CN209077371U - A kind of coating machine cleaning systems - Google Patents
A kind of coating machine cleaning systems Download PDFInfo
- Publication number
- CN209077371U CN209077371U CN201821875292.3U CN201821875292U CN209077371U CN 209077371 U CN209077371 U CN 209077371U CN 201821875292 U CN201821875292 U CN 201821875292U CN 209077371 U CN209077371 U CN 209077371U
- Authority
- CN
- China
- Prior art keywords
- cleaning
- vacuum chamber
- brush
- coating machine
- clear water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The utility model discloses a kind of coating machine cleaning systems, including cleaning brush device, detergent supplier, waste collecting device and drying device；The cleaning brush device includes being set to cleaning brush board, the driving motor outside vacuum chamber and one end of internal vacuum chamber on the cleaning brush board, the L-type connecting rod that the other end is connected with the driving motor；The detergent supplier includes chemically cleaning liquid component and clear water cleaning solution component；The waste collecting device is set to outside vacuum chamber, and top is connected by pipeline with vacuum chamber bottom；The drying device is set to vacuum chamber inside top.The utility model provides a kind of coating machine cleaning systems, can carry out quickly, comprehensively, efficiently cleaning to vacuum chamber of film coating machine.
Description
Technical field
The utility model belongs to the care and maintenance technical field of filming equipment, and in particular to a kind of coating machine cleaning system
System.
Background technique
Vacuum coating equipment refers mainly to a kind of plated film for needing to carry out under higher vacuum, be largely divided into evaporation coating and
Two kinds of sputter coating.Either evaporation coating or sputter coating are both needed to experience atomic group or ion cluster during plated film
Diverging and deposition ultimately form the process of film, therefore atomic group or ion cluster dissipate in vacuum chamber, are easily attached to plated film
On the inner wall of equipment vacuum room.
More than vacuum coating equipment 200 plating runs of every completion, answer cleaning room primary, common clean method is
It cleans filming equipment vacuum chamber interior walls repeatedly with chemical solution, then cleans filming equipment vacuum chamber with clear water.In the prior art,
The method for mostly using artificial cleaning wiping greatly cleans filming equipment vacuum chamber, not only low efficiency, but also for large size
Filming equipment vacuum chamber often has that cleaning is not comprehensive, manual operation difficulty is big.
Summary of the invention
In order to solve the deficiencies in the prior art, the utility model provides a kind of coating machine cleaning systems, can be to plating
Film machine vacuum chamber quickly, comprehensively, efficiently clean.
The utility model technical effect to be achieved is realized by following scheme:
Coating machine cleaning systems provided by the utility model, including cleaning brush device, detergent supplier, waste collecting device
And drying device；
The cleaning brush device include set on the cleaning brush board of internal vacuum chamber, the driving motor outside vacuum chamber with
And the L-type connecting rod that one end is set on the cleaning brush board, the other end is connected with the driving motor；
The detergent supplier includes chemically cleaning liquid component and clear water cleaning solution component；
The waste collecting device is set to outside vacuum chamber, and top is connected by pipeline with vacuum chamber bottom；The drying
Device is set to vacuum chamber inside top.
Further, the section of the cleaning brush board is arc, including arc fixed part and to be set to the arc solid
Determine the cleaning part and cleaning part in portion；The cleaning part is set to the arc fixed part close to rotation direction side, the wiping
Portion is set to the arc fixed part far from rotation direction side.
Further, the cleaning part is horsehair brush, acrylic fibers brush, terylene brush, polypropylene fibre brush or nylon brush configuration.
Further, the cleaning part is sponge brush or cotton brush configuration.
Further, scraping article structure is additionally provided on the adjacent side of the cleaning part, the scraping article structure is rubber or silicon
Glue material matter.
Further, it is Telescopic rod structure that the L-type connecting rod, which is set to one end on the cleaning brush board,.
Further, the chemically cleaning liquid component includes chemically cleaning liquid collecting tank, the chemistry outside vacuum chamber
Cleaning solution conveyance conduit, the chemically cleaning hydraulic control valve on the chemically cleaning liquid conveyance conduit and be set to vacuum chamber at the top of
The chemical cleaning solution spray head of inside.
Further, the clear water cleaning solution component includes clear water cleaning solution collecting vessel, the clear water outside vacuum chamber
Cleaning solution conveyance conduit, the clear water on the clear water cleaning solution conveyance conduit clean hydraulic control valve and are set at the top of vacuum chamber
The clear water cleaning solution spray head of inside.
Further, the waste collecting device include top waste liquid storage unit and bottom waste liquid discharge unit, it is described
Liquid waste treating apparatus is equipped between waste liquid storage unit and waste liquid discharge unit.
Further, the drying device is vacuum desiccator.
The utility model has the advantage that
1, the cleaning systems of the utility model include cleaning brush device and detergent supplier, using automated mechanical structure
Artificial clean operation is substituted, clean speed can be effectively promoted, guarantee clean high efficiency.
2, the cleaning brush board of the utility model includes cleaning part and cleaning part, can be completed at the same time cleaning and wiping to vacuum chamber
Operation is wiped, guarantees the clean high efficiency of device；And scraping article structure is additionally provided on cleaning part side, it can clean and wipe laggard
One step scrapes off residual liquid in vacuum chamber interior walls, the further clean high efficiency of device and comprehensive of guaranteeing.
3, it is Telescopic rod structure that the L-type connecting rod of the utility model, which is set to one end on cleaning brush board, can effectively be adjusted clear
Clean brush board guarantees the clean validity of device at a distance from vacuum chamber interior walls；And the section for cleaning brush board is arc, can make to clean
Brush board is bonded cleaning with vacuum chamber interior walls, further to guarantee the clean validity of device.
4, the cleaning systems of the utility model further include waste collecting device, and waste collecting device is filled equipped with liquid waste processing
It sets, cleaning waste liquid can be then exhausted from after filtering, handling, avoid polluting the environment.
5, the cleaning systems of the utility model further include drying device, can clean and wiping operation after, to vacuum chamber into
Row drying and vacuum pumping guarantee that the environment of internal vacuum chamber meets the needs of production.
Detailed description of the invention
Fig. 1 is the overall structure diagram of coating machine cleaning systems in the utility model；
Fig. 2 is the structural schematic diagram that brush assemblies are cleaned in utility model；
Fig. 3 is the schematic diagram of the section structure that brush board is cleaned in utility model；
Fig. 4 is the structural schematic diagram of chemically cleaning liquid component in utility model；
Fig. 5 is the structural schematic diagram of clear water cleaning solution component in utility model；
Fig. 6 is the structural schematic diagram of waste collecting device in utility model.
The reference numerals are as follows:
100, vacuum chamber；200, brush device is cleaned；210, brush board is cleaned；211, arc fixed part；212, cleaning part；213,
Cleaning part；214, scraping article structure；220, L-type connecting rod；230, driving motor；310, chemically cleaning liquid component；311, chemistry is clear
Clean liquid collecting tank；312, chemically cleaning liquid conveyance conduit；313, chemical cleaning solution spray head；314, chemically cleaning hydraulic control valve；
320, clear water cleaning solution component；321, clear water cleaning solution collecting vessel；322, clear water cleaning solution conveyance conduit；323, clear water cleaning solution
Spray head；324, clear water cleans hydraulic control valve；400, waste collecting device；410, waste liquid storage unit；420, waste liquid discharge unit；430,
Liquid waste treating apparatus；500, drying device.
Specific embodiment
The utility model is described in detail with reference to the accompanying drawings and examples.
The coating machine cleaning systems provided in the present embodiment as illustrated in the accompanying drawings from 1 to 3, including clean brush device 200, cleaning solution
Device, waste collecting device 400 and drying device 500.
Cleaning brush device includes the cleaning brush board 210, the driving motor outside vacuum chamber inside vacuum chamber 100
230 and one end be set on cleaning brush board, the L-type connecting rod 220 that is connected with driving motor of the other end, and L-type connecting rod is set to
Cleaning one end on brush board is Telescopic rod structure.Clean brush board section be arc, including arc fixed part 211 and be set to arc
Cleaning part 212 and cleaning part 213 on shape fixed part；Cleaning part is set to arc fixed part close to rotation direction side, cleaning part
Set on arc fixed part far from rotation direction side.Cleaning part is horsehair brush, acrylic fibers brush, terylene brush, polypropylene fibre brush or nylon bruss knot
Structure；Cleaning part is sponge brush or cotton brush configuration.Scraping article structure 214 is additionally provided on the adjacent side of cleaning part, scraping article structure is
Rubber or silica gel material.
Detergent supplier includes chemically cleaning liquid component 310 and clear water cleaning solution component 320.Chemically cleaning liquid component includes
Chemically cleaning liquid collecting tank 311, chemically cleaning liquid conveyance conduit 312 outside vacuum chamber are set to chemically cleaning liquid and convey
Chemically cleaning hydraulic control valve 314 on pipeline and the chemical cleaning solution spray head 313 set on vacuum chamber inside top.Clear water cleaning solution
Component includes clear water cleaning solution collecting vessel 321 outside the vacuum chamber, clear water cleaning solution conveyance conduit 322, to be set to clear water clear
Clear water cleaning hydraulic control valve 324 on clean liquid conveyance conduit and the clear water cleaning solution spray head 323 set on vacuum chamber inside top.
Waste collecting device is set to outside vacuum chamber, and top is connected by pipeline with vacuum chamber bottom；Waste collecting device
The waste liquid discharge unit 420 of waste liquid storage unit 410 and bottom including top is equipped with useless between waste liquid storage unit and waste liquid discharge unit
Liquid processing device 430.Drying device is set to vacuum chamber inside top, preferably vacuum desiccator.
The cleaning brush device and detergent supplier of the utility model, artificial cleaning is substituted using automated mechanical structure
Operation can effectively promote clean speed, guarantee clean high efficiency.To guarantee that cleaning brush device cleans internal vacuum chamber
It is comprehensive, preferably cleaning brush board height be internal vacuum chamber height 3/5-4/5.
Cleaning brush board includes cleaning part and cleaning part, and scraping article structure is additionally provided on cleaning part side, can be in driving motor
Drive under, it is disposable to complete to the cleaning of vacuum chamber, wiping and shave operation further and ensure that device is clean efficiently
Property and comprehensive.Specifically, cleaning part is set on cleaning brush board arc fixed part close to rotation direction side, hardness, wearability
With the biggish horsehair brush of intensity, acrylic fibers brush, terylene brush, polypropylene fibre brush or nylon brush configuration, it to be used for effective clean vacuum chambers inner wall
On coating materials；Cleaning part is set on cleaning brush board arc fixed part far from rotation direction side, and absorb water preferable sponge brush or cotton
Cloth brush configuration can be used for effectively absorbing remaining cleaning solution in vacuum chamber interior walls, guarantee the clean validity of device.
It is Telescopic rod structure that L-type connecting rod, which is set to one end on cleaning brush board, can effectively adjust cleaning brush board and vacuum chamber
The distance of inner wall guarantees the clean validity of device；And the section for cleaning brush board is arc, can make to clean in brush board and vacuum chamber
Wall fitting cleaning, it is further to guarantee the clean validity of device.
In addition, cleaning systems further include waste collecting device and drying device, waste collecting device can be by cleaning waste liquid warp
It is then exhausted from after filtering, processing, avoids polluting the environment；Drying device can clean and wiping operation after, to vacuum chamber into
Row drying and vacuum pumping, to meet the needs of internal vacuum chamber environment is to production.
The course of work of the utility model coating machine cleaning systems is as follows:
Open chemically cleaning hydraulic control valve, chemically cleaning liquid chemically cleaning solution collecting tank via chemically cleaning liquid delivery pipe
Road and chemical cleaning solution spray head enter internal vacuum chamber, and chemically cleaning liquid is uniformly sprayed at vacuum by chemical cleaning solution spray head
After in chamber interior walls, chemically cleaning hydraulic control valve is closed, opens driving motor, makes to clean brush board under the drive of driving motor, it is right
Vacuum inner wall carries out first cleaning and wiping operation.It is then turned on clear water cleaning hydraulic control valve, clear water cleaning solution is clear from clear water
Clean liquid collecting vessel enters internal vacuum chamber, the spray of clear water cleaning solution via clear water cleaning solution conveyance conduit and clear water cleaning solution spray head
After clear water cleaning solution uniformly rush and is sprinkled upon in vacuum chamber interior walls by head, it is again turned on driving motor, makes to clean brush board electric in driving
Under the drive of machine, cleaning and wiping operation again are carried out to vacuum inner wall.
The generated waste liquid in first wash and again cleaning process enters waste collection dress by the bottom of vacuum chamber
In setting, after the liquid waste treating apparatus in waste collecting device is filtered and handles to waste liquid, then waste liquid is discharged.Complete chemistry
After cleaning and clear water cleaning step, the drying device for being set to vacuum chamber inside top is opened, vacuum chamber is dried and is taken out is true
Do-nothing operation, until the indoor environment of vacuum meets the demand of production.
It can be seen that the utility model from the scheme of above-described embodiment and provide a kind of coating machine cleaning systems, it can be to plating
Film machine vacuum chamber quickly, comprehensively, efficiently clean.
Finally, it should be noted that above embodiments are only to illustrate the technical solution of the utility model embodiment rather than right
It is limited, although the utility model embodiment is described in detail referring to preferred embodiment, this field it is common
Technical staff should understand that still be modified or replaced equivalently the technical solution of the utility model embodiment, and this
A little ranges modified or equivalent replacement cannot also make modified technical solution be detached from the utility model embodiment technical solution.
Claims (10)
1. a kind of coating machine cleaning systems, it is characterised in that: including cleaning brush device, detergent supplier, waste collecting device and
Drying device；
The cleaning brush device includes the cleaning brush board, the driving motor outside vacuum chamber and one set on internal vacuum chamber
The L-type connecting rod that end is set on the cleaning brush board, the other end is connected with the driving motor；
The detergent supplier includes chemically cleaning liquid component and clear water cleaning solution component；
The waste collecting device is set to outside vacuum chamber, and top is connected by pipeline with vacuum chamber bottom；The drying device
Set on vacuum chamber inside top.
2. coating machine cleaning systems as described in claim 1, it is characterised in that: the section of the cleaning brush board is arc, including
Arc fixed part and the cleaning part and cleaning part being set on the arc fixed part；The cleaning part is solid set on the arc
Portion is determined close to rotation direction side, and the cleaning part is set to the arc fixed part far from rotation direction side.
3. coating machine cleaning systems as claimed in claim 2, it is characterised in that: the cleaning part is horsehair brush, acrylic fibers brush, terylene
Brush, polypropylene fibre brush or nylon brush configuration.
4. coating machine cleaning systems as claimed in claim 2, it is characterised in that: the cleaning part is sponge brush or cotton brush knot
Structure.
5. coating machine cleaning systems as claimed in claim 2, it is characterised in that: be additionally provided with and scrape on the adjacent side of the cleaning part
Structure, the scraping article structure are rubber or silica gel material.
6. coating machine cleaning systems as described in claim 1, it is characterised in that: the L-type connecting rod is set to the cleaning brush board
Upper one end is Telescopic rod structure.
7. coating machine cleaning systems as described in claim 1, it is characterised in that: the chemically cleaning liquid component includes being set to vacuum
The chemically cleaning liquid collecting tank of outdoor, chemically cleaning liquid conveyance conduit, the change on the chemically cleaning liquid conveyance conduit
Learn cleaning hydraulic control valve and the chemical cleaning solution spray head set on vacuum chamber inside top.
8. coating machine cleaning systems as described in claim 1, it is characterised in that: the clear water cleaning solution component includes being set to vacuum
It is the clear water cleaning solution collecting vessel of outdoor, clear water cleaning solution conveyance conduit, clear on the clear water cleaning solution conveyance conduit
Water cleans hydraulic control valve and the clear water cleaning solution spray head set on vacuum chamber inside top.
9. coating machine cleaning systems as described in claim 1, it is characterised in that: the waste collecting device includes the waste liquid at top
The waste liquid discharge unit of storage unit and bottom is equipped with liquid waste treating apparatus between the waste liquid storage unit and waste liquid discharge unit.
10. coating machine cleaning systems as described in claim 1, it is characterised in that: the drying device is vacuum desiccator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821875292.3U CN209077371U (en) | 2018-11-14 | 2018-11-14 | A kind of coating machine cleaning systems |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821875292.3U CN209077371U (en) | 2018-11-14 | 2018-11-14 | A kind of coating machine cleaning systems |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209077371U true CN209077371U (en) | 2019-07-09 |
Family
ID=67124042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821875292.3U Active CN209077371U (en) | 2018-11-14 | 2018-11-14 | A kind of coating machine cleaning systems |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209077371U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110820036A (en) * | 2019-11-26 | 2020-02-21 | 衡阳市晋宏精细化工有限公司 | Novel potassium aurous cyanide production is with supplementary device |
| CN112144036A (en) * | 2020-08-24 | 2020-12-29 | 宁波中骏森驰汽车零部件股份有限公司 | PVD vacuum coating machine |
| CN113061868A (en) * | 2021-03-12 | 2021-07-02 | 斡兹真空科技(嘉兴)有限公司 | Flexible multifunctional film coating machine |
| CN113584435A (en) * | 2021-08-04 | 2021-11-02 | 付国臣 | Prevent evaporation equipment of jam |
| CN114952634A (en) * | 2022-05-24 | 2022-08-30 | 福建省富达精密科技有限公司 | Automatic sand blasting equipment and process for television frame |
-
2018
- 2018-11-14 CN CN201821875292.3U patent/CN209077371U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110820036A (en) * | 2019-11-26 | 2020-02-21 | 衡阳市晋宏精细化工有限公司 | Novel potassium aurous cyanide production is with supplementary device |
| CN112144036A (en) * | 2020-08-24 | 2020-12-29 | 宁波中骏森驰汽车零部件股份有限公司 | PVD vacuum coating machine |
| CN113061868A (en) * | 2021-03-12 | 2021-07-02 | 斡兹真空科技(嘉兴)有限公司 | Flexible multifunctional film coating machine |
| CN113584435A (en) * | 2021-08-04 | 2021-11-02 | 付国臣 | Prevent evaporation equipment of jam |
| CN114952634A (en) * | 2022-05-24 | 2022-08-30 | 福建省富达精密科技有限公司 | Automatic sand blasting equipment and process for television frame |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN209077371U (en) | A kind of coating machine cleaning systems | |
| CN107670403B (en) | Cleaning device for air conditioner filter screen | |
| CN107414649B (en) | A kind of metal tube rust-cleaning integrating machine | |
| CN204018335U (en) | Automatic barrel-cleaning machine | |
| CN211275645U (en) | Toughened belt cleaning device for coated glass | |
| CN112403786A (en) | Intelligent coating integrated equipment for machining large mechanical arm | |
| CN208815145U (en) | A kind of spray equipment in electrophoresis coating technique | |
| CN106932934A (en) | Glass substrate heavy industry equipment | |
| CN207641938U (en) | Optics cleaning machine with spray equipment | |
| CN209886334U (en) | Crude oil natural gas pipeline cleaning device | |
| CN210437993U (en) | Automatic cleaning device for conveying belt | |
| CN208944669U (en) | A kind of Chinese herb cleaning pond Xi Run | |
| CN212597539U (en) | Neodymium iron boron raw material block belt cleaning device | |
| CN205718644U (en) | A kind of Duct cleaning equipments | |
| CN211635511U (en) | Novel ceramic membrane disc filter | |
| CN213103668U (en) | Quick cleaning equipment of flowers blake bottle | |
| CN205289030U (en) | Cleaning machine | |
| CN209985948U (en) | High-pressure cleaning system inside coating bucket | |
| CN204608166U (en) | A kind of solution-type cleaning machine | |
| CN210047886U (en) | Special storage tank for powder and liquid | |
| CN207371217U (en) | A kind of air-conditioning filter net cleaning device | |
| CN209302350U (en) | A kind of industrial waste gas treatment device | |
| CN208912744U (en) | A kind of quartz can washing apparatus | |
| CN209174529U (en) | One kind being used for OIL IN LUBRICATING OIL PRODUCTION pipe clearing apparatus | |
| CN104826844A (en) | High-pressure three-dimensional water-jet oil tank cleaning device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |