CN209086628U - A kind of preparation facilities of novel cycle polarization domain reverse structure crystal - Google Patents
A kind of preparation facilities of novel cycle polarization domain reverse structure crystal Download PDFInfo
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- CN209086628U CN209086628U CN201822027472.2U CN201822027472U CN209086628U CN 209086628 U CN209086628 U CN 209086628U CN 201822027472 U CN201822027472 U CN 201822027472U CN 209086628 U CN209086628 U CN 209086628U
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Abstract
The utility model discloses a kind of preparation facilities of novel cycle polarization domain reverse structure crystal, including vacuum chamber, the bottom of vacuum chamber is provided with sample stage, ferroelectric crystal is provided on sample stage, the bottom surface of ferroelectric crystal is etched with periodic electrodes, periodic electrodes are grounded, and S type or spiral shape corona wire are provided with above ferroelectric crystal, and corona wire connects gas source and high voltage power supply.The S type or spiral shape corona wire that the utility model uses can effectively eliminate point discharge caused by skin effect while generating uniform electric field, effectively improve the uniformity coefficient of polarized electric field, improve yields.
Description
Technical field
The utility model relates to a kind of preparation facilities of novel cycle polarization domain reverse structure crystal, belong to period polarized farmland
Invert the preparation field of crystal.
Background technique
The periodic polarized reversion on crystalline ferroelectric farmland can be easy and effectively realizes quasi-phase matched, it is as acquisition
The important means of efficient frequency multiplication light output, has been widely used in the non-linear optical fields such as laser freuqency doubling, optical parametric oscillation,
It is the core component of required light source in the application such as high-density optical storage, optical communication and laser measurement.
The most common method of manufacturing cycle polarization domain reverse crystal is electric field poling at present, passes through fabrication cycle exposure mask
Version turns periodic electrodes to be carved into the face crystal+C, and subsequent applied voltage polarizes, to realize that the period polarized farmland of crystal is anti-
Turn.In document (M.Yamada, N. Nada, M. Saitoh, and K. Watanabe, First-order quasi-
phase matched LiNbO3 waveguide periodically poled by applying an external
field for efficient blue second-harmonic generation, Appl. Phys. Lett., vol.
62, no. 5,1993, pp. 435-436) in realize the crystal of electric field poling manufacturing cycle domain structure for the first time.Text
In add periodic electrodes in the face crystal+C and be grounded, the face crystal-C adds plate aluminium electrode and applies pulse voltage, thus in crystal
Middle generation high voltage electric field has prepared the lithium columbate crystal of the period polarized domain structure of 0.2mm thickness.Due to power supply and plate electrode
Contact range is small, and such mode for generating high voltage electric field is difficult to be formed uniform electric field, and electrode is easily breakdown when overtension, therefore
The depth on formed farmland is shallower.
In patent, (Radix Cynanchi Paniculati, Zhang Renshi, Jonathan's mark's that, make domain inversion structures on nonlinear ferroelectric substrate
Method, utility model, application number: 200780035798.1) in, Radix Cynanchi Paniculati et al. using multiple regularly arranged corona torches come
There is provided extra electric field, wherein the face crystal+C adds periodic electrodes and is grounded, and the face crystal-C is powered on dizzy torch and carries out corona discharge, releases
Polarized electric field is formed between the charge put and ferroelectric crystal grounding electrode, and the arrangement by controlling corona torch makes polarized electric field in equal
Even distribution.Since corona torch shape used can cause point discharge by skin effect under high pressure, being uniformly distributed for electric field is influenced,
Reduce the yields of product.
Utility model content
The utility model provides a kind of preparation facilities of novel cycle polarization domain reverse structure crystal, solves corona torch
Bring non-uniform electric problem.
In order to solve the above-mentioned technical problem, the technical scheme adopted by the utility model is
A kind of preparation facilities of novel cycle polarization domain reverse structure crystal, including vacuum chamber, the bottom setting of vacuum chamber
There is sample stage, ferroelectric crystal is provided on sample stage, the bottom surface of ferroelectric crystal is etched with periodic electrodes, and periodic electrodes connect
Ground, S type or spiral shape corona wire are provided with above ferroelectric crystal, and corona wire connects gas source and high voltage power supply.
It is drawn from vacuum chamber side wall at the both ends of S type corona wire.
For screw type corona wire to gradually spiral increases at center, centrally located one end is another from vacuum chamber Base top contact
It is drawn from from vacuum chamber side wall at end.
Vacuum chamber includes cavity and the vacuum pump that is connected to cavity.
Channel is offered on sample stage, towards ferroelectric crystal bottom surface, the other end in channel connects vacuum pump for the one end in channel.
It further include the temperature control device for controlling ferroelectric crystal temperature.
The utility model is achieved the utility model has the advantages that the S type or spiral shape corona wire that the utility model uses can produce
Point discharge caused by skin effect is effectively eliminated while raw uniform electric field, effectively improves the uniform journey of polarized electric field
Degree improves yields.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the schematic diagram of S-shaped corona cable architecture；
Fig. 3 is the schematic diagram of spiral shape corona cable architecture.
Specific embodiment
The utility model is further described with reference to the accompanying drawing.Following embodiment is only used for clearly illustrating this
The technical solution of utility model, and cannot be used as a limitation the limitation protection scope of the utility model.
As shown in Figure 1, a kind of preparation facilities of novel cycle polarization domain reverse structure crystal, including vacuum chamber 1, vacuum chamber
1 bottom is provided with sample stage 2, and ferroelectric crystal 3 is provided on sample stage 2, and the bottom surface of ferroelectric crystal 3 is etched with periodic electrodes
4, periodic electrodes 4 are grounded, and the top of ferroelectric crystal 3 is provided with S type or spiral shape corona wire 9, and corona wire 9 connects gas source 8
With high voltage power supply 7.
Vacuum chamber 1 includes cavity and the vacuum pump 6 being connected to cavity, and vacuum chamber 1 is to provide needed for corona discharge absolutely
Edge environment, the vacuum pump 6 being connected to cavity realize that vacuum ranges are 10-4- 1 atmospheric pressure.
Sample stage 2 offers channel 5 placing ferroelectric crystal 3 on sample stage 2, the one end in channel 5 is towards ferroelectric crystal
The other end connection of 3 bottom surfaces, channel 5 is located at the vacuum pump 6 outside vacuum chamber 1, which is
10-6- 1 atmospheric pressure, for reinforcing electrical isolation.
The device of above-mentioned manufacturing cycle polarization domain reverse structure crystal further includes the temperature control device for controlling 3 temperature of ferroelectric crystal
10；Temperature control device 10 includes that connection sample stage 2 is the heater of the heating of sample stage 2, the temperature sensing near ferroelectric crystal 3
The feed circuit or temperature control device 10 of device and stable 3 temperature of ferroelectric crystal include the radiation positioned at connection 2 attachment of sample stage
Heater, the temperature sensor near ferroelectric crystal 3 and the feed circuit for stablizing 3 temperature of ferroelectric crystal.
The periodic electrodes 4 of ferroelectric crystal 3 coat insulating film, and periodic electrodes 4 and 1 environment of vacuum chamber are completely cut off.
Corona wire 9 uses regular cylindrical shape, is made of internal metal tube and external insulation, metal tube inside diameter ranges are
1-10mm, external diametrical extent 1-100mm.External insulation coats metal tubular at insulation tube and by outer ground.
S type corona wire 9 is as shown in Fig. 2, the both ends of S type corona wire 9 are drawn from 1 side wall of vacuum chamber；Screw type corona wire 9 is such as
Shown in Fig. 3, screw type corona wire 9 is to gradually spiral raising at center, and centrally located one end is from 1 Base top contact of vacuum chamber, separately
It is drawn from from 1 side wall of vacuum chamber one end；Above two corona wire 9 can more efficiently be realized on 3 surface of ferroelectric crystal uniform
Distribution of charges.
The connection of corona wire 9 is located at high voltage power supply 7 and gas source 8 outside vacuum chamber 1, provides voltage by high voltage power supply 7 and reaches
Electric field strength needed for polarization, it is 0.5-100KV that high voltage power supply 7, which can provide voltage range,；Gas source 8 includes a gas storage
Tank, gas flow controller and gas temperature controller, storing in air accumulator is inert gas, such as nitrogen, the stream of inert gas
Speed control is in 0-100L/min.
Above-mentioned apparatus maintains the level of vacuum of vacuum chamber 1 via vacuum pump 6, then supplies protection gas by gas source 8.It is being full of
In the cavity of protective gas, corona wire 9 generates corona discharge by the high-voltage electricity that high voltage power supply 7 applies.Since corona discharge produces
Raw field distribution is influenced by corona wire shaped, and the special shape of corona wire 9 can eliminate point discharge and draw in the utility model
The non-uniform electric risen can be formed in the top of ferroelectric crystal 3 and is completely covered and equally distributed polarized electric field.Ferroelectricity
The polarized electric field of 3 top of crystal makes to be formed inside ferroelectric crystal 3 period polarized with 4 collective effect of periodic electrodes that lower section coats
Domain inversion structures.
The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art
For art personnel, without deviating from the technical principle of the utility model, several improvement and deformations can also be made, these change
It also should be regarded as the protection scope of the utility model into deformation.
Claims (6)
1. a kind of preparation facilities of novel cycle polarization domain reverse structure crystal, it is characterised in that: including vacuum chamber, vacuum chamber
Bottom is provided with sample stage, and ferroelectric crystal is provided on sample stage, and the bottom surface of ferroelectric crystal is etched with periodic electrodes, periodically
Electrode is grounded, and S type or spiral shape corona wire are provided with above ferroelectric crystal, and corona wire connects gas source and high voltage power supply.
2. a kind of preparation facilities of novel cycle polarization domain reverse structure crystal according to claim 1, it is characterised in that:
It is drawn from vacuum chamber side wall at the both ends of S type corona wire.
3. a kind of preparation facilities of novel cycle polarization domain reverse structure crystal according to claim 1, it is characterised in that:
Screw type corona wire is to gradually spiral increases at center, and centrally located one end is from vacuum chamber Base top contact, and the other end is from from true
Cavity sidewalls are drawn.
4. a kind of preparation facilities of novel cycle polarization domain reverse structure crystal according to claim 1, it is characterised in that:
Vacuum chamber includes cavity and the vacuum pump that is connected to cavity.
5. a kind of preparation facilities of novel cycle polarization domain reverse structure crystal according to claim 1, it is characterised in that:
Channel is offered on sample stage, towards ferroelectric crystal bottom surface, the other end in channel connects vacuum pump for the one end in channel.
6. a kind of preparation facilities of novel cycle polarization domain reverse structure crystal according to claim 1, it is characterised in that:
It further include the temperature control device for controlling ferroelectric crystal temperature.
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Cited By (1)
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| CN109407439A (en) * | 2018-12-05 | 2019-03-01 | 浙江大学昆山创新中心 | A kind of preparation facilities of novel cycle polarization domain reverse structure crystal |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109407439A (en) * | 2018-12-05 | 2019-03-01 | 浙江大学昆山创新中心 | A kind of preparation facilities of novel cycle polarization domain reverse structure crystal |
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