CN209098807U - A kind of LPCVD cvd furnace - Google Patents
A kind of LPCVD cvd furnace Download PDFInfo
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- CN209098807U CN209098807U CN201821903801.9U CN201821903801U CN209098807U CN 209098807 U CN209098807 U CN 209098807U CN 201821903801 U CN201821903801 U CN 201821903801U CN 209098807 U CN209098807 U CN 209098807U
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Abstract
The utility model provides a kind of LPCVD cvd furnace, is related to cvd furnace field.The LPCVD cvd furnace, including pedestal, the top of the pedestal includes cabinet, left support and right support, it is fixedly connected at the top of the bottom of the cabinet and pedestal, the left support is located at the left side setting of cabinet, it is fixedly connected at the top of the bottom of the left support and pedestal, it is fixedly connected on the left of the right side of left support and cabinet, right support is located at the right side setting of cabinet, it is fixedly connected on the right side of the left side of right support and cabinet, the top of left support includes left fixture block, and the bottom rear of left fixture block is rotatablely connected by the top rear of hinge and left support.The LPCVD cvd furnace, by the way that left support, left fixture block, right support and right fixture block is arranged in the two sides of cabinet, it is to achieve the purpose that cvd furnace is fixed, by the way that card fire door and rubber pad is arranged in the two sides of cabinet, in the front setting plate of cabinet, to solve the problems, such as that deposition furnace body is inconvenient to take out and place in cabinet.
Description
Technical field
The utility model relates to cvd furnace technical field, specially a kind of LPCVD cvd furnace.
Background technique
LPCVD technology can be used to prepare silicon epitaxy layer, can be used for the heavy of various amorphous passivating films and polycrystal film
Product is a kind of important film deposition technique, but cvd furnace needs to overhaul and safeguard after prolonged use, but existing deposition
Furnace due to the fixed form of volume and placement cause maintenance when it is inconvenient.
Summary of the invention
The utility model is to provide a kind of fixation that can be fast and convenient and places easy LPCVD cvd furnace.
Technical solution
In order to achieve the above object, the utility model is achieved by the following technical programs: a kind of LPCVD cvd furnace, packet
Pedestal is included, the top of the pedestal includes cabinet, left support and right support, the fixed company in the bottom of the cabinet and the top of pedestal
It connects, the left support is located at the left side setting of cabinet, is fixedly connected at the top of the bottom of the left support and pedestal, the left branch
Be fixedly connected on the left of the right side of frame and cabinet, the right support be located at cabinet right side setting, the left side of the right support with
Be fixedly connected on the right side of cabinet, the top of the left support includes left fixture block, the bottom rear of the left fixture block by hinge with
The top rear of left support is rotatablely connected, and the top of the right support includes right fixture block, and the bottom rear of the right fixture block passes through
The rotation connection of the top rear of hinge and right support.
The inside of the cabinet includes upper heating plate, deposits furnace body, air inlet pipe, escape pipe and lower heating plate, described above to add
Hot plate is located at the inner wall setting of cabinet, and the surface of the upper heating plate and the inner wall of cabinet are clamped, and institute's cvd furnace body is located at upper add
The downside of hot plate is arranged, and the left side of the deposition furnace body is fixedly connected with the right end of air inlet pipe, the right side of the deposition furnace body with
The left end of escape pipe is fixedly connected, the lower heating plate be located at deposition furnace body downside setting, the surface of the lower heating plate with
The inner wall of cabinet is clamped, and the inside of the deposition furnace body includes left end cap, slide glass boat, deposition hole, right end cap and fixed block, described
Fixed block is located at the inner wall bottom setting for depositing furnace body, the fixed company in bottom of the bottom and deposition inboard wall of furnace body of the fixed block
It connecing, the top of the fixed block is fixedly connected with the surface bottom portion of slide glass boat, and the left end cap is located at the left side setting of slide glass boat,
It is threadedly coupled on the left of the inner wall of the left end cap and the surface of slide glass boat, the right end cap is located at the right side setting of slide glass boat, institute
It states and is threadedly coupled on the right side of the inner wall of right end cap and the surface of slide glass boat, the front of the cabinet includes plate, and the plate is located at
The front setting of cabinet, the surface of the plate and the inner wall of cabinet are slidably connected, and the two sides of the cabinet include card fire door, institute
It states card fire door and is located at the two sides inner wall of cabinet and open up, the inside of card fire door includes rubber pad, the bottom of the rubber pad and card furnace
The inner wall bottom bonding of mouth, the left end of the air inlet pipe extends to the left side of cabinet, the surface of the air inlet pipe by card fire door
The top slide of the connection of the surface activity of bottom and rubber pad, the surface bottom portion of the air inlet pipe and left support connects, it is described into
The bottom of the surface crown of tracheae and left fixture block is clamped, and the right end of the escape pipe extends to the right side of cabinet by card fire door,
The surface bottom portion of the escape pipe and the surface activity of rubber pad connect the surface crown of the escape pipe and the bottom of right fixture block
Clamping, the surface bottom portion of the escape pipe and the top movable of right support connect.
Further, the bottom of the pedestal includes universal wheel and kelly, and the inner wall of the universal wheel passes through shaft and bottom
The lower rotation connection of seat, the kelly are located at the back side setting of universal wheel, the left end of the kelly and the back side card of universal wheel
It connects.
Further, the quantity of the universal wheel and kelly is four, and four universal wheels and four kellies are with pedestal
Central axes are the quadrangle for being symmetricly set on pedestal.
Further, the bottom of the air inlet pipe includes left fixed column, and the left fixed column is located at the inside setting of cabinet,
The top of the left fixed column is flexibly connected with the surface bottom portion of air inlet pipe, and the bottom of the left fixed column is upper with lower heating plate
The left side on surface is clamped, and the bottom of the escape pipe includes right fixed column, and the right fixed column is located at the inside setting of cabinet, institute
The top for stating right fixed column is flexibly connected with the surface bottom portion of escape pipe, the upper table of the bottom of the right fixed column and lower heating plate
Right side of face clamping.
Further, the surface of the deposition furnace body includes deposition hole, and the surface that the deposition hole is located at deposition furnace body is equal
It is even to open up.
Further, the inner diameter size of the air inlet pipe is less than the inner diameter size of escape pipe.
The utility model provides a kind of LPCVD cvd furnace.Have it is following the utility model has the advantages that
1, the LPCVD cvd furnace, by the way that left support, left fixture block, right support and right fixture block is arranged in the two sides of cabinet, thus
Achieve the purpose that fix cvd furnace, by the way that card fire door and rubber pad is arranged in the two sides of cabinet, in the front setting of cabinet
Plate, to solve the problems, such as that deposition furnace body is inconvenient to take out and place in cabinet.
2, LPCVD cvd furnace, by the way that universal wheel and kelly is arranged in the bottom of pedestal, to reach to cvd furnace
Mobile and fixed purpose includes left fixed column and right fixed column by the inside in cabinet, to solve deposition furnace body certainly
The problem of weight stress and deformation.
Detailed description of the invention
FIG. 1 is a schematic structural view of the utility model；
Fig. 2 is the utility model the structure left view；
Fig. 3 is the utility model structure card fire door schematic diagram；
Fig. 4 is the utility model structure top view.
Wherein, 1 pedestal, 2 cabinets, 3 deposition furnace bodies, 4 right end caps, 5 fixed blocks, 6 deposition holes, 7 slide glass boats, 8 left end caps, 9
Upper heating plate, 10 left fixture blocks, 11 air inlet pipe, 12 left supports, 13 left fixed columns, 14 lower heating plates, 15 right fixture blocks, 16 escape pipes,
17 right fixed columns, 18 right supports, 19 universal wheels, 20 kellies, 21 card fire doors, 22 plates, 23 rubber pads.
Specific embodiment
As shown in Figs 1-4, the utility model embodiment provides a kind of LPCVD cvd furnace, including pedestal 1, the top of pedestal 1
Including cabinet 2, left support 12 and right support 18, the bottom of cabinet 2 is fixedly connected with the top of pedestal 1, and left support 12 is located at case
The left side of body 2 is arranged, and the bottom of left support 12 is fixedly connected with the top of pedestal 1, the right side of left support 12 and the left side of cabinet 2
It is fixedly connected, right support 18 is located at the right side setting of cabinet 2, and the left side of right support 18 is fixedly connected with the right side of cabinet 2, left branch
The top of frame 12 includes left fixture block 10, and the bottom rear of left fixture block 10 is rotated by the top rear of hinge and left support 12 to be connected
It connects, the top of right support 18 includes right fixture block 15, and the bottom rear of right fixture block 15 passes through the top rear of hinge and right support 18
Rotation connection, it is using left support 12, left fixture block 10, right support 18 and right fixture block 15 that air inlet pipe 11 and escape pipe 16 is fixed, prevent
Only it is rotated, and the bottom of pedestal 1 includes universal wheel 19 and kelly 20, and the inner wall of universal wheel 19 passes through the bottom of shaft and pedestal 1
Rotation connection, kelly 20 are located at the back side setting of universal wheel 19, and the left end of kelly 20 and the back side of universal wheel 19 are clamped, universal wheel
19 and the quantity of kelly 20 be four, four universal wheels 19 and four kellies 20 are to be symmetricly set on the central axes of pedestal 1
The quadrangle of pedestal 1, universal wheel 19 and kelly 20 facilitate the movement and fixation of whole device.
The inside of cabinet 2 includes upper heating plate 9, deposition furnace body 3, air inlet pipe 11, escape pipe 16 and lower heating plate 14, is above added
Hot plate 9 is located at the inner wall setting of cabinet 2, and the surface of upper heating plate 9 and the inner wall of cabinet 2 are clamped, and deposited furnace body 3 is located at upper add
The downside of hot plate 9 is arranged, and the left side of deposition furnace body 3 is fixedly connected with the right end of air inlet pipe 11, deposits right side and the outlet of furnace body 3
The left end of pipe 16 is fixedly connected, and lower heating plate 14 is located at the downside setting of deposition furnace body 3, the surface of lower heating plate 14 and cabinet 2
Inner wall clamping, the surface of cvd furnace includes deposition hole 6, and the surface that deposition hole 6 is located at deposition furnace body 3 uniformly opens up, and is uniformly set
The deposition hole 6 set is conducive to reaction gas even into depositing inside furnace body 3, and the aperture of deposition hole 6 is 0.6 millimeter, cvd furnace
The inside of body 3 includes left end cap 8, slide glass boat 7, deposition hole 6, right end cap 4 and fixed block 5, and fixed block 5 is located at deposition furnace body 3
The bottom of the setting of inner wall bottom, fixed block 5 is fixedly connected with the bottom of deposition 3 inner wall of furnace body, the top of fixed block 5 and slide glass boat
7 surface bottom portion is fixedly connected, and left end cap 8 is located at the left side setting of slide glass boat 7, the inner wall of left end cap 8 and the surface of slide glass boat 7
Left side is threadedly coupled, and right end cap 4 is located at the right side setting of slide glass boat 7, spiral shell on the right side of the inner wall of right end cap 4 and the surface of slide glass boat 7
Line connection, the front of cabinet 2 include plate 22, and plate 22 is located at the front setting of cabinet 2, surface and the cabinet 2 of plate 22
Inner wall is slidably connected, and the two sides of cabinet 2 include card fire door 21, and the two sides inner wall that card fire door 21 is located at cabinet 2 opens up, card fire door 21
Inside include rubber pad 23, the bottom of rubber pad 23 and the inner wall bottom of card fire door 21 are Nian Jie, rubber pad 23 for prevent into
The surface of tracheae 11 and escape pipe 16 is scratched by 21 inner wall of card fire door, and the left end of air inlet pipe 11 extends to cabinet by card fire door 21
2 left side, the inner diameter of card fire door 21 are slightly larger than the surface diameter of air inlet pipe 11 and escape pipe 16, facilitate air inlet pipe 11 and go out
The surface bottom portion of the placement of tracheae 16, air inlet pipe 11 is connect with the surface activity of rubber pad 23, the surface bottom portion of air inlet pipe 11 with
The top slide of left support 12 connects, and the bottom of the surface crown of air inlet pipe 11 and left fixture block 10 is clamped, the right end of escape pipe 16
The right side of cabinet 2 is extended to by card fire door 21, the surface bottom portion of escape pipe 16 connect outlet with the surface activity of rubber pad 23
The bottom of the surface crown of pipe 16 and right fixture block 15 is clamped, and the surface bottom portion of escape pipe 16 and the top movable of right support 18 connect
It connects, the inner diameter size of air inlet pipe 11 is less than the inner diameter size of escape pipe 16, and 16 inner diameter of escape pipe is greatly and air inlet
11 inner diameter of pipe can slow down the spilling of internal gas, increase deposition efficiency, and the bottom of air inlet pipe 11 includes left fixed column 13,
Left fixed column 13 is located at the inside setting of cabinet 2, and the top of left fixed column 13 is flexibly connected with the surface bottom portion of air inlet pipe 11, left
The left side of the bottom of fixed column 13 and the upper surface of lower heating plate 14 is clamped, and the bottom of escape pipe 16 includes right fixed column 17, right
Fixed column 17 is located at the inside setting of cabinet 2, and the top of right fixed column 17 is flexibly connected with the surface bottom portion of escape pipe 16, and the right side is solid
It is clamped on the right side of the bottom of fixed column 17 and the upper surface of lower heating plate 14, left fixed column 13 and right fixed column 17 by air inlet pipe 11 and go out
Tracheae 16 supports, and prevents cvd furnace self weight stress and deformation.
In use, pressing kelly 20 after cvd furnace is pushed to suitable position by universal wheel 19 for whole fixation, drawing
Left fixture block 10 and right fixture block 15 are opened in plate 22 out, by air inlet pipe 11 and escape pipe 16 along the card fire door 21 of 2 two sides of cabinet
Push-in closes left fixture block 10 and right fixture block until air inlet pipe 11 and escape pipe 16 shift the top of left support 12 and right support 18 onto
15, cabinet 2 is inserted by 16 fixed column of air inlet pipe 11 and escape pipe, then by plate 22.
Claims (6)
1. a kind of LPCVD cvd furnace, including pedestal (1), it is characterised in that: the top of the pedestal (1) includes cabinet (2), a left side
Bracket (12) and right support (18) are fixedly connected at the top of the bottom and pedestal (1) of the cabinet (2), the left support (12)
It is arranged positioned at the left side of cabinet (2), is fixedly connected at the top of the bottom and pedestal (1) of the left support (12), the left support
(12) it is fixedly connected on the left of right side and cabinet (2), the right support (18) is located at the right side setting of cabinet (2), the right side
It is fixedly connected on the right side of the left side of bracket (18) and cabinet (2), the top of the left support (12) includes left fixture block (10), described
The bottom rear of left fixture block (10) is rotatablely connected by the top rear of hinge and left support (12), the top of the right support (18)
Portion includes right fixture block (15), and the bottom rear of the right fixture block (15) is rotated by the top rear of hinge and right support (18) to be connected
It connects；
The inside of the cabinet (2) includes upper heating plate (9), deposition furnace body (3), air inlet pipe (11), escape pipe (16) He Xiajia
Hot plate (14), the upper heating plate (9) are located at the inner wall setting of cabinet (2), the surface and cabinet (2) of the upper heating plate (9)
Inner wall clamping, deposit furnace body (3) be located at upper heating plate (9) downside be arranged, it is described deposit furnace body (3) left side and air inlet
The right end of pipe (11) is fixedly connected, and the right side of deposition furnace body (3) is fixedly connected with the left end of escape pipe (16), is added under described
Hot plate (14) is located at the downside setting of deposition furnace body (3), and the surface of the lower heating plate (14) and the inner wall of cabinet (2) are clamped,
The inside of deposition furnace body (3) includes left end cap (8), slide glass boat (7), deposition hole (6), right end cap (4) and fixed block (5),
The inner wall bottom that the fixed block (5) is located at deposition furnace body (3) is arranged, in the bottom and deposition furnace body (3) of the fixed block (5)
The bottom of wall is fixedly connected, and the top of the fixed block (5) is fixedly connected with the surface bottom portion of slide glass boat (7), the left end cap
(8) left side positioned at slide glass boat (7) is arranged, and is threadedly coupled on the left of the inner wall of the left end cap (8) and the surface of slide glass boat (7),
The right end cap (4) is located at the right side setting of slide glass boat (7), the inner wall of the right end cap (4) and the surface right side of slide glass boat (7)
It is threadedly coupled, the front of the cabinet (2) includes plate (22), and the plate (22) is located at the front setting of cabinet (2), described
The surface of plate (22) and the inner wall of cabinet (2) are slidably connected, and the two sides of the cabinet (2) include card fire door (21), the card
The two sides inner wall that fire door (21) is located at cabinet (2) opens up, and the inside of card fire door (21) includes rubber pad (23), the rubber pad
(23) bottom is Nian Jie with the inner wall bottom of card fire door (21), and the left end of the air inlet pipe (11) is extended to by card fire door (21)
The surface bottom portion in the left side of cabinet (2), the air inlet pipe (11) is connect with the surface activity of rubber pad (23), the air inlet pipe
(11) surface bottom portion is connect with the top slide of left support (12), the surface crown of the air inlet pipe (11) and left fixture block (10)
Bottom clamping, the right end of the escape pipe (16) extends to the right side of cabinet (2), the escape pipe by card fire door (21)
(16) surface bottom portion connect surface crown and right fixture block (15) of the escape pipe (16) with the surface activity of rubber pad (23)
Bottom clamping, the surface bottom portion of the escape pipe (16) connect with the top movable of right support (18).
2. a kind of LPCVD cvd furnace according to claim 1, it is characterised in that: the bottom of the pedestal (1) includes universal
(19) and kelly (20) are taken turns, the inner wall of the universal wheel (19) is connect by shaft with the lower rotation of pedestal (1), pedestal (1)
Bottom include universal wheel (19) and kelly (20), the inner wall of the universal wheel (19) is turned by the bottom of shaft and pedestal (1)
Dynamic connection, the kelly (20) are located at the back side setting of universal wheel (19), left end and universal wheel (19) of the kelly (20)
Back side clamping, the left end of the kelly (20) and the back side of universal wheel (19) are clamped.
3. a kind of LPCVD cvd furnace according to claim 2, it is characterised in that: the universal wheel (19) and kelly (20)
Quantity be four, four universal wheels (19) and four kellies (20) are to be symmetricly set on pedestal with the central axes of pedestal (1)
(1) quadrangle.
4. a kind of LPCVD cvd furnace according to claim 1, it is characterised in that: the bottom of the air inlet pipe (11) includes
Left fixed column (13), the left fixed column (13) be located at cabinet (2) inside setting, the top of the left fixed column (13) with into
The surface bottom portion of tracheae (11) is flexibly connected, the left side of the upper surface of the bottom and lower heating plate (14) of the left fixed column (13)
Clamping, the bottom of the escape pipe (16) includes right fixed column (17), and the inside that the right fixed column (17) is located at cabinet (2) is set
It sets, the top of the right fixed column (17) is flexibly connected with the surface bottom portion of escape pipe (16), the bottom of the right fixed column (17)
It is clamped on the right side of portion and the upper surface of lower heating plate (14).
5. a kind of LPCVD cvd furnace according to claim 1, it is characterised in that: the surface of deposition furnace body (3) includes
Deposition hole (6), the surface that the deposition hole (6) is located at deposition furnace body (3) uniformly open up.
6. a kind of LPCVD cvd furnace according to claim 1, it is characterised in that: the inner diameter of the air inlet pipe (11)
Size is less than the inner diameter size of escape pipe (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821903801.9U CN209098807U (en) | 2018-11-19 | 2018-11-19 | A kind of LPCVD cvd furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821903801.9U CN209098807U (en) | 2018-11-19 | 2018-11-19 | A kind of LPCVD cvd furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209098807U true CN209098807U (en) | 2019-07-12 |
Family
ID=67160395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821903801.9U Active CN209098807U (en) | 2018-11-19 | 2018-11-19 | A kind of LPCVD cvd furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209098807U (en) |
-
2018
- 2018-11-19 CN CN201821903801.9U patent/CN209098807U/en active Active
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