CN209043949U - A kind of adjusting needle stand - Google Patents
A kind of adjusting needle stand Download PDFInfo
- Publication number
- CN209043949U CN209043949U CN201821317055.5U CN201821317055U CN209043949U CN 209043949 U CN209043949 U CN 209043949U CN 201821317055 U CN201821317055 U CN 201821317055U CN 209043949 U CN209043949 U CN 209043949U
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- CN
- China
- Prior art keywords
- adjustment portion
- screw rod
- mounting base
- adjusting screw
- probe
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Abstract
The utility model discloses a kind of adjusting needle stands, including mounting base, for being fixedly mounted with the equipment used；First driving portion, is fixed on mounting base；First adjusting screw rod, bearing is connected to mounting base respectively at both ends, the output shaft synchronous band connection with the first driving portion, and the first driving portion can drive first adjusting screw rod to rotate；First adjusting screw rod one end is connected with manual adjustment portion；First adjusting screw rod swivel feeding direction is Z-direction；First adjustment portion is spirally connected with the first adjusting screw rod, and the direction for being parallel to the first adjusting screw rod swivel feeding is Z-direction；First adjustment portion is connect with mounting base sliding rail, the first adjustment portion relative to mounting base along sliding rail limit after glide direction as Z-direction；First adjustment portion is connected with the first probe portion and the second probe portion.
Description
Technical field
The utility model relates to a kind of adjusting needle stands.
Background technique
Existing semiconductor testing apparatus generally requires to promote testing efficiency while multicore is tested.Multicore checkout area
Conjunction needs to consider multiple probe portions installation site, since the volume in probe portion is smaller, cannot continue to reduce probe portion, and
And the size for changing probe portion will cause existing probe portion and scrap, waste of resource.
Utility model content
In order to solve the above technical problems, not having to the existing probe portion of change the utility model proposes one kind is just able to satisfy multicore survey
Try desired adjusting needle stand.
The technical solution of the utility model are as follows: a kind of adjusting needle stand, including,
Mounting base, for being fixedly mounted with the equipment used；
First driving portion, is fixed on mounting base；
First adjusting screw rod, bearing is connected to mounting base respectively at both ends, the output shaft synchronous band connection with the first driving portion,
First driving portion can drive first adjusting screw rod to rotate；First adjusting screw rod one end is connected with manual adjustment portion；
First adjusting screw rod swivel feeding direction is Z-direction；
First adjustment portion is spirally connected with the first adjusting screw rod, and the direction for being parallel to the first adjusting screw rod swivel feeding is Z-direction；
First adjustment portion is connect with mounting base sliding rail, the first adjustment portion relative to mounting base along sliding rail limit after glide direction as Z-direction；
First adjustment portion is connected with the first probe portion and the second probe portion.
Further, first probe portion includes the first X to adjustment portion and the first Y-direction adjustment portion；Second probe
Portion includes secondary Z-direction adjustment portion, the 2nd X to adjustment portion and the second Y-direction adjustment portion.
Further, Z-direction, X are mutually perpendicular to two-by-two to Y-direction, i.e. X is to perpendicular to Y-direction, and for Y-direction perpendicular to Z-direction, Z-direction is vertical
In X to.
Further, the first X is to adjustment portion, the first Y-direction adjustment portion, secondary Z-direction adjustment portion, the 2nd X to adjustment portion
Screw rod slide block structure is all made of with the second Y-direction adjustment portion.
Further, the mounting base is fixed with the first detector and the second detector；First adjustment portion is fixed with
Detection lug, the detection lug is between the first detector and the second detector.
Further, the Z-direction is perpendicular to blowing plane.
Further, the mounting base is far from probe.
The utility model has the beneficial effects that: existing multiple probe portions are mounted in the first adjustment portion, described first
Adjustment portion drives Z-direction movement by the first driving portion；First driving portion is installed in mounting base；Mounting base is fixed on equipment, thus
It realizes and multiple probe portions is installed, reduce multiple probe portions and the space occupied is not installed.
Detailed description of the invention
Fig. 1 is that the utility model adjusts needle stand schematic diagram；
Fig. 2 is the first adjustment portion mounting structure schematic diagram.
Specific embodiment
For convenient for those skilled in the art understand that the technical solution of the utility model, below by the technical side of the utility model
Case is described in further detail in conjunction with specific embodiments.
As depicted in figs. 1 and 2, a kind of adjusting needle stand 100 for semiconductor testing apparatus includes:
Mounting base 20, for being fixedly mounted with the equipment used；
First driving portion 21, is fixed on mounting base 20；It drives probe to feed or give up the throne along Z-direction, realizes to multiple crystal grain
Follow-on test；
First adjusting screw rod 30, bearing is connected to mounting base 20 respectively at both ends, meets 30 rotary motion of the first adjusting screw rod,
With the output shaft synchronous band connection of the first driving portion 21, the first driving portion 21 can drive first adjusting screw rod 30 to rotate；
Described first adjusting screw rod, 30 one end is connected with manual adjustment portion 31；First adjusting screw rod, 30 swivel feeding direction is Z-direction；First
Adjustment portion 40 is spirally connected with the first adjusting screw rod 30, and the direction for being parallel to 30 swivel feeding of the first adjusting screw rod is Z-direction；First adjusts
Section portion 40 is connect with 20 sliding rail of mounting base, the first adjustment portion 40 relative to mounting base 20 along sliding rail limit after glide direction as Z
To, thus realize feeding of the first adjustment portion of rotational movement 40 along Z-direction of the first adjusting screw rod 30, it is final to realize that first drives
Dynamic portion 21 drives the first adjustment portion 40 to feed along Z-direction；First adjustment portion 40 is connected with the first probe portion 51 and the second probe
Portion 52；The first adjustment portion 40 is fixed in multiple probe portions (including the first probe portion 51 and second probe portion 52) to meet,
It only needs for mounting base 20 to be fixed on equipment, reduces installation multiple probe portions the space occupied；When the wafer size of equipment test
One timing, the space for installing probe portion that equipment can be provided is limited, by the way that multiple probe portions are shared a mounting base
Mode, meet multiple probe portions installs and uses requirement；First driving portion 21 and/or manual adjustment portion 31 can simultaneously
Z-direction for one of probe portion in multiple probe portions is adjusted.
As depicted in figs. 1 and 2, first probe portion 51 includes the first X to adjustment portion and the first Y-direction adjustment portion；First
Driving portion 21 and/or manual adjustment portion 31 are used for the first probe portion 51Z to adjusting；Second probe portion 52 includes secondary Z-direction
Adjustment portion, the 2nd X are to adjustment portion and the second Y-direction adjustment portion；Meet the adjustment requirement in the first probe portion 51 and the second probe portion 52
Under, relative to the second probe portion 52, the first probe portion 51 reduces Z-direction adjustment portion；Z-direction, X are mutually perpendicular to two-by-two to Y-direction, real
Three-dimensional regulation now is distinguished to the probe in the first probe portion 51 and the second probe portion 52, the use for meeting probe in detecting semiconductor is wanted
It asks；First X is to adjustment portion, the first Y-direction adjustment portion, secondary Z-direction adjustment portion, the 2nd X to adjustment portion and the second Y-direction adjustment portion
It is all made of screw rod slide block structure；Screw rod slide block mechanism is a kind of orientation adjustment structure, specifically: component one and two sliding rail of component connect
It connects, so that component one can only be moved along the direction that sliding rail limits relative to component two, screw rod and component one and two screw thread of component connect
It connects, limits component one along sliding rail relative to component two by rotary screw (by screw rod one end connection electrode or manual rotating handle)
Direction movement；Screw spring structure also can be realized the technical effect with screw rod slide block structure, at this time component one and component two-way
It crosses sliding rail and limits direction of relative movement, component one is spirally connected with screw rod, and (or draw and support) component two, elastic element are only supported in screw rod one end
(including, but are not limited to spring) both ends are respectively acting on component one and component two, and component one is fed relative to component two along screw rod
Amount movement.
As depicted in figs. 1 and 2, the mounting base 20 is fixed with the first detector 22 and the second detector 23；Described first
Adjustment portion 40 is fixed with detection lug 41, and the detection lug 41 is between the first detector 22 and the second detector 23；When first
When 22/ second detector 23 of detector detects detection lug 41, first adjustment portion 40 is reached relative to the mounting base 20
Extreme position prevents to block movement of first adjustment portion 40 relative to mounting base 20 because the first adjustment portion 40 is opposite
Slipping over extreme position in mounting base 20 causes the first adjustment portion 40 to be unable to normal use；The Z-direction is being pacified perpendicular to blowing plane
Before filling the adjusting needle stand 100, Z-direction is adjusted to the position far from blowing plane, conducive to the installation for adjusting needle stand 100, is prevented
Probe is damaged in the stroke of blowing plane；The mounting base 20 is far from probe, to extend size relative to single probe portion, just
In the installation for adjusting needle stand 100.
It is the preferred embodiment of the utility model above, is not used in restriction the technical solution of the utility model.It should approve,
Those skilled in the art made non-creative deformation or change after understanding technical solutions of the utility model, should also belong to
The protection content of the utility model.
Claims (7)
1. a kind of adjusting needle stand, it is characterised in that: the adjusting needle stand includes,
Mounting base, for being fixedly mounted with the equipment used；
First driving portion, is fixed on mounting base；
First adjusting screw rod, bearing is connected to mounting base respectively at both ends, the output shaft synchronous band connection with the first driving portion, and first
Driving portion can drive first adjusting screw rod to rotate；First adjusting screw rod one end is connected with manual adjustment portion；First
Adjusting screw rod swivel feeding direction is Z-direction；
First adjustment portion is spirally connected with the first adjusting screw rod, and the direction for being parallel to the first adjusting screw rod swivel feeding is Z-direction；First
Adjustment portion is connect with mounting base sliding rail, the first adjustment portion relative to mounting base along sliding rail limit after glide direction as Z-direction；It is described
First adjustment portion is connected with the first probe portion and the second probe portion.
2. adjusting needle stand according to claim 1, it is characterised in that: first probe portion includes the first X to adjustment portion
With the first Y-direction adjustment portion；
Second probe portion includes secondary Z-direction adjustment portion, the 2nd X to adjustment portion and the second Y-direction adjustment portion.
3. adjusting needle stand according to claim 2, it is characterised in that: Z-direction, X are mutually perpendicular to two-by-two to Y-direction.
4. adjusting needle stand according to claim 2, it is characterised in that: the first X to adjustment portion, the first Y-direction adjustment portion,
Secondary Z-direction adjustment portion, the 2nd X are all made of screw rod slide block structure to adjustment portion and the second Y-direction adjustment portion.
5. adjusting needle stand according to claim 1, it is characterised in that: the mounting base is fixed with the first detector and second
Detector；
First adjustment portion is fixed with detection lug, and the detection lug is between the first detector and the second detector.
6. adjusting needle stand according to claim 1, it is characterised in that: the Z-direction is perpendicular to blowing plane.
7. adjusting needle stand according to claim 1, it is characterised in that: the mounting base is far from probe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821317055.5U CN209043949U (en) | 2018-08-16 | 2018-08-16 | A kind of adjusting needle stand |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821317055.5U CN209043949U (en) | 2018-08-16 | 2018-08-16 | A kind of adjusting needle stand |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209043949U true CN209043949U (en) | 2019-06-28 |
Family
ID=67031018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821317055.5U Active CN209043949U (en) | 2018-08-16 | 2018-08-16 | A kind of adjusting needle stand |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209043949U (en) |
-
2018
- 2018-08-16 CN CN201821317055.5U patent/CN209043949U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 518172 Longgang District, Shenzhen City, Guangdong Province Patentee after: Silicon electric semiconductor equipment (Shenzhen) Co., Ltd Address before: 518172 Longgang District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN SIDEA SEMICONDUCTOR EQUIPMENT Co.,Ltd. |