CN209102672U - A kind of device detecting sulfur hexafluoride decomposition product - Google Patents
A kind of device detecting sulfur hexafluoride decomposition product Download PDFInfo
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- CN209102672U CN209102672U CN201821791537.4U CN201821791537U CN209102672U CN 209102672 U CN209102672 U CN 209102672U CN 201821791537 U CN201821791537 U CN 201821791537U CN 209102672 U CN209102672 U CN 209102672U
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- Prior art keywords
- control circuit
- sulfur hexafluoride
- decomposition product
- circuit
- hexafluoride decomposition
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- 229910018503 SF6 Inorganic materials 0.000 title claims abstract description 26
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 title claims abstract description 26
- 229960000909 sulfur hexafluoride Drugs 0.000 title claims abstract description 24
- 238000000354 decomposition reaction Methods 0.000 title claims abstract description 19
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000005864 Sulphur Substances 0.000 claims abstract description 12
- 238000002438 flame photometric detection Methods 0.000 claims abstract description 9
- 229910052698 phosphorus Inorganic materials 0.000 claims abstract description 8
- 239000011574 phosphorus Substances 0.000 claims abstract description 8
- 150000001875 compounds Chemical class 0.000 claims abstract description 7
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims abstract description 5
- 238000001514 detection method Methods 0.000 claims description 10
- 238000007689 inspection Methods 0.000 claims 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 abstract description 8
- OBTWBSRJZRCYQV-UHFFFAOYSA-N sulfuryl difluoride Chemical compound FS(F)(=O)=O OBTWBSRJZRCYQV-UHFFFAOYSA-N 0.000 abstract description 6
- LSJNBGSOIVSBBR-UHFFFAOYSA-N thionyl fluoride Chemical compound FS(F)=O LSJNBGSOIVSBBR-UHFFFAOYSA-N 0.000 abstract description 5
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052731 fluorine Inorganic materials 0.000 abstract description 4
- 239000011737 fluorine Substances 0.000 abstract description 4
- 238000004587 chromatography analysis Methods 0.000 abstract description 3
- 238000000926 separation method Methods 0.000 abstract description 3
- 230000003647 oxidation Effects 0.000 abstract description 2
- 238000007254 oxidation reaction Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 6
- DECCZIUVGMLHKQ-UHFFFAOYSA-N rhenium tungsten Chemical compound [W].[Re] DECCZIUVGMLHKQ-UHFFFAOYSA-N 0.000 description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- 239000001257 hydrogen Substances 0.000 description 5
- 238000000295 emission spectrum Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- -1 sulphur compound Chemical class 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 101000856246 Arabidopsis thaliana Cleavage stimulation factor subunit 77 Proteins 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000036760 body temperature Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 150000003017 phosphorus Chemical class 0.000 description 1
- 150000003018 phosphorus compounds Chemical class 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 150000003464 sulfur compounds Chemical class 0.000 description 1
- DUGWRBKBGKTKOX-UHFFFAOYSA-N tetrafluoro(oxo)-$l^{6}-sulfane Chemical compound FS(F)(F)(F)=O DUGWRBKBGKTKOX-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
The utility model discloses a kind of devices for detecting sulfur hexafluoride decomposition product, it includes: that power circuit is connect with MCU control circuit；Thermal Conductivity control circuit is connect with MCU control circuit, for detecting the concentration of sulfur hexafluoride decomposition product；Flame photometric detection control circuit is connect with MCU control circuit, for detecting the compound of phosphorus element-containing and element sulphur in sulfur hexafluoride decomposition product.The thermal conductivity detector (TCD) (TCD) and flame photometric detector (FPD) serial flow that the utility model uses, air, carbon tetrafluoride, the vikane (SO2F2), ten fluorine one of thionyl fluoride (S2OF2) oxidation two sulphur (S2OF10) content in sulfur hexafluoride can be measured, by chromatography post separation, air, carbon tetrafluoride are detected with thermal conductivity detector (TCD)；SO2F2, S2OF2, S2OF10 are detected with flame photometric detector.
Description
Technical field
The present invention relates to sulfur hexafluoride technical field, especially a kind of device for detecting sulfur hexafluoride decomposition product.
Background technique
The detection that SF6 decomposes gas has had corresponding national standard and IEC standard.Preliminary studies have shown that being drawn by PD
In addition to this composition of the decomposition product risen mainly has HF, SOF4, SOF2, SF6, S2F2, SO2F2, S2F10 and SO2 etc., also answer
The impurity such as air, CF4, steam are detected.Detection device is largely by external import at present, and equipment cost is higher,
Maintenance is complicated, is not suitable for high-volume and promotes, and there are no use Thermal Conductivity control circuit and flame luminosity currently on the market
The detection device of detection circuit.
Summary of the invention
In view of the above drawbacks of the prior art, it is an object of the invention to provide a kind of detection sulfur hexafluoride decomposition products
Device, the thermal conductivity detector (TCD) (TCD) and flame photometric detector (FPD) serial flow of use can measure in sulfur hexafluoride
Air, carbon tetrafluoride, vikane (SO2F2), ten fluorine one of thionyl fluoride (S2OF2) aoxidize two sulphur (S2OF10) content.
It is realized the purpose of the present invention is technical solution in this way, a kind of dress detecting sulfur hexafluoride decomposition product
It sets, it includes:
Power circuit, Thermal Conductivity control circuit, flame photometric detection control circuit and MCU control circuit；
The power circuit is connect with the MCU control circuit；
The Thermal Conductivity control circuit is connect with the MCU control circuit, for detecting sulfur hexafluoride decomposition product
Concentration；
The flame photometric detection control circuit is connect with the MCU control circuit, decomposes production for detecting sulfur hexafluoride
The compound of phosphorus element-containing and element sulphur in object.
Further, the flame photometric detection control circuit includes high-voltage power circuit and micro current amplifier circuit；
The high-voltage power circuit is used to export the operating voltage that absolute value is 210V~1100V；
The micro current amplifier current circuit is used to the direct current signal that photomultiplier tube exports amplifying output.
Further, the MCU control circuit is C8051F single-chip microcontroller.
By adopting the above-described technical solution, the present invention has the advantage that: the Thermal Conductivity that the utility model uses
Device (TCD) and flame photometric detector (FPD) serial flow, can measure air, carbon tetrafluoride, the vikane in sulfur hexafluoride
(SO2F2), ten fluorine one of thionyl fluoride (S2OF2) aoxidizes two sulphur (S2OF10) content and uses thermal conductivity detector (TCD) by chromatography post separation
Detect air, carbon tetrafluoride；SO2F2, S2OF2, S2OF10 are detected with flame photometric detector.
Other advantages, target and feature of the invention will be illustrated in the following description to a certain extent, and
And to a certain extent, based on will be apparent to those skilled in the art to investigating hereafter, Huo Zheke
To be instructed from the practice of the present invention.
Detailed description of the invention
Detailed description of the invention of the invention is as follows:
Fig. 1 is the connection schematic diagram for detecting the device of sulfur hexafluoride decomposition product.
Fig. 2 is Thermal Conductivity circuit diagram.
Fig. 3 is flame photometric detector schematic diagram.
Fig. 4 is high voltage power supply working principle diagram.
Fig. 5 is micro current amplifier circuit diagram.
Fig. 6 is the circuit connection diagram of serial modulus conversion chip AD7718.
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples.
Embodiment, as shown in Figure 1；A kind of device detecting sulfur hexafluoride decomposition product, it includes:
Power circuit, Thermal Conductivity control circuit, flame photometric detection control circuit and MCU control circuit；
Power circuit is connect with MCU control circuit；
Thermal Conductivity control circuit is connect with MCU control circuit, for detecting the concentration of sulfur hexafluoride decomposition product；
Flame photometric detection control circuit is connect with MCU control circuit, phosphorous in sulfur hexafluoride decomposition product for detecting
The compound of element and element sulphur.
MCU (Micro Control Unit) Chinese is micro-control unit, also known as one chip microcomputer (Single
Chip Microcomputer) or single-chip microcontroller, refer to the appearance and its development with large scale integrated circuit, by computer
CPU, RAM, ROM, timing number device and a variety of I/O Interface integrations on one chip, form the computer of chip-scale, are different
Do various combination control in application.The utility model has selected the C8051F020 type MCU of Silabs company, the U.S..
As shown in Fig. 2, gas has conduction of heat, different material has the different coefficients of heat conduction, thermal conductivity detector (TCD)
Exactly designed according to the difference of the different material coefficient of heat conduction.It has response to organic and inorganic sample, and does not destroy
Sample can be used for macro-analysis.
Thermal conductivity detector (TCD) is based on gas heat-conduction principle, with a kind of detection device of thermal resistance type sensor composition.Heat
Leading detector thermal resistance is using heat conducting element made of rhenium tungsten wire material, in the gas chamber of stainless steel pond body, on circuit
Connect into typical wheatstone bridge circuits.When the carrier gas flux in conductance cell gas chamber is stablized, when conductance cell pond body temperature is constant,
The heat that heat and various factors caused by rhenium tungsten wire thermal resistance consumption electric energy scatter and disappear reaches dynamic equilibrium, thus by rhenium tungsten wire heat
The bridge circuit of resistance composition is at equilibrium state.When there is sample to enter, due to the difference of sample thermal conductivity, break thermal conductivity
Hot dynamic equilibrium in pond causes rhenium tungsten wire resistance and temperature to change, and the resistance value of rhenium tungsten wire thermal resistance also changes therewith, this
Sample has just broken the balance of Wheatstone bridge, generates a voltage signal, and size can reflect the concentration of component.
The thermal conductivity detector (TCD) of the utility model we use and traditional constitute Wheatstone bridge R by four rhenium tungsten wiresi
As measurement arm RrAs reference arm.Measuring circuit uses constant-current circuit, which is with a sample circuit and electric bridge string
Connection, to keep the electric current of electric bridge constant, when component enters measurement arm (Ri), resistance increases, when bridge flows down drop, on sample circuit
Just reflect that electric current reduces, after being compared, being amplified, this variation is sent to adjustment circuit, makes to keep bridge current constant.
As shown in figure 3, flame photometric detector (FPD) is substantially a simple emission spectrometer, mainly by four
It is grouped as:
1. photo-emission source is a hydrogen rich flame (H2:O2> 3:1), temperature is up to 2000~3250 DEG C；
2. wavelength selector, common wavelengths selector has interference formula or medium optical filter；
3. reception device includes photomultiplier tube (PMT) and amplifier, effect is the signal for the signal of light being transformed into electricity,
And suitably amplify；
4. recorder and other data processings.
FPD concrete operating principle are as follows: when phosphorous, sulphur compound, when burning in hydrogen rich flame, in condition appropriate
Under, a series of characteristic spectrum will be emitted.Wherein, sulfide emission spectrum wave-length coverage is maximum about between 300~450nm
Wavelength is about in 394nm or so；About between 480~575nm, maximum wavelength about exists phosphorus compound emission spectrum wave-length coverage
526nm or so.Phosphorus-containing compound, it is considered that the oxide of oxidizing fire generation phosphorus first, then also by the hydrogen in hydrogen-rich flame
Original will emit the light of certain frequency range of wavelength at HPO, this phosphorus sliver excited by flame high temperature, and luminous intensity is proportional to
The concentration of HPO, so it is linear that FPD, which surveys phosphorus compound response,.
The compound of sulfur-bearing burns in hydrogen rich flame, generates the S of excitation state at moderate temperatures2* molecule, when returning to base
When state, also emit the characteristic light of a certain wave band.It and phosphorous compound working mechanism are not both: must be by two sulphur originals
Son, and under the appropriate temperature conditions, the excitation state S with transmitting characteristic light can be generated2* molecule, so transmitting light intensity
Degree is proportional to S2* molecule, and S2* molecule and SO2Concentration it is square directly proportional, therefore when FPD surveys sulphur, respond to be non-linear, but
In fact, sulphur intensity of emission spectra (IS2*) relationship between the quality of sulfur compound, flow velocity is IS2=I0[SO2]n, in formula:
N is not exactly equal to 2, there are very big relationship in it and operating condition and the type of compound, especially quantitative in single flame
When operation, if very big quantitative error will be will cause with n=2 calculating.
FPD detector circuit mainly includes high voltage power supply and micro current amplifier two parts.
High voltage power supply is as shown in Figure 4 using special high-pressure module principle.
Its main feature is that being exported with gage system, output high pressure range is wider, and output area is 210V~1100V (absolute
Value).High pressure adjustment mode is divided into resistance adjustment and voltage adjustment, and out-put supply ripple is easy to operate less than 0.005%, flexibly
Reliably.
What micro current amplifier circuit was exported due to photomultiplier tube is still faint direct current signal, and such signal is necessary
Can just work station be sent to show after amplification.Since signal code is too weak, singal source resistance is again high, therefore chooses and suitably put
Big device is the key that design FPD detection circuit, it is necessary to be completed using highly sensitive and high input impedance dc amplifier.It is right
The requirement of this kind of amplifier is as follows: 1. can measure 10-8-10-12The ion stream of A；2. the input impedance of amplifier is greater than 1013
Ω；3. since current range to be measured is big, and being consecutive variations, therefore it is required that linearity of amplifier range is wide and lesser response
Time.In order to meet above-mentioned requirements, multistage profound and negative feedbck DC current amplifier is mostly used at present, system has selected AD here
The ultralow input bias current operational amplifier AD549 of company, AD549 have following key property:
1. ultralow bias current, the bias current maximum of AD549L is only 60fA (AD549J 250fA).
2. lower offset voltage, the offset voltage of AD549K is up to 0.25mV (AD549J 1.00mV).
3. Low Drift Temperature, the maximum temperature drift of AD549K is 5 μ V/ DEG C (AD549J is 20 μ V/ DEG C).
4. low input noise, the input voltage noise of 0.1Hz~10Hz range signal is 4 μ V.
5. input impedance is 1013Ω。
Micro current amplifier circuit is as shown in Figure 5.
The micro current signal that ion chamber generates flows through resistance R9, generates voltage drop E at its both ends, designs simultaneously in system
Three road auxiliary resistances are to choose the suitable resistance value of resistance according to different current signals.Signal flows through micro current amplifier
After AD549 amplification, it is output to A/D conversion circuit through attenuator circuit, is shown in work station after host is transferred to work station
Come.
The thermal conductivity detector (TCD) (TCD) and flame photometric detector (FPD) serial flow that the utility model uses, can measure
Air, carbon tetrafluoride, vikane (SO2F2), ten fluorine one of thionyl fluoride (S2OF2) oxidation two sulphur (S2OF10) in sulfur hexafluoride
Content detects air, carbon tetrafluoride with thermal conductivity detector (TCD) by chromatography post separation；With flame photometric detector detection SO2F2,
S2OF2、S2OF10。
Finally it should be noted that: the above embodiments are merely illustrative of the technical scheme of the present invention and are not intended to be limiting thereof, to the greatest extent
Invention is explained in detail referring to above-described embodiment for pipe, it should be understood by those ordinary skilled in the art that: still
It can be with modifications or equivalent substitutions are made to specific embodiments of the invention, and without departing from any of spirit and scope of the invention
Modification or equivalent replacement, should all cover within the scope of the claims of the present invention.
Claims (3)
1. a kind of device for detecting sulfur hexafluoride decomposition product, which is characterized in that described device includes power circuit, thermal conductivity inspection
Survey control circuit, flame photometric detection control circuit and MCU control circuit；
The power circuit is connect with the MCU control circuit；
The Thermal Conductivity control circuit is connect with the MCU control circuit, for detecting the concentration of sulfur hexafluoride decomposition product；
The flame photometric detection control circuit is connect with the MCU control circuit, for detecting in sulfur hexafluoride decomposition product
The compound of phosphorus element-containing and element sulphur.
2. the device of detection sulfur hexafluoride decomposition product as described in claim 1, which is characterized in that the flame photometric detection
Control circuit includes high-voltage power circuit and micro current amplifier circuit；
The high-voltage power circuit is used to export the operating voltage that absolute value is 210V~1100V；
The micro current amplifier current circuit is used to the direct current signal that photomultiplier tube exports amplifying output.
3. the device of detection sulfur hexafluoride decomposition product as described in claim 1, which is characterized in that the MCU control circuit
For C8051F single-chip microcontroller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821791537.4U CN209102672U (en) | 2018-10-31 | 2018-10-31 | A kind of device detecting sulfur hexafluoride decomposition product |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821791537.4U CN209102672U (en) | 2018-10-31 | 2018-10-31 | A kind of device detecting sulfur hexafluoride decomposition product |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209102672U true CN209102672U (en) | 2019-07-12 |
Family
ID=67157707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821791537.4U Active CN209102672U (en) | 2018-10-31 | 2018-10-31 | A kind of device detecting sulfur hexafluoride decomposition product |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209102672U (en) |
-
2018
- 2018-10-31 CN CN201821791537.4U patent/CN209102672U/en active Active
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