture thin-film solar cells.Draw described in the 5th protective layer covering
Flow tube 40 can be effectively prevented the evaporation material and corrode the drainage tube 40 during transportation.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, all should be considered as described in this specification.
The several embodiments of the application above described embodiment only expresses, the description thereof is more specific and detailed, but simultaneously
The limitation to claim therefore cannot be interpreted as.It should be pointed out that coming for those of ordinary skill in the art
It says, without departing from the concept of this application, various modifications and improvements can be made, these belong to the protection of the application
Range.Therefore, the scope of protection shall be subject to the appended claims for the application patent.
Claims (10)
1. a kind of evaporation coating device (100) characterized by comprising
Crucible (10), surrounds the accommodating chamber (11) for being formed and having opening, and the crucible (10) has medial surface (12), lateral surface
(13) and along the crucible (10) thickness direction medial surface (12) and lateral surface (13) intersection wall surface (14)；
First protective layer (21) covers the medial surface (12), first protective layer (21) with a thickness of 0.6 μm -150 μm, use
In prevent evaporation material corrosion described in medial surface (12)；
Second protective layer (22) covers the lateral surface (13)；And
Third protective layer (23) covers the wall surface (14).
2. evaporation coating device (100) according to claim 1, which is characterized in that second protective layer (22) with a thickness of
0.6 μm -150 μm, for preventing evaporation material from overflowing lateral surface (13) described in post-etching；
The third protective layer (23) with a thickness of 0.6 μm -150 μm, for prevent evaporation material overflow post-etching described in wall surface
(14)。
3. evaporation coating device (100) according to claim 1, which is characterized in that first protective layer (21) includes at least
One step (211), at least one described step (211) are arranged along a first direction, for preventing evaporation material from overflowing.
4. evaporation coating device (100) according to claim 3, which is characterized in that at least one described step (211) is along
The width in two directions successively increases, and the first direction and the second direction are vertical.
5. evaporation coating device (100) according to claim 1, which is characterized in that second protective layer (22) includes at least
One sawtooth (221), at least one described sawtooth (221) arrange that one of at least one sawtooth holds along a first direction
Face is vertical with the lateral surface (13), after preventing the evaporation material from overflowing, corrodes the entire lateral surface (13).
6. evaporation coating device (100) according to claim 5, which is characterized in that at least one described sawtooth (221) is along
The width in two directions successively increases, and the second direction is vertical with the first direction.
7. evaporation coating device (100) according to claim 1, which is characterized in that the third protective layer (23) includes at least
One groove (231), at least one described groove (231) are used to contain the evaporation material of a part spilling.
8. evaporation coating device (100) according to claim 1, which is characterized in that further include:
Lid (30) is closed with the crucible (10) enclosing cover, offers through-hole (31) on the lid (30).
9. evaporation coating device (100) according to claim 8, which is characterized in that further include:
4th protective layer (24) seals the lid (30), the 4th protective layer (24) with a thickness of 0.6 μm -150 μm, use
In prevent evaporation material corrosion described in lid (30).
10. evaporation coating device (100) according to claim 8, which is characterized in that further include:
Drainage tube (40) passes through the through-hole (31), the inside of the accommodating chamber (11) is deep into, for the evaporation after evaporating
Material export.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821649501.2U CN209113980U (en) | 2018-10-11 | 2018-10-11 | Evaporation coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821649501.2U CN209113980U (en) | 2018-10-11 | 2018-10-11 | Evaporation coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209113980U true CN209113980U (en) | 2019-07-16 |
Family
ID=67200642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821649501.2U Active CN209113980U (en) | 2018-10-11 | 2018-10-11 | Evaporation coating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209113980U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109161854A (en) * | 2018-10-11 | 2019-01-08 | 北京铂阳顶荣光伏科技有限公司 | The preparation method of evaporation coating device and unit protection layer |
-
2018
- 2018-10-11 CN CN201821649501.2U patent/CN209113980U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109161854A (en) * | 2018-10-11 | 2019-01-08 | 北京铂阳顶荣光伏科技有限公司 | The preparation method of evaporation coating device and unit protection layer |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Chen et al. | Sol–gel derived Li–La–Zr–O thin films as solid electrolytes for lithium-ion batteries | |
| US10790559B2 (en) | Battery pack and battery pack system | |
| CN103080366B (en) | Heating apparatus, vacuum-heating method and method for manufacturing thin film | |
| ES2433495T3 (en) | Procedure for the production of a transparent and conductive oxide layer | |
| CN104471091B (en) | The excellent aluminium alloy of anodized and anodized aluminium alloy element | |
| CN102388497A (en) | Method for manufacturing solid electrolytic cell, and solid electrolytic cell | |
| Laleh et al. | Improvement in corrosion resistance of micro arc oxidation coating formed on AZ91D magnesium alloy via applying a nano-crystalline sol–gel layer | |
| Sha et al. | Printing 3D mesh-like grooves on zinc surface to enhance the stability of aqueous zinc ion batteries | |
| CN209113980U (en) | Evaporation coating device | |
| CN107768677A (en) | A kind of method for improving lithium ion cell positive colelctor electrode corrosion resisting property | |
| Jeong et al. | Investigation of interfacial resistance between LiCoO2 cathode and LiPON electrolyte in the thin film battery | |
| CN103646868A (en) | Method for preparing porous silicon by adopting hydrothermal-vapor etching | |
| CN107768776B (en) | Battery temperature control device | |
| US8642187B2 (en) | Structural member to be used in apparatus for manufacturing semiconductor or flat display, and method for producing the same | |
| CN108539130A (en) | A kind of carbon nanotube pole piece fluorination process of advance lithiumation processing | |
| KR101794625B1 (en) | Lithium thin film fabricating apparatus and method for manufacturing negative electrode of lithium secondary battery by using same | |
| Takada | Solid electrolytes and solid-state batteries | |
| CN109161854A (en) | The preparation method of evaporation coating device and unit protection layer | |
| Lee et al. | Cycle stability increase by insertion of Li–La–Ta–O thin-film electrolyte between cathode and solid electrolyte for all-solid-state battery | |
| CN106058305A (en) | Method for in-situ preparation of minisized all-solid-state thin-film lithium-ion battery by using PLD | |
| CN109148826A (en) | A kind of cathode and preparation method thereof, lithium battery | |
| CN109285900A (en) | Two-dimentional Ca1-xInxSe alloy and preparation method thereof and the application in preparation photodetection | |
| Suzuki et al. | Manufacturing technology of all-solid-state thin-film battery for stand-alone MEMS/sensor application | |
| Nomura et al. | Some Properties of RF Sputtered Al2 O 3‐Ta2 O 5 Composite Thin Films | |
| TWI747104B (en) | Substrate mounting table and plasma processing equipment capable of improving temperature control accuracy |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 100176 Beijing Daxing District Beijing economic and Technological Development Zone Rongchang East Street 7 hospital 6 Building 3001 room. Patentee after: Beijing Dingrong Photovoltaic Technology Co.,Ltd. Address before: 100176 Beijing Daxing District Beijing economic and Technological Development Zone Rongchang East Street 7 hospital 6 Building 3001 room. Patentee before: BEIJING APOLLO DING RONG SOLAR TECHNOLOGY Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210408 Address after: Room 201, Building A, 1 Qianwan Road, Qianhai Shenzhen-Hong Kong Cooperation Zone, Shenzhen, Guangdong Province Patentee after: Shenzhen Zhengyue development and Construction Co.,Ltd. Address before: 100176 Beijing Daxing District Beijing economic and Technological Development Zone Rongchang East Street 7 hospital 6 Building 3001 room. Patentee before: Beijing Dingrong Photovoltaic Technology Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210831 Address after: No.66210, 3rd floor, Pudong Free Trade Zone, Shanghai, China Patentee after: Shanghai zuqiang Energy Co.,Ltd. Address before: Room 201, Building A, 1 Qianwan Road, Qianhai Shenzhen-Hong Kong Cooperation Zone, Shenzhen, Guangdong Province Patentee before: Shenzhen Zhengyue development and Construction Co.,Ltd. |