CN209052478U - Filter plant - Google Patents

Filter plant Download PDF

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Publication number
CN209052478U
CN209052478U CN201821584110.7U CN201821584110U CN209052478U CN 209052478 U CN209052478 U CN 209052478U CN 201821584110 U CN201821584110 U CN 201821584110U CN 209052478 U CN209052478 U CN 209052478U
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China
Prior art keywords
switch valve
valve
filter plant
plant according
delivery line
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CN201821584110.7U
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Chinese (zh)
Inventor
王振荣
戴志文
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Shanghai Xinyang Semiconductor Material Co Ltd
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Shanghai Xinyang Semiconductor Material Co Ltd
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Priority to CN201821584110.7U priority Critical patent/CN209052478U/en
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Abstract

The utility model discloses a kind of filter plants.The filter plant includes: the pretreatment mechanism for handling stoste;Film filter, film filter include that the shell for being with inner cavity and fixation are accommodated in the intracorporal filter membrane of shell, and inner cavity is divided into intake antrum and water chamber by filter membrane;Water inlet line, water inlet line are configured to the liquid in pretreatment unit being delivered to intake antrum, and first switch valve is equipped on water inlet line;First pressure regulating device, the first pressure regulating device are connected to intake antrum, and second switch valve is equipped on the first pressure regulating device;Second pressure regulating device, the second pressure regulating device are connected to water chamber, and third switch valve is equipped on the second pressure regulating device;Outlet conduit, outlet conduit are connected to water chamber, and the 4th switch valve is equipped on outlet conduit.Filter plant provided by the utility model can effectively cross the impurity in electroplate liquid.

Description

Filter plant
Technical field
The utility model relates to a kind of filter plants.
Background technique
Copper sulphate plating occupies particularly important status in PCB circuit board electroplating technology.The quality of sour copper plating influences The quality and related mechanical properties of copper electroplating layer, and certain influence is generated on following process.And in the plating process, in tank liquor Gel-like foreign matters can be generated, the benefit of sour copper plating is influenced.
In the prior art, generally tank liquor is delivered in industrial slot from electroplating bath, then launches charcoal bag or carbon into industrial slot Powder filters mucilage binding impurity.But filtered according to charcoal bag Electro Sorb, it is unclean to will lead to filtering since charcoal bag particle is larger.If It is filtered using carbon dust, will lead to since carbon dust is small in size and be mixed into carbon dust in copper sulphate, still will affect sour copper after drawing back to electroplating bath The benefit of plating.
Utility model content
The purpose of this utility model first is that in order to overcome it is in the prior art at least one is insufficient, provide it is a kind of can be effective Cross the filter plant of impurity in electroplate liquid.
In order to achieve the above object, the utility model is achieved through the following technical solutions:
It is according to the present utility model in a first aspect, providing a kind of filter plant.The filter plant includes:
For handling the pretreatment mechanism of stoste;
Film filter, the film filter include that the shell for being with inner cavity and fixation are accommodated in the intracorporal mistake of the shell The inner cavity is divided into intake antrum and water chamber by filter membrane, the filter membrane;
Water inlet line, the water inlet line is configured to the liquid in pretreatment unit being delivered to intake antrum, in institute Water inlet line is stated equipped with first switch valve;
First pressure regulating device, first pressure regulating device are connected to the intake antrum, are set on first pressure regulating device There is second switch valve;
Second pressure regulating device, second pressure regulating device are connected to the water chamber, are set on second pressure regulating device There is third switch valve;
Outlet conduit, the outlet conduit are connected to the water chamber, and the 4th switch valve is equipped on the outlet conduit.
Optionally, first pressure regulating device includes the first air compressor and the first surge pipe, first surge pipe One end be connected to first air compressor, the other end is connected to the intake antrum;Second switch valve setting is the On one surge pipe, concatenated first pressure regulator valve, the first relief valve and first pressure detection are additionally provided on first surge pipe Device.
Optionally, first manual ball valve is in series in the two sides of first pressure regulator valve;On first surge pipe It is additionally provided with second manual ball valve in parallel with first pressure regulator valve and first manual ball valve.
Optionally, the second switch valve is solenoid valve.
Optionally, it is equipped with the first pressure modulating opening on the housing, first surge pipe passes through the first pressure modulating opening and water inlet Chamber connection;The film filter is vertically arranged, and first pressure modulating opening is located at or close to the top of the intake antrum.
Optionally, the filter membrane includes hollow pipeline section and the plate section below hollow pipeline section;The filter plant It further include the first delivery line for being connected to hollow pipeline section water chamber and the second delivery line for being connected to plate section water chamber;Described One delivery line and the second delivery line are connected to the outlet conduit, and the 5th switch valve is equipped on first delivery line, Second delivery line is equipped with the 6th switch valve.
Optionally, first delivery line and the second delivery line are through to the water chamber from the outside of the shell Interior, first delivery line and the second delivery line are connect with the housing seal.
Optionally, first delivery line is docked with the second delivery line, the outlet conduit and the first delivery line docked It is connected to the second delivery line.
Optionally, the first switch valve, third switch valve, the 4th switch valve, the 5th switch valve and the 6th switch valve are Pneumatic ball valve.
Optionally, second pressure regulating device includes the second air compressor, the second surge pipe and the second pressure regulator valve;It is described One end of second surge pipe is connected to second air compressor, the other end is connected to the water chamber;Second pressure regulation Valve and third switch valve are arranged in series on the second surge pipe.
Optionally, second surge pipe is connected to first delivery line;And/or second surge pipe and second Delivery line connection.
Optionally, further includes: electroplating bath, the electroplating bath pass through input channel and pretreatment mechanism connection;Described defeated Enter pipeline to be equipped with for the stoste in the electroplating bath to be delivered to second pump for pre-processing mechanism;In the input pipe The 8th switch valve being additionally provided on road between second pump and pretreatment mechanism;The outlet conduit and the electroplating bath Connection.
Optionally, second pump is diaphragm pump, and the 8th switch valve is pneumatic ball valve.
Optionally, the manual ball of third being additionally provided on the input channel between second pump and electroplating bath Valve.
Optionally, it is equipped on the water inlet line for liquid within the organization is delivered to intake antrum first will to be pre-processed Pump, the first switch valve setting is between first pump and intake antrum.
Optionally, first pump is diaphragm pump.
Optionally, the 4th manual ball valve being located between the first pump and pretreatment mechanism is equipped on the water inlet line.
Optionally, the film filter is vertically arranged, and the shell includes that cylindrical body and radial one end are hinged on institute State the bottom cover in cylindrical body, the bottom cover be located at wound packages ontology towards gravity direction side;Pacify in the cylindrical body Equipped with driving mechanism, the driving mechanism be configured to drive the radial other end of the bottom cover to rotate so that the bottom cover with Cylindrical body lid closes or separation.
Optionally, the pretreatment unit includes pretreatment tank for storing stoste and described for adsorbent to be put into Throwing mechanism in pretreatment tank and the blender for stirring stoste in the pretreatment tank.
Optionally, further includes: the probe tube being connected to the intake antrum is equipped with the 5th manual ball on the probe tube Valve.
Optionally, further includes: reflux line, one end of the reflux line is connected to the intake antrum, the other end and institute Pretreatment mechanism connection is stated, the 7th switch valve is equipped on the return pipe.
Optionally, further includes: pressure relief mechanism, the pressure relief mechanism include the relief tube connected in intake antrum, are let out described Pressure pipe is equipped with concatenated second pressure detector, the second relief valve and the 6th manual ball valve.
Compared with prior art, in filter plant provided by the utility model, pretreatment unit can locate in advance stoste Reason, film filter further filter pretreated liquid and produce water from outlet conduit.First pressure regulating device can be discharged Liquid in film filter intake antrum.After water inlet intracavity liquid is drained, the second pressure regulating device can will be attached to filter membrane On adsorbent and impurity blow off.Effectively cross the impurity in electroplate liquid.Prevent the performance of adsorbent and impurity effect filter membrane, mistake The performance of filter membrane can be guaranteed.
By the detailed description referring to the drawings to the exemplary embodiment of the utility model, the utility model it is other Feature and its advantage will become apparent.
Detailed description of the invention
Fig. 1 is the piping diagram of the filter plant of the utility model embodiment one.
Fig. 2 is the structural schematic diagram of the filter plant in the utility model embodiment one.
Fig. 3 is the structural schematic diagram after the removal cabinet of Fig. 2 filter plant.
Fig. 4 is the structural schematic diagram of the film filter in the utility model embodiment one.
Specific embodiment
The utility model is described in detail with reference to the accompanying drawing:
Embodiment one:
Referring to Fig. 1, it is a kind of filter plant provided by the utility model.The filter plant includes electroplating bath 10, defeated Enter pipeline 11, pretreatment mechanism, cabinet 30, film filter, water inlet line 20, outlet conduit 50, the first pressure regulating device and the Two pressure regulating devices.The pretreatment mechanism includes pretreatment tank 15 and throwing mechanism and blender 16.The pretreatment tank 15 is used In the stoste that storage is to be processed.
The throwing mechanism, so that adsorbent is mixed with stoste, makes to adsorb for adsorbent to be put into pretreatment tank 15 The impurity in stoste is adsorbed in agent.In the present embodiment, adsorbent is carbon dust, and the throwing mechanism is for being put into carbon dust to described In pretreatment tank 15.For the dispensing convenient for carbon dust, the throwing mechanism includes the funnel that 15 top of pretreatment tank is arranged in 17.Adsorbent is put into funnel 17 automatically by feeding device and enters pretreatment tank 15;Alternatively, adsorbent is manually put into funnel 17 enter pretreatment tank 15.
The blender 16 is used to stir the liquid in the pretreatment tank 15, so that adsorbent comes into full contact with stoste, Adsorbent is set sufficiently to adsorb the impurity in stoste.For example, the mountable top in the pretreatment tank 15 of the blender 16.
Fig. 2 and Fig. 3 are please referred to, the film filter is accommodated in inside the cabinet 30.The film filter Including shell 31 and filter membrane (not shown).The shell 31 is with inner cavity, and the filter membrane is fixed to be accommodated in described Intracavitary, the inner cavity is divided into intake antrum and water chamber by the filter membrane.In the present embodiment, the filter membrane surrounds described Water chamber, the intake antrum are formed between the shell 31 and the filter membrane.
One end of the water inlet line 20 is connected to the pretreatment tank 15, the other end is connected to the intake antrum.Institute Water inlet line 20 is stated equipped with the first pump 22, first pump 22 is described for the liquid in the pretreatment tank 15 to be delivered to In intake antrum.First switch valve 23 is additionally provided on the water inlet line 20.The first switch valve 23 is arranged described first Between pump 22 and intake antrum.Liquid in the pretreatment tank 15 can be delivered to the intake antrum by the water inlet line 20.It is logical The pressure difference that first pump 22 provides is crossed, the liquid in the intake antrum can pass through the filter membrane and enter the water chamber. In the present embodiment, the first switch valve 23 is pneumatic ball valve, and first pump 22 is diaphragm pump.In the water inlet line 20 On be additionally provided with third manual ball valve 21, the third manual ball valve 21 is located between the first pump 22 and pretreatment tank 15.
The outlet conduit 50 is connected to the inside of the water chamber, and the water purification that the water chamber is generated exports.? The outlet conduit 50 is equipped with the 4th switch valve 51.In the present embodiment, the 4th switch valve 51 is pneumatic ball valve.
First pressure regulating device includes the first air compressor and the first surge pipe 40.The one of first surge pipe 40 End is connected to first air compressor, the other end is connected to the intake antrum.String is equipped on first surge pipe 40 Join second switch valve 41, first pressure detector 42, the first pressure regulator valve 44 and the first relief valve 43 of setting.The second switch Valve 41 is arranged between first pressure regulator valve 44 and intake antrum.For example, the first switch valve 23, pressure detector, first Relief valve 43 and the first pressure regulator valve 44 are successively arranged far from the intake antrum.In this way, first pressure regulating device can to it is described into Air pressure in water cavity is adjusted.It, can be by the water inlet when first pressure regulating device increases the air pressure in the intake antrum Intracavitary liquid discharge.In the present embodiment, the second switch valve 41 can be solenoid valve.
The first pressure modulating opening is equipped on the shell 31.First surge pipe 40 by first pressure modulating opening with it is described Intake antrum connection.When the filter plant is in use state, the film filter is vertically arranged, and the intake antrum has Away from the top of gravity direction side.First pressure modulating opening is located at or close to the top of the intake antrum.In this way, being convenient for Enable first pressure regulating device that the liquid in the intake antrum to be discharged.
For convenience of maintenance, first manual ball valve 45 is in series in the two sides of first pressure regulator valve 44.Described first Second manual ball valve 46 in parallel with first pressure regulator valve 44 and first manual ball valve 45 is additionally provided on surge pipe 40.
The filter membrane is divided into two sections, including hollow pipeline section and plate section.The filter membrane is placed vertically, the hollow tube Section is located at the top of the plate section.The outlet conduit 50 includes the first delivery line 32 and the second delivery line 34.Described first Delivery line 32 and the second delivery line 34 are through in corresponding water chamber from the outside of the shell 31.The outlet conduit 50 with The shell 31 is tightly connected.First delivery line 32 is connected to the water chamber of hollow pipeline section.In first delivery line 32 It is equipped with the 5th switch valve 32.Second delivery line 34 is connected to the water chamber of the plate section.In second delivery line 34 are equipped with the 6th switch valve 35.In the present embodiment, the 5th switch valve 32 and the 6th switch valve 35 are pneumatic ball valve. First delivery line 32 and the second delivery line 34 are connected to the outlet conduit 50.
Second pressure regulating device includes the second air compressor and the second surge pipe 52.The one of second surge pipe 52 End is connected to second air compressor, the other end is connected to the water chamber.String is equipped on second surge pipe 52 Join the third switch valve 53 and the second pressure regulator valve 54 of setting.In the present embodiment, the third switch valve 53 is pneumatic ball valve.Such as This, second pressure regulating device is connected to the water chamber, and second pressure regulating device is adjustable the air pressure in the water chamber. When second pressure regulating device increases the air pressure in the water chamber, it can blow off and be attached to the filter membrane and be located towards into water The adsorbent and impurity of cavity direction side.In the present embodiment, second air compressor can be total to the first air compressor With first surge pipe 40 is connected with second surge pipe 52, to share an air compressor 47.
It is vertically arranged when being in use state to collect adsorbent and impurity, the film filter.Please refer to figure 4, the shell 31 includes that cylindrical body 310 and radial one end are hinged on the bottom cover 311 in the cylindrical body 310, the bottom Lid 311 be located at the wound packages ontology towards gravity direction side.The shell 31 is set-located with the filter membrane, described Bottom cover 311 is located at the separate hollow pipeline section direction side of the plate section.First delivery line 32 runs through the hollow pipeline section Wall with water chamber to be connected to.Second delivery line 34 is through the plate section wall to be connected to water chamber.
Driving mechanism 36 is installed in the cylindrical body 310.The driving mechanism 36 can drive the bottom cover 311 Radial other end rotation.When the driving mechanism 36 drives the other end rotation of bottom cover 311, the bottom cover 311 can be transported respectively It moves to the conjunction of the lid of cylindrical body 310 or with cylindrical body 310 and separates.In the present embodiment, the driving mechanism 36 includes gas Cylinder, the filter plant may also include the control pipeline 80 of one end Yu the cylinder activation, the other end of the control pipeline 80 It is connected with the air compressor 47.The control piper 80 is for controlling the cylinder or other component.In the control Pipeline 80 is equipped with one or more of manual ball valve, solenoid valve, pneumatic ball valve.
The electroplating bath 10 is connected to by input channel 11 with pretreatment tank 15.Second is equipped on the input channel 11 Stoste in the electroplating bath 10 can be delivered to the pretreatment tank 15 by pump 12, second pump 12.In the input channel The 8th switch valve 14 is additionally provided on 11, the 8th switch valve 14 is located between the second pump 12 and pretreatment tank 15.In this implementation In example, the 8th switch valve 14 is pneumatic ball valve.Second pump 12 is diaphragm pump.
The 4th manual ball valve 13 being located between second pump 12 and electroplating bath 10 is equipped on the input channel 11. When the impurity generated in the electroplating bath 10 is more, openable 4th manual ball valve 13 will by second pump 12 Stoste in the electroplating bath 10 is delivered in the pretreatment tank 15.
The outlet conduit 50 is connected to the electroplating bath 10, by the liquid reflux in the water chamber to the plating In slot 10.Specifically, the part of first delivery line 32 and the second delivery line 34 is docked and connected, and is connected to the electricity jointly Coating bath 10.
Fig. 3 and Fig. 4 are please referred to, for second surge pipe 52 is connected to the water chamber, second surge pipe 52 It is connected with the first delivery line 32 of docking and the second delivery line 34.For example, the filter membrane includes skeleton and is wound around skeleton On membrane component, on the skeleton can be equipped be respectively communicated in the through-hole of first delivery line 32 and the second delivery line 34. Certainly in other embodiments, second surge pipe 52 can also be directly connected to the water chamber, such as described second adjusts Pressure pipe 52 is connected to first delivery line 32 and/or second surge pipe 52 is connected to the second delivery line 34.
To be sampled to the liquid in the intake antrum, in the present embodiment, referring to Fig. 1, the filter plant is also Including probe tube 60, the probe tube 60 is connected to the intake antrum, and the 5th manual ball valve 61 is equipped on the probe tube 60. When the liquid to the intake antrum being needed to be sampled, the 5th manual ball valve 61 is opened;When not sampling, the described 5th manually Ball valve 61 is closed.
To avoid the air pressure in the intake antrum excessive, in the present embodiment, referring to Fig. 1, the filter plant also wraps Include pressure relief mechanism.The pressure relief mechanism includes and connects in the relief tube 70 of intake antrum, and series connection is equipped on the relief tube 70 Second pressure detector 73, the second relief valve 72 and the 6th manual ball valve 71.When the second pressure detector 73 detects When air pressure in intake antrum is excessive, the 6th manual ball valve 71 and the second relief valve 72 are opened and realize decompression.
In the present embodiment, referring to Fig. 1, the filter plant further includes reflux line 24, the reflux line 24 One end is connected to the intake antrum, the other end and the pretreatment mechanism connection.The pretreatment tank 15 is lower than the intake antrum Height.The 7th switch valve 25 is equipped on the return pipe.For example, the 7th switch valve 25 is pneumatic ball valve.Described Second switch valve 41 is opened, openable when the liquid in intake antrum is discharged the air pressure in the first pressure regulating device increase intake antrum 7th switch valve 25 and the first switch valve 23 and the first pump 22 are closed, keeps the liquid in the intake antrum reflowable In to the pretreatment tank 15.When the first switch valve 23 and the first pump 22 are opened with by the liquid in the pretreatment tank 15 When being delivered in intake antrum, the 7th switch valve 25 is closed.
Embodiment two:
A kind of filter method that the utility model also provides.Referring to Fig. 1, the filter method the following steps are included:
Firstly, providing above-mentioned filter device.
Then, stoste to be processed is delivered to pretreatment mechanism.In the present embodiment, the stoste in electroplating bath 10 is conveyed In to the pretreatment mechanism.Adsorbent is put into pretreatment mechanism with adsorbing contaminant.For example, adsorbent is carbon dust.
After adsorbent has adsorbed impurity, opening first switch valve 23 and the 4th switch valve 51, water inlet line 20 will locate in advance The intake antrum that liquid within the organization is delivered to film filter is managed, adsorbent and impurity are trapped in intake antrum and were attached to On filter membrane, the liquid of no adsorbent and impurity passes through filter membrane and enters water chamber.Filter membrane realization cuts adsorbent and impurity It stays, all or part of adsorbent and impurity can be attached on filter membrane, and the liquid into intake antrum is free from foreign meter and adsorbent.
After filter membrane retains more adsorbent and impurity, first switch valve 23 and the 4th switch valve 51 are closed, opens the Two switch valves 41 increase the air pressure in intake antrum by the first pressure regulating device, the liquid in intake antrum are discharged.
Later, second switch valve 41 is closed, third switch valve 53 is opened, the second pressure regulating device increases the gas in water chamber Pressure, the adsorbent being attached on filter membrane and impurity are blown off.
The filter method can apply to the filtering to impurity in electroplate liquid, and in the present embodiment, filter plant further includes electricity Coating bath 10 and input channel 11.Stoste to be processed is delivered to pretreatment mechanism by input channel 11.Water inlet line 20 will pre-process After liquid within the organization is delivered to film filter, filter membrane can in liquid adsorbent and impurity retain.Later, out Liquid in water chamber is delivered to electroplating bath 10 by waterpipe 50.
In the present embodiment, filter membrane includes hollow pipeline section and the plate section below hollow pipeline section.Outlet conduit 50 Including the first delivery line 32 for being connected to hollow pipeline section and the second delivery line 34 for being connected to plate section.First delivery line 32 and Two delivery lines 34 are connected to outlet conduit 50, the 5th switch valve 32 are equipped on first delivery line 32, described second Delivery line 34 is equipped with the 6th switch valve 35.First pressure regulating device will intake intracavity liquid discharge the step of include:
After closing first switch valve 23 and the 4th switch valve 51 and opening second switch valve 41, it is first turned on the 5th Switch valve 32 and close the 6th switch valve 35, the first pressure regulating device increase intake antrum in air pressure, the first pressure regulating device will in Liquid in blank pipe section intake antrum is discharged by the first delivery line 32.
Later, it opens the 5th switch valve 32 and closes the 6th switch valve 35, the first pressure regulating device is by plate section intake antrum Interior liquid is discharged by the second delivery line 34.At this point, the high pressure gas that the first pressure regulating device generates will not directly be led from first Outlet pipe 32 is discharged.
The method that the adsorbent being attached on filter membrane and impurity are blown off includes: by the second pressure regulating device
After the first pressure regulating device is by the liquid discharge in intake antrum, second switch valve 41 and the 4th switch valve 51 are closed, And open the third switch valve 53 and the 6th switch valve 35.The 5th switch valve 32 is opened at this time, and first switch valve 23 is closed. Second pressure regulating device increases the air pressure in water chamber, and the adsorbent being attached on filter membrane and impurity are blown off.
Fig. 3 and Fig. 4 are please referred in the present embodiment to collect the adsorbent and impurity that blow off, shell 31 is vertically arranged, Shell 31 includes cylindrical body 310 and bottom cover 311, and radial one end of bottom cover 311 is hinged on cylindrical body, in cylindrical body Driving mechanism 36 is installed on 310.When filter membrane separation stoste and adsorbent and impurity, driving mechanism 36 drives bottom cover 311 It covers and closes with cylindrical body 310.When the second pressure regulating device increases the air pressure in water chamber to be attached to the absorption on filter membrane When agent and impurity are blown off, adsorbent and impurity are fallen on bottom cover 311.It is blown by the adsorbent being attached on filter membrane and impurity Fall behind, driving mechanism 36 drives the radial other side rotation of bottom cover 311, separates bottom cover 311 with cylindrical body 310 to collect and inhale Attached dose and impurity.
In filter plant and its filter method provided by the utility model, pretreatment unit can pre-process stoste, Film filter further filters pretreated liquid and produces water from outlet conduit.Film mistake can be discharged in first pressure regulating device Filter the liquid in device intake antrum.After water inlet intracavity liquid is drained, the second pressure regulating device can will be attached on filter membrane Adsorbent and impurity are blown off.Effectively cross the impurity in electroplate liquid.Prevent the performance of adsorbent and impurity effect filter membrane, filter membrane Performance can be guaranteed.
The above is only the utility model preferred embodiments, are not used to the limitation protection scope of the utility model, any Modification, equivalent replacement or improvement within the spirit of the present invention etc. are all covered in the scope of the claims of the utility model.

Claims (22)

1. a kind of filter plant characterized by comprising
For handling the pretreatment mechanism of stoste;
Film filter, the film filter include that the shell for being with inner cavity and fixation are accommodated in the intracorporal filtering of the shell The inner cavity is divided into intake antrum and water chamber by film, the filter membrane;
Water inlet line, the water inlet line are configured to the liquid in pretreatment unit being delivered to intake antrum, it is described into Waterpipe is equipped with first switch valve;
First pressure regulating device, first pressure regulating device are connected to the intake antrum, and the is equipped on first pressure regulating device Two switch valves;
Second pressure regulating device, second pressure regulating device are connected to the water chamber, and the is equipped on second pressure regulating device Three switch valves;
Outlet conduit, the outlet conduit are connected to the water chamber, and the 4th switch valve is equipped on the outlet conduit.
2. filter plant according to claim 1, it is characterised in that:
First pressure regulating device include the first air compressor and the first surge pipe, one end of first surge pipe with it is described The connection of first air compressor, the other end are connected to the intake antrum;
The second switch valve is arranged on the first surge pipe, and concatenated first pressure regulation is additionally provided on first surge pipe Valve, the first relief valve and first pressure detector.
3. filter plant according to claim 2, it is characterised in that:
First manual ball valve is in series in the two sides of first pressure regulator valve;
The second manual ball in parallel with first pressure regulator valve and first manual ball valve is additionally provided on first surge pipe Valve.
4. filter plant according to claim 2, it is characterised in that:
The second switch valve is solenoid valve.
5. filter plant according to claim 2, it is characterised in that:
It is equipped with the first pressure modulating opening on the housing, first surge pipe is connected to by the first pressure modulating opening with intake antrum;
The film filter is vertically arranged, and first pressure modulating opening is located at or close to the top of the intake antrum.
6. filter plant according to claim 1, it is characterised in that:
The filter membrane includes hollow pipeline section and the plate section below hollow pipeline section;
The filter plant further includes being connected to the first delivery line of hollow pipeline section water chamber and being connected to plate section water chamber Second delivery line;
First delivery line and the second delivery line are connected to the outlet conduit, and the 5th is equipped on first delivery line Switch valve is equipped with the 6th switch valve on second delivery line.
7. filter plant according to claim 6, it is characterised in that:
First delivery line and the second delivery line are through in the water chamber from the outside of the shell, and described first leads Outlet pipe and the second delivery line are connect with the housing seal.
8. filter plant according to claim 6, it is characterised in that:
First delivery line is docked with the second delivery line, the outlet conduit and the first delivery line and the second delivery line that dock Connection.
9. filter plant according to claim 6, it is characterised in that:
The first switch valve, third switch valve, the 4th switch valve, the 5th switch valve and the 6th switch valve are pneumatic ball valves.
10. filter plant according to claim 6, it is characterised in that:
Second pressure regulating device includes the second air compressor, the second surge pipe and the second pressure regulator valve;
One end of second surge pipe is connected to second air compressor, the other end is connected to the water chamber;
Second pressure regulator valve and third switch valve are arranged in series on the second surge pipe.
11. filter plant according to claim 10, it is characterised in that:
Second surge pipe is connected to first delivery line;And/or
Second surge pipe is connected to the second delivery line.
12. filter plant according to claim 1, which is characterized in that further include:
Electroplating bath, the electroplating bath pass through input channel and pretreatment mechanism connection;It is equipped on the input channel for inciting somebody to action Stoste in the electroplating bath is delivered to the second pump of the pretreatment mechanism;It is additionally provided on the input channel described in being located at The 8th switch valve between second pump and pretreatment mechanism;The outlet conduit is connected to the electroplating bath.
13. filter plant according to claim 12, it is characterised in that:
Second pump is diaphragm pump, and the 8th switch valve is pneumatic ball valve.
14. filter plant according to claim 12, it is characterised in that:
The third manual ball valve being additionally provided on the input channel between second pump and electroplating bath.
15. filter plant according to claim 1, it is characterised in that:
It is equipped on the water inlet line and is used to pre-process the first pump that liquid within the organization is delivered to intake antrum, described first Switch valve setting is between first pump and intake antrum.
16. filter plant according to claim 15, it is characterised in that:
First pump is diaphragm pump.
17. filter plant according to claim 15, it is characterised in that:
The 4th manual ball valve being located between the first pump and pretreatment mechanism is equipped on the water inlet line.
18. filter plant according to claim 1, it is characterised in that:
The film filter is vertically arranged, and the shell includes that cylindrical body and radial one end are hinged in the cylindrical body Bottom cover, the bottom cover be located at wound packages ontology towards gravity direction side;
Driving mechanism is installed in the cylindrical body, the driving mechanism is configured to drive the radial another of the bottom cover One end rotates so that the bottom cover is closed or separated with cylindrical body lid.
19. filter plant according to claim 1, it is characterised in that:
The pretreatment unit includes pretreatment tank for storing stoste and for adsorbent to be put into the pretreatment tank Throwing mechanism and blender for stirring stoste in the pretreatment tank.
20. filter plant according to claim 1, which is characterized in that further include:
The probe tube being connected to the intake antrum is equipped with the 5th manual ball valve on the probe tube.
21. filter plant according to claim 1, which is characterized in that further include:
Reflux line, one end of the reflux line is connected to the intake antrum, the other end and the pretreatment mechanism connection, The return pipe is equipped with the 7th switch valve.
22. filter plant according to claim 1, which is characterized in that further include:
Pressure relief mechanism, the pressure relief mechanism include the relief tube connected in intake antrum, and concatenated the is equipped on the relief tube Two pressure detectors, the second relief valve and the 6th manual ball valve.
CN201821584110.7U 2018-09-27 2018-09-27 Filter plant Active CN209052478U (en)

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Application Number Priority Date Filing Date Title
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109179712A (en) * 2018-09-27 2019-01-11 上海新阳半导体材料股份有限公司 Filter plant and its filter method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109179712A (en) * 2018-09-27 2019-01-11 上海新阳半导体材料股份有限公司 Filter plant and its filter method

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