CN209108769U - Full-automatic silicon chip cleaning machine of environmental protection circulated - Google Patents
Full-automatic silicon chip cleaning machine of environmental protection circulated Download PDFInfo
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- CN209108769U CN209108769U CN201821943597.3U CN201821943597U CN209108769U CN 209108769 U CN209108769 U CN 209108769U CN 201821943597 U CN201821943597 U CN 201821943597U CN 209108769 U CN209108769 U CN 209108769U
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- water tank
- cleaning machine
- fixedly connected
- environmental protection
- cyclic water
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- 238000004140 cleaning Methods 0.000 title claims abstract description 41
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 31
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 31
- 239000010703 silicon Substances 0.000 title claims abstract description 31
- 230000007613 environmental effect Effects 0.000 title claims abstract description 20
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 124
- 125000004122 cyclic group Chemical group 0.000 claims description 41
- 238000003825 pressing Methods 0.000 claims description 15
- 239000003651 drinking water Substances 0.000 claims description 8
- 235000020188 drinking water Nutrition 0.000 claims description 8
- 239000002351 wastewater Substances 0.000 abstract description 7
- 239000002699 waste material Substances 0.000 abstract description 5
- 238000009434 installation Methods 0.000 abstract description 4
- 238000004062 sedimentation Methods 0.000 abstract description 4
- 238000001914 filtration Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- FGRBYDKOBBBPOI-UHFFFAOYSA-N 10,10-dioxo-2-[4-(N-phenylanilino)phenyl]thioxanthen-9-one Chemical compound O=C1c2ccccc2S(=O)(=O)c2ccc(cc12)-c1ccc(cc1)N(c1ccccc1)c1ccccc1 FGRBYDKOBBBPOI-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000003809 water extraction Methods 0.000 description 1
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- Filtration Of Liquid (AREA)
Abstract
The utility model discloses a full-automatic silicon chip cleaning machine of environmental protection circulated, relate to the silicon chip and wash technical field, this full-automatic silicon chip cleaning machine of environmental protection circulated, including the cleaning machine body, one side of cleaning machine body leads to pipe fixedly connected with circulation water tank, and circulation water tank's inner chamber upper end symmetry is provided with the installation piece, and the inserting groove has all been seted up at one side middle part that circulation water tank was kept away from to two installation pieces, the one end of the first filter of pegging graft in the inserting groove, the equal fixed connection in top inner wall both ends of circulation water tank is provided with the fixed column, and the cavity has been seted up to. This full-automatic silicon chip cleaning machine of environmental protection circulated sets up through the cooperation of first filter and second filter and can carry out filtration treatment to the waste water that the cleaning machine body produced, can take out the storage water tank through setting up circulating water pump in can with the water through handling in the circulating water tank, through the natural sedimentation at the storage water tank, can reutilization, reduces the waste of water resource.
Description
Technical field
The utility model relates to wafer cleaning technical, specially a kind of recyclable full-automatic silicon wafer cleaning machine of environmental protection.
Background technique
With the development of large scale integrated circuit, the continuous improvement of integrated level, the continuous reduction of line width, to the quality of silicon wafer
It is required that it is also higher and higher, it is especially more and more tighter to silicon polished surface quality requirements.This is primarily due to polished silicon wafer surface
Particle and metal impurities stain and can seriously affect the quality and yield rate of device, in silicon transistor and integrated circuit production,
Almost every procedure has the problem of Wafer Cleaning, and I will use silicon wafer cleaner during Wafer Cleaning, but existing
Silicon wafer cleaner will cause water resource waste when cleaning to silicon wafer, cannot recycle water resource.
Utility model content
(1) the technical issues of solving
In view of the deficiencies of the prior art, the utility model provides a kind of recyclable full-automatic silicon wafer cleaning machine of environmental protection, solution
Existing silicon wafer cleaner of having determined will cause water resource waste when cleaning to silicon wafer, cannot recycle asking for water resource
Topic.
(2) technical solution
In order to achieve the above object, the utility model is achieved by the following technical programs:
A kind of recyclable full-automatic silicon wafer cleaning machine of environmental protection, including cleaning machine body, the side of the cleaning machine body are logical
It crosses water pipe and is fixedly connected with cyclic water tank, the inner cavity upper end of the cyclic water tank is symmetrically arranged with mounting blocks, two installations
Block offers inserting groove far from a middle side part of cyclic water tank, one end of the first filter plate of grafting in the inserting groove；
The top inner wall both ends of the cyclic water tank, which are fixedly connected with, is provided with fixed column, and the inside of the fixed column opens up
There is cavity, the upper surface of the top inner wall fitting pressing plate of the cavity, the lower surface of the pressing plate is fixedly connected with the one of portable pillar
It holds, is socketed with reset spring on the outside of the portable pillar, the lower end of the cavity is fixedly installed with fixed plate；
The upper surface of first filter plate is symmetrically arranged with arc rubber slab, the fixed peace in the inner cavity lower end of the circulating box
Equipped with the second filter plate, the side of the cyclic water tank is provided with water tank, and the top side of the water tank is fixedly connected with
Water circulating pump, one end of the water circulating pump are fixedly connected with one end of drinking-water pipe, and the other end of the drinking-water pipe runs through recirculated water
The side bottom end of case and the inside for being located at cyclic water tank, the other end of the water circulating pump are fixedly connected with one end of outlet pipe, institute
The other end for stating outlet pipe runs through the top middle portion of water tank and is located in water tank.
Optionally, top middle portion of the one end of the water pipe through cyclic water tank and the inside positioned at cyclic water tank；
One end of the water pipe is located at the top of the first filter plate.
Optionally, one end of the reset spring is fixedly connected with the lower surface of pressing plate；
The other end of the reset spring is fixedly connected with the upper surface of fixed plate.
Optionally, the other end of the portable pillar runs through the center bottom of fixed column and consolidates with the upper surface middle part of mounting blocks
Fixed connection；
The mounting blocks are fitted and connected close to the side of cyclic water tank inner wall and the side inner wall of cyclic water tank；
The upper surface of the mounting blocks and the lower surface of fixed column are fitted and connected.
Optionally, through-hole is offered in the middle part of the fixed plate；
The diameter of the through-hole is adapted with the diameter of portable pillar.
Optionally, one end of the arc rubber slab is fixedly connected with the first filter plate；
The other end of the arc rubber slab is fixedly connected with the top side of fixed column.
Optionally, it is provided with rubber mat plate below the mounting blocks, the inner wall of the rubber mat plate and cyclic water tank is solid
Fixed connection；
The side top of the water tank offers water outlet.
(3) beneficial effect
The utility model provides a kind of recyclable full-automatic silicon wafer cleaning machine of environmental protection, have it is following the utility model has the advantages that
(1), the environmental protection is recycled full-automatic silicon wafer cleaning machine, passes through being equipped with for the first filter plate and the second filter plate
The waste water that can be generated to cleaning machine body is filtered processing, can will pass through place in cyclic water tank by setting water circulating pump
The water of reason is extracted into water tank, by the natural sedimentation in water tank, can secondary use, reduce the waste of water resource.
(2), the environmental protection is recycled full-automatic silicon wafer cleaning machine, passes through fixed column, portable pillar, pressing plate, fixed plate and reset
Being equipped with for spring can play buffer function to the first filter plate, can be effectively reduced water flow and rush to the first filter plate
It hits, to protect the first filter plate.
Detailed description of the invention
Fig. 1 is utility model diagram；
Fig. 2 is the schematic cross-sectional view of the utility model cyclic water tank；
Fig. 3 is the schematic cross-sectional view of the fixed rod structure of the utility model；
Fig. 4 is the enlarged diagram of structure at A in the utility model Fig. 2.
In figure: 1- cleaning machine body, 2- water pipe, 3- cyclic water tank, 4- mounting blocks, 5- inserting groove, the first filter plate of 6-, 7-
Fixed column, 8- cavity, 9- pressing plate, 10- portable pillar, 11- reset spring, 12- fixed plate, 13- arc rubber slab, the second mistake of 14-
Filter plate, 15- water tank, 16- water circulating pump, 17- drinking-water pipe, 18- outlet pipe, 19- rubber mat plate, 20- water outlet.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.
In the description of the present invention, it should be understood that term " center ", " longitudinal direction ", " transverse direction ", " length ", " width
Degree ", " thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom" "inner", "outside", " suitable
The orientation or positional relationship of the instructions such as hour hands ", " counterclockwise ", " axial direction ", " radial direction ", " circumferential direction " is orientation based on the figure
Or positional relationship, be merely for convenience of describing the present invention and simplifying the description, rather than the device of indication or suggestion meaning or
Element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as the limit to the utility model
System.
In the present invention unless specifically defined or limited otherwise, term " setting ", " connected ", " connects " installation "
Connect ", the terms such as " fixation " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection；It can be machine
Tool connection；It can be directly connected, it can also be indirectly connected through an intermediary.For those of ordinary skill in the art and
Speech, can understand the concrete meaning of above-mentioned term in the present invention as the case may be.
In addition, term " first ", " second " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance
Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or
Implicitly include one or more of the features.
Fig. 1-4 is please referred to, the utility model provides a kind of technical solution:
A kind of recyclable full-automatic silicon wafer cleaning machine of environmental protection, including cleaning machine body 1, the side of cleaning machine body 1 pass through
Water pipe 2 is fixedly connected with cyclic water tank 3, and the inner cavity upper end of cyclic water tank 3 is symmetrically arranged with mounting blocks 4, and two mounting blocks 4 are separate
One middle side part of cyclic water tank 3 offers inserting groove 5, one end of the first filter plate of grafting 6 in inserting groove 5；
The top inner wall both ends of cyclic water tank 3, which are fixedly connected with, is provided with fixed column 7, and the inside of fixed column 7 opens up free
Chamber 8, the upper surface of the top inner wall fitting pressing plate 9 of cavity 8, the lower surface of pressing plate 9 are fixedly connected with one end of portable pillar 10, activity
The outside of column 10 is socketed with reset spring 11, and the lower end of cavity 8 is fixedly installed with fixed plate 12；
The upper surface of first filter plate 6 is symmetrically arranged with arc rubber slab 13, and the inner cavity lower end of circulating box 3 is fixedly installed with
Second filter plate 14, the side of cyclic water tank 3 are provided with water tank 15, and the top side of water tank 15 is fixedly connected with recirculated water
Pump 16, one end of water circulating pump 16 are fixedly connected with one end of drinking-water pipe 17, and the other end of drinking-water pipe 17 runs through the one of cyclic water tank 3
Side bottom end and the inside for being located at cyclic water tank 3, the other end of water circulating pump 16 are fixedly connected with one end of outlet pipe 18, outlet pipe 18
The other end through water tank 15 top middle portion and be located at water tank 15 in, pass through the first filter plate 6 and the second filter plate 14
Be equipped with can to cleaning machine body 1 generate waste water be filtered processing, by setting water circulating pump 16 can will follow
Treated water is extracted into water tank 15 in ring water tank 3, by the natural sedimentation in water tank 15, can secondary use,
Reduce the waste of water resource.
A kind of optional technical solution as the utility model:
Top middle portion of the one end of water pipe 2 through cyclic water tank 3 and the inside positioned at cyclic water tank 3；
One end of water pipe 2 is located at the top of the first filter plate 6, can will be given up in cleaning machine body 1 by setting water pipe 2
Water is sent in cyclic water tank 3.
A kind of optional technical solution as the utility model:
One end of reset spring 11 is fixedly connected with the lower surface of pressing plate 9；
The other end of reset spring 11 is fixedly connected with the upper surface of fixed plate 12, and reset spring 11 plays buffer function.
A kind of optional technical solution as the utility model:
The other end of portable pillar 10 runs through the center bottom of fixed column 7 and is fixedly connected with the upper surface middle part of mounting blocks 4；
Mounting blocks 4 are fitted and connected close to the side of 3 inner wall of cyclic water tank and the side inner wall of cyclic water tank 3；
The upper surface of mounting blocks 4 and the lower surface of fixed column 7 are fitted and connected.
A kind of optional technical solution as the utility model:
The middle part of fixed plate 12 offers through-hole；
The diameter of through-hole is adapted with the diameter of portable pillar 10, is opened up through-hole by fixed plate 12, can be made portable pillar 10
Movement it is more convenient.
A kind of optional technical solution as the utility model:
One end of arc rubber slab 13 is fixedly connected with the first filter plate 6；
The other end of arc rubber slab 13 is fixedly connected with the top side of fixed column 7, and arc rubber slab 13 has elasticity,
There is deformability simultaneously.
A kind of optional technical solution as the utility model:
The lower section of mounting blocks 4 is provided with rubber mat plate 19, and rubber mat plate 19 is fixedly connected with the inner wall of cyclic water tank 3, leads to
Setting rubber mat plate 19 is crossed, can mounting blocks 4 be played with buffer function, while position-limiting action can be played；
The side top of water tank 15 offers water outlet 20, can will be in water tank 15 by the way that water outlet 20 is arranged
Water extraction is used for 1 cleaning silicon chip of cleaning machine body.
The electric elements occurred in this article are electrically connected with extraneous main controller and 220V alternating current, and main controller can be meter
Calculation machine etc. plays the conventionally known equipment of control.
In conclusion the environmental protection is recycled full-automatic silicon wafer cleaning machine, the waste water that cleaning machine body 1 generates passes through water pipe 2
Into in cyclic water tank 3, by being equipped with for the first filter plate 6 and the second filter plate 14, waste water can be handled, be passed through
The water for crossing processing is extracted out by water circulating pump 16 by drinking-water pipe 17, and is discharged into water tank 15 by outlet pipe 18 through water circulating pump 16
It is interior, in water tank 15 can natural sedimentation, the water outlet 20 opened up by the side top of water tank 15 can be by water tank 15
Interior water discharge carries out secondary use, and when waste water is entered in cyclic water tank 3 by water pipe 2, waste water can fall in the first filter plate 6
On, the first filter plate 6 is caused to impact, the first filter plate 6 will drive mounting blocks 4 by impact and move down, mounting blocks 4 to
It is mobile that portable pillar 10 is able to drive during lower movement, portable pillar 10 is able to drive the movement of pressing plate 9, pressing plate 9 in moving process
Pressed home spring 11 is able to drive in moving process, reset spring 11, which is squeezed, to give pressing plate 9 one oppositions
Pressing plate 9 and portable pillar 10 can be prevented to continue to move down, so that buffer function is played to mounting blocks 4 and the first filter plate 6, the
One filter plate 6 can pull arc rubber slab 13 to deform during moving down, and arc rubber slab 13 has elasticity, can either
Sealing function is played to fixed column 7, and buffer function, energy during moving down of mounting blocks 4 can be played to the first filter plate 6
Rubber mat plate 19 is enough squeezed, rubber mat plate 19 can limit mounting blocks 4.
It should be noted that in the present invention unless specifically defined or limited otherwise, fisrt feature is in the second spy
It can be that the first and second features directly contact or the first and second features are connect indirectly by intermediary "above" or "below" sign
Touching.Moreover, fisrt feature can be above the second feature " above ", " above " and " above " fisrt feature right above second feature or
Oblique upper, or first feature horizontal height is merely representative of higher than second feature.Fisrt feature second feature " under ", " lower section "
" following " can be fisrt feature and be directly under or diagonally below the second feature, or is merely representative of first feature horizontal height and is less than
Second feature.
The preferable specific embodiment of the above, only the utility model, but the protection scope of the utility model is not
It is confined to this, anyone skilled in the art is within the technical scope disclosed by the utility model, practical according to this
Novel technical solution and its utility model design are subject to equivalent substitution or change, should all cover the protection model in the utility model
Within enclosing.
Claims (7)
1. a kind of recyclable full-automatic silicon wafer cleaning machine of environmental protection, including cleaning machine body (1), it is characterised in that: the cleaning machine
The side of ontology (1) is fixedly connected with cyclic water tank (3) by water pipe (2), and the inner cavity upper end of the cyclic water tank (3) is symmetrically set
It is equipped with mounting blocks (4), two mounting blocks (4) offer inserting groove (5), institute far from a middle side part of cyclic water tank (3)
State one end of interior the first filter plate of grafting (6) of inserting groove (5)；
The top inner wall both ends of the cyclic water tank (3), which are fixedly connected with, to be provided with fixed column (7), the fixed column (7) it is interior
Portion offers cavity (8), the upper surface of top inner wall fitting pressing plate (9) of the cavity (8), the lower surface of the pressing plate (9)
It is fixedly connected with one end of portable pillar (10), is socketed with reset spring (11) on the outside of the portable pillar (10), the cavity (8)
Lower end is fixedly installed with fixed plate (12)；
The upper surface of first filter plate (6) is symmetrically arranged with arc rubber slab (13), under the inner cavity of the cyclic water tank (3)
End is fixedly installed with the second filter plate (14), and the side of the cyclic water tank (3) is provided with water tank (15), the water tank
(15) top side is fixedly connected with water circulating pump (16), and one end of the water circulating pump (16) is fixedly connected with drinking-water pipe (17)
One end, the other end of the drinking-water pipe (17) through cyclic water tank (3) side bottom end and be located at the interior of cyclic water tank (3)
Portion, the other end of the water circulating pump (16) are fixedly connected with one end of outlet pipe (18), and the other end of the outlet pipe (18) passes through
It wears the top middle portion of water tank (15) and is located in water tank (15).
2. the recyclable full-automatic silicon wafer cleaning machine of a kind of environmental protection according to claim 1, it is characterised in that:
Top middle portion of the one end of the water pipe (2) through cyclic water tank (3) and the inside positioned at cyclic water tank (3)；
One end of the water pipe (2) is located at the top of the first filter plate (6).
3. the recyclable full-automatic silicon wafer cleaning machine of a kind of environmental protection according to claim 1, it is characterised in that:
One end of the reset spring (11) is fixedly connected with the lower surface of pressing plate (9)；
The other end of the reset spring (11) is fixedly connected with the upper surface of fixed plate (12).
4. the recyclable full-automatic silicon wafer cleaning machine of a kind of environmental protection according to claim 1, it is characterised in that:
The other end of the portable pillar (10) runs through the center bottom of fixed column (7) and consolidates with the upper surface middle part of mounting blocks (4)
Fixed connection；
The mounting blocks (4) are fitted and connected close to the side of cyclic water tank (3) inner wall and the side inner wall of cyclic water tank (3)；
The upper surface of the mounting blocks (4) and the lower surface of fixed column (7) are fitted and connected.
5. the recyclable full-automatic silicon wafer cleaning machine of a kind of environmental protection according to claim 1, it is characterised in that:
Through-hole is offered in the middle part of the fixed plate (12)；
The diameter of the through-hole is adapted with the diameter of portable pillar (10).
6. the recyclable full-automatic silicon wafer cleaning machine of a kind of environmental protection according to claim 1, it is characterised in that:
One end of the arc rubber slab (13) is fixedly connected with the first filter plate (6)；
The other end of the arc rubber slab (13) is fixedly connected with the top side of fixed column (7).
7. the recyclable full-automatic silicon wafer cleaning machine of a kind of environmental protection according to claim 1, it is characterised in that:
It is provided with rubber mat plate (19) below the mounting blocks (4), the inner wall of the rubber mat plate (19) and cyclic water tank (3)
It is fixedly connected；
The side top of the water tank (15) offers water outlet (20).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821943597.3U CN209108769U (en) | 2018-11-23 | 2018-11-23 | Full-automatic silicon chip cleaning machine of environmental protection circulated |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821943597.3U CN209108769U (en) | 2018-11-23 | 2018-11-23 | Full-automatic silicon chip cleaning machine of environmental protection circulated |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209108769U true CN209108769U (en) | 2019-07-16 |
Family
ID=67206309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821943597.3U Active CN209108769U (en) | 2018-11-23 | 2018-11-23 | Full-automatic silicon chip cleaning machine of environmental protection circulated |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209108769U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112742787A (en) * | 2020-12-14 | 2021-05-04 | 常德嘉腾电镀有限公司 | Cleaning solution recovery device for chemical degreasing for conveying cylinder electroplating |
| CN114748906A (en) * | 2022-04-22 | 2022-07-15 | 扬州禹力水处理科技有限公司 | Full-automatic purified water circulating system |
-
2018
- 2018-11-23 CN CN201821943597.3U patent/CN209108769U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112742787A (en) * | 2020-12-14 | 2021-05-04 | 常德嘉腾电镀有限公司 | Cleaning solution recovery device for chemical degreasing for conveying cylinder electroplating |
| CN112742787B (en) * | 2020-12-14 | 2022-05-31 | 常德嘉腾电镀有限公司 | Cleaning solution recovery device for chemical degreasing for conveying cylinder electroplating |
| CN114748906A (en) * | 2022-04-22 | 2022-07-15 | 扬州禹力水处理科技有限公司 | Full-automatic purified water circulating system |
| CN114748906B (en) * | 2022-04-22 | 2024-04-12 | 扬州禹力水处理科技有限公司 | Full-automatic circulation system of purified water |
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