CN209054929U - A kind of multicell horizontal vacuum furnace producing silicon monoxide - Google Patents
A kind of multicell horizontal vacuum furnace producing silicon monoxide Download PDFInfo
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- CN209054929U CN209054929U CN201821569605.2U CN201821569605U CN209054929U CN 209054929 U CN209054929 U CN 209054929U CN 201821569605 U CN201821569605 U CN 201821569605U CN 209054929 U CN209054929 U CN 209054929U
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- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 title claims abstract description 108
- 238000010438 heat treatment Methods 0.000 claims abstract description 146
- 238000001816 cooling Methods 0.000 claims abstract description 83
- 238000006243 chemical reaction Methods 0.000 claims abstract description 15
- 238000007789 sealing Methods 0.000 claims abstract description 15
- 238000004519 manufacturing process Methods 0.000 claims description 62
- 239000000463 material Substances 0.000 claims description 31
- 238000001291 vacuum drying Methods 0.000 claims description 11
- 239000002826 coolant Substances 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 238000009792 diffusion process Methods 0.000 claims description 3
- 239000002994 raw material Substances 0.000 description 19
- 238000000034 method Methods 0.000 description 12
- 239000007787 solid Substances 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000002360 preparation method Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000007664 blowing Methods 0.000 description 4
- 230000006698 induction Effects 0.000 description 4
- 238000003335 Production assurance Methods 0.000 description 3
- 238000010923 batch production Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 229910000975 Carbon steel Inorganic materials 0.000 description 2
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000010962 carbon steel Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000010924 continuous production Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 229910001416 lithium ion Inorganic materials 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910052573 porcelain Inorganic materials 0.000 description 2
- 239000011863 silicon-based powder Substances 0.000 description 2
- 229910003978 SiClx Inorganic materials 0.000 description 1
- 229910006295 Si—Mo Inorganic materials 0.000 description 1
- 239000010405 anode material Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 239000010431 corundum Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- RJCRUVXAWQRZKQ-UHFFFAOYSA-N oxosilicon;silicon Chemical compound [Si].[Si]=O RJCRUVXAWQRZKQ-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- -1 silicon oxide compound Chemical class 0.000 description 1
- 239000012265 solid product Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
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- Silicon Compounds (AREA)
Abstract
The utility model embodiment is related to a kind of multicell horizontal vacuum furnace for producing silicon monoxide, and multicell horizontal vacuum furnace includes furnace body, heating response device, reaction cooling device, cooling collector, collects cooling device and vacuum evacuation device；Removable half furnace body and half furnace body mechanical connection is fixed, makes to fix between half furnace body and removable half furnace body and realize and fit closely；Fix fixed one or more heating response device in half furnace body；Reaction cooling device is installed in the furnace wall for fixing half furnace body, to cool down to the furnace wall for fixing half furnace body；Each heating response device passes through one cooling collector of flanged joint, and flange connections are sealed by sealing ring；It collects cooling device to be arranged in the furnace wall of removable half furnace body, to cool down removable half furnace body and cooling collector；Vacuum evacuation device is connected with multiple heating response devices and cooling collector respectively, to vacuumizing in heating response device and cooling collector.
Description
Technical field
The utility model relates to the production technical field of silicon oxide compound more particularly to a kind of multicells for producing silicon monoxide
Horizontal vacuum furnace.
Background technique
Silicon monoxide is a kind of wide band gap semiconducter optical material, is to be used to prepare optical coating, negative electrode of lithium ion battery
The important source material of material, preparation method are mostly to react metallic silicon under vacuum and high temperature with the mixture of silica, are produced
The steam of silicon monoxide, deposits at low temperature.The apparatus for producing silicon monoxide of early stage is only a high-alumina porcelain refractory tube,
Its normally opened one end inner wall is lined with molybdenum matter or nickel matter liner, and when work, the mixed raw material of the carbon dioxide mixed and silicon is set
In one end of closed frame tube, after fire resisting duct occlusion vacuumizes, direct heating tube surface in air, after feed vaporization, deposition
On the molybdenum sheet of the refractory tube other end or nickel sheet, this process units, since directly heating high-alumina porcelain is resistance in air
Fire tube, and vacuumized in it, therefore be easy to rupture, and production efficiency is low.
Currently, the production equipment of domestic silicon monoxide is mostly monomer-type vacuum drying oven, low output, and it is high to consume energy, meanwhile, it is existing
The leakproofness of monomer-type vacuum drying oven is poor in technology, batch stablize it is very poor, in addition, using monomer-type vacuum drying oven heating time compared with
It is long, and wait the time to be cooled also longer, it cannot achieve the volume production work of a furnace body simultaneously with work, to the wilderness demand table of industry
It is now extremely weak, it is not able to satisfy the development of Silicon Based Anode Materials for Lithium-Ion Batteries especially.Therefore, it is badly in need of one kind and is able to solve the above problem
Production silicon monoxide multicell horizontal vacuum furnace.
Utility model content
The purpose of this utility model is in view of the problems of the existing technology, it is sleeping to provide a kind of multicell for producing silicon monoxide
Formula vacuum drying oven, multiple vacuum drying ovens combine in set of system while heating collection, and yield is high, and does not need to stop in process of production
Heating, stability is strong, the work of a set of multicell horizontal vacuum furnace, and when furnace body either on or off uses displacement pulley, input and output material side
Just, the continuous work for realizing equipment, improves production efficiency, can better meet industry requirement.
To achieve the above object, the utility model provides a kind of multicell horizontal vacuum furnace for producing silicon monoxide, described
Multicell horizontal vacuum furnace includes:
Furnace body, including fix half furnace body and removable half furnace body；Removable half furnace body fixes half furnace body machine with described
Tool connection makes described fix between half furnace body and removable half furnace body realize and fit closely；
Heating response device, it is described to fix the fixed one or more heating response device in half furnace body；
Cooling device is reacted, is installed in the furnace wall for fixing half furnace body；
Cooling collector, each heating response device pass through one cooling collector of flanged joint, and flange
Junction is sealed by sealing ring；
Cooling device is collected, the cooling device of collecting is arranged in the furnace wall of removable half furnace body；
Vacuum evacuation device, the vacuum evacuation device are connected with multiple heating response devices and the cooling collector respectively
It is logical.
Preferably, the heating response device includes heating reacting tank body, heating device and attemperator；
The heating reacting tank body is set to described fix in half furnace body；
The heating device is located on the outer surface of the heating reacting tank body, intracorporal to the heating reactor tank
The raw material are heated；
The attemperator is set between the heating reacting tank body and the heating device.
It is further preferred that the cooling collector includes collecting tank body；Described one end for collecting tank body is open end, institute
Stating and collecting the other end of tank body is closed end, and the diameter of the open end is greater than the diameter of the closed end；The collection tank body
By the flanged joint between the heating reacting tank body, and flange connections are sealed using the sealing ring.
Preferably, it is connected between the collection cooling device and multiple cooling collectors by cooling medium.
Preferably, the heating response device further includes hygrosensor.
Preferably, multiple first support columns are uniformly arranged on the lower surface for fixing half furnace body；Removable half furnace
Multiple second support columns are uniformly arranged on the lower surface of body, and second support column is equipped with pulley.
It is further preferred that the multicell horizontal vacuum furnace further includes guide rail, the pulley is slidedly arranged on the guide rail.
Preferably, the reaction cooling device and the collection cooling device are water circulation cooling device.
Preferably, the vacuum evacuation device include one or more of mechanical pump, lobe pump, molecular pump, diffusion pump and
Its corresponding vacuum meter.
The multicell horizontal vacuum furnace of production silicon monoxide provided by the embodiment of the utility model, multiple vacuum drying ovens combine in a set of
Collection is heated simultaneously in system, i.e., multicell horizontal vacuum furnace includes that the heating of multiple mutual removable seal connections is anti-in the application
It answers tank body and collects tank body, disposable yield is high, and the inexpensive cooling side combined using cooling medium with cooling circulating water
Formula waits cooling time short, meanwhile, a jacket heating system meets multiple tank bodies while heating, and heating temperature is stablized, and each tank body
Interior material homogeneous heating, high production efficiency, in addition, production silicon monoxide multicell horizontal vacuum furnace using guide rails moving type into
Discharging, the laborsaving convenience of input and output material, disposable input and output material is more, and yield is high, is conducive to equipment and realizes mechanization batch production, can
Better meet industry requirement and the production assurance of production silicon monoxide.
Meanwhile in process of production, heating response device does not need blowing out when picking and placing material, and stability is good, it is made to keep life
Occurrence state further improves production efficiency to realize the continuous production of multicell horizontal vacuum furnace, energy saving.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the multicell horizontal vacuum furnace of production silicon monoxide provided by the embodiment of the utility model；
Fig. 2 is the multicell horizontal vacuum furnace of production silicon monoxide provided by the embodiment of the utility model using induction heating
The inside sectional view of heating response device；
Fig. 3 is the multicell horizontal vacuum furnace of production silicon monoxide provided by the embodiment of the utility model using resistance heating
The inside sectional view of heating response device；
Fig. 4 is multicell horizontal vacuum furnace preparation one oxidation provided by the embodiment of the utility model using production silicon monoxide
The flow diagram of silicon method.
Specific embodiment
Below by drawings and examples, the technical solution of the utility model is described in further detail.
The utility model embodiment is related to the multicell horizontal vacuum furnace of the production silicon monoxide provided, and multiple vacuum drying ovens combine in
Collection is heated in set of system simultaneously, disposable yield is high, and the low cost combined using cooling medium with cooling circulating water
The type of cooling waits cooling time short, meanwhile, a jacket heating system meets multiple tank bodies while heating, and heating temperature is stablized, and
Each intracorporal material homogeneous heating of tank, high production efficiency, in addition, the multicell horizontal vacuum furnace of production silicon monoxide is moved using guide rail
Dynamic formula input and output material, the laborsaving convenience of input and output material, disposable input and output material is more, is conducive to equipment and realizes mechanization batch production, can
Better meet industry requirement and the production assurance of production silicon monoxide.Also, in process of production, heating response device exists
Blowing out is not needed when picking and placing material, stability is good, so that it is kept production status, to realize the continuous life of multicell horizontal vacuum furnace
It produces, further improves production efficiency, it is energy saving.
It is understood that following described specific embodiments are only used for explaining the utility model, rather than it is practical to this
Novel restriction.
Fig. 1, Fig. 2, Fig. 3 are respectively the multicell horizontal vacuum furnace of production silicon monoxide provided by the embodiment of the utility model
Structural schematic diagram, using induction heating heating response device inside sectional view and using the heating response device of resistance heating
Internal sectional view.In conjunction with shown in Fig. 1, Fig. 2 and Fig. 3:
The multicell horizontal vacuum furnace of production silicon monoxide includes heating part, collection portion provided by the utility model embodiment
With vacuum system three parts, heating part with collection portion is combinable separates, i.e., the multicell horizontal vacuum furnace is divided into two sections of merging bodies, adds
Hot portion includes multiple heating reacting tank bodies 21, and collection portion includes multiple corresponding collection tank bodies 4, two-part heating reactor tank
It is equipped on body 21 and collection tank body 4 and vacuumizes interface, its inside is vacuumized by vacuum system.Specifically, production
The multicell horizontal vacuum furnace of silicon monoxide includes: furnace body 1, heating response device 2, reaction cooling device 3, cooling collector (in figure
Be not shown), collect cooling device 5 and vacuum evacuation device 6.
Wherein, furnace body 1 includes fixing half furnace body 11 and removable half furnace body 12, moves half furnace body 12 and fixes half furnace body
11 mechanical connections make to fix and realize and fit closely between half furnace body 11 and removable half furnace body 12.Preferably, the shell of furnace body 1
Select the materials such as ordinary carbon steel, alloy, stainless steel.
Heating response device 2 is the heating part in the multicell horizontal vacuum furnace of the application production silicon monoxide, specifically, solid
Fixed one or more heating response devices 2 in fixed half furnace body 11, heating response device 2 include heating reacting tank body 21, heating device
22 and attemperator 23, detailed, heating reacting tank body 21, which is set to, to be fixed in half furnace body 11, to hold production silicon monoxide
Raw material, heating device 22 be located on heating reacting tank body 21 outer surface on, to heating reacting tank body 21 in former material
Material is heated, and attemperator 23 is set between heating reacting tank body 21 and heating device 22.
It is understood that yes, " multicell " in the application multicell horizontal vacuum furnace refers to thering is multiple heating response devices 2
And its corresponding cooling collector, on the one hand, for guarantee a furnace can production silicon monoxide finished product as much as possible, another party
Face, and need to guarantee that whole device is lighter, facilitate heating part to separate with merging for collection portion, therefore, the processing of horizontal vacuum furnace
The number of room is preferably no greater than 100, i.e. the number of heating response device 2 is not more than 100.
In addition, the temperature in reacting tank body 21 is heated for real-time monitoring, to guarantee the temperature in multicell horizontal vacuum furnace
It controls within the scope of default temperature, heating response device 2 further includes hygrosensor 24, and it is anti-that hygrosensor 24 is set to heating
It answers in the heating reacting tank body 21 of device 2.
Further, the high temperature resistants material such as corundum, graphite, aluminium oxide, ceramics can be selected in heating reacting tank body 21.Heating dress
22 optional induction heatings are set, as shown in Fig. 2, resistance heating also can be selected, as shown in Figure 3.Hygrosensor 24 is thermocouple,
And preferably stainless steel and ceramic electric thermo-couple.Attemperator 23 is to heat the thermal insulation material used outside reacting tank body 21, such as protect
Wen Mian, felt rug etc..
Simultaneously as 2 internal temperature of heating response device of heating part is higher, to prevent from fixing the temperature of half furnace body, 11 shell
Height is spent, staff is scalded, reaction cooling device 3 is additionally provided in the interlayer in shell, specifically, reaction cooling device 3
It is installed in the furnace wall for fixing half furnace body 11, to cool down to the furnace wall for fixing half furnace body 11, guarantees skin temperature
No more than 30 degrees Celsius, keep its working environment safer.
And it is cooling collector, each heating that the application, which produces the collection part in the multicell horizontal vacuum furnace of silicon monoxide,
Reactor 2 connects a cooling collector by flange (not shown), and flange connections pass through sealing ring (in figure not
Show) sealing, detailed, cooling collector includes collecting tank body 4, and the one end for collecting tank body 4 is open end, collects tank body 4
The other end is closed end, and the diameter of open end is greater than the diameter of closed end, and tapered tubular structure, this collects 4 shape of tank body
The condensation that design is more advantageous to steam is collected, and is collected by flanged joint between tank body 4 and heating reacting tank body 21, and flange connects
It meets place to seal using sealing ring, better tightness.Meanwhile collecting the materials such as the preferred ordinary carbon steel of tank body 4, alloy, stainless steel.
Meanwhile to guarantee that removable half furnace body, 12 skin temperature of collection part is no more than 30 degrees Celsius of the utility model realities
The multicell horizontal vacuum furnace for applying the production silicon monoxide in example collects the furnace that removable half furnace body 12 is arranged in cooling device 5
In wall, to be cooled down to removable half furnace body 12 and cooling collector, in addition, to keep collection tank body 4 etc. to be cooled
Time it is shorter, collect and connected between cooling device 5 and multiple cooling collectors by cooling medium (not shown), to
Heat exchange is carried out, the preferred inert gas of cooling medium substantially increases life so that the multicell horizontal vacuum furnace is with short production cycle
Produce efficiency.
It should be noted that the reaction cooling device 3 and collection cooling device 5 in the application are both preferably water circulating cooling
Device, structure is simple, and can be effectively reduced the cooling cost of this multicell horizontal vacuum furnace.
Vacuum evacuation device 6 is the vacuum system in the multicell horizontal vacuum furnace of the application production silicon monoxide, specifically, taking out
Vacuum plant 6 is connected with multiple heating response devices 2 and cooling collector respectively, to heating response device 2 and cooling collection
It is vacuumized in device.Preferably, vacuum evacuation device 6 includes one of mechanical pump, lobe pump, molecular pump, diffusion pump or several
Kind and its corresponding vacuum meter.
Multiple first support columns 13 are uniformly arranged in addition, fixing on the lower surface of half furnace body 11, fix half furnace to support
Body 11 moves and is uniformly arranged multiple second support columns 14 on the lower surface of half furnace body 12, to support removable half furnace body 12,
Meanwhile for convenience of collection portion input and output material, pulley 15 is additionally provided on the lower surface of the second support column 14, and horizontal true in the multicell
It is additionally provided with correspondingly oriented guide rail 16 on the ground for the corresponding position that empty furnace is placed, is leading the pulley 15 of collection portion lower end
When sliding on rail, merging or separating for heating part and collection portion can be realized.
It is to all parts of the multicell horizontal vacuum furnace of production silicon monoxide provided in this embodiment, between them above
Connection relationship be described, it is sleeping to the multicell of production silicon monoxide below with reference to a specific embodiment and Fig. 1-Fig. 3
The complete structure and working principle of formula vacuum drying oven are described in detail.
In a specific embodiment, the multicell horizontal vacuum furnace heating part that the application produces silicon monoxide is equipped with 20
Reacting tank body 21 is heated, is placed in and is fixed in half furnace body 11 using stack, be specifically divided into 4 layers, every layer of 5 heating reacting tank body
21, and 20 collection tank bodies 4 of corresponding setting., it is each heating reacting tank body 21 diameter be 600mm, length 1350mm,
Each collection tank body 4 is taper tubular structure open at one end, that one end is closed, and open end diameter is greater than closed end diameter, length
For 1350mm, the finished size of entire multicell horizontal vacuum furnace is high 4000mm, wide 5000mm, long 2700mm.
It is put into raw material and taking-up final product to be more convenient, more, collection part entirety in multicell horizontal vacuum furnace
Lower section is provided with pulley 15 and guide rail 16, enables the more labor-saving convenient pick-and-place material of staff, meanwhile, to guarantee that multicell is horizontal
The leakproofness of vacuum drying oven is fixed between half furnace body 11 and removable half furnace body 12 and heating response device 2 and cooling collector and is set
There is sealing device, removable half furnace body 12 and cooling collector, heating response device 2 and cooling are opened or closed by sealing device
It is closed using flange and sealing ring between collector, and fastening can be passed through by fixing between half furnace body 11 and removable half furnace body 12
The connection types such as formula, hinged, threaded connection are mechanically connected, and are fitted closely to realize, using double sealing structure, into one
Step ensures the leakproofness of multicell horizontal vacuum furnace, improves the quality of product.
In process of production, raw material is respectively placed in 20 heating reacting tank bodies 21, carries out heating reaction in raw material
Before, it is necessary first to the vacuum orifice heated in reacting tank body 21 by vacuum evacuation device 6 and thereon to 20 vacuumizes,
It is at vacuum state, meets the vacuum requirement of silicon monoxide production.
The raw material in heating reacting tank body 21 is heated later, heating method can be selected the induction of high-frequency heating pipe and add
Heat, as shown in Fig. 2, can also be heated by Elema, Si-Mo rod, graphite resistance, as shown in Figure 3.Meanwhile during heating,
23 pairs of heating reacting tank bodies 21 of attemperator are kept the temperature, and make the temperature control that reacting tank body 21 is heated in material heating reaction process
System carries out real-time monitoring to the temperature in furnace at 1000-1500 degrees Celsius, and by hygrosensor 24, and raw material is anti-by chemistry
Steam should be generated, since collection portion collects the other end that tank body 4 is located at heating part heating reacting tank body 21, peripheral temperature is far low
In heating part temperature, therefore steam is being collected in tank body 4 through cooling medium and the collection progress heat exchange of cooling device 5, a life
After producing the period, solid product, i.e. silicon monoxide solid are formed in collecting tank body 4.
Furnace body 1 is separated by pulley 15 and guide rail 16, open removable half furnace body 12 and collects tank body 4, is received at 20
Finished product is taken out in collection tank body 4.And then new raw material is added into 20 heating reacting tank bodies 21, sealing collect tank body 4 and
Removable half furnace body 12, repeating aforesaid operations process can proceed with production, until the secondary production is completed, in production process
In, heating response device is not necessarily to blowing out, and stability is good, production status is always maintained at, to realize that multicell horizontal vacuum furnace is continuously given birth to
It produces, greatly increases the production efficiency, it is energy saving.
Further, since the inside of multicell horizontal vacuum furnace is in vacuum state, external atmosphere pressure is unfavorable for its service life,
For the service life for guaranteeing multicell horizontal vacuum furnace, the preferably heat-resisting resistance to compression material of the material of furnace body 1.
Correspondingly, the present embodiment additionally provides a kind of one oxidation of multicell horizontal vacuum furnace preparation using production silicon monoxide
Silicon method, specifically as shown in figure 4, the silicon monoxide preparation method includes the following steps:
Step 101, multiple heating response devices in multicell horizontal vacuum furnace are divided with corresponding cooling collector respectively
From.
During one specific, for the raw material for producing silicon monoxide solid is put into the intracorporal heating reacting tank body of furnace
In, sealing device is opened first, and by the pulley below collection portion on orientation guide rail it is mobile make furnace body fix half furnace
Body is separated with removable half furnace body, and multiple heating response devices are separated with corresponding cooling collector respectively.
Step 102, the mixture and/or compound of Si powder and silica multiple heating are put into as raw material to react
In the heating reacting tank body of device.
During one specific, the mixture and/or compound of Si powder and silica are as one oxidation of production
The raw material of silicon solid, after heating response device is separated with cooling collector, raw material can be passed through multiple heating by staff
The opening that reacting tank body is heated in reactor, is respectively added in the heating reacting tank body of heating response device.
Step 103, multiple cooling collectors are sealedly connected in heating response device respectively.
During one specific, after filling is completed, anti-on orientation guide rail by the pulley below collection portion
Merge half furnace body of fixing of furnace body with removable half furnace body to movement, and multiple heating response devices respectively with corresponding cooling
Collector sealing.
Step 104, multiple heating response devices are carried out with the inside of corresponding cooling collector by vacuum evacuation device
It vacuumizes.
It is intracorporal to furnace multiple after heating response device and cooling collector sealed connection during one specific
Heating response device is vacuumized with the inside of corresponding cooling collector, to provide the vacuum of production silicon monoxide solid
Operating environment remains 0.01-10000Pa.
Step 105, the heating intracorporal raw material of reactor tank is heated by the heating device of heating response device, to make
Raw material reaction generates steam.
During one specific, when the intracorporal environment of furnace reaches the vacuum degree of setting, heating response device is opened
Heating device, to be heated to the heating intracorporal raw material of reactor tank, to guarantee fully reacting and energy saving, heating reaction
For the intracorporal temperature control of tank between 1000-1500 degrees Celsius, raw material reaction generates steam, flow to collection portion from heating part.
Step 106, the collection cooling device of cooling collector cools down the collection tank body of cooling collector, makes to spread
It condenses to form solid silicon monoxide to the intracorporal steam of collecting tank.
During one specific, for the condensation for accelerating collection portion steam, the collection cooling device pair of cooling collector
It collects tank body to be cooled down, i.e., heat exchange is carried out to the intracorporal steam of collecting tank, it is made quickly to form an oxygen on collecting tank body 4
SiClx solid.After reaching certain temperature, collection portion is cooled down by cooling medium and collection cooling device 5, in next step
The mask work of heating response device and cooling collector is prepared.
Step 107, successively multiple heating response devices are separated with corresponding cooling collector respectively, and takes out collecting tank
Intracorporal solid silicon monoxide.
During one is specific, the mobile fixation for making furnace body half on orientation guide rail by the pulley below collection portion
Furnace body is separated with removable half furnace body, and multiple heating response devices are separated with corresponding cooling collector respectively, thus by more
A intracorporal solid silicon monoxide of collecting tank takes out.
Step 108, the raw material is added into multiple heating reacting tank bodies respectively again.
It, can be directly again to the heating reactor tank of heating response device in a production process during one specific
New raw material is added in body, repeats the above process, continues to produce, until preparation terminates.
Wherein, in silicon monoxide preparation process, to realize higher production efficiency and lower production cost, heating is anti-
It answers tank body and collects tank design in 2-200kg, controlling the reaction time is 2-60 hours, and the temperature of cooling device is controlled in 100-
900℃。
The multicell horizontal vacuum furnace of production silicon monoxide provided by the embodiment of the utility model, multiple vacuum drying ovens combine in a set of
Collection is heated simultaneously in system, i.e., multicell horizontal vacuum furnace includes that the heating of multiple mutual removable seal connections is anti-in the application
It answers tank body and collects tank body, disposable yield is high, and the inexpensive cooling side combined using cooling medium with cooling circulating water
Formula waits cooling time short, meanwhile, a jacket heating system meets multiple tank bodies while heating, and heating temperature is stablized, and each tank body
Interior material homogeneous heating, high production efficiency, in addition, production silicon monoxide multicell horizontal vacuum furnace using guide rails moving type into
Discharging, the laborsaving convenience of input and output material, disposable input and output material is more, and yield is high, is conducive to equipment and realizes mechanization batch production, can
Better meet industry requirement and the production assurance of production silicon monoxide.
Meanwhile in process of production, heating response device does not need blowing out when picking and placing material, and stability is good, it is made to keep life
Occurrence state further improves production efficiency to realize the continuous production of multicell horizontal vacuum furnace, energy saving.
In the present invention, term " multiple " refers to two or more, unless otherwise restricted clearly.Term " peace
Dress ", " connected ", " connection ", the terms such as " fixation " shall be understood in a broad sense, can also be with for example, " connection " may be a fixed connection
It is to be detachably connected, or be integrally connected；" connected " can be directly connected, can also be indirectly connected through an intermediary.It is right
For those skilled in the art, can understand as the case may be above-mentioned term in the present invention specifically contain
Justice.
In the description of the utility model, it is to be understood that term " on ", "lower", "left", "right", "front", "rear" etc. refer to
The orientation or positional relationship shown be based on the orientation or positional relationship shown in the drawings, be merely for convenience of description the utility model and
Simplify description, rather than the device or unit of indication or suggestion meaning there must be specific direction, with specific orientation construction
And operation, it is thus impossible to be construed as a limitation of the present invention.
In description in the present specification, term " specific embodiment ", " some embodiments ", " one embodiment "
Deng description mean that particular features, structures, materials, or characteristics described in conjunction with this embodiment or example are contained in the utility model
At least one embodiment or example in.In the present specification, the schematic illustration of above-mentioned term is not necessarily referring to identical
Embodiment or example.Moreover, the particular features, structures, materials, or characteristics of description can be implemented in any one or more
It can be combined in any suitable manner in example or example.
Above-described specific embodiment, to the purpose of this utility model, technical scheme and beneficial effects carried out into
One step is described in detail, it should be understood that being not used to limit the foregoing is merely specific embodiment of the present utility model
Determine the protection scope of the utility model, within the spirit and principle of the utility model, any modification for being made equally is replaced
It changes, improve, should be included within the scope of protection of this utility model.
Claims (9)
1. a kind of multicell horizontal vacuum furnace for producing silicon monoxide, which is characterized in that the multicell horizontal vacuum furnace includes:
Furnace body, including fix half furnace body and removable half furnace body；Removable half furnace body and the half furnace body machinery of fixing connect
It connects, described fix between half furnace body and removable half furnace body is made to realize and fit closely；
Heating response device, it is described to fix the fixed one or more heating response device in half furnace body；
Cooling device is reacted, is installed in the furnace wall for fixing half furnace body；
Cooling collector, each heating response device pass through one cooling collector of flanged joint, and flanged joint
Place is sealed by sealing ring；
Cooling device is collected, the cooling device of collecting is arranged in the furnace wall of removable half furnace body；
Vacuum evacuation device, the vacuum evacuation device are connected with multiple heating response devices and the cooling collector respectively.
2. the multicell horizontal vacuum furnace of production silicon monoxide according to claim 1, which is characterized in that the heating reaction
Device includes heating reacting tank body, heating device and attemperator；
The heating reacting tank body is set to described fix in half furnace body；
The heating device is located on the outer surface of the heating reacting tank body, to the intracorporal former material of the heating reactor tank
Material is heated；
The attemperator is set between the heating reacting tank body and the heating device.
3. the multicell horizontal vacuum furnace of production silicon monoxide according to claim 2, which is characterized in that the cooling collection
Device includes collecting tank body；Described one end for collecting tank body is open end, and the other end for collecting tank body is closed end, described to open
The diameter at mouth end is greater than the diameter of the closed end；Pass through the flange between the collection tank body and the heating reacting tank body
Connection, and flange connections are sealed using the sealing ring.
4. the multicell horizontal vacuum furnace of production silicon monoxide according to claim 1, which is characterized in that the collection cooling
It is connected between device and multiple cooling collectors by cooling medium.
5. the multicell horizontal vacuum furnace of production silicon monoxide according to claim 1, which is characterized in that the heating reaction
Device further includes hygrosensor.
6. the multicell horizontal vacuum furnace of production silicon monoxide according to claim 1, which is characterized in that described to fix half furnace
Multiple first support columns are uniformly arranged on the lower surface of body；Multiple second are uniformly arranged on the lower surface of removable half furnace body
Support column, and second support column is equipped with pulley.
7. the multicell horizontal vacuum furnace of production silicon monoxide according to claim 6, which is characterized in that the multicell is horizontal
Vacuum drying oven further includes guide rail, and the pulley is slidedly arranged on the guide rail.
8. the multicell horizontal vacuum furnace of production silicon monoxide according to claim 1, which is characterized in that the reaction cooling
Device and the collection cooling device are water circulation cooling device.
9. the multicell horizontal vacuum furnace of production silicon monoxide according to claim 1, which is characterized in that the vacuum means
It sets including one or more of mechanical pump, lobe pump, molecular pump, diffusion pump and its corresponding vacuum meter.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201821569605.2U CN209054929U (en) | 2018-09-26 | 2018-09-26 | A kind of multicell horizontal vacuum furnace producing silicon monoxide |
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| CN201821569605.2U CN209054929U (en) | 2018-09-26 | 2018-09-26 | A kind of multicell horizontal vacuum furnace producing silicon monoxide |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109210930A (en) * | 2018-09-26 | 2019-01-15 | 溧阳天目先导电池材料科技有限公司 | A kind of multicell horizontal vacuum furnace producing silicon monoxide and silicon monoxide preparation method |
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2018
- 2018-09-26 CN CN201821569605.2U patent/CN209054929U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109210930A (en) * | 2018-09-26 | 2019-01-15 | 溧阳天目先导电池材料科技有限公司 | A kind of multicell horizontal vacuum furnace producing silicon monoxide and silicon monoxide preparation method |
| CN109210930B (en) * | 2018-09-26 | 2024-05-17 | 溧阳天目先导电池材料科技有限公司 | Multi-chamber horizontal vacuum furnace for producing silicon monoxide and silicon monoxide preparation method |
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Effective date of registration: 20221208 Address after: 213300 room 132, building C, no.218, Hongkou Road, Kunlun Street, Liyang City, Changzhou City, Jiangsu Province Patentee after: TIANMULAKE EXCELLENT ANODE MATERIAL Co.,Ltd. Patentee after: INSTITUTE OF PHYSICS, CHINESE ACADEMY OF SCIENCES Address before: 213300 Floor 3, Building 15, Chuangzhi Park, Zhongguancun, Liyang, Changzhou, Jiangsu Patentee before: TIANMULAKE EXCELLENT ANODE MATERIAL Co.,Ltd. |